Abstract: The invention provides a carrier housing assembly holding a flexible foil having conductive tracks in which the housing assembly has a plurality of parts each having a respective securing mechanism, the securing mechanisms being mutually engageable to provide a predetermined spatial relationship between the part, thereby providing the flexible foil with a predetermined spatial arrangement. The housing assembly is particularly relevant to component housing assemblies where electrical components are held in place and connected to connecter pins via the flexible foil. In a further aspect of the invention, there is provided methods for manufacturing a foil carrier housing assembly out of a flexible foil comprising conductive tracks at least one electrical component, at least one electrical contact element, at least one component housing and a carrier housing.

Abstract: A reduced noise ultrasound piezo film array on a printed circuit board. A printed circuit board carries a piezo array on one end and a standard coupling at the other end. The board is made in four layers with the two external layers being ground planes to prevent noise pickup. The two internal layers carry printed circuit lines between various elements of the array and terminals of the connector. The various arrays are sequentially scanned. All of the lines except the one selected are connected to ground to prevent crosstalk and noise pickup.

Abstract: An electronic module includes an interconnect module having a plurality of metal layers separated by a plurality of dielectric layers in a stacked structure with electronic components mounted on one surface of the module. The electronic components are selectively interconnected by drilling via holes completely through all dielectric layers with a conductive material such as solder in each via contacting metal layers to be interconnected and each metal layer which is not connected by a via having a metal pattern devoid of metal at the via location. For via connecting non-ground layers, there will be a patch of solder mask on the backside ground layer to electrically prevent this via from inadvertently connecting to ground.

Abstract: The present invention relates to a packaging substrate with electrostatic discharge protection. Each of the mold gates on the substrate is electrically connected to the first copper-mesh layer on the periphery of a top side of the substrate. When static electricity is generated during the molding process, static electric charges will be conducted from the mold gate to the first copper-mesh layer. The static electric charges are collected and restricted to a capacitor formed by a first copper-mesh layer, a dielectric layer and a second copper-mesh layer, and are discharged via a metal pad and supporter. On the other hand, the static electric charge is conducted via the first copper-mesh layer, a through hole, the second copper-mesh layer, the metal pad to the supporter.

Abstract: A method and structure relating to multisegmented plated through holes. A substrate includes a dielectric layer sandwiched between a first laminate layer and a second laminate layer. A through hole is formed through the substrate. The through hole passes through nonplatable dielectric material within the dielectric layer. As a result, subsequent seeding and electroplating of the through hole results in a conductive metal plating forming at a wall of the through hole on a segment of the first laminate layer and on a segment of the second laminate layer, but not on the nonplatable dielectric material of the dielectric layer. Thus, the conductive metal plating is not continuous from the first laminate layer to the second laminate layer.

Abstract: Upper and lower planar circuit boards are connected in spaced apart parallel relationship by a plurality of contacts each made of a conductive pin, insulative collar and solder ball. The upper ends of the pins are inserted in plated though holes in the upper circuit board and soldered thereto by wave soldering or re-flow. The pins have shoulders to establish the penetration of the pins into the upper circuit board. The lower ends of the pins are bonded to conductive pads on the lower circuit board via the solder balls that are maintained in substantially spherical configuration by the insulative collars and accommodate variations in board co-planarity or pin length. Where the lower ends of the pins do not contact their corresponding conductive pads the volume of solder in the solder balls allows reliable fillet solder joints to be formed.

Abstract: The invention comprises a weighing scale, comprising a weight-receiving platform and a display device, which is angularly adjustable with respect to the plane of the platform, whereby to provide an optimum viewing angle.

Abstract: A fuse block having a rotary operator communicating with a door-mounted knob provides a sensor arm on the rotary operator for engaging the door handle to detect closure of the door. A slider may actuate a set of plates capturing a swing arm attached to the rotary operator preventing inadvertent movement of the rotary operator when the door is open.

