Abstract: Methods and devices for the detection and/or quantification of an analyte in a sample are provided. These are positive detection methods and devices, in that the more analyte is present in the sample, the stronger the signal that is provided. Devices of the invention include a mobilization zone including a mobile or mobilizable detectable analyte analog, a sample application area, primary and secondary capture areas each including an immobilized binding partner having a binding affinity for the analyte being tested for a detectable analyte analog. The mobilization zone, sample application area, primary and secondary capture area are in fluid continuous contact with each other. In these devices, the first immobilized binding partner has an equal or lower apparent affinity for the analyte than it has for the detectable analyte analog.

Abstract: A semiconductor nanocrystal compound is described capable of linking to an affinity molecule. The compound comprises (1) a semiconductor nanocrystal capable of emitting electromagnetic radiation and/or absorbing energy, and/or scattering or diffracting electromagnetic radiation—when excited by an electromagnetic radiation source or a particle beam; and (2) at least one linking agent, having a first portion linked to the semiconductor nanocrystal and a second portion capable of linking to an affinity molecule. The compound is linked to an affinity molecule to form a semiconductor nanocrystal probe capable of bonding with a detectable substance. Subsequent exposure to excitation energy will excite the semiconductor nanocrystal in the probe, causing the emission of electromagnetic radiation.

Abstract: The present invention provides nanoshell particles (“nanoshells”) for use in biosensing applications, along with their manner of making and methods of using the nanoshells for in vitro and in vivo detection of chemical and biological analytes, preferably by surface enhanced Raman light scattering. The preferred particles have a non-conducting core and a metal shell surrounding the core. For given core and shell materials, the ratio of the thickness (i.e., radius) of the core to the thickness of the metal shell is determinative of the wavelength of maximum absorbance of the particle. By controlling the relative core and shell thicknesses, biosensing metal nanoshells are fabricated which absorb light at any desired wavelength across the ultraviolet to infrared range of the electromagnetic spectrum. The surface of the particles are capable of inducing an enhanced SERS signal that is characteristic of an analyte of interest.

Abstract: In the present invention, ferroelectric memory devices using a ferroelectric planarization layer and methods of fabricating the same are disclosed. According to the method of the present invention, a conductive layer is formed on an interlayer insulation layer having a contact plug and patterned to form capacitor bottom electrode patterns. A ferroelectric layer for planarization is formed to fill a space between the bottom electrode patterns, and then another ferroelectric layer for a capacitor is formed on the bottom electrode pattern and the ferroelectric layer for planarization.

Abstract: The semiconductor device is constituted in such a manner that a switching transistor having a drain region and a source region which are comprised of an impurity-diffused region is formed in the surface layer portion of a semiconductor substrate. On the semiconductor substrate containing the transistor, a first insulation film is formed, and, at the upper layer side of the first insulation film, a capacitor is formed. The capacitor is comprised of a lower electrode, an inter-electrode insulation film comprising one of ferroelectric and high-permittivity dielectric, and an upper electrode. Before the inter-electrode insulation film is formed, a second insulation film is formed so as to cover the side face portion of the inter-electrode insulation film, the second insulation film protecting the side face portion of the inter-electrode insulation film.

Abstract: A method for prioritizing production flow includes processing a plurality of manufactured items in a process flow; measuring characteristics of a plurality of manufactured items in the process flow; estimating performance grades for the plurality of manufactured items based on the measured characteristics; grouping the manufactured items with like estimated performance grades; assigning priorities to groups of manufactured items with like estimated performance grades; and directing the plurality of manufactured items through the process flow based on the assigned priorities. A manufacturing system includes a plurality of processing tools adapted to process a plurality of manufactured items in a process flow, a metrology tool, and a process control server. The metrology tool is adapted to measure characteristics of a plurality of manufactured items in the process flow.

Abstract: An OLED device using improved pillars to facilitate patterning of a conductive layer is described. Conventional use of pillars to pattern electrodes encounters shorting problems due to piling of polymer material at the base of the pillars. This piling deteriorates the profile of the pillars which adversely impacts the ability of the pillars to pattern the conductive layer to form the electrodes. The present invention avoids the shorting problem by separating the pillars into at least first and second sub-pillars. By providing a relatively narrow gap between the sub-pillars, the amount of polymers filling the area between the gap is small. This prevents at least the sidewalls of the pillars facing the gap from being deteriorated by polymer pile-up, thus ensuring that the conductive layer is discontinuous between the sub-pillars.

