Abstract: In a recording and/or reproducing apparatus (1) having a reel drive device (35) with a drive shaft (46A) and with a disc-shaped drive member (47) made of a plastic and with drive teeth (48), and with a second magnetic circuit element (49), and with a third magnetic circuit element (50), which is connected to the drive member (47) by insert-molding of the third magnetic circuit element (50), the drive shaft (46A) is connected directly to the third magnetic circuit element (50) in a rotationally interlocked manner and the third magnetic circuit element (50) is formed by an element which is finished by means of a turning operation, and the third magnetic circuit element (50) is dimensioned in such a manner with respect to the drive member (47) that the third magnetic circuit element (50) is not subjected to any deformation by the drive member (47) made by insert-molding.

Abstract: In a webbing retractor having a pretensioner mechanism and a force limiter mechanism, when a drive member is rotated in one direction by the pretensioner mechanism, a cam plate is disposed at a sleeve side by an inner peripheral surface of a clutch ring. Thus, a roller engages with a sleeve, the sleeve is rotated integrally with the drive member, and a webbing is taken-up. When the sleeve is rotated in another direction by the force limiter mechanism, the cam plate is inserted into a recess portion of the clutch ring, and the cam plate is disposed at a side opposite to a sleeve side. Thus, rotation of the sleeve with respect to the drive member is permitted, and impeding of the pulling-out of the webbing can be prevented. Accordingly, a force limiter load can be determined by only a load required for deforming an energy absorbing member.

Abstract: At a lock plate of a webbing retractor, a pair of pawls and a connecting shaft are molded integrally such that the lock plate is rotated appropriately such that the connecting shaft of the lock plate is inserted into a spool from a cut-out portion and two operational surfaces oppose respective load receiving surfaces, and thereafter, other parts are assembled.

Abstract: In a webbing retractor, when a pawl engages with an internal tooth, a lock plate is guided, via a V gear, to a position at which engagement with a ratchet tooth is possible, and thereafter, the lock plate self-locks. When the V gear reversely rotates by a predetermined amount in accordance with this self-locking, engagement of the pawl and the internal tooth is cancelled. An engagement surface of the internal tooth corresponds to a locus of swinging of the pawl. Engagement with the pawl is cancelled at a smallest V gear reverse rotation angle.

Abstract: A mechanism is provided for removing rotation clamping members in which a rotor of a cable reel is temporarily clamped to a stator. Rotation clamping members which are temporarily positioned over the stator and the rotor of the cable reel are connected with a vertical piece through a hinge that allows a lateral piece to pivot downwardly easily from a root. When removing the rotation clamping member for permitting rotation of the rotor, the lateral piece of the rotation clamping members which is lifted up engages against the periphery of the wheel hub followed by downward pivoting from the root, so that the clamping members are removed smoothly through the side of the wheel boss.

Abstract: A water ski tow rope retrieval and payout system is disclosed. The system includes a reel having a quantity of tow rope wound therearound. The reel is powered by an electric motor through a drive shaft which is also coupled to an electrically controlled brake or clutch. The brake or clutch acts to keep the drive shaft, and thus the reel, from rotating freely when the electric motor is not being used to pay out or retrieve tow rope. An embodiment of the water ski tow rope retrieval and payout system having radio remote control is also disclosed.

Abstract: There is provided a method for refilling a system and apparatus for dispensing wet wipes. The system may include a housing, a tray and a cartridge. The cartridge has the ability to be inserted into the dispenser in a pre-selected manner based on the desired orientation of the wipes contained therein.

Abstract: Disclosed herein is a recording-media tape reel including a cylindrical hub with its center line as an axis of rotation, and a pair of disc flanges extending radially from upper and lower ends of the hub.

Abstract: Disclosed is an aircraft, configured to have a wide range of flight speeds, consuming low levels of power for an extended period of time, while supporting a communications platform with an unobstructed downward-looking view. The aircraft includes an extendable slat at the leading edge of the wing, and a reflexed trailing edge. The aircraft comprises a flying wing extending laterally between two ends and a center point. The wing is swept and has a relatively constant chord. The aircraft also includes a power module configured to provide power via a fuel cell. The fuel cell stores liquid hydrogen as fuel, but uses gaseous hydrogen in the fuel cell. A fuel tank heater is used to control the boil-rate of the fuel in the fuel tank. The aircraft of the invention includes a support structure including a plurality of supports, where the supports form a tetrahedron that affixes to the wing.

