Processing chamber for manufacturing semiconductors
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The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for a processing chamber for manufacturing semiconductors or the like, as shown and described.
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Type: Grant
Filed: Apr 10, 2007
Date of Patent: Jun 9, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Yicheng Li (Narashino)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/278,809