Wafer holding member

- Tokyo Electron Limited
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Description

FIG. 1 is front perspective view of a wafer holding member illustrating our new design;

FIG. 2 is a top plan view thereof;

FIG. 3 is a bottom view thereof;

FIG. 4 is a front view thereof, the rear view being a mirror image;

FIG. 5 is a left side view thereof;

FIG. 6 is a right side view thereof;

FIG. 7 is a sectional view taken along line 7-7 of FIG. 2;

FIG. 8 is an enlarged view of portion 8 encircled in FIG. 7; and,

FIG. 9 is a perspective view of wafer holding members in use.

The broken lines are shown for illustrative purposes only and form no part of the claimed design.

Claims

The ornamental design for wafer holding member, as shown and described.

Patent History
Patent number: D674761
Type: Grant
Filed: Mar 2, 2012
Date of Patent: Jan 22, 2013
Assignee: Tokyo Electron Limited (Minato-Ku)
Inventors: Naruaki Iida (Koshi), Hideki Kajiwara (Koshi)
Primary Examiner: Selina Sikder
Application Number: 29/414,719