Abstract: A method of operating a rotor aircraft at high speeds applies negative collective pitch to the rotor. The rotor aircraft has a wing, a thrust source and a rotor. During horizontal flight, the pilot operates the thrust source to move the aircraft forward. This supplies lift due to air flowing over the wing. By controlling tilt of the rotor, and without supplying power to the rotor, the pilot causes the rotor to auto-rotate due to the forward movement of the aircraft. The speed of rotation of the rotor is controlled by the degree of tilt of the rotor relative to the direction of flight. Once the aircraft speed is sufficiently high to cause reverse flow of air over the entire retreating blade of the rotor, the pilot reduces the collective pitch of the rotor to less than zero to reduce the flapping as desired.

Abstract: Rotary wing aircraft with electric pitch control.

Abstract: A novel energy producing flexible material is provided particularly suited for high altitude and stratospheric applications. The flexible energy producing covering includes a flexible solar cell layer, a flexible substrate which preferably matches the shape and size of the airship gore as well and an electrically conductive conduit disposed in a flexible electrically non-conductive adhesive connecting the flexible solar cell substrate to the airship substrate. Preferably two electrically conductive conduits are provided between the substrate layer and the flexible solar cell layer with the electrically conductive conduits being insulated from one another by the non-conductive adhesive. The novel process provided by the invention for joining the airship substrate to the flexible solar cell substrate includes heat, pressure and the selection of substrate materials and in certain applications the use of a vacuum.

Abstract: An airfoil has a concave rear top surface, a concave rear bottom surface, and a rounded trailing edge to increase the lift-to-drag ratio of the airfoil at small angles of attack when air is flowing from the trailing edge to the leading edge (reverse flow), while maintaining a high lift-to-drag ratio when air is flowing from the leading edge to the trailing edge (forward flow). The airfoil design results from a performance compromise between forward and reverse airflow. For structural reasons, the thickness of the airfoil in proportion to its chord length may change along the blade radius. Thus, a family of airfoils has been designed that promote low-drag laminar flow with both forward and reverse flow, permit operation of the airfoil with reverse flow over a reasonable range of angles of attack, and achieve high lift with forward flow.

Abstract: Apparatus for reducing the installation moments of an external load installed at at least one fastening station of an aircraft includes a ramp arranged in front of the shoulder station relative to the direction of flight. The height of the ramp increases toward the fastening station, and the end of the ramp that is located in proximity of the shoulder station forms a break-off edge that is disposed at a predetermined distance from the outer side of the external load that is directed toward the break-off edge, in order to influence pitch moments and yawing moments of the external load.

Abstract: The door (10) of an aircraft incorporates a housing (14) able to receive a slide, in a folded up state. The housing (14) is delimited between a cover (16) facing outwards from the door (10) and an intermediate bulkhead (18). The cover (16) is jettisonable outside the aircraft or able to swivel by its lower edge on a threshold of the door, by the use of setting de-setting means. In one embodiment, the housing occupies the greater part of the door surface.

Abstract: A method and means are provided for increasing the aerodynamic efficiency of an airfoil employed by an aircraft. The method utilizes the primary flight control surfaces (11) (12) contiguous to the airfoil's trailing edge and relocates these devices to novel positions (21) (23) resulting in an expanded cord and enhanced camber for the aircraft wing (13). Self-adjusting push-pull rods (25) (60) replace conventional solid rods (24) where necessary in combination with a re-rigging of the flight control surfaces (11) (12) to predetermined positions (21) (23). Any voids created by this modification between the shared upper and lower fluid flow surfaces of the aircraft wing (13) and its flight control surfaces (11) (12) are eliminated through the installation of appropriate structure (40) or seal (43). Thus the aircraft wing (13) retains a unique geometric profile as a usual configuration.

Abstract: A deployment system for deploying a moveable wing surface such as a slat from a main wing section includes a first swing arm assembly (24) and a second swing arm assembly (26), which connect the moveable wing surface (22) to said main wing section (8). The first swing arm assembly (24) includes a first swing arm (30) that is pivotably connected to the moveable wing surface, and the second swing arm assembly (26) includes a second swing arm (44) that is connected to the moveable wing surface (22) via a lost motion mechanism (50) that includes a sliding joint (58).

Abstract: In one aspect, a stackable transmission line hanger is provided for securing one or more transmission lines to a supporting structure. Each such hanger includes a transmission line retention section for accommodating a transmission line and a mounting section extending from the transmission line retention section, the mounting section including a mounting hole disposed therein. The transmission line retention section includes a first leg and a second leg extending therefrom, the first and second legs allowing the hanger to accommodate various sizes of transmission lines. The first and second legs each include a locking barb configured to lock against an attachment surface.

