Wafer support ring

- Entegris, Inc.
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Description

FIG. 1 is a top perspective view of a wafer support ring showing our new design;

FIG. 2 is a bottom perspective view thereof;

FIG. 3 is a top plan view thereof;

FIG. 4 is a bottom plan view thereof;

FIG. 5 is a front elevational view, with the rear being a mirror image thereof;

FIG. 6 is a cross sectional view taken at line 6-6 of FIG. 3; and,

FIG. 7 is a cross sectional view taken at line 7-7 of FIG. 3.

Claims

The ornamental design for a wafer support ring, as shown and described.

Referenced Cited
U.S. Patent Documents
3893649 July 1975 Cornell
4867401 September 19, 1989 Graff
4899967 February 13, 1990 Johnson
D457283 May 14, 2002 Wayt
D591924 May 5, 2009 Abe
8016542 September 13, 2011 Cox
D646764 October 11, 2011 Rusconi
D655401 March 6, 2012 Muramatsu
D667601 September 18, 2012 Fitzpatrick
D723239 February 24, 2015 Raschke
D743513 November 17, 2015 Yamagishi
D754308 April 19, 2016 Nakagawa
20040048474 March 11, 2004 Asano
20060166503 July 27, 2006 Sasaki
20120263569 October 18, 2012 Priddy
20130330165 December 12, 2013 Wimplinger
20140154038 June 5, 2014 Hudgens
Patent History
Patent number: D767234
Type: Grant
Filed: Mar 2, 2015
Date of Patent: Sep 20, 2016
Assignee: Entegris, Inc. (Billerica, MA)
Inventors: Eric A. Kirkland (Colorado Springs, CO), Russ V. Raschke (Chanhassen, MN), Jason T. Steffens (Shakopee, MN)
Primary Examiner: Cynthia Ramirez
Application Number: 29/519,122
Classifications
Current U.S. Class: Belt Or Roller Conveyor (D34/29)