Dome assembly for a deposition chamber
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The broken lines in the Figures indicating tubular elements disposed internal to other tubular elements do not form part of the claimed design. Transparent materials included in certain elements are indicated by surface treatment and/or are apparent from the Figures.
Claims
The ornamental design for a dome assembly for a deposition chamber, as shown and described.
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Type: Grant
Filed: Nov 16, 2009
Date of Patent: Jul 24, 2012
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Tetsuya Ishikawa (Saratoga, CA), David H. Quach (San Jose, CA), Anzhong Chang (San Jose, CA), Olga Kryliouk (Sunnyvale, CA), Yuriy Melnik (Santa Clara, CA), Harsukhdeep S. Ratia (Santa Clara, CA), Son T. Nguyen (San Jose, CA), Lily Pang (Fremont, CA)
Primary Examiner: Patricia Palasik
Attorney: Patterson & Sheridan, LLP
Application Number: 29/350,406