Semiconductor wafer processing apparatus
Latest Lam Research Corporation Patents:
The broken line showings of portions of the semiconductor wafer processing apparatus and portions of the semiconductor wafer processing tool illustrate environmental structure, and the broken lines form no part of the claimed design.
The shape of the semiconductor wafer processing apparatus is the feature of the design creation content.
Claims
The ornamental design for a semiconductor wafer processing apparatus, as shown and described.
D571739 | June 24, 2008 | Hosaka |
D730849 | June 2, 2015 | Aromin |
D748595 | February 2, 2016 | Bertalan |
D753735 | April 12, 2016 | Shimano |
D761746 | July 19, 2016 | Toyoshima |
D851611 | June 18, 2019 | Kurz |
D900892 | November 3, 2020 | Zhang |
D923591 | June 29, 2021 | Aoki |
D923669 | June 29, 2021 | Tavares Andre |
D928722 | August 24, 2021 | Kok |
D928854 | August 24, 2021 | Zhang |
D929475 | August 31, 2021 | Tavares Andre |
D930054 | September 7, 2021 | Bangalore Srinivas |
- Semiconductor Wafer Apparatus. (Design—© Questel) orbit.com. [Online PDF compilation of references] 59 pgs. Print Dates Range Jul. 16, 2019-Jun. 2, 2000 [Retrieved Sep. 13, 2021].
- “Single Wafer vs Batch Wafer Processing.” Feb. 21, 2018. Mems star, https://memsstar.com/single-wafer-vs-batch-wafer-processing/.
- “Single Wafer vs. Batch Wafer Processing in MEMS manufacturing.” Aug. 2, 2016. CMM International, http://www.cmmmagazine.com/mems/single-wafer-vs-batch-wafer-processing-in-mems-manufacturing/.
- https://www.researchgate.net/publication/35950411_Nonlinear_control_of_a_planar_magnetic_levitation_system_microformLevis, Michel. “Nonlinear Control of a Planar Magnetic Lefitation System.” 2003. University of Toronto.
- “Chinese Application Serial No. 201930607750.9, First Notice of Correction dated Feb. 27, 2020”, w/ English Machine Translation, 2 pgs.
- “Chinese Application Serial No. 201930607750.9, Response filed Apr. 26, 2020 to First Correction Notice dated Feb. 27, 2020”, w/ English Machine Translation, 34 pgs.
- “Korean Application Serial No. 30-2019-0034114, Notice of Preliminary Rejection dated Mar. 17, 2020”, w/o English Translation, 5 pgs.
Type: Grant
Filed: May 6, 2019
Date of Patent: Sep 6, 2022
Assignee: Lam Research Corporation (Fremont, CA)
Inventor: Eller Y. Juco (Tualatin, OR)
Primary Examiner: Manpreet S Matharu
Assistant Examiner: Suzanne E Tisdell
Application Number: 29/690,192