Abstract: A plate member mounting structure is used to mount a plate to a panel with an opening without forming a hole to the plate. The mounting structure is formed of a plate member to be attached to the panel and formed on the plate, and a clip to be disposed in the opening of the panel. The plate member has an insertion portion, and an engagement portion to project outwardly from an outer peripheral portion of the insertion portion. The clip includes an accommodating portion for receiving the insertion portion of the plate member, an engagement piece provided at the accommodating portion and engaging the engagement portion of the plate member, an anchor piece formed at one side of the clip to engage the panel, and a positioning piece formed at a head portion of the clip for engaging the panel together with the anchor piece.

Abstract: A holder for a beverage container for upright installation in a motor vehicle has a carrier, guide means by which the carrier is movably guided from a retracted, basic position, into a raised, use position and vice-versa, a holding piece which is mounted on the carrier and has an insertion opening for inserted a beverage container, the holding piece being pivotally mounted on the carrier and being arranged to be pivoted from a basic position, wherein the holding piece is located approximately in a plane of movement of the carrier, into use position wherein the holding piece occupies an at least approximately horizontal position and vice-versa.

Abstract: The invention relates to a stand for clamping rod-shaped parts, in particular Christmas trees. The stand has a tensioning device and a holding device with a number of holding elements which can be pivoted from a holding position into a release position and are prestressed in the release position by respective springs. At least one force transmission element is provided, which is guided on the holding elements and can be tensioned by means of the tensioning device. The holding elements and/or the force transmission element are/is, at least in a region in which the force transmission element is guided on the holding elements, designed in such a manner that, when relative movement takes place between the holding elements and the force transmission element, the latter slides with reduced friction on the holding elements. The springs are integrated in the respective holding elements, and the holding elements consist of a slidable plastic.

Abstract: The invention is a temporary support for holding a structural member such as a fence post in an upright vertical position during vertical leveling and setting. The support comprises a removable frame that fits around a fence post. The frame has a post-retaining portion and a plurality of leg-receiving portions. The legs are slid in the leg-receiving portions and are capable of sliding in and out of the frame in order to adjustably support the fence post.

Abstract: A method is disclosed comprising the steps of placing a first portion of a mixture of spring water and distilled water into a first chamber; and freezing the first portion of the mixture inside the first chamber to form a first ice cube. The mixture may comprise about ninety percent distilled water and ten percent pure spring water. The method may include placing a second portion of the mixture into a second chamber and freezing the second portion of the mixture inside the second chamber to form a second ice cube. The first and second chambers may be attached together by a backing. The method may also include sealing the first chamber after placing the first portion of the mixture into the first chamber and before freezing the first portion. The first chamber may be sealed by placing a foil over the first chamber. The method may include removing bacteria from the first portion after placing the first portion into the first chamber and before freezing the first portion.

Abstract: A novel concept for high-resolution attitude determination sun sensor, which reduces mass and power of current commercial technology sensors by orders of magnitude, while at the same time providing high resolution and a very wide field of view. The sensor is based on a few basic principles and state of the art technology. The wide FOV, high resolution, and compact size are achieved by overlapping fields-of-view onto a single high-resolution detector using holographic technology. Overlapping the fields of small angular sectors in the field of view of a fine sensor permits sharing a single high-resolution focal plane array of a moderate size among sectors. For a given array size it allows to spread the signal in the elevation direction over N times the number of pixels that a sensor with a single sector and the same system field of view would have used. thus creating a system that overcomes the inherent problems of wide field of view systems, namely, low resolution.

Abstract: The invention relates to a color solid-state pickup element and a method for producing the same, which can improve the sensitivity by efficiently utilizing light received by the element surface and has an excellent color reappearance property, wherein, in a solid-state pickup element having light receptive elements arrayed and formed on the surface side of a substrate, a light polarizing prism that polarizes light he that has entered from the surface side of the substrate, distributes and irradiates spectral light ha of specified wavelength bands onto a plurality of light receptive areas is provided on the substrate in which the light receptive areas are arrayed and formed; the second light condensing lens that condenses light he irradiated on the surface side of the substrate is provided on the light polarizing prism; an in-layer lens that makes the light hc condensed by the second light condensing lens into a parallel beam hb and causes it to enter the light polarizing prism is provided between the second l

Abstract: An automatic vehicle headlamp dimming system which includes an optical system and an imaging processing system. The optical system is configured to discriminate between headlamps and tail lamps, and focus the light rays from the headlamps and tail lamps on different portions of a pixel sensor array. The optical system as well as the image processing system provides for relatively increased discrimination of headlamps and tail lamps of other vehicles and also enables the high beam headlamps of the control vehicle to be controlled as a function of the distance as well as horizontal angular position of other vehicles relative to the controlled vehicle.

