Attracting disc for an electrostatic chuck for semiconductor production
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Description
Claims
The ornamental design for an attracting disc for an electrostatic chuck for semiconductor production, as shown and described.
Referenced Cited
U.S. Patent Documents
3078565 | February 1963 | Sanders |
4502094 | February 26, 1985 | Lewin et al. |
5350479 | September 27, 1994 | Collins et al. |
5671116 | September 23, 1997 | Husain |
6033478 | March 7, 2000 | Kholodenko |
6278600 | August 21, 2001 | Shamouilian et al. |
6628503 | September 30, 2003 | Sogard |
6721162 | April 13, 2004 | Weldon et al. |
20020027762 | March 7, 2002 | Yamaguchi |
20020159217 | October 31, 2002 | Tsuruta et al. |
20040179323 | September 16, 2004 | Litman et al. |
20040190215 | September 30, 2004 | Weldon et al. |
20040212947 | October 28, 2004 | Nguyen et al. |
20040218339 | November 4, 2004 | Nakamura |
20050111161 | May 26, 2005 | Tran |
20060002053 | January 5, 2006 | Brown et al. |
20060161785 | July 20, 2006 | Pellegrin |
20060221539 | October 5, 2006 | Morita et al. |
Patent History
Patent number: D548705
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Aug 14, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,047
Type: Grant
Filed: Dec 19, 2005
Date of Patent: Aug 14, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Daisuke Hayashi (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/245,047
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)