Abstract: A local area of a sample is focally heated to produce a transient physical deformation. The surface of the structure is optically monitored while the heated area cools to a baseline temperature by illuminating the heated region with one or more probe beams from time to time and detecting returning light. In some embodiments heat dissipation within the structure is correlated with change in optical reflectivity over time. In other embodiments, surface deformation of the structure is correlated with changes in light scattering from the surface. Following application of a pump pulse and no more than 3 probe pulses, a time varying returning light signal is compared with a corresponding returning light signal from a reference. An anomaly in the sample is indicated by a deviation between the two signals. First-degree exponential decay curves may be constructed from the signals, and their decay constants compared.

Abstract: Detecting a defect of an integrated circuit includes illuminating an integrated circuit with an optical beam. The integrated circuit includes a substrate, a dielectric layer disposed outwardly from the substrate, and a sequence of metal links disposed within the dielectric layer. An end metal link of the sequence of metal links is grounded. A change of relative brightness of the dielectric layer proximate to the sequence of metal links is detected. The change of relative brightness comprises a difference between a first brightness associated with a first metal link and a second brightness associated with a second metal link coupled to the first metal link. The change of relative brightness is associated with a defect of the integrated circuit.

Abstract: In an optical scanning system for detecting particles and pattern defects on a sample surface, a light beam is focused to an illuminated spot on the surface and the spot is scanned across the surface along a scan line. A detector is positioned adjacent to the surface to collect scattered light from the spot where the detector includes a one- or two-dimensional array of sensors. Light scattered from the illuminated spot at each of a plurality of positions along the scan line is focused onto a corresponding sensor in the array. A plurality of detectors symmetrically placed with respect to the illuminating beam detect laterally and forward scattered light from the spot. The spot is scanned over arrays of scan line segments shorter than the dimensions of the surface. A bright field channel enables the adjustment of the height of the sample surface to correct for errors caused by height variations of the surface.

Abstract: A curved mirrored surface is used to collect radiation scattered by a sample surface and originating from a normal illumination beam and an oblique illumination beam. The collected radiation is focused to a detector. Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors to restrict detection to certain azimuthal angles.

Abstract: A method for optical detection of characteristic quantities of the wavelength-dependent behavior of an illuminated specimen, such as the emission behavior and/or absorption behavior, preferably the fluorescence and/or enzyme fluorescence comprises determining at least one spectral centroid and/or a maximum of the emission radiation and/or of the absorbed radiation. An arrangement for performing the method is disclosed.

Abstract: A fluorescence spectrometer comprises a laser and at least one beam splitter positioned to receive a light beam from the laser and to divide it into several first light beam portions. Dichroic mirrors are positioned to separately receive the first light beam portions and to reflect the beam portions at an angle to the first light beam portions. Transparent chambers are provided for holding the samples. Objective lens systems are respectively positioned in the path of the reflected beam portions to respectively focus each reflected beam portion to a point within one of the separate transparent chambers. Lenses are positioned to receive fluorescence from a sample for testing within the transparent chambers and to respectively focus the fluorescence at pin holes in opaque partitions. The lenses are positioned to receive the fluorescence, which passes back through the objective lens system and the dichroic mirror.

Abstract: Overlay measurements for a semiconductor wafer are obtained by forming a periodic grating on the wafer having a first set of ridges and a second set of ridges. The first and second sets of ridges are formed on the wafer using a first mask and a second mask, respectively. After forming the first and second sets of gratings, zero-order cross polarization measurements of a portion of the periodic grating are obtained. Any overlay error between the first and second masks used to form the first and second sets of gratings is determined based on the obtained zero-order cross polarization measurements.

Abstract: A system is disclosed for evaluating nitrogen levels in thin gate dielectric layers formed on semiconductor samples. In one embodiment, a tool is disclosed which includes both a narrow band ellipsometer and a broadband spectrometer for measuring the sample. The narrowband ellipsometer provides very accurate information about the thickness of the thin film layer while the broadband spectrometer contains information about the nitrogen levels. In another aspect of the subject invention, a thermal and/or plasma wave detection system is used to provide information about the nitrogen levels and nitration processes.