Abstract: A plunger mechanism provides for automatic tripping of a circuit breaker upon the opening of a cover of electrical equipment connected adjacent to the circuit breaker. One end of the plunger mechanism protrudes from the circuit breaker's housing adjacent to the cover, and the other end of the plunger mechanism engages the latch within the trip mechanism of the circuit breaker. Upon opening the cover, the plunger is depressed by the cover, rotating the latch, thereby tripping the circuit breaker.

Abstract: A breaker apparatus which has a pair of fixed electrodes in a fixed-side housing and a movable electrode in a movable-side housing. The fixed electrodes and the movable electrodes are brought into contact and separated from each other by a guide that allows the housings to move toward and away from each other. A pin in the fixed-side housing mates with a groove in a drive member that is part of the movable-side having to assist in the movement of the housings when the device member is moved in the appropriate direction.

Abstract: A switch device is provided, which has a function of preventing reverse flow of current and reducing the number of switch terminals or harnesses. The switch device has a plurality of fixed contacts and a plurality of movable contacts to contact the fixed contacts. The movable contacts have an electronic element provided between contact members.

Abstract: The present invention has as its object to provide a push switch utilizing a click spring with superior electrical conduction during operation of the switch. The push switch 20 of the present invention has a fixed contact 4, and a spherical click spring that contacts the fixed contact 4 and acts as a traveling contact, the click spring 10 having a projection 11a that projects upward from a central part of the click spring 10, and further, an aperture part 11 formed inside the projection so as to be open at the bottom. When the projection 11a is pressed downward the bottom edge 11b of the aperture part and the fixed contact 4 form a line contact (see FIG. 2).

Abstract: In a flexible switch, a circuit member having an electrode is provided on a adhesive sheet. A spacer sheet, having a through hole situated so as to correspond to the electrode on the circuit member, is provided on the circuit member. A front sheet, having a projected portion, is provided on the spacer sheet, in which a contact portion provided on an inner face of the projected portion is brought into contact with the electrode through the through hole in the circuit member when the projected portion is depressed. At least one of the adhesive sheet, the circuit member, the spacer sheet, and the front sheet has flexibility.

Abstract: An arc chute including a first side wall having a plurality of holes, a second side wall having a plurality of holes and spaced apart from the first side wall, and a plurality of arc chute plates mounted between the first and second side walls. Each of the plurality of arc chute plates include a laterally extending tab on two sides of the arc chute plate, each of the laterally extending tabs being shaped to be interference fitted within one of the plurality of holes. The laterally extending tabs are dimensioned to not substantially extend beyond an outer surface of each of the side walls.

Abstract: A sealing apparatus for effecting a temporary seal against an elongate object. The object is placed in a chamber(17) and supported between inlet and outlet apertures in the walls of the chamber. A resilient seal (32) is placed at the point where the object passes through one of the apertures. A piston (34) is located on the remote side of the seal being operable to compress the seal towards the relevant aperture thereby deforming the seal laterally into contact with the object to seal the periphery of the object. When the piston is released, the seal reverts to its relaxed condition thereby enabling the object to be moved between the two apertures.

Abstract: An upper electrode unit constituting the upper wall of a processing chamber of an etching device includes a first assembly that includes an upper electrode, a second assembly that supports the first assembly and a third assembly that includes power supply routes. After releasing a second locking mechanism and disengaging the third assembly alone with a removing mechanism, the first assembly is disengaged to perform maintenance on the upper electrode. After locking the second locking mechanism and releasing a first locking mechanism, the removing mechanism is utilized to disengage the second and third assemblies and, as a result, the processing chamber is opened to enable maintenance. By adopting the structure described above, a plasma processing device and a maintenance method thereof, that facilitate maintenance and reduce the workload imposed on the operator, are provided.