Abstract: An integrated active pixel photosensor includes a matrix array of pixels. Each pixel includes a photosensitive component, an amplifier component and a reset to initial state component. The matrix array further includes, for controlling the pixels, an addressing device, a power supply device, a reset to initial state device and a device for reading luminance information picked up by the pixels to extract the information from the matrix array. The addressing, power supply, reset and reading devices are implemented by the same plurality of matrix array column and row lines. The photosensor further includes logic control devices external to the matrix array and connected to the column and row lines to enable selective control in each pixel of the power supply, addressing, return to initial state and read functions.

Abstract: In an amplification type solid-state imaging device, output signals of unit cells Pij arranged in a selected row (horizontal line) in the imaging area are read out in sequence and then the average level of the output signals of the unit cells is detected and stored temporarily in a memory. The integrating time of photodiodes in unit cells in each row is set based on the average output level for that row of one frame before, thereby allowing the dynamic range to be expanded on a row-by-row basis without making more complex than necessary the arrangement of the solid-state imaging device.

Abstract: A method and apparatus are provided in a system for utilizing optical radiation which is applied to a handpiece in contact with a patient's skin to perform a dermatological treatment on the patient to protect the patient by assuring that radiation is applied only when there is good contact between the handpiece and the patient's skin. Good contact is detected by detecting light at a skin contacting surface of the handpiece and enabling the application of radiation only if the detected light is within a selected range. The apparatus assures that the source is not normally enabled and is enabled only when it is safe to apply radiation, and in particular when there is good contact between the handpiece and the patient's skin.

Abstract: A relative rotational angle of a rotary body is measured with respect to a reference angle. First openings are arranged about the circumference of a disk, which rotates integrally with the rotary body, at predetermined pitches. A first detecting element detects the first openings and generates a first binary code. The relative rotational angle of the rotary body is computed in accordance with the first binary code. A second detecting element detects the second openings and generates a second binary code. The reference angle of the rotary body is computed and reset in accordance with the second binary code. Third openings are concentrical with the first and second openings. A third detecting element detects the third openings and generates a third binary code. The reference angle is determined based on the combination of the first and third binary codes.

Abstract: An optical encoder including a scale, a scanning device displaceable relatively to the scale in a measuring direction and having a scanning reticle with at least one transparent window limited by an opaque screen and a partial grit formed of an electrically conductive material and provided at least in a region of the window.

Abstract: Matrix assisted laser desorption/ionization is performed in a manner to thermalize large analyte ions in a plume of desorbed material for spectroscopic analysis. The thermalized ions have a low or zero mean velocity and are presented at a well-defined instant in time, reducing artifacts and sharpening the spectral peaks. In one embodiment the light is delivered to a matrix or sample holder having a cover, baffle or compartment. The baffle or compartment impedes or contains a plume of desorbed material and the analyte undergoes collisions to lower its mean velocity and directionality. Thus “thermalized” the analyte ions are passed to a mass analysis instrument. In a preferred embodiment an optical fiber butts up against a thin transparent plate on which the specimen resides, with the matrix side in a vacuum acceleration chamber. A mechanical stage moves the specimen in both the x- and y- directions to select a point on the specimen which is to receive the radiation.

Abstract: The present invention provides an ion trap mass spectrometry method and its mass spectrometer of an internal ionization type for ejecting ions generated in a large amount when ionizing specimen gas or reagent gas by electron impact ionization (EI) or others in the ion trap from the space between the ion trap electrodes, trapping negative ions generated only in an extremely small amount in priority, and making an analysis in high sensitivity. During the ionization period for ionizing specimen gas or reagent gas by electron impact ionization (EI) or others in the ion trap, a static field is superimposed between the ion trap electrodes in addition to the RF field, and positive ions are made unstable and ejected from the space between the ion trap electrodes simultaneously with ionization, and negative ions generated only in an extremely small amount are trapped in priority, and a mass analysis is made.