Abstract: The specification discloses a handheld color measurement instrument capable of reading both barcodes and sample colors. The instrument includes a single color measurement engine connected to a control capable of detecting and reading barcodes. When a barcode is detected, the control updates program and/or configuration information in accordance with information contained in the barcode. When a barcode is not detected, the control operates to read sample colors.

Abstract: A lightweight hand-held skin abnormality detection system includes a source of excitation light that causes tissue under examination to produce fluorescence light. The fluorescence light produced along with the beam of reference light is provided to a beam splitter which divides the fluorescence light and the reference light into separate optical channels. Each optical channel produces an image of the tissue under examination. A passive optical combiner superimposes the image produced by each optical channel for viewing by a user.

Abstract: Apparatuses and methods for determining the concentration of an analyte in a physiological sample are provided. The subject apparatuses include at least one light source, a detector array, means for determining whether a sufficient amount of sample is present on each of the plurality of different areas, and means for determining the concentration of the analyte based on the reflected light detected from those areas determined to have sufficient sample, where areas having insufficient sample are not used in analyte concentration determination. The subject methods include illuminating each area of a test strip, obtaining reflectance from each of the different areas, determining which areas have sufficient sample based on detected light therefrom and deriving analyte concentration from the areas determined to have sufficient sample, where areas determined not to have sufficient sample are not used in the derivation. Also provided are kits for use in practicing the subject methods.

Abstract: A mark comprising at least one set of calibration periodic structures and at least two sets of test periodic structures, both types of which are positioned along an axis. The mark is used to measure the relative position between two layers of a device. Each set of test periodic structures has its periodic structures formed within first and second sections. The periodic structures of the first and second sections are each formed on one of the two layers of the device, respectively. The first and second sections of each test set is positioned proximate to the second and first sections of the next test set, respectively. This mark allows two beams which scan the mark to travel over both a test section formed on one layer of the device and a test section formed on the other of the two layers. Scanning multiple test sets provides multiple registration error values which are then averaged to obtain an average registration error value.

Abstract: An automated lane surface measuring device comprising a controller for operating a drive mechanism for propelling the measuring apparatus and one or more sensors operated by the controller to measure topographical parameters of the bowling lane surface. In one embodiment the apparatus measures bowling lane surface elevation by measuring bowling lane height with respect to the measuring apparatus in selectable increments along the surface of the bowling lane. The measuring apparatus may also measure crosswise tilt along the width of a bowling lane in selectable increments. The measuring apparatus may also measure lengthwise tilt of the length of the lane surface in selectable increments.

Abstract: An apparatus for determining measurements of an object moving along a conveyor path having a support surface is provided. The apparatus includes an object detector located along the conveyor path which is adapted to detect the leading edge of the object and generate a leading edge signal. An object speed detector is located along the conveyor path and is adapted to generate an object speed signal. A light source is located above the conveyor path and generates a light beam having a sharp edge which extends across the support surface in a direction transverse to a direction of movement of the object to define a light beam intersect path on the support surface. The light beam is arranged at a fixed angle of incidence of less than 90° relative to the support surface.

Abstract: A coordinate inputting/detecting apparatus for optically detecting a position of a designating device inserted into a flat or substantially flat two-dimensional coordinate inputting/detecting area of the apparatus includes a coordinate determining device to determine two-dimensional coordinates of the designating device in the coordinate inputting/detecting area. A distance determining device determines a distance of the designating device from a surface of the coordinate inputting/detecting area when the designating device is located on or in vicinity to the coordinate inputting/detecting area. A storing device stores information of the two-dimensional coordinates determined by the coordinates determining device and information of the distance determined by the distance determining device so as to be associated with each other.

Abstract: A method for neutral pixel detection using color space feature vectors wherein one color space coordinate represents lightness is provided. The method includes the following steps: a) receiving an input image represented in a first color space; b) converting the input image to a second color space wherein one coordinate represents lightness; c) selecting a pixel in the second color space representation to be classified; d) computing second color space feature vectors associated with the selected pixel; and e) classifying the selected pixel between neutral and color classes based on the values computed for the second color space feature vectors. Typically, the input image is processed using a smoothing filter to create a smoothed input image prior to the conversion to the second color space. The method can be adapted to page processing or strip processing schemes with respect to the input image.

