Quartz outer tube

- Tokyo Electron Limited
Description

FIG. 1 is a perspective view of a quartz outer tube.

FIG. 2 is a front elevational view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a cross sectional view thereof taken along line 5--5 in FIG. 2.

FIG. 6 is a rear elevational view thereof.

FIG. 7 is a right side view thereof, the left side view being a mirror image of the right view.

FIG. 8 is a cross sectional view thereof taken along line 8--8 in FIG. 3; and,

FIG. 9 is a cross sectional view thereof taken along line 9--9 is FIG. 3.

Referenced Cited
U.S. Patent Documents
5303671 April 19, 1994 Kondo et al.
5520742 May 28, 1996 Ohkase
Patent History
Patent number: D417438
Type: Grant
Filed: Jul 24, 1997
Date of Patent: Dec 7, 1999
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Noriaki Matsushima (Kanagawa)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/74,299
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;