Susceptor with heater

- Applied Materials, Inc.
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Description

FIG. 1 is an isometric bottom view of a susceptor with heater.

FIG. 2 is an isometric top view of the susceptor with heater of FIG. 1.

FIG. 3 is a bottom plan view of the susceptor with heater of FIG. 1.

FIG. 4 is a top plan view of the susceptor with heater of FIG. 1.

FIG. 5 is a side elevation view of the susceptor with heater of FIG. 1. The opposing side elevation view is a mirror-image.

FIG. 6 is a side elevation view of the susceptor with heater of FIG. 1. The opposing side elevation view is a mirror-image.

FIG. 7 is a cross-sectional view taken along section 7-7 of FIG. 4; and,

FIG. 8 is an enlarged plan view of a portion of the susceptor with heater of FIG. 3.

The broken lines in the Figures form no part of the claimed design.

Claims

The ornamental design for a susceptor with heater, as shown and described.

Referenced Cited
U.S. Patent Documents
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D554945 November 13, 2007 Chung
D564838 March 25, 2008 Shin et al.
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8490615 July 23, 2013 Cudnohoske et al.
D701329 March 18, 2014 Tiner et al.
8709162 April 29, 2014 Leung et al.
D706577 June 10, 2014 Funnell et al.
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Patent History
Patent number: D713200
Type: Grant
Filed: Aug 31, 2012
Date of Patent: Sep 16, 2014
Assignee: Applied Materials, Inc. (Santa Clara, CA)
Inventors: Gaku Furuta (Sunnyvale, CA), John M. White (Hayward, CA), Robin L. Tiner (Santa Cruz, CA), Suhail Anwar (Saratoga, CA), Soo Young Choi (Fremont, CA)
Primary Examiner: Ricky Pham
Application Number: 29/430,967
Classifications
Current U.S. Class: D7/409