Supporting column of insulation unit for semiconductor manufacturing apparatus

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Description

FIG. 1 is a front, top and right side perspective view of a supporting column of insulation unit for semiconductor manufacturing apparatus showing our new design;

FIG. 2 is a front elevational view thereof;

FIG. 3 is a rear elevational view thereof;

FIG. 4 is a right side elevational view thereof;

FIG. 5 is a left side elevational view thereof;

FIG. 6 is a top plan view thereof;

FIG. 7 is a bottom plan view thereof; and,

FIG. 8 is a cross-sectional view take along line 8-8 in FIG. 2.

The dot-dash broken lines FIG. 2 are for reference purposes only; the broken lines form no part of the claimed design.

Claims

The ornamental design for a supporting column of insulation unit for semiconductor manufacturing apparatus, as shown (and described).

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Patent History
Patent number: D928106
Type: Grant
Filed: Jul 12, 2018
Date of Patent: Aug 17, 2021
Assignee: KOKUSAI ELECTRIC CORPORATION (Tokyo)
Inventors: Yusaku Okajima (Toyama), Shuhei Saido (Toyama), Hidenari Yoshida (Toyama)
Primary Examiner: Keli L Hill
Assistant Examiner: Harold E Blackwell, II
Application Number: 29/656,381
Classifications