Stage arm for a semiconductor wafer delivery apparatus

- Tokyo Electron Limited
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Description

FIG. 1 is a top plan view of a stage arm for a semiconductor wafer delivery apparatus showing our new design;

FIG. 2 is a front elevation view thereof;

FIG. 3 is a bottom plan view thereof;

FIG. 4 is a cross-sectional view thereof taken along line 4—4 in FIG. 1;

FIG. 5 is a cross-sectional view thereof taken along line 5—5 in FIG. 1; and,

FIG. 6 is a perspective view thereof in use.

The broken line showing represents unclaimed subject matter.

Claims

The ornamental design for a stage arm for a semiconductor wafer delivery apparatus, as shown and described.

Referenced Cited
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Patent History
Patent number: D559805
Type: Grant
Filed: Nov 14, 2005
Date of Patent: Jan 15, 2008
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Hiroki Hosaka (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/242,543