Abstract: A method of planarizing an image sensor substrate is disclosed. The method comprises depositing a first polymer layer over the image sensor substrate. The first polymer layer is patterned to form pillars. Then, a second polymer layer is deposited over the pillars. Optionally, the second polymer layer is etched back.

Abstract: A method of making a stacked microelectronic assembly includes providing a flexible substrate having a plurality of attachment sites, test contacts and conductive terminals, and including a wiring layer with leads extending to the attachment sites. The method includes assembling a plurality of microelectronic elements to the attachment sites and electrically interconnecting the microelectronic elements and the leads. The flexible substrate is then folded so as to stack at least some of the microelectronic elements in substantially vertical alignment with one another to provide a stacked assembly with the conductive terminals exposed at the bottom end of the stack and the test contacts exposed at the top end of the stack.

Abstract: A fabricating method for a semiconductor package is proposed, in which a chip carrier accommodates at least one semiconductor chip, which is attached with an interface layer formed on a covering module plate consisting of at least one covering plate, while the interface layer is poor in adhesion to the chip and a molding compound used for forming an encapsulant. So that after completing molding, ball implantation and singulation processes, the interface layer, the covering plate and a portion of the encapsulant formed on the covering plate can be easily removed by heating the singulated semiconductor package. This allows the molding compound not to flash on the chip, and prevents the chip from being damaged by stress generated in the molding process.

Abstract: A flip-chip package and packaging method use a substrate having bond pad spacing that matches terminal spacing on a chip at an elevated temperature, such as the temperature of the chip during bonding to the substrate, the melting point of solder used on the chip, a temperature within the range of thermal cycling of the chip, or an operating temperature of the chip. Matching spacing at an elevated temperature permits a better alignment at the bonding temperature for formation of stronger bonds.

Abstract: A method and apparatus for coupling a semiconductor die to terminals of a die package in which the die is housed. The apparatus comprises a die having first and second terminals. A first conductive member is elongated between a first end portion and a second end portion thereof such that the second end portion is proximate to the first terminal. A second conductive member is elongated between a first end portion and second end portion thereof such that the second end portion of the second conductive member is proximate to the second terminal of the die and the second conductive member is generally parallel to the first conductive member. The second end portions of the first and second conductive members may be coupled with conductive couplers to the first and second die terminals, respectively. The conductive members and conductive couplers may be sized and shaped to produce a selected capacitance and/or a selected impedance at the die terminals.

Abstract: A semiconductor device having resin formed on both surfaces of semiconductor elements, where a resin thickness ratio for the resin formed on the two surfaces at least 0.2 and not more than 1.

Abstract: A method and structure for conductively coupling a metallic stiffener to a chip carrier. A substrate has a conductive pad on its surface and an adhesive layer is formed on the substrate surface. The metallic stiffener is placed on the adhesive layer, wherein the adhesive layer mechanically couples the stiffener to the substrate surface and electrically couples the stiffener to the pad. The adhesive layer is then cured such as by pressurization at elevated temperature. Embodiments of the present invention form the adhesive layer by forming an electrically conductive contact on the pad and setting a dry adhesive on the substrate, such that the electrically conductive contact is within a hole in the dry adhesive. The electrically conductive contact electrically couples the stiffener to the pad. The curing step includes curing both the dry adhesive and the electrically conductive contact, resulting in the dry adhesive adhesively coupling the stiffener to the substrate.

Abstract: Salient electrodes on a semiconductor chip and leads on a film substrate are to be connected together with a high accuracy. A change in lead pitch which occurs at the time of connecting salient electrodes on a semiconductor chip and inner leads on a film substrate with each other is taken into account and a correction is made beforehand to the pitch of the inner leads. Likewise, a change in lead pitch which occurs at the time of connecting electrodes on a liquid crystal substrate and outer leads on the film substrate with each other is taken into account and a correction is made beforehand to the pitch of the outer leads.

Abstract: A semiconductor doping method includes steps of forming an insulation layer on a substrate, forming a semiconductor layer on the insulation layer, forming a photoresist layer on the insulation layer, patterning the photoresist layer to provide a portion of the photoresist layer on a first portion of the semiconductor layer, hard baking the portion of the photoresist layer at a first hard-baking temperature of more than about 140° C., doping the semiconductor layer with an impurity in regions other than the first portion of the semiconductor layer, and removing the portion of the photoresist layer.

