Vacuum contact pad
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Description
The broken line showing of the environment is for illustrative purposes only and forms no part of the claimed design.
Claims
The ornamental design for a vacuum contact pad, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
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5374829 | December 20, 1994 | Sakamoto et al. |
6091079 | July 18, 2000 | Green et al. |
6196532 | March 6, 2001 | Otwell |
6257564 | July 10, 2001 | Avneri et al. |
7115984 | October 3, 2006 | Poo et al. |
D552565 | October 9, 2007 | Nakamura et al. |
20050035514 | February 17, 2005 | Hillman et al. |
20070063453 | March 22, 2007 | Ishikawa et al. |
20090179365 | July 16, 2009 | Lerner et al. |
2007-250601 | September 2007 | JP |
2006/112531 | October 2006 | WO |
Patent History
Patent number: D616389
Type: Grant
Filed: Apr 17, 2009
Date of Patent: May 25, 2010
Assignee: Ebara Corporation (Tokyo)
Inventor: Tamami Takahashi (Ohta-ku)
Primary Examiner: Selina Sikder
Attorney: Sughrue Mion, PLLC
Application Number: 29/335,608
Type: Grant
Filed: Apr 17, 2009
Date of Patent: May 25, 2010
Assignee: Ebara Corporation (Tokyo)
Inventor: Tamami Takahashi (Ohta-ku)
Primary Examiner: Selina Sikder
Attorney: Sughrue Mion, PLLC
Application Number: 29/335,608
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)