Roller for substrate cleaning
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The broken lines depict environmental subject matter only and form no part of the claimed design.
Claims
The ornamental design for a roller for substrate cleaning, as shown and described.
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Type: Grant
Filed: Mar 23, 2016
Date of Patent: Oct 17, 2017
Assignee: EBARA CORPORATION (Tokyo)
Inventor: Tomoatsu Ishibashi (Tokyo)
Primary Examiner: Michael A. Pratt
Assistant Examiner: Michelle E Wilson
Application Number: 29/558,949