Flow rate controller
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Any indicia shown in broken lines in the drawings form no part of the design to be patented.
The present article relates to a design of a flow rate controller, which controls fluid including process gas used for fluid supply lines at semiconductor manufacturing facilities, chemical plants, nuclear power plants, petroleum refinery plants and the like.
A flow rate controller is easily connected to a cable by changing the position and direction of the connector even when it is found difficult to connect a cable to a connector because of the relative position of other devices to the controller.
Claims
The ornamental design for a flow rate controller, as shown and described.
| 4276904 | July 7, 1981 | Jackson |
| D439312 | March 20, 2001 | Fukano |
| D446738 | August 21, 2001 | Fukano |
| 6491659 | December 10, 2002 | Miyamoto |
| 6516707 | February 11, 2003 | Elberson |
| 6619613 | September 16, 2003 | Akamatsu et al. |
| 6874404 | April 5, 2005 | Elberson |
| 7290567 | November 6, 2007 | Hirakuni et al. |
| 7328721 | February 12, 2008 | Kytola |
| D616965 | June 1, 2010 | Miyazoe et al. |
Type: Grant
Filed: Nov 5, 2008
Date of Patent: Feb 22, 2011
Assignee: Fujikin Incorporated (Osaka)
Inventors: Tsutomu Shinohara (Osaka), Michio Yamaji (Osaka), Tomokazu Imai (Osaka)
Primary Examiner: Cathron C. Brooks
Assistant Examiner: Maurice Stevens
Attorney: Griffin & Szipl, P.C.
Application Number: 29/327,405
