Quartz combustion chamber

- Tokyo Electron Limited
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Description

FIG. 1 a perspective view of a quartz combustion chamber.

FIG. 2 a left side view thereof.

FIG. 3 a front elevational view thereof.

FIG. 4 a top plan view thereof.

FIG. 5 a bottom plan view thereof.

FIG. 6 a right side view thereof; and,

FIG. 7 a cross-sectional view taken along time 7--7 in FIG. 4.

Referenced Cited
U.S. Patent Documents
5303671 April 19, 1994 Kondo et al.
5584934 December 17, 1996 Lin
Patent History
Patent number: D424025
Type: Grant
Filed: Feb 2, 1998
Date of Patent: May 2, 2000
Assignee: Tokyo Electron Limited (Tokyo-to)
Inventor: Takahiro Mori (Shiroyama-Machi)
Primary Examiner: Lisa Lichtenstein
Law Firm: Ladas & Parry
Application Number: 0/82,979
Classifications
Current U.S. Class: Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)
International Classification: 1303;