Abstract: Plasma is generated in a vacuum processing apparatus and a high-frequency voltage is applied to a lower electrode on which a wafer is placed. The high-frequency voltage applied to the lower electrode is subjected to periodical on-off modulation, the on-off duty ratio of which is determined for each wafer or each plurality of wafers, to carry out plasma processing on the wafer. As a result, in the plasma processing carried out on the wafer, the wafer is fabricated with a high degree of reproducibility by suppressing variations in fabricated-line dimension from wafer to wafer without decreasing the throughput.

Abstract: A trigger system for operating a plasma arc torch is provided that comprises a selector that operates between at least a first operating position and a second operating position, wherein the first operating position operates the plasma arc torch in a first mode to deliver gas to the plasma arc torch, and the second operating position operates the plasma arc torch in a second mode to deliver the gas and electric power to the plasma arc torch. Further, the selector comprises a neutral position that selects a neutral mode in which delivery of gas and electric power to the plasma arc torch is inhibited. The selector is preferably disposed within a housing of the plasma arc torch and is slidably operable between the first operating position, the second operating position, and the neutral position.

Abstract: A method of controlling an output of a generator is provided. The output provides an output signal having a settling time to a load having an impedance. The settling time of the output signal is determined. The output signal is amplitude modulated with a modulation waveform. A sense signal is generated that is representative of the modulated output signal. The sense signal is sampled at a sampling time based upon the settling time of the output signal. A digital representation of the sampled sense signal is generated. The amplitude modulation of the output is controlled based upon the digital representation of the sampled sense signal.

Abstract: A dielectric barrier discharge apparatus and module for perfluorocompound (PFC) abatement. The apparatus includes a housing, first dielectric tube disposed in the housing, a second dielectric tube disposed in the first dielectric tube, and at least one electrode disposed in the housing. By this arrangement, a first cooling gas passage is formed between the housing and the first dielectric tube, a PFC passage is formed between the first and second dielectric tubes, and a second cooling gas passage is formed in the second dielectric tube. When the applied voltage for the electrodes is greater than a breakdown voltage, high energetic electrons generated in the PFC passage can ionize or dissociate the PFC to be removed. Meanwhile, cooling gas is introduced to the cooling gas passage for cooling the electrodes. A dielectric barrier discharge module composed of a plurality of dielectric barrier discharge apparatuses is provided to promote the capacity of the treatment of PFC gases.

Abstract: A device for inscribing materials has a hand-held device and a support device. The devices have a laser, a refraction unit, a control unit and a power pack consisting of compact, transportable components. The devices are connected to one another by means of a cable or glass fiber connection.

Abstract: A system for creating a pattern on a workpiece sensitive to light radiation, such as a photomask, a display panel or a microoptical device, comprising a source for emitting light pulses in the wavelength range from EUV to IR, a spatial light modulator (SLM) having at least one modulating element (pixel), adapted to being illuminated by at least one emitted light pulse and a projection system creating an image of the modulator on the workpiece.

Abstract: Provided are a laser apparatus of continuous oscillation that is capable of enhancing the efficiency of substrate processing, a laser irradiation method, and a manufacturing method for a semiconductor device using the laser apparatus. A portion of a semiconductor film that should be left on a substrate after patterning is grasped in accordance with a mask. Then, a portion to be scanned with a laser light is determined so that it is possible to crystallize at least the portion to be obtained through the patterning. Also, a beam spot is made to strike the portion to be scanned. As a result, the semiconductor film is partially crystallized. That is, with the present invention, the laser light is not scanned and irradiated onto the entire surface of a semiconductor film but is scanned so that at least an indispensable portion is crystallized.

Abstract: An electric arc welder for creating a welding cycle with a real time current waveform constituting several control parameters by a microprocessor that controls a power supply by a signal so the output of the power supply traces a desired waveform and dynamic reaction behavior to arc conditions defined by the control parameters. The welder has a controller for creating the signal and reading the parameters, a graphic user interface program controlled by input from a graphic user interface computer, a system with a first interface for an interactive display for displaying the desired waveform and dynamic behavior and at least one manipulative control parameter, a second interface for a manual data entry device to change the waveform and/or the parameters and a digital communication link from the graphic user interface to the welder microprocessor controller for causing the welder to perform the desired waveform by controlling the signal.

