Arm for wafer transportation for manufacturing semiconductor wafers
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The broken line showing in the figures is included for the purpose of illustrating environment and forms no part of the claimed design.
Claims
The ornamental design for an arm for wafer transportation for manufacturing semiconductor wafers, as shown and described.
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Type: Grant
Filed: Apr 2, 2008
Date of Patent: May 5, 2009
Assignee: Tokyo Electron Limited (Tokyo)
Inventor: Takahiro Abe (Oshu)
Primary Examiner: Cynthia E Ramirez
Attorney: Smith, Gambrell & Russell, LLP
Application Number: 29/300,495