Abstract: Measure of forming an EL layer by selectively depositing through evaporation a material for forming the EL layer at a desired location is provided. When a material for forming an EL layer is deposited, a mask (113) is provided between a sample boat (111) and a substrate (110). By applying voltage to the mask (113), the direction of progress of the material for forming the EL layer is controlled to be selectively deposited at a desired location.

Abstract: A semiconductor device including a P-type semiconductor layer; an N-type first well on the surface of the semiconductor layer; a P-type second well on the surface of the first well; an N-type source region on the surface of the second well; and an N-type drain region on the surface of the first well and apart from the source region at a specific distance. A gate electrode is formed on the semiconductor layer and extends from the source region to the second well and the first well. An application electrode is arranged apart from the gate electrode on the first well between the second well and the drain region, and extends from the first well to the edge thereof. A P-type first impurity diffusion layer is formed on the surface of the source region and extends to the second well under the source region.

Abstract: A high frequency bipolar transistor that has a silicon germanium intrinsic base region is formed in a semiconductor fabrication process that forms the extrinsic base regions after the intrinsic base region has been formed. The extrinsic base regions are epitaxially grown single crystal silicon that is doped during the growth.

Abstract: A SRAM memory cell including an access device formed on a storage device is described. The storage device has at least two stable states that may be used to store information. In operation, the access device is switched ON to allow a signal representing data to be coupled to the storage device. The storage device switches to a state representative of the signal and maintains this state after the access device is switched OFF. When the access device is switched ON, the state of the storage device may be sensed to read the data stored in the storage device. The memory cell may be formed to be unusually compact and has a reduced power supply requirements compared to conventional SRAM memory cells. As a result, a compact and robust SRAM having reduced standby power requirements is realized.

Abstract: The present invention provides a method for fabricating improved integrated circuit devices. The method of the present invention enables selective hardening of gate oxide layers and includes providing a semiconductor substrate having a gate oxide layer formed thereover. A resist is then formed over the gate oxide layer and patterned to expose one or more areas of the gate oxide layer which are to be hardened. The exposed portions of the gate oxide layer are then hardened using a true remote plasma nitridation (RPN) scheme or a high-density plasma (HDP) RPN scheme. Because the RPN scheme used in the method of the present invention runs at low temperature, the patterned resist remains stable through the RPN process, and those areas of gate oxide layer which are exposed by the patterned resist are selectively hardened by the RPN treatment, while those areas covered by the patterned resist remain unaffected.

Abstract: The disclosure relates to a method of forming a MOS transistor of a semiconductor device and, more particularly, to a method of forming a PMOS transistor of a semiconductor device that minimizes temporary reinforcement and diffusion of dopants for controlling a threshold voltage and dopants for forming a gate electrode due to the selective oxidization of side walls of a conductive layer even though a post heat process is performed at a low temperature by implanting inert ions into the entire semiconductor substrate having a gate pattern including a conductive layer and a metal layer. Thus, the conductive layer and the metal layer are made to have different surface binding capacities to improve the characteristics, reliability and yield of the semiconductor device and to enable high integration of the semiconductor device.

Abstract: A rugged polysilicon electrode for a capacitor has high surface area enhancement with a thin layer by high nucleation density plus gas phase doping which also enhances grain shape and oxygen-free dielectric formation.

Abstract: The present invention discloses a method for manufacturing a semiconductor device. In the method for manufacturing the semiconductor device, a contact plug connected to a predetermined region for a bit line contact and a storage electrode contact is formed in a cell region of a semiconductor substrate before a source/drain region is formed in a peripheral circuit region of the semiconductor substrate using an epitaxially grown silicon film in a high temperature process, to obtain a contact plug having a high filling characteristic and a low contact resistance. In addition, additional ion-implantation process of a P type impurity in the subsequent bit line contact formation can be omitted to simplify the fabrication process. The method is suitable for the high speed merged DRAM logic process to achieve the high speed operation of the semiconductor device, and improves a process yield and reliability of the semiconductor device.

Abstract: In a method for forming a trench capacitor a first layer of silicon oxide is deposited in a storage trench and a layer of silicon is deposited over the first layer by a chemical vapor deposition process. A layer of an oxidizable metal is deposited over the layer of silicon. The layer of silicon and the layer of the oxidizable metal are subsequently oxidized to form a layer of silicon oxide and metal oxide.

