Roller shaft for semiconductor cleaning

- Ebara Corporation
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Description

FIG. 1 is a front elevational view of a roller shaft for semiconductor cleaning showing our new design;

FIG. 2 is a rear elevation view thereof;

FIG. 3 is a top plan view thereof, the bottom view being a mirror image thereof;

FIG. 4 is a right side view thereof, the left side view being a mirror image thereof;

FIG. 5 is a cross sectional view taken along the line 5-5 of FIG. 1;

FIG. 6 is a front perspective view, at an enlarged scale;

FIG. 7 is a front elevational view thereof, at an enlarged scale;

FIG. 8 is an enlarged view of the area 8 seen in FIG. 3; and,

FIG. 9 is an enlarged view of the area 9 seen in FIG. 4.

The broken line showing depicts environmental subject matter only and forms no part of the claimed design.

Claims

We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.

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Patent History
Patent number: D710062
Type: Grant
Filed: Dec 8, 2011
Date of Patent: Jul 29, 2014
Assignee: Ebara Corporation (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Fumitoshi Oikawa (Tokyo), Hideaki Tanaka (Tokyo), Teruaki Hombo (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/408,194
Classifications
Current U.S. Class: Element Or Attachment (D32/25)