Abstract: A system for preventing and clearing gutter ice dams includes a plurality of wire holding assemblies, each assembly having a base for attachment to a gutter and a length-adjustable arm for contact with a roof adjacent the gutter. The arm is rotatably and pivotally mounted to the base. The system includes a PTCR heating cable that is held in a desired position by the wire holding assembly arms. The system includes roof and gutter temperature sensors and a moisture sensor. The heating cable is connected to the control unit, the control having a mode selector switch for controlling operation of the cable. In an automatic mode, the heating cable is energized if a roof temperature is greater than a predetermined temperature and a gutter temperature is less than a predetermined temperature. In a timer mode, the heating cable is energized for a selectable time.

Abstract: A workpiece chuck to support a semiconductor wafer during processing includes a thermal plate assembly which includes both heating and cooling capability. The heating element can be a resistive heater in a coiled configuration disposed in a plane. The cooling can be performed via a cooling fluid circulated through cooling tubes which are also disposed in a coiled configuration in a plane. The plane of the heating element and the cooling tubes can be the same plane, and that plane can be a center plane of the thermal plate assembly. The heating element and cooling tubes are coiled in an interleaved fashion to provide uniform heating and cooling while allowing them to simultaneously occupy the same plane. The thermal plate assembly can include a housing made of a cast material such as aluminum. The chuck also provides for interchangeable top surface assemblies used to support the workpiece chuck.

Abstract: A hot-button type heat alert safety device attachable to a surface, such as metal or glass, for warning individuals that the surface is hot, comprising a thermochromic composition, a button-shaped container for housing the composition, having a convex face, the convex face overlying said composition and the container container being transparent in at least a portion of the container overlying the thermochromic composition. The thermochromic composition is shaped in a predetermined symbol which communicates that an underlying surface is dangerously hot, substantially visible through the convex face of the container, and designed to undergo and maintain a readily perceptible color change whenever the temperature of the hot surface exceeds a predetermined temperature.

Abstract: A power management system in electrical cooking appliances having at least two electrical heating elements wherein the power level of the elements can be set by a user but not exceed a predetermined power level. The power management system being able to compare the total level set by the user with the predetermined power level. The power management system also being able to downgrade the total level set by the user to a lower level which does not to exceed the predetermined level, independently of the set levels. The power management system being further able to selectively downgrade the heating element operating at the higher power level by a predefined step until the total power does not exceed the predetermined power level.

Abstract: A control circuit for a clothes dryer operating with a 120 volt power supply compensates for changes in the ambient temperature to compensate for premature advancement of the dryer timer motor during an automatic drying cycle. The control circuit has a thermally biased low outlet thermostat and a thermally biased high outlet thermostat which control the energization of a heater in the dryer. The low outlet thermostat and the high outlet thermostat each open circuit at respective lower and higher predetermined temperatures when the outlet air flow from the dryer drum reaches the lower or higher respective predetermined temperatures to thereby de-energize the heater and advance the timer motor. The control circuit includes a thermally biased ambient thermostat that is normally open and unbiased, and that switches control of the heater energization from the low output thermostat to the high outlet thermostat when thermally biased and when the ambient temperature rises above a predetermined ambient temperature.

Abstract: The invention is of a portable stripping head induction heating system and associated method of use thereof which system and method is useful in heating metallic components to which protective coatings or linings are applied for enabling their easy removal.

