Gas supply pipe for manufacturing semiconductor wafers
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The rear view of the gas supply pipe for manufacturing semiconductor wafers appears the same as its front view shown in
Claims
The ornamental design for a gas supply pipe for manufacturing semiconductor wafers, as shown and described.
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Type: Grant
Filed: Nov 8, 2007
Date of Patent: Jul 20, 2010
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Mitsuhiro Okada (Yamanashi)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Eric L Goodman
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/290,252