Substrate support for a semiconductor deposition apparatus

- ASM Genitech Korea Ltd
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FIG. 1 is a perspective view of a substrate support that may be positioned in a reaction space of a chamber in a semiconductor deposition apparatus, showing our new design, wherein the four small circles on the top surface of the support represent through-holes;

FIG. 2 is a front view thereof;

FIG. 3 is a rear view thereof;

FIG. 4 is a left-side view thereof;

FIG. 5 is a right-side view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof;

FIG. 8 is a perspective view of the substrate support cut along a line passing through the center of the support with a partial enlarged view showing a transition from a center recess on the top surface of the support and an outer shoulder at the outer portion of the support; and,

FIG. 9 is a cross-sectional view thereof, along a line passing through the center of the support.

The ornamental design which is claimed is shown in solid lines in the drawings.


The ornamental design for a substrate support for a semiconductor deposition apparatus, as shown and described.

Referenced Cited
U.S. Patent Documents
5098501 March 24, 1992 Nishiguchi
5403401 April 4, 1995 Haafkens et al.
6053982 April 25, 2000 Halpin et al.
6203622 March 20, 2001 Halpin et al.
6893507 May 17, 2005 Goodman et al.
D552565 October 9, 2007 Nakamura et al.
D587222 February 24, 2009 Sasaki et al.
7582166 September 1, 2009 Lampe et al.
20030168174 September 11, 2003 Foree
20050152089 July 14, 2005 Matsuda et al.
20050193952 September 8, 2005 Goodman et al.
20070076345 April 5, 2007 Bang et al.
Other references
  • Givens et al., Substrate Holder With Varying Density, U.S. Appl. No. 12/266,317, filed on Nov. 6, 2008.
Patent History
Patent number: D614593
Type: Grant
Filed: Jan 16, 2009
Date of Patent: Apr 27, 2010
Assignee: ASM Genitech Korea Ltd (Chungcheongnam-Do)
Inventors: Jeong Ho Lee (Seoul), Sang Jin Jeong (Daejeon-si), Dong Rak Jung (Cheonan-si)
Primary Examiner: Selina Sikder
Attorney: Knobbe, Martens, Olson & Bear LLP
Application Number: 29/331,023