Abstract: The quadrupole mass spectrometer according to the present invention includes an ion source; a quadrupole filter including four rod electrodes for allowing ions having a preset mass number (mass/charge) among those ions generated by the ion source to pass through the space surrounded by the four rod electrodes; an ion detector for detecting the ions passing through the space; a quadrupole driver for applying a DC+RF voltage to the four rod electrodes, where the voltage corresponds to the preset mass number; a scanning controller for changing the voltage applied to the four rod electrodes to scan through a preset scanning range of the mass number; and a field controller for producing an electrical field between the ion source and the quadrupole filter, where the magnitude of the electrical field depends on the scanning speed of the scanning controller.

Abstract: The present invention develops a new type of SPM, a scanning tunneling charge transfer microscope (STCTM). The STCTM is capable of first, detecting the transfer of an ultrasmall amount of charge (single electrons) or current (attoampere) into or out from a surface with atomic resolution and second, simultaneously measuring the electronic response of that surface to the transferred charge. This dual capability can be achieved by appropriately combining the virtues of the STM and a modified EFM. The STM provides the atomic resolution for the charge transfer, while the modified EFM provides the sub-electronic charge sensitivity for the current and charge detection. The STCTM, with sensitivity many orders of magnitude better than with SPM technology currently available, can be used to characterize the properties of molecules, ultrathin oxides, insulator surfaces, and clusters on insulators with atomic resolution.

Abstract: A scanning probe instrument is offered which can easily calibrate measured values and permits accurate length measurements regardless of the magnification factor. A scan signal generator produces an X-scan signal SX that is amplified or attenuated by an attenuator and applied to a first operational amplifier. Two magnification data items CXW and CXZ for specifying the magnification of the attenuator are registered in a dimensional relation registration portion. A magnification selector portion reads data for setting either magnification corresponding to the present mode of operation of the scanning probe instrument specified by a mode signal SM from the dimensional relation registration portion and sends it to an attenuator. The attenuator amplifies or attenuates the scan signal SX at a magnification corresponding to the magnification data supplied via the magnification selector portion.

Abstract: An optical arrangement, in particular a laser scanning microscope, having a light source, in particular a laser light source, and an interruption device (1) for a light beam (2) of the light source, is configured, in the interest of reliable operation, in such a way that means (3) for monitoring the functioning of the interruption device (1) are associated with the interruption device (1). The invention additionally concerns a shutter (5) for a light beam (2) of a light source, in particular a laser light source, which, again in the interest of reliable operation of an optical arrangement, is characterized by at least two movable components (6, 7) which are configured and arranged such that the mechanical momentum generated by a moving component (6) or by several moving components is compensated for by the motion of the other component (7) or components.

Abstract: A main control system 34 prepares, in advance, a voltage map showing the amount of focus deviation of a secondary electron beam B2 at a detection surface of an electron beam detector 30 corresponding with the amount of charge-up generated on a sample 4 upon irradiation with a primary electron beam B1, and stores this voltage map in a storage device 43. During an observation, the main control system 34 reads the voltage map stored in the storage device 43 and corrects the focal position of the secondary electron beam B2 by controlling either the voltage applied to the secondary optical system 20 or the voltage applied to the sample 4. As a result, focal position deviations resulting from charge-up generated on the sample being observed can be corrected without causing inconvenience to an operator.

Abstract: An infrared detecting capacitor formed of a ferroelectric film has its capacitor portion supported by first and second interconnecting lines to be held on an Si substrate located on both sides of a trench. A lower electrode is coupled with the first interconnecting line while an upper electrode is coupled with the second interconnecting line. The capacitor portion is a rectangle in shape in plan view without small triangular sections opposite to each other in the diagonal direction.

Abstract: Using at least one surface mount resistor as an infrared light emitter in an analytical instrument provides low cost, long life and high reliability.

Abstract: A movement detector includes a lens and a kaleidoscopic mirror. The movement detector is very sensitive and has a very small diameter.

Abstract: In order to make available a detector assembly (100) for photons, more particularly X-ray gamma quanta, with a fiber glass body (10) possessing a screen surface (12) for the imaging of photons, a detector surface (14) with a photon detector (16) mounted thereupon as well as an intermediate section (18) which conducts photons imaged by the screen surface (12) to the detector surface (14); which permits the detection of as large as possible a solid angle in conjunction with a minimal distortion of the image, it is proposed that the screen surface (12) be configured in the form of a curved surface area.