Abstract: A compact induction heating system that is at least partially powered by a source of substantially clean DC current. The induction heating system includes a high frequency inverter with an input connected to a substantially clean DC current source, a first current conductive path including a first capacitor and a first switch closed to cause one half cycle of AC current to flow in the first path by discharging the first capacitor, a second current conductive path including a second capacitor and a second switch closed to cause a second half cycle of AC current to flow in the second path by discharging the second capacitor, a single load inductor in both of the paths with AC current flowing in a first direction through the inductor when the first switch is closed and in a second opposite direction through the inductor when the second switch is closed, and a gating circuit to alternately close the switches at a driven frequency to control heating by the load inductor.

Abstract: Low-odor microwaveable polypropylene/mica food contact articles are disclosed. The articles are prepared by low temperature processing and typically include odor-suppressing basic organic or inorganic compounds. Preferably, the articles are substantially free from C8 and C9 organic ketones associated with undesirable odors. Further improvements to the articles include crack-resistant embodiments with synergistic amounts of polyethylene and titanium dioxide.

Abstract: A wall-mounted type microwave oven includes an oven body and a single lighting device which illuminates a cooking chamber of the oven body and a kitchen space below the oven body. The lighting device is provided at a lower portion of the oven body to illuminate the cooking chamber and the kitchen space. The cooking chamber includes an upper opening formed at its bottom plate to allow light emitted from the lighting device to pass into the cooking chamber therethrough, and the oven body includes a lower opening formed at its bottom plate to allow the light to pass to the kitchen space.

Abstract: An imaging or viewing system, which automatically compensates for bright spots, which tend to overload or saturate imaging system. The system can be used with imaging type tracking systems, viewers and various types of optical devices which heretofore have been unable to provide satisfactory performance due to saturation or overloading of an imaging device due to bright spots, i.e., laser radiation flares or sunlight. The system in accordance with the invention is configured such that reflected radiation is imaged onto a first image plane without dividing the incoming radiation into two optical paths. A digital mirror device, i.e., is disposed at the first image plane. The radiation level of each pixel in the image plane is compared with a fixed threshold on a pixel by pixel basis and used to generate a mirror drive signal that automatically reduces the reflectivity of the corresponding mirror pixel to compensate for bright spots.

Abstract: A system for stabilizing an optical line of sight. An optical system including primary optics and relay optics includes a jitter rejection mirror located within the path of the relay optics. An auto alignment system is provided for maintaining alignment of the jitter rejection mirror in response to a control signal. An auto alignment sensor detects jitter in a reference beam passing through the jitter rejection mirror, and the generated control signal is used to reduce the jitter. The reference beam is supplied by a stabilized source of laser signals which are received by the primary optics, and relayed to the jitter rejection mirror.

Abstract: Each of N optical detector parts 801 to 80N has a photodiode PD, a capacitor Cd and a switch SW0. An amplifier A1, an integrator circuit capacitor Cf1, and a switch SW11 , are connected in parallel between the input terminal and the output terminal of an integrator circuit 10. The capacitance of the integrator circuit capacitance C11 is equal to the capacitance of the capacitor Cd in each of the N optical detector parts 801 to 80N. A switch SW01, is equipped between the input terminal of the integrator circuit 10 and the switch SW0 for each of the N optical detector parts 801 to 80N. A switch SW02 is equipped between the output terminal of the integrator circuit 10 and the switch SW0 in each of the N optical detector parts 801, to 80N.

Abstract: A multi-wavelength semiconductor image sensor comprises a p-type Hg0.7Cd0.3Te photo-absorbing layer formed on a single crystal CdZnTe substrate, a CdTe isolation layer deposited on the photo-absorbing layer, a p-type Hg0.77Cd0.23Te photo-absorbing layer deposited on the CdTe isolation layer, n+ regions which are formed in these photo-absorbing layers and form a pn-junction with each of these photo-absorbing layers, an indium electrode connected to each of these n+ regions and a ground electrode connected to the photo-absorbing layer, the semiconductor isolation layer being electrically isolated from the photo-absorbing layer.

