Wafer boat or rack

Description

FIG. 1 is a front elevational view of a wafer boat or rack showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a right side elevational view thereof, the left side elevational view being a mirror image and, therefore, not being shown;

FIG. 4 is a top view thereof;

FIG. 5 is a bottom view thereof;

FIG. 6 is a longitudinal sectional view on section 6--6 in FIG. 1;

FIG. 7 is a transverse sectional view on section 7--7 in FIG. 1;

FIG. 8 is an enlarged view of a portion of FIG. 7.