Roller shaft for semiconductor cleaning
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The broken line showing depicts environmental subject matter only and forms no part of the claimed design.
Claims
We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.
5745945 | May 5, 1998 | Manfredi et al. |
6240588 | June 5, 2001 | Dickey et al. |
6247197 | June 19, 2001 | Vail et al. |
6330729 | December 18, 2001 | Brunelli et al. |
6464796 | October 15, 2002 | Vail et al. |
6467120 | October 22, 2002 | Ziemins et al. |
6502273 | January 7, 2003 | Mihara et al. |
6523210 | February 25, 2003 | Andros |
6543084 | April 8, 2003 | Dickey et al. |
6598255 | July 29, 2003 | Gohda et al. |
6684447 | February 3, 2004 | Mihara et al. |
6802099 | October 12, 2004 | Murakami et al. |
6842933 | January 18, 2005 | Oikawa et al. |
7735177 | June 15, 2010 | Farber et al. |
7955693 | June 7, 2011 | Drury |
8092730 | January 10, 2012 | Wargo et al. |
8372210 | February 12, 2013 | Sin et al. |
8444890 | May 21, 2013 | Drury |
8460475 | June 11, 2013 | Wargo et al. |
8496758 | July 30, 2013 | Idani |
8533895 | September 17, 2013 | Benson |
20130255720 | October 3, 2013 | Tyrrell et al. |
20130255721 | October 3, 2013 | Tyrrell et al. |
Type: Grant
Filed: Dec 8, 2011
Date of Patent: Jul 29, 2014
Assignee: Ebara Corporation (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Fumitoshi Oikawa (Tokyo), Hideaki Tanaka (Tokyo), Teruaki Hombo (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/408,194