Abstract: A grayscale patch is formed using a uniform density signal on the entire surface of a recording paper sheet corresponding to a print region of a photosensitive drum, and a plurality of such grayscale patches corresponding to different gray levels are output (S3501). The entire surface of each of the plurality of output grayscale patches is scanned by a scanner unit to obtain luminance data for respective pixel positions (S3502). The scanned luminance data for the entire surface are converted into reflection density values using a predetermined table (S3503), and a two-dimensional &ggr; correction LUT corresponding to the print region is obtained on the basis of the converted density values (S3504).

Abstract: A data management method and system for expediting the flow and handling of print data from a creation source to one or more printers. Data in a stream is examined in light of assessed available and capable printers, and is block boundaried accordingly to divide the stream appropriately into compressed and uncompressed data blocks.

Abstract: A single, integrated multi-function driver which, when invoked, has the capability to afford driver control over the operations of a scanner and a printer, such as the scanner and printer component portions of an otherwise conventional MFP device. The integrated driver included both a scanner driver and a printer driver, and in an enhanced form, further includes specialized portions which enable scan modification and manipulation, as well as print modification and manipulation.

Abstract: A method and apparatus for providing a user ID to a printer to print personalized content for a specific user. The printer detects an ID provided by a user. This ID uniquely identifies the user. The printer determines a reference to the personalized content. The reference is based upon the user ID. The printer uses the reference to request the personalized content stored somewhere on a network. Upon receipt of the personalized content over the network, the printer prints the personalized content on paper.

Abstract: A printer driver integrates local and remote printing. A computer is coupled to a local printer. The computer also has access via a network connection to one or more remote printers or printing services. The computer may access the remote printers via the Internet or other wide area network. Using the printer driver, a user can send print jobs either to the local printer or a remote printer. Preferably, the coordination of the local and remote printing capabilities of the computer and printer driver is transparent to the user. That is, the user can initiate a print job from any authoring application (e.g., word processor) and have that print job sent either to the local or remote printer via a common user interface provided by the printer driver.

Abstract: A distributed printing process which involves intercepting a print-job data stream, dividing that stream into data components on the basis of a pre-assessment made with respect to the availabilities and performance capabilities of plural computing devices and printer resources in a network setting, with divided components being sent for plural-peer-device implementation of at least one of the steps of rendering and rasterizing, and delivering such rasterized/rendered components to one or more selected target printers for printing

Abstract: To provide a workflow management device which can determine a workflow according to the content of information, and various devices which are an application of such a workflow management device. When data that is the subject of the processing operation is being sent, a first processing unit receives the data, and notifies an operator of the reception of the data via a notification unit. The operator confirms the content of the received data or other information, and instructs a workflow required to be carried out on the data in the second processing unit and afterward. The first processing unit carries out a first processing operation on the received data. When the instruction of the workflow by the operator and the first processing operation are completed, the second processing unit starts to execute the instructed workflow which is required to be carried out in the second processing operation and afterward.

Abstract: A method of printing including the steps of receiving a print job having image data, converting the image data into raster bits, and transmitting the raster bits to an external file storage.

Abstract: The present invention provides a method and system for the creation and use of simple and complex templates. The system includes providing the template where the template contains a plurality of tags, and then applying the template to the image based on the tags. The plurality of tags provide instructions for the application of a plurality of plane files to be applied to the image. The method and system in accordance with the present invention automates the process of applying templates to images which reduces the required amount of user time for the interface. Its use of tags to store the template requires less storage space. The method and system in accordance with the present invention thus saves the user considerable time and effort in applying templates. It also require less processing time over manual template creation methods.

Abstract: A pinhole-imaging device used as an imaging device for an optical scanner apparatus. The pinhole-imaging device replaced the conventional lens-imaging device and placed in front of the optical sensor to receive the imaged light from the illuminant illuminated the scanning object and the optical imaging is focused on the optical sensor. When the radius of the aperture of pinhole-imaging device is smaller or equal to the pixel of the optical sensor, due to the imaged light transmitted to the aperture of the pinhole-imaging device to focus on the optical sensor to form an imaging such that the resolution of the optical imaging can be obtained and the light dispersion effect issue can be improved.

