Attracting plate of an electrostatic chuck for semiconductor manufacturing
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The broken line showing in the figures is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for an attracting plate of an electrostatic chuck for semiconductor manufacturing, as shown and described.
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Type: Grant
Filed: Feb 1, 2007
Date of Patent: Feb 24, 2009
Assignees: Tokyo Electron Limited (Tokyo), Sumitomo Osaka Cement Co., Ltd. (Tokyo)
Inventors: Yasuharu Sasaki (Nirasaki), Mamoru Kosakai (Tokyo)
Primary Examiner: Selina Sikder
Attorney: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
Application Number: 29/276,663