Attracting disc for an electrostatic chuck for semiconductor production

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of an attracting disc for an electrostatic chuck for semiconductor production, showing my new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a left side elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a top plan view thereof; and,

FIG. 6 is a bottom plan view thereof.

Claims

The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.

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Patent History
Patent number: D548705
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Aug 14, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,047