Process chamber tray

- Applied Materials, Inc.
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Description

FIG. 1 is a top perspective view of a process chamber tray of the present invention;

FIG. 2 is a perspective view showing one side of a process chamber tray of the present invention;

FIG. 3 is a perspective view showing another side of a process chamber tray of the present invention;

FIG. 4 is a perspective view showing the top of a process chamber tray of the present invention;

FIG. 5 is a perspective view showing the bottom of a process chamber tray of the present invention;

FIG. 6 is a perspective view showing the front end of a process chamber tray of the present invention; and,

FIG. 7 is a perspective view showing the back end of a process chamber tray of the present invention.

Claims

The ornamental design for a process chamber tray, as shown.

Referenced Cited
U.S. Patent Documents
D397346 August 25, 1998 Fan et al.
4405435 September 20, 1983 Tateishi et al.
4498416 February 12, 1985 Bouchaib
4592306 June 3, 1986 Gallego
4607593 August 26, 1986 Van Hemel
4664062 May 12, 1987 Kamohara et al.
4681773 July 21, 1987 Bean
4709655 December 1, 1987 Van Mastrigt
4715921 December 29, 1987 Maher et al.
4717461 January 5, 1988 Strahl et al.
4733631 March 29, 1988 Boyarsky et al.
4739787 April 26, 1988 Stoltenberg
4820106 April 11, 1989 Walde et al.
4825808 May 2, 1989 Takahashi et al.
4857160 August 15, 1989 Landau et al.
4886592 December 12, 1989 Anderle et al.
4917556 April 17, 1990 Stark et al.
4951601 August 28, 1990 Maydan et al.
5000113 March 19, 1991 Wang et al.
5067218 November 26, 1991 Williams
5088444 February 18, 1992 Ohmine et al.
5186718 February 16, 1993 Tepman et al.
5199483 April 6, 1993 Bahng
5259881 November 9, 1993 Edwards et al.
5352248 October 4, 1994 Ishikawa et al.
5380682 January 10, 1995 Edwards et al.
5516732 May 14, 1996 Flegal
5520002 May 28, 1996 Ishikawa
5582866 December 10, 1996 White
5769952 June 23, 1998 Komino
5784238 July 21, 1998 Nering et al.
5930456 July 27, 1999 Vosen
5944857 August 31, 1999 Edwards et al.
5997255 December 7, 1999 Krueger et al.
6017820 January 25, 2000 Ting et al.
Foreign Patent Documents
0756316A1 January 1997 EP
60-221572 June 1985 JP
61-170568 August 1986 JP
61-246381 November 1986 JP
62-116769 May 1987 JP
62-131455 June 1987 JP
62-164875 July 1987 JP
4-87784 March 1992 JP
4-87785 March 1992 JP
4-87782 March 1992 JP
WO 87/07309 March 1987 WO
Patent History
Patent number: D437333
Type: Grant
Filed: Nov 30, 1999
Date of Patent: Feb 6, 2001
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventor: Daehwan D. Kim (Sunnyvale, CA)
Primary Examiner: Antoine Duval Davis
Attorney, Agent or Law Firm: Thomason, Moser & Patterson
Application Number: 29/114,740
Classifications
Current U.S. Class: Scientific, Laboratory, Or Industrial Heating Equipment (D15/144.1)
International Classification: 1501;