Abstract: A method of fabricating a capacitor includes selectively forming a positive photosensitive resin layer on a first conductive layer; exposing the positive photosensitive resin layer, immersing the exposed positive photosensitive resin layer in a solution in which dielectric particles are dispersed and diffusing the dielectric particles into the positive photosensitive resin layer; forming an insulating resin layer covering side faces of the positive photosensitive resin layer; and forming a second conductive layer on the positive photosensitive resin layer. According to the method, a very reliable capacitor having excellent electrical characteristics, such as dielectric strength, can be cheaply and easily fabricated in a wiring layer.

Abstract: A method of manufacturing a MIM capacitor having a bottom electrode is provided by forming a metal wire including copper on a substrate. After the metal wire is formed on the substrate, a dielectric film is formed on the metal wire. A top electrode film is formed on the dielectric film, and then the top electrode film is etched to form a top electrode. A hard metallic polymer formed during the etching of the top electrode film is removed using a mixture of an oxygen gas and a fluorocarbon based gas. The lifting of the thin films is effectively prevented, and the yield of the manufacturing process for manufacturing a MIM capacitor is increased. Additionally, the MIM capacitor has a uniform capacitance because the damage to the dielectric film is prevented, and the oxidation of the bottom electrode is also prevented.

Abstract: A semiconductor device includes a substrate forming a trench, the trench including a storage node disposed within the trench. A wordline is disposed within the substrate and adjacent to a portion of the substrate. A vertically disposed transistor is included wherein the wordline functions as a gate, the storage node and a bitline function as one of a source and a drain such that when activated by the wordline the transistor conducts between the storage node and the bitline. The invention further includes a method of fabricating the semiconductor device with vertical transistors.

Abstract: A method of fabricating a capacitor in semiconductor devices includes forming an insulating interlayer on a semiconductor substrate; forming a contact hole in the insulating interlayer to expose a portion of the semiconductor substrate; forming a plug in the contact hole to be in contact with the semiconductor substrate; forming an adhesive layer, a first barrier layer and a first lower electrode on the insulating interlayer successively; selectively removing portions of the adhesive layer, the first barrier layer and the first lower electrode to define exposed sides of the adhesive layer, the first barrier layer and the first lower electrode; forming a second barrier layer at sides of the adhesive layer; forming a second lower electrode at the sides of the first and second barrier layers; forming a dielectric layer on the first lower electrode and second lower electrode; and forming an upper electrode on the dielectric layer.

Abstract: The present invention provides methods of forming in situ doped rugged silicon and semiconductor devices incorporating conductive rugged silicon. In one aspect, the methods involve forming a layer of amorphous silicon on a substrate at a substantially constant deposition temperature; and converting the layer of amorphous silicon into hemispherical grain silicon by subjecting the layer of amorphous silicon to substantially the deposition temperature while varying pressure.

Abstract: A method of fabricating a contact-less array of non-volatile memory cells includes: (A) forming over the substrate three stacks S1, S2 and S3 of first and second polysilicon layers; (B) forming in the substrate a drain region between the stacks S1 and S2, self-aligned to the edges of stacks S1 and S2, (C) forming side-wall spacers adjacent to edges of each polysilicon stack, (D) forming in the substrate a source region between stacks S2 and S3, self-aligned to the side-wall spacers; (E) forming a composite layer of HTO-Nitride-Polysilicon (ONP) over the array of memory cells immediately after step (B); (F) converting the ONP composite layer to ONO composite layer after step (D); (G) anisotropically etching the ONO composite layer to form ONO side-wall spacers adjacent to edges of the polysilicon stacks; and (H) growing select gate oxide over the row of polysilicon.

Abstract: A flash memory cell. The memory cell includes a substrate, a floating gate, a control gate, and a source/drain region. The floating gate, disposed over the substrate and insulated from the substrate, has a plurality of hut structures. The control gate is disposed over the floating gate and insulated from the floating gate. The source/drain region is formed in the substrate. This invention further includes a method of fabricating a flash memory cell. First, a polysilicon layer and a germanium layer are successively formed over a substrate and insulated from the substrate. Subsequently, the substrate is annealed to form a germanium layer having a plurality of hut structures on the polysilicon layer to serve as a floating gate with the polysilicon layer. Next, a control gate is formed over the floating gate and insulated from the floating gate. Finally, a source/drain region is formed in the substrate.