Abstract: A radiation detector 10 is provided with three optical members 12, 14, 16 arranged so that their entrance end faces 12a, 14a, 16a are placed on a substantially identical plane; a scintillator 18 provided on the entrance end faces 12a, 14a, 16a of the optical members 12, 14, 16; a plurality of CCDs 20 for picking up optical images outputted from exit end faces 12b, 14b, 16b of the optical members 12, 14, 16; and a plurality of lightguide optical members 22 for guiding the optical images outputted from the exit end faces 12b, 14b, 16b of the optical members 12, 14, 16, to the CCDs 20. The optical members 12, 14, 16 are bonded and fixed to each other with an adhesive 24 having the light-absorbing property and spacings between them are set in the range of 10 to 15 &mgr;m. A protective film 26 is provided on the scintillator 18.

Abstract: There is provided a radiographic apparatus or a digital cassette in which a metal support is fitted to the interior of a casing of the apparatus through spacers, an x-ray image detection panel is disposed on a front surface of the support, an electric circuit board is fixed to a back surface of the support through projections and the x-ray image detection panel and the electric circuit board are connected to each other by flexible circuit boards. Because shock absorbers made of sheet-like elastic material or gel material are disposed on the inner side of the side walls of the casing, even if the apparatus drops down from its side wall by mistake and the side wall of the casing is instantaneously deformed, the shock is absorbed by the shock absorber, thereby the shock transmiting to the support, the x-ray image detection panel, the flexible circuit board or the like can be reduced. As a result, the shock resistance of the apparatus is improved.

Abstract: This invention provides an electrooptic system array having a plurality of electron lenses. This electrooptic system array has at least two electrode structures which respectively include membranes each having a plurality of apertures and are arranged along the optical axis, and a spacer which is interposed between the facing membranes and determines the gap between the facing membranes.

Abstract: An object is to provide a sample holder and a sample mount which allow observation of a sample from many directions in an electron microscope. A sample holder (10) is made for use in a transmission electron microscope (TEM). In the TEM, an electron beam is incident in the Z direction. A sample mount (17) and a sample (SA) affixed on it can be rotated by a motor (12) in the range of 0 to 360° on an axis extending in the Y direction which differs from the direction of the electron beam incidence. Therefore the electron beam can enter the observed sample (SA) from many directions, thus allowing observation of the sample (SA) from many directions. It is also possible to FIB-process the sample (SA) in many directions without removing the sample (SA) from the sample holder (10), which facilitates the handling in the FIB processing.

Abstract: The method of illumination of a microarray sample may contribute to the signal-to-background ratio. An oblique illumination technique is used to reduce the reflections from the sample to the detector. The sample may also be moved to the backside of the sample support to reduce the reflections caused by the sample support. In addition, a parallel scanning technique may be used to ensure proper alignment of the sample.

Abstract: Methods are disclosed for correcting proximity effects as affected by varying magnitudes of beam blur occurring at different respective locations in an image of a reticle subfield as projected onto the sensitive surface of a substrate. Local resizings of pattern-element profiles as defined on the reticle are made taking into consideration not only proximity effects arising from Coulomb interactions but also different magnitudes of beam blur occurring at different respective locations in a projected subfield. Beam blur is imparted by the projection-optical system and is a function of the magnitude of beam deflection, the location of pattern element(s) within the area of the exposed subfield, and the exposure-energy profile on the surface of the substrate being exposed. A resist-development energy threshold is established such that the edges of pattern elements as transferred to the wafer in response to the exposure-energy profile will be at their desired locations according to design specifications.

Abstract: Disclosed is an exposure method, an exposure apparatus and a device manufacturing method, in which transmission factors of almost all optical systems, including a projection optical system, can be measured during an exposure process, and in which the exposure amount is controlled on the basis of it. The exposure apparatus includes an illumination optical system for illuminating a pattern of a reticle with a laser beam from an excimer laser, and a projection lens system for projecting the pattern illuminated by the illumination optical system onto a wafer, to thereby expose the wafer with the reticle pattern, wherein reflection light or ghost light produced at a surface of a lens of the projection lens system is received by a sensor and, on the basis of the an output of the sensor, the transmission factor of the projection lens system is measured.

Abstract: In an apparatus for determining the exposure conditions, a developed pattern is converted into an optical information formed by exposing a plurality of different positions of a substrate at different exposure amounts and focus values to light at a predetermined pattern and developing the pattern thereby to determine the combination of the optimum exposure amount and the optimum focus value from the optical information.