Showerhead for a semiconductor processing chamber

- APPLIED MATERIALS, INC.
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Description

FIG. 1 is an isometric top view of a showerhead for a semiconductor processing chamber showing my new design.

FIG. 2 is an isometric bottom view thereof.

FIG. 3 is a top plan view thereof.

FIG. 4 is a bottom plan view thereof.

FIG. 5 is a side elevational view thereof, the other side elevational views being identical.

FIG. 6 is a cross-sectional view thereof taken along lines 6-6 of FIG. 3.

FIG. 7 is an enlarged view of a portion of FIG. 6; and,

FIG. 8 is an enlarged view of a portion of FIG. 1.

Claims

The ornamental design for a showerhead for a semiconductor processing chamber, as shown and described.

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Patent History
Patent number: D793526
Type: Grant
Filed: Apr 8, 2016
Date of Patent: Aug 1, 2017
Assignee: APPLIED MATERIALS, INC. (Santa Clara, CA)
Inventor: Mehran Behdjat (San Jose, CA)
Primary Examiner: Robin V Webster
Application Number: 29/560,663