Liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of liquid crystal display substrate conveying arm structure for a semiconductor manufacturing device, showing my new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a right side elevational view thereof; the opposite side being a mirror image thereof;

FIG. 4 is a rear elevational view thereof;

FIG. 5 is a bottom plan view thereof;

FIG. 6 is a cross-sectional view thereof, taken along line 6--6 of FIG. 1;

FIG. 7 is a cross-sectional view thereof, taken along line 7--7 of FIG. 1; and,

FIG, 8 is a front, top and right side perspective view thereof.

Referenced Cited
U.S. Patent Documents
4022231 May 10, 1977 Kostiainen et al.
4208760 June 24, 1980 Dexter et al.
5651797 July 29, 1997 Laube
Patent History
Patent number: D406570
Type: Grant
Filed: Dec 24, 1997
Date of Patent: Mar 9, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Tatsuya Iwasaki (Kumamoto)
Primary Examiner: Brian N. Vinson
Law Firm: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 0/81,204
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;