Heat retaining tube for use in a semiconductor wafer heat processing apparatus

Description

FIG. 1: a perspective view of a heat retaining tube for use in a semiconductor wafer heat processing apparatus;

FIG. 2: a top plan view thereof;

FIG. 3: a front elevational view thereof;

FIG. 4: a cross sectional view thereof taken along line IV--IV in FIG. 3;

FIG. 5: a cross sectional view thereof taken along line V--V in FIG. 3;

FIG. 6: a left side view thereof;

FIG. 7: a right side view thereof;

FIG. 8: a bottom plan view thereof; and,

FIG. 9: a rear elevational view thereof.