Wafer holding member

- Tokyo Electron Limited
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Description

FIG. 1 is a front elevational view of a wafer holding member showing our new design;

FIG. 2 is a rear elevational view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a right side elevational view thereof;

FIG. 6 is a left side elevational view thereof;

FIG. 7 is a top, front and right side perspective view thereof;

FIG. 8 is a bottom, front and left side perspective view thereof; and,

FIG. 9 is a cross-sectional view thereof taken along line 9—9 in FIG. 1.

Claims

The ornamental design for a wafer holding member, as shown and described.

Referenced Cited
U.S. Patent Documents
5643366 July 1, 1997 Somekh et al.
6183183 February 6, 2001 Goodwin et al.
6190114 February 20, 2001 Ogawa et al.
6190460 February 20, 2001 Hwang
6405610 June 18, 2002 Komatsu et al.
D559805 January 15, 2008 Hosaka
20010051088 December 13, 2001 Park et al.
20030169916 September 11, 2003 Hayashi et al.
20060120833 June 8, 2006 Bonora et al.
Patent History
Patent number: D589474
Type: Grant
Filed: Dec 6, 2007
Date of Patent: Mar 31, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventors: Ikuo Ogasawara (Nirasaki), Munetoshi Nagasaka (Nirasaki)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/298,522