Abstract: A combination platen and sheet fed scanner has a retractable lamp which comprises a sheet fed scanning unit (1). A sheet feeding mechanism is in the sheet fed scanning unit (1). A first camera images a first side of a document fed through the sheet feeding mechanism. A second camera images a side of the document. A platen (2) is detachably mounted to the sheet fed scanning unit (1). A mechanism moves the second camera from the sheet fed scanning unit (1) to the platen (2). A lamp is associated with the second camera, the lamp is retractably mounted to the second camera.

Abstract: An object of this invention is to quickly complete white balance calculation in photographing. To achieve this object, an image sensing apparatus includes an image sensing element in which a line on which first and second color filters are arranged and a line on which first and third color filters are arranged are alternately arrayed on pixels, an image sensing controller which forms an image of one frame by n fields (n is an odd number), and reads out pixel data of the image sensing element so as to contain all color components in each 1-field period, a white balance calculation device which performs process on the basis of image data read out from the image sensing element by the image sensing controller, and starts the process before read of one frame from the image sensing element is completed by the image sensing controller.

Abstract: Holographic media having a photoactive ingredient, such as a photoactive dye, that produces reactive species that directly or indirectly react with oxygen and other inhibitors present in the media to protect the media before recording are disclosed. Methods for holographic media protection and inhibitor and oxygen removal are also disclosed.

Abstract: The present invention relates to the analysis of the internal structures of objects using optical means. According to the invention there were designed an apparatus suited for optical coherence tomography (OCT), an optical fiber lateral scanner (15), which is a part of said apparatus and is incorporated into an optical fiber probe (8), and a method for studying biological tissue in vivo, which allows for making a diagnostics of the biological tissue under study on basis of the state of the basal membrane (46). The moving part of lateral scanner (15) of sampling arm (4) of interferometer (2) is arranged comprising a current conductor (19), which envelopes a magnetic system (17) in the area of one of its poles (25) and an optical fiber (13), which is rigidly fastened to current conductor (19), whereas optical fiber (13) serves as a flexible cantilever, allowing to miniaturize the optical fiber probe (8).

Abstract: In an optical scanning device, a resin lens having a power that is an inverse (negative) power of a scanning lens is implemented in an optical system placed before a deflector so that a change in beam pitch caused by environmental temperature change can be prevented even when a resin lens is used as the scanning lens. To realize optical scanning using this device, a bundle of rays emitted from a plurality of light sources is coupled into a desired state by a coupling lens, after which the bundle of rays is incident on a resin lens. The surface of incidence of this resin lens has a spherical surface configuration with a negative power, and the exit surface of this resin lens has a cylindrical surface configuration with a negative power only in the sub scanning direction. Then, the bundle of rays passes through a resin lens that has a negative power only in the sub scanning direction and then enters a glass toroidal lens.

Abstract: A scanning imaging optical component is used in an optical scanning device which deflects a beam from a light source by a light deflector, condenses the deflected beam toward a surface to be scanned by a scanning imaging optical system, forms a beam spot on the surface to be scanned, and performs optical scanning of the surface to be scanned. The optical component forms at least a part of the scanning imaging optical system, and at least a part of a surface of the optical component other than an effective optical surface is made to be a roughened surface, and roughness thereof is such that: Rmax>0.5 (&mgr;m).

Abstract: The present invention pertains to an optical shutter comprising an photon-absorbing layer and a surface layer in a transparent state on at least one side of the photon-absorbing layer, wherein the optical shutter is characterized by the absorption of photons to change the photon-absorbing layer to an opaque state and to change the surface layer to a reflective state. The optical shutter is reversibly imageable between these transparent and reflective states. The optical shutter may comprise a metallized layer on at least one side of the photon-absorbing layer. Preferably, the optical shutter comprises an organic free radical compound, such as a salt of an aminium radical cation, in the photon-absorbing layer. Also provided are optical switch devices and optical buffers comprising such optical shutters and methods of switching an optical signal utilizing such optical shutters and switch devices.

Abstract: A multi-gas sensor is provided which modulates a polarized light beam over a broadband of wavelengths between two alternating orthogonal polarization components. The two orthogonal polarization components of the polarization modulated beam are directed along two distinct optical paths. At least one optical path contains one or more spectral discrimination means, with each spectral discrimination means having spectral absorption features of one or more gases of interest being measured. The two optical paths then intersect, and one orthogonal component of the intersected components is transmitted and the other orthogonal component is reflected. The combined polarization modulated beam is partitioned into one or more smaller spectral regions of interest where one or more gases of interest has an absorption band.

