Wafer holder for ion implantation
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Description
The broken lines shown in the drawings represent portions of the wafer holder for ion implantation that form no part of the claimed design.
Claims
The ornamental design for a wafer holder for ion implantation, as shown and described.
Referenced Cited
U.S. Patent Documents
3247576 | April 1966 | Dill, Jr. et al. |
D224643 | August 1972 | Mascia |
6037599 | March 14, 2000 | Takase et al. |
6225594 | May 1, 2001 | Zehavi |
6329664 | December 11, 2001 | Mihira |
6545267 | April 8, 2003 | Miura et al. |
6617540 | September 9, 2003 | Zehavi |
7100954 | September 5, 2006 | Klein et al. |
7109068 | September 19, 2006 | Akram et al. |
7479644 | January 20, 2009 | Ryding et al. |
D592512 | May 19, 2009 | Dubitsky et al. |
7633045 | December 15, 2009 | Endoh et al. |
7644968 | January 12, 2010 | Hirooka et al. |
7701230 | April 20, 2010 | Ye et al. |
7799618 | September 21, 2010 | Kawase et al. |
8044374 | October 25, 2011 | Ryding et al. |
D661193 | June 5, 2012 | Merchant et al. |
D680871 | April 30, 2013 | Ellinwood et al. |
D684551 | June 18, 2013 | Nguyen |
20050191409 | September 1, 2005 | Murrell et al. |
20100327190 | December 30, 2010 | Glavish et al. |
Patent History
Patent number: D702655
Type: Grant
Filed: Mar 8, 2013
Date of Patent: Apr 15, 2014
Assignee: Sumitomo Electric Industries, Ltd. (Osaka-shi)
Inventor: Ren Kimura (Osaka)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/448,067
Type: Grant
Filed: Mar 8, 2013
Date of Patent: Apr 15, 2014
Assignee: Sumitomo Electric Industries, Ltd. (Osaka-shi)
Inventor: Ren Kimura (Osaka)
Primary Examiner: Elizabeth J Oswecki
Application Number: 29/448,067
Classifications
Current U.S. Class:
Semiconductor, Transistor Or Integrated Circuit (24) (D13/182)