Handling arm for boats for thermal treatment of semiconductor wafers

- Tel Sagami Limited
Description

FIG. 1 is a top, front and right side perspective view of a handling arm for boats for thermal treatment of semiconductor wafers showing our new design;

FIG. 2 is a front elevational view;

FIG. 3 is a left side elevational view;

FIG. 4 is a top plan view;

FIG. 5 is a bottom plan view; and

FIG. 6 is a rear elevational view thereof.

Referenced Cited
U.S. Patent Documents
D199694 December 1964 Belke
D272743 February 21, 1984 Knox
4344729 August 17, 1982 Orsinger et al.
4787805 November 29, 1988 Kosikowski
Foreign Patent Documents
28151 February 1987 JPX
Patent History
Patent number: D323332
Type: Grant
Filed: Jan 25, 1989
Date of Patent: Jan 21, 1992
Assignee: Tel Sagami Limited (Kanagawa)
Inventors: Katsumi Ishii (Fujino), Mitsuo Katoh (Sagamihara), Shingo Watanabe (Aikawa)
Primary Examiner: Bruce W. Dunkins
Assistant Examiner: Antonie D. Davis
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt
Application Number: 7/301,992
Classifications
Current U.S. Class: Miscellaneous (D15/199)