Abstract: A method for producing a gate on a semiconductor substrate. The semiconductor substratehas a first oxide layer, a conductive layer, a silicide layer, and a hard mask formed thereon. The method includes defining the hard mask to form a pattern of the gate, performing an etching process to remove portions of the silicide layer and the conductive layer which are not covered by the hard mask, performing an O2 flush process to form a second oxide layer on the surface of the exposed first oxide layer, and performing a wet etching process to remove portions of the silicide layer to of give sidewalls of the silicide layer a concave shape and to etch back the second oxide layer.

Abstract: A method for forming four transistors static-random-access-memory.

Abstract: A process uses two layers of polysilicon for fabricating high-density nonvolatile memory, such as mask ROM or SONOS memory, integrated with advanced peripheral logic on a single chip. The method includes covering a gate dielectric layer with a sacrificial layer of silicon nitride; using a masks for defining line structures in the layer of silicon nitride for the bit line implant processes; depositing a dielectric material among the line structures to fill gaps among the line structures; planarizing the deposited oxide and said layer of silicon nitride; removing the silicon nitride and applying a layer of polysilicon material; patterning wordlines in the array portion, and transistor gate structures in said non-array portion, and applying LDD, silicide and other logic circuit processes.

Abstract: The first insulating film (81) and the second insulating film (82) are so layered in this order on a SOI layer (3) as to cover a gate electrode (6) and a side wall (5) and dry-etched with different etching selection ratio (the etching rate of the second insulating film (82) is smaller). After that, an exposed portion of the first insulating film (81) is removed by wet etching. Through these steps, a silicide protection portion (8) is formed only on a flat surface (3S) of the SOI layer (3) and silicide layers (71 and 72) are formed in n+ layers (12 and 13). With this structure, it is possible to prevent etching of the SOI layer in formation of an SiO2 film for silicide protection.

Abstract: The invention relates to a high density read only memory and fabrication method thereof through fabricating a plurality of spaced post transistors on a wafer by implanting and trench etching wherein each post transistor has four vertical surfaces with one of vertical surfaces as a short circuit junction between substrate and source and a read only memory (ROM) cell formed on each of the three remaining vertical surfaces. Therefore, the invention can fabricate three ROM cells in a single post transistor having a high density feature for storing three-bit data.

Abstract: One method includes epitaxially growing a layer of group III-nitride semiconductor under growth conditions that cause a growth surface to be rough. The method also includes performing an epitaxial growth of a second layer of group III-nitride semiconductor on the first layer under growth conditions that cause the growth surface to become smooth. The two-step growth produces a lower density of threading defects. Another method includes epitaxially growing a layer of group III-nitride semiconductor on a lattice-mismatched crystalline substrate and then, chemically treating a growth surface of the layer to selectively electrically passivate defects that thread the layer.

Abstract: A method for fabricating a y-direction, self-alignment mask ROM device is described. The method includes forming a buried drain region in a substrate and forming a gate oxide layer on the substrate. Perpendicular to the direction of the buried drain region, a bar-shaped silicon nitride layer is formed on the gate oxide layer. A photoresist layer is then formed on the gate oxide layer and the bar-shaped silicon nitride layer. Performing a code implantation to form a plurality of coded memory cells using the photoresist layer as a mask. The photoresist layer is then removed. A polysilicon layer is further formed on the gate oxide layer and the bar-shaped silicon nitride layer. The polysilicon layer is back-etched until the bar-shaped silicon nitride layer is exposed. The silicon nitride layer is subsequently removed.

Abstract: An integrated circuit device structure which avoids misalignment when a contact hole is formed to expose a contact pad and a method of fabricating the same, are provided. The integrated circuit device includes a semiconductor substrate having a conductive region and an insulating region, a contact pad on the conductive region of the semiconductor substrate, an auxiliary pad adjacent to the contact pad, and an interlevel insulating layer on the semiconductor substrate and having a contact hole for exposing both the contact pad and the auxiliary pad.

Abstract: A method of fabricating a CMOS transistor using a silicon germanium disposable spacer (114) for the source/drain implant. After gate etch, silicon germanium disposable spacers (114) are formed. A NMOS resist pattern (116) is formed exposing the NMOS regions (120) and the n-type source/drain implant is performed. The disposable spacers (114) in the NMOS regions are removed and, with the NMOS resist mask (116) still in place, the LDD/MDD implant is performed. The process may then be repeated for the PMOS regions (122).

