Plasma power transfer rod for a semiconductor deposition apparatus
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Description
Claims
The ornamental design for a plasma power transfer rod for a semiconductor deposition apparatus, as shown and described.
Referenced Cited
U.S. Patent Documents
Foreign Patent Documents
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D576647 | September 9, 2008 | Furutani |
8115136 | February 14, 2012 | Mather et al. |
8304684 | November 6, 2012 | Currier et al. |
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D692402 | October 29, 2013 | Dalton et al. |
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Patent History
Patent number: D702654
Type: Grant
Filed: Jun 13, 2012
Date of Patent: Apr 15, 2014
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Jeong Ho Lee (Seoul), Woo Chan Kim (Daejeon), Sang Jin Jeong (Cheonan), Hyun Soo Jang (Daejeon)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/424,575
Type: Grant
Filed: Jun 13, 2012
Date of Patent: Apr 15, 2014
Assignee: ASM IP Holding B.V. (Almere)
Inventors: Jeong Ho Lee (Seoul), Woo Chan Kim (Daejeon), Sang Jin Jeong (Cheonan), Hyun Soo Jang (Daejeon)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/424,575
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)