Nozzle for vapor-phase epitaxial equipment
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Description
Claims
The ornamental design for a nozzle for vapor-phase epitaxial equipment, as shown and described.
Referenced Cited
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Patent History
Patent number: D576647
Type: Grant
Filed: Jan 4, 2007
Date of Patent: Sep 9, 2008
Assignee: NuFlare Technology, Inc. (Numazu-shi)
Inventors: Hiroshi Furutani (Numazu), Seiichi Nakazawa (Numazu), Michio Nishibayashi (Numazu)
Primary Examiner: Louis S Zarfas
Assistant Examiner: David G Muller
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/275,695
Type: Grant
Filed: Jan 4, 2007
Date of Patent: Sep 9, 2008
Assignee: NuFlare Technology, Inc. (Numazu-shi)
Inventors: Hiroshi Furutani (Numazu), Seiichi Nakazawa (Numazu), Michio Nishibayashi (Numazu)
Primary Examiner: Louis S Zarfas
Assistant Examiner: David G Muller
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/275,695
Classifications
Current U.S. Class:
Miscellaneous (D15/199)