Absorption board for an electric chuck used in semiconductor manufacture

- Tokyo Electron Limited
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Description

FIG. 1 is a perspective view of an absorption board for an electric chuck used in semiconductor manufacture.

FIG. 2 is a front elevational view thereof.

FIG. 3 is a rear elevational view thereof.

FIG. 4 is a right side elevational view thereof, the left side elevational view being a mirror image and not shown; and,

FIG. 5 is a top plan view thereof, the bottom plan view being a mirror image and not shown.

Claims

We claim the ornamental design for an absorption board for an electric chuck used in semiconductor manufacture, as shown.

Referenced Cited
U.S. Patent Documents
3078565 February 1963 Sanders
4502094 February 26, 1985 Lewin et al.
5350479 September 27, 1994 Collins et al.
5671116 September 23, 1997 Husain
6033478 March 7, 2000 Kholodenko
6278600 August 21, 2001 Shamouilian et al.
6628503 September 30, 2003 Sogard
6721162 April 13, 2004 Weldon et al.
20020027762 March 7, 2002 Yamaguchi
20020159217 October 31, 2002 Tsuruta et al.
20040177927 September 16, 2004 Kikuchi et al.
20040179323 September 16, 2004 Litman et al.
20040190215 September 30, 2004 Weldon et al.
20040212947 October 28, 2004 Nguyen et al.
20040218339 November 4, 2004 Nakamura
20050111161 May 26, 2005 Tran
20050146277 July 7, 2005 Ueda et al.
20060002053 January 5, 2006 Brown et al.
20060164785 July 27, 2006 Pellegrin
20060221539 October 5, 2006 Morita et al.
Foreign Patent Documents
D1041644 June 1999 JP
2004-047653 February 2004 JP
D1197395 February 2004 JP
Patent History
Patent number: D553104
Type: Grant
Filed: Oct 19, 2004
Date of Patent: Oct 16, 2007
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Kaoru Oohashi (Nirasaki), Shunsuke Mizukami (Nirasaki), Takehiro Ueda (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Ladas and Parry LLP
Application Number: 29/215,644