Roller shaft for semiconductor cleaning
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The broken line showing depicts environmental subject matter only and forms no part of the claimed design.
Claims
We claim the ornamental design for a roller shaft for semiconductor cleaning, as shown and described.
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Type: Grant
Filed: Dec 8, 2011
Date of Patent: Jul 29, 2014
Assignee: Ebara Corporation (Tokyo)
Inventors: Tomoatsu Ishibashi (Tokyo), Fumitoshi Oikawa (Tokyo), Hideaki Tanaka (Tokyo), Teruaki Hombo (Tokyo)
Primary Examiner: T. Chase Nelson
Assistant Examiner: Kathleen M Sims
Application Number: 29/408,194