Wafer boat

- Tokyo Electron Limited
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Description

FIG. 1 is a front view of a first embodiment of a wafer boat showing my new design;

FIG. 2 is a rear view of the embodiment of FIG. 1;

FIG. 3 is a top view of the embodiment of FIG. 1;

FIG. 4 is a bottom view of the embodiment of FIG. 1;

FIG. 5 is a left side view of the embodiment of FIG. 1, the right side view being a mirror image and, therefore, not shown;

FIG. 6 is a cross sectional view of the embodiment of FIG. 1 on section line 6--6 in FIG. 1;

FIG. 7 is a cross sectional view of the embodiment of FIG. 1 on section line 7--7 in FIG. 3;

FIG. 8 is a front/top/right side perspective view of the embodiment of FIG. 1;

FIG. 9 is a front view of a second embodiment of a wafer boat showing my new design;

FIG. 10 is a rear view of the embodiment of FIG. 9;

FIG. 11 is a top view of the embodiment of FIG. 9;

FIG. 12 is a bottom view of the embodiment of FIG. 9;

FIG. 13 is a left side view of the embodiment of FIG. 9, the right side view being a mirror image and, therefore, not shown;

FIG. 14 is a cross sectional view of the embodiment of FIG. 9 on section line 14--14 in FIG. 9;

FIG. 15 is a cross sectional view of the embodiment of FIG. 9 on section line 15--15 in FIG. 11; and,

FIG. 16 is a front/top/right side perspective view of the embodiment of FIG. 9.

Referenced Cited
U.S. Patent Documents
D366868 February 6, 1996 Ohsawa
5482559 January 9, 1996 Imai et al.
5510146 April 23, 1996 Miyasaka
Patent History
Patent number: D378675
Type: Grant
Filed: Nov 30, 1995
Date of Patent: Apr 1, 1997
Assignee: Tokyo Electron Limited (Tokyo-to)
Inventor: Hiroyuki Iwai (Kanagawa-ken)
Primary Examiner: Antoine Duval Davis
Law Firm: Ladas & Parry
Application Number: 0/47,279