Abstract: An electrochromic device comprising a pair of glass or plastic plates or plastic films of which at least one plate or film, preferably both plates or films, are provided on in each case one side with an electrically conductive coating, of which at least one plate or film and its conductive coating are transparent, of which the other may be mirrored, and of which in the case of at least one of the two plates or films the electrically conductive layer can be divided into separate, individually contacted area segments, where the plates or films are joined together via a sealing ring on the sides of their conductive coating, and the volume formed by the two plates or films and the sealing ring is filled with an electrochromic medium which comprises at least one reducible electrochromic substance OX2 and at least one oxidizable electrochromic substance RED1, characterized in that one OX2 corresponds to the formula 1

Abstract: The disclosed invention provides a variable lenslet array system that comprises an acousto-optic medium and at least one acoustic wave generator that is positioned adjacent to the acousto-optic medium. The acoustic wave generator is adapted to generate standing acoustic waves into the acousto-optic medium. The wavelength of the resonant acoustic waves is variable in respect to the medium dimensions or can be varied by changing the driving frequency of the wave generator. The standing acoustic waves within the acousto-optic medium change locally the index of refraction. A wave front of a light beam, which crosses these periodic changes of the index of refraction, becomes corrugated and effectively, an array of lenslets is formed.

Abstract: A variable diameter iris is used to change the pass gate of a shaped image produced by a digital mirror device.

Abstract: A system (apparatus and process) for producing an electrophoretic (display) device is provided for allowing production of such a device wherein charged phoretic particles in the dispersion liquid are easily and evenly distributed to respective cells (pixels) between two substrates of the device even in the case of a very small gap between the two substrates or the case of using a flexible substrate. The system includes a storage for a dispersion liquid containing the charged phoretic particles dispersed therein, a stirrer for stirring the dispersion liquid, a substrate-holder for holding the substrate in the dispersion liquid, and a voltage source for applying a voltage to the electrodes formed on the substrate thereby depositing the charged phoretic particles on the electrodes.

Abstract: Electrophoretic particles for electrophoretic display having excellent dispersibility and dispersion stability with time for insulating media, and being protected against coagulation, settling and the like, a process for production of the electrophoretic particles having high versatility for pigments to be used in response to a full-color display, and an electrophoretic display device using the electrophoretic particles that has an excellent memory property and is highly reliable are provided. The electrophoretic particles are formed using as at least a part of structure a pigment with at least a part of the surface covered with polyhydroxyalkanoate.

Abstract: A matrix driven electrophoretic display with a multi-layer back plane is disclosed. The display comprises a top electrode layer, a display cell layer, and a multi-layer back plane. In one embodiment, the multi-layer back plane comprises an electrode formed on the top surface of the top substrate of the multi-layer back plane, a conductive via structure through the substrate, and a conductive trace connected electrically to the via structure at the bottom surface of the first substrate, whereby an electrical connection may be made from the electrode to a structure or component not located immediately beneath the electrode in the multi-layer back plane. In other embodiments, the multi-layer back plane may comprise additional layers and via holes, as needed to connect the electrode with the appropriate switching elements and/or driver elements, as applicable.

Abstract: To provide a process of successively forming from an EL layer, a cathode, a barrier layer and a cover layer in the same multi-chamber. By using a same film deposition method to form the EL layer and the cover layer, as shown in FIG. 1A, the EL layer, the cathode, the barrier layer, and the cover layer can be formed in the same multi-chamber in succession. Thus, as shown in FIG. 1B, a sealed structure of an EL element can be formed.

Abstract: A first control optics assembly receives an incoming optical image. A template optical element produces a template optical intensity profile. A second control optics assembly receives the template optical intensity profile. A polarization separator receives an output from the second control optics. A quarter wave plate changes the polarization of the polarized output therefrom. A combiner receives an output from the first control optics assembly and an output from the quarter wave plate and provides a combined, co-linear propagation output image having an initial beam size. An SLM provides absorption of a portion of the combined output image which changes the local index of refraction of the SLM so that the local reflection at the template optical intensity profile changes.

