Electrostatic chuck with improved spacing mask and workpiece detection device

- Applied Materials, Inc.
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Description

FIG. 1 depicts a top view of the electrostatic chuck with improved spacing mask and workpiece detection device;

FIG. 2 depicts an elevation view of the electrostatic chuck when looking up along the y-axis of FIG. 1, the view when looking down along the y-axis, being identical to that of FIG. 2;

FIG. 3 depicts a detailed view of part of a surface and circumferential edge of the electrostatic chuck seen in FIG. 2;

FIG. 4 depicts a bottom view of the electrostatic chuck;

FIG. 5 depicts an elevation view of the electrostatic chuck when looking to the left along the x-axis of FIG. 1; and,

FIG. 6 depicts an elevation view of the electrostatic chuck when looking to the right along the x-axis of FIG. 1.

Referenced Cited
U.S. Patent Documents
5671116 September 23, 1997 Husain
5691876 November 25, 1997 Chen et al.
5745332 April 28, 1998 Burkhart et al.
Patent History
Patent number: D406852
Type: Grant
Filed: Nov 14, 1997
Date of Patent: Mar 16, 1999
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Vincent E. Burkhart (San Jose, CA), Allen Flanigan (San Jose, CA), Steven Sansoni (San Jose, CA)
Primary Examiner: Antoine Duval Davis
Law Firm: Thomason and Moser
Application Number: 0/79,584
Classifications
Current U.S. Class: Tool Or Work Holder (D15/140)
International Classification: 1509;