Abstract: A method of fabricating a Si1−XGeX film on a silicon substrate includes preparing a silicon substrate; epitaxially depositing a Si1−XGeX layer on the silicon substrate forming a Si1−XGeX/Si interface there between; epitaxially growing a silicon cap on the Si1−XGeX layer; implanting hydrogen ions through the Si1−XGeX layer to a depth of between about 3 nm to 100 nm below the Si1−XGeX/Si interface; amorphizing the Si1−XGeX layer to form an amorphous, graded SiGe layer; and annealing the structure at a temperature of between about 650° C. to 1100° C. for between about ten seconds and sixty minutes to recrystallize the SiGe layer.

Abstract: Embodiments of a bipolar transistor are disclosed, along with methods for making the transistor. An exemplary transistor includes a collector region in a semiconductor substrate, a base layer overlying the collector region and bound by a field oxide layer, a dielectric isolation layer overlying the base layer, and an emitter structure overlying the dielectric isolation layer and contacting the base layer through a central aperture in the dielectric layer. The transistor may be a heterojunction bipolar transistor with the base layer formed of a selectively grown silicon germanium alloy. A dielectric spacer may be formed adjacent the emitter structure and over a portion of the base layer.

Abstract: A system, apparatus and/or method is provided for fabricating an integrated capacitor during the fabrication of a transistor employing chemical mechanical polishing of a gate electrode of the transistor. Components of the integrated capacitor, particularly the lower electrode of a parallel plate capacitor in one form thereof, and an outer plate of a cylindrical-like capacitor in another form thereof, are defined by the polish stop layer during chemical mechanical polishing (CMP) of a gate of the transistor. According to an aspect of the subject invention, the polish stop layer may be an oxide or a nitride.

Abstract: The present invention concerns the field of solid state capacitors and relates particularly to massed production methods for manufacturing solid state capacitors.

Abstract: Methods for forming capacitors of semiconductor devices are disclosed, and more particularly, methods for forming capacitors having a stacked structure of metal layer-insulating film-metal layer and having its storage electrode formed of ruthenium (hereinafter, referred to as ‘Ru’), which provides improved formation rates of Ru film having desired thickness using ozone (O3) having high reactivity.

Abstract: Provided is a method for fabricating a capacitor using an electrochemical deposition method and Ce(NH4)2(NO3)6 solution. The method includes the steps of: a) forming a contact hole in an insulation layer on a substrate; b) forming a plug including nitride in the contact hole; c) forming a Ru seed layer in the contact hole and on the insulation layer; d) forming a sacrificial layer including an open area overlapped with the contact hole on the Ru seed layer; e) forming a Ru layer for an electrode of the capacitor in the open area by performing electrochemical deposition; f) removing the sacrificial layer, whereby the Ru seed layer not covered with the Ru layer is exposed; and g) etching the exposed Ru seed layer by using an aqueous solution including Ce(NH4)2(NO3)6.

Abstract: A hybrid semiconductor substrate assembly is made by first forming a silicon oxide (SiOx) layer within a silicon carbide wafer, thus forming a silicon carbide membrane on top of the silicon oxide layer and on a surface of the silicon carbide wafer. Optionally, the silicon oxide layer is then thermally oxidized in the presence of steam or oxygen. A substrate-of-choice is then wafer bonded to the silicon carbide membrane, optionally in the presence of a wetting layer that is located intermediate the substrate-of-choice and the silicone carbide membrane, the wetting layer containing silicon. The silicon oxide layer is then removed by hydrofluoric acid etching, to thereby provide a hybrid semiconductor substrate assembly that includes the substrate-of-choice wafer bonded to the silicon carbide membrane. The hybrid semiconductor substrate assembly is then annealed.

Abstract: A method of forming a semiconductor device includes forming at least one amorphous region within an at least partially formed semiconductor device. The method also includes implanting a halogen species in the amorphous region of the at least partially formed semiconductor device. The method further includes doping at least a portion of the at least one amorphous region to form at least one junction within the at least partially formed semiconductor device. The method also includes performing solid phase epitaxial re-growth to activate the doped portion of the at least one amorphous region of the at least partially formed semiconductor device.

Abstract: A method for creating a trench for high voltage isolation begins by forming a trench in the substrate having sidewalls and a bottom surface. Spacers are formed along the sidewalls of a trench with the spacers partially covering the bottom surface. A barrier layer is formed on the portion of the bottom surface not covered by the spacers. The spacers are then removed, exposing the bottom surface not covered by the barrier layer. The bottom surface is then further etched to create a second deeper trench which has sidewalls and bottom surface. An insulating layer is then conformally deposited to cover the surface of the substrate including filling the first and second trenches.