Abstract: Many commercial radiant energy processing systems, such as luminaires and light detectors, require highly efficient diffusely reflective surfaces that can withstand high temperatures. As disclosed herein, a reflector for such a device is constructed of a substrate with a reflective coating, for example painted onto one or more surfaces of the substrate. The coating material comprises a zinc oxide pigment, preferably an uncalcined zinc oxide together with a small amount of a dispersing agent. The pigment and water are mixed together with an alkali metal silicate vehicle-binder (preferably a potassium silicate), for example, in a sheer mixer. The resulting material can be painted onto the desired surface, for example by spraying, spot-brushing or dipping.

Abstract: An apparatus is provided in which multiple devices are connected in series forming a signal path through which a signal propagates. Each device may have one or more operating frequencies and each operating frequency may generate a corresponding intensity modulation with respect to the signal. For one embodiment, the apparatus includes multiple delay lines through which the signal travels. The length of each delay line is configured to reduce the intensity modulation generated by each device based upon one or more factors including the one or more operating frequencies associated with each device and multiple null orders corresponding to different lengths of the delay lines.

Abstract: A system working to detect a reciprocating motion of an object such as a scanner mirror of an optical scanner. The system is designed to compensate for an error which is concluded in an amplified sensor signal used to determine a reference position of the scanner mirror and which is sensitive to a change in environmental condition of use such as a change in ambient temperature. The system also works to monitor a change in amplitude of swing of the scanner mirror accurately to keep it constant.

Abstract: A nuclear logging-while-drilling measuring systems, and the correction of the formation property measurements for adverse effects of instrument standoff from the borehole wall, is disclosed. Detector responses for one or more downhole detectors are sampled and recorded over a time segment. The response samples are then sorted by magnitude, and a running integral of the sorted samples as a function of time is performed over the time segment. Linear segments are then fitted to the running integral, wherein each straight line segment is a function of one or more formation properties, and also a function of the standoff distance of the detector from the borehole wall. Segments are then combined to obtain a measure of one or more formation properties of interest such as formation density, where the adverse effects of borehole standoff are minimized. Standoff magnitude is also obtained and can be used to correct other logs, such as a neutron porosity log, for adverse effects of tool standoff and borehole size.

Abstract: In an ion trap mass spectrometer, between an ion supply source and an ion trap, there are disposed an entrance gate electrode, an ion storing section for holding ions by accumulating them near an exit side by means of an RF voltage with an axial electric potential inclined from an entrance side to the exit side, and an exit gate electrode. When the ions are accumulated near the exit side, the exit gate electrode is opened to thereby introduce the ions in the pulse state into the ion trap. At this point, a voltage is not applied to a ring electrode of the ion trap, so that repulsion due to the voltage of the ring electrode is eliminated. Thereafter, when maximum amount of ions stay inside the ion trap, ring RF voltage is suddenly applied. Thus, the maximum amount of the ions can be introduced into the ion trap.

Abstract: The invention relates to a method and a device which reduces the phase space volume of ions in an ion beam in such a way that their injection into a downstream time-of-flight mass spectrometer optimizes the performance of that spectrometer. The performance of the time-of-flight mass spectrometer, i.e. the sensitivity of the spectrometer, the temporal resolution for fast concentration changes of the examined substances, and particularly the mass resolving power, relates critically to the transmission of the ions. The invention consists of completely decelerating the ions by means of collisions with a damping gas in an RF ion guide system, guiding them to the end of the ion guide system by active forward thrust, extracting them by a drawing lens system, and forming an ion beam with a low phase space volume. In particular, the ion guide system can take the form of a pair of wires coiled in a double helix and be surrounded by an envelope which is filled with the damping gas.

Abstract: Adjustment systems, methods, computerized methods and computer readable-mediums that can be used in time-of-flight mass spectrometry (TOFMS) to account for thermal drift or mechanical strain are provided.

