Measurement scanner for semi-conductor

- Hitachi, Ltd.
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Description

FIG. 1 is a front, top and right side elevational perspective view of measurement scanner for semi-conductor showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a right elevational view thereof;

FIG. 4 is a top plan elevational view thereof;

FIG. 5 is a bottom plan elevational view thereof;

FIG. 6 is a rear elevational view thereof; and,

FIG. 7 is a left elevational view thereof.

Referenced Cited
U.S. Patent Documents
D332616 January 19, 1993 Hashimoto et al.
D352910 November 29, 1994 Yamamoto et al.
Patent History
Patent number: D360599
Type: Grant
Filed: Jul 26, 1994
Date of Patent: Jul 25, 1995
Assignee: Hitachi, Ltd. (Tokyo)
Inventors: Toshihiko Wada (Musashimurayama), Tadashi Ohtaka (Katsuta), Nobuyoshi Hashimoto (Katsuta)
Primary Examiner: Antoine Duval Davis
Law Firm: Antonelli, Terry, Stout & Kraus
Application Number: 0/25,210
Classifications
Current U.S. Class: Electrical Property (D10/75)