Abstract: A wide band erbium-doped fiber amplifier with a gain enhancement is provided comprising a first fiber amplifier adapted to amplify C-band components of an input optical signal, a second fiber amplifier connected to the first fiber amplifier in series while being disposed downstream from the first fiber amplifier to amplify L-band components of the input optical signal. A C/L splitter is disposed between the first and second fiber amplifiers and to split the amplified C and L-band optical signals to flow along different paths. A fiber reflector is disposed downstream from the second fiber amplifier to reflect the amplified L-band optical signal to flow backwards toward the second fiber amplifier. A circulator is disposed between the C/L splitter and the second fiber amplifier to guide the amplified L-band optical signal, reflected to flow backwards by the fiber reflector, so that the amplified L-band optical signal flows along a path different from that of optical signals applied to the circulator.

Abstract: An EDFA with integrated input and output modules is presented. The integrated input module has a packaged pump laser diode mounted to the metal EDFA package to provide a heat sink for the pump laser diode which sends the pump laser light over a optical fiber section connected to the amplifying erbium-doped optical fiber section. The fiber section is formed from an optical fiber which better matches the transmission modes in the erbium-doped optical fiber section and has an end subsection of the single mode fiber for a larger numerical aperture. Collimating lenses also increase the coupling efficiency of the laser diode to the erbium-doped fiber section. The integrated output module has a photodiode with a tap filter to monitor the output power of the EDFA, an optical isolator to prevent interference in the erbium-doped optical fiber section. With a twin optical isolator, the integrated input and output modules can be arranged in different ways and combinations with the erbium-doped optical fiber section.

Abstract: It is an object of the present invention to provide a variable wavelength light source apparatus capable of changing continuously wavelengths of a plurality of oscillation light over a wideband and an optical amplifier using the same.

Abstract: An exposure apparatus (10) for applying high-intensity, uniform polarized UV irradiation to a sensitized substrate such as an LCD alignment layer. A telecentric projection system (20) projects a uniformized light towards a surface (28) for irradiation. One or more individual light sources (12) can be combined to provide the intensity needed over the area of the surface (28). An integrator (40) with combining structures (42) allows combination of light from multiple light sources (12). A polarizer (18) is provided at one of an alternate number of locations in the exposure illumination path.

Abstract: A system and method for simultaneous imaging of both infrared and millimeter wave radiation. The novel optical system (10) includes a primary mirror (20), a Mangin secondary mirror (30) positioned to receive energy reflected from the primary mirror (20), and an immersion lens (40) for focusing energy received from the Mangin mirror (30). In the illustrative embodiment, the primary mirror (20) and Mangin mirror (30) are arranged in a Cassegrain configuration. Central to this invention is the use of a negative power refractive Mangin mirror (30) as the Cassegrain secondary mirror, so that the field curvature of the secondary mirror (30) and immersion lens (40) can be made to cancel. The immersion lens (40) effectively decreases the wavelength of the millimeter wave radiation, allowing a smaller detector to collect the same amount of radiation as would a larger detector in air.

Abstract: A reflector assembly for a UV energy exposure system includes a funnel adapted to be connected to a UV energy source to funnel UV energy from the UV energy source longitudinally and a reflector connected to the funnel to redirect the UV energy from the funnel laterally to an object.

Abstract: In one embodiment of the invention, a grating structure etched on a mirror substrate has a grating period causing diffracting, out of an optical path, a first incident radiation within a first band around a first wavelength. A multi-layer coating deposited on the grating structure reflects the first incident radiation, in the optical path, within the first band and a second incident radiation within a second band around a second wavelength. In another embodiment, a first multi-layer coating deposited on a mirror substrate reflects a first incident radiation within a first band around a first wavelength and a second incident radiation, in an optical path, within a second band around a second wavelength. A grating structure is deposited on the first multi-layer coating. The grating structure is etched to have a grating period causing diffracting, out of the optical path, the second incident radiation within the second band.

Abstract: A microscope, especially a laser scanning microscope, with illumination over one wavelength and/or a plurality of wavelengths, wherein a controlling of the intensity of at least one wavelength is carried out by at least one rotatable interference filter which is arranged in the illumination beam path, wherein the at least one wavelength is at least partially reflected out of the illumination beam path and a plurality of filters for different wavelengths can be arranged one behind the other in the illumination beam path.