Abstract: An ion source for a mass spectrometer includes an atmospheric pressure sample ioniser (20), arranged to generate ionised sample droplets for ingress into an ion block (50). The block (50) has an entrance orifice cone (70) in communication with an inlet channel (60), and an outlet channel (80) which has a first end that intersects the inlet channel (60) at 90° therto. The outer end of the outlet channel (80) opens into an evacuation chamber (90) which is pumped via a rotary vacuum pump (110). The reduced pressure within the channels of the ion block (50) draws sample droplets therethrough. An exit orifice defined by an exit orifice cone (130) is formed in the outlet channel (80) and sample ions pass through into a mass analyzer region (180). The right-angle bend between the inlet and outlet channels introduces turbulence and promotes desolution. Streaming of droplets from the entrance cone (70) to the exit cone (130) is also prevented.

Abstract: A method of improving the signal to noise ratio of an ion beam, utilizing a tandem mass spectrometer comprising two mass filters separated by a collision cell. The first mass filter is operated in a resolving mode such that only a narrow mass-to-charge range of precursor ions are stable and accelerated towards the collision cell which contains neutral gas to promote collisional activation and subsequent fragmentation of unwanted fragile ions while minimizing fragmentation of desired analyte ions. The second mass filter is scanned synchronously with the first mass filter such that only ions that do not fragment are recorded by the ion detector. Thus, analyte ions that have fragmentation values higher than unwanted background ions are preferentially detected thereby increasing the signal-to-noise ratio of the ion beam.

Abstract: Methods of sampling specimens for microanalysis, particularly microanalysis by atom probe microscopy, include steps of forming a study specimen in a first study object (as by use of focused ion beam milling); removing the study specimen from the study object; situating the study specimen on a second study object; and microanalyzing the study specimen. Where the first study object is of particular interest for study, the study specimen may be taken from a functional portion of the first study object so that microanalysis will provide information regarding this functional portion. Where the second study object is of particular interest for study, the second study object may be subjected to manufacturing processes (e.g., deposition of layers of materials) after the study specimen is situated thereon so that the study specimen will provide information regarding the results of the manufacturing process.

Abstract: The present invention provides a wafer inspection technique capable of detecting a defect in a wafer on which a pattern having a large step such as a contact hole being subjected to a semiconductor manufacturing process is formed and obtaining information such as the position and kind of a defect such as a hole with open contact failure caused in dry etching process at high speed. A wafer on which a pattern having a large step being subjected to a semiconductor manufacturing process is formed is scanned and irradiated with an electron beam having irradiation energy which is in a range from 100 eV to 1,000 eV, and a defect is detected at high speed from an image of secondary electrons generated. Before the secondary electron image is captured, the wafer is irradiated with an electron beam at high speed while being moved to thereby charge the surface of the wafer with a desired charging voltage.

Abstract: An object detection apparatus including a light intensifier tube for use on an overland vehicle is described and which includes an electromagnetic radiation emitter which emits electromagnetic radiation which is reflected from an object of interest; and an electromagnetic radiation receiver which discriminately receives the reflected electromagnetic radiation at predetermined time intervals and which provides an output signal from which information regarding the object of interest may be derived.

Abstract: In an infrared imaging device, shutting means 40 is configured so that it can be opened/closed and so as to shut off an infrared radiation coming into an optical system 20 when it is closed. During an imaging operation, the shutting means 40 is opened, and the optical system 20 causes an infrared radiation from an object 70 to form an image on an infrared detector 10. The infrared detector 10 outputs a signal according to the amount of infrared light received by each pixel. Correction means 30 corrects sensitivity variations among pixels, the influence of the infrared radiation from the optical system 20, etc. During a calibration operation, the shutting means 40 is closed, and the correction means 30 determines a correction coefficient for correcting fluctuations in the amount of infrared radiation from the optical system 20 by using the output of the infrared detector 10 imaging the shutting means 40.