Patents Issued in March 2, 2004
  • Patent number: 6700625
    Abstract: An image processing apparatus and method in which image data stored in storage media of a plurality of different types or output by image signal generating sources of a plurality of different types can be reproduced simultaneously on the same monitor screen. Original image data provided by storage media or image signal generating sources of a plurality of types is converted to reduced image data representing pictures of reduced size. The original image data or the reduced image data is stored in a display memory in an arrangement capable of constructing a split-screen display. A plurality of frames of (reduced) image data read out of different storage media, etc. are stored in the display memory. These items of image data from the display memory are converted to image signals suitable for being displayed, and the image signals are applied to a monitor display unit.
    Type: Grant
    Filed: May 17, 1995
    Date of Patent: March 2, 2004
    Assignee: Fuji Photo Film Co., Ltd.
    Inventor: Tadashi Fujii
  • Patent number: 6700626
    Abstract: A video-apparatus includes a peaking filter (3-5), which, in response to applied video signals, supplies peaking signals (Vp) that are combined with the applied video signals. The peaking filter (3-5) includes a first (3) and a second (4) 1st-first order high-pass or band-pass filter in cascade configuration, while a unit (5, 6) for determining the peaking strength is arranged between the first (3) and second (4) filters.
    Type: Grant
    Filed: March 15, 2001
    Date of Patent: March 2, 2004
    Assignee: Koninklijke Philips Electronics N.V.
    Inventors: Jeroen Hubert Christoffel Jacobus Stessen, Christian Hentschel, Michel Wouter Nieuwenhuizen
  • Patent number: 6700627
    Abstract: A method of characterizing a video display, including the steps of providing a mathematical model of the display that relates code values to luminance output of the display, the model having a parameter that characterizes the display; displaying a reference patch and a test patch simultaneously on the display, the reference patch having a reference brightness produced by one or more luminances and the test patch having an test brightness produced by rapidly switching back and forth between two luminances; observing the display while varying one of the luminances keeping the others fixed, until the apparent brightness of the reference patch matches the apparent brightness of the test patch, and recording the code values employed to produce the luminances when a best match is made; and using the mathematical model, and the recorded code values to determine the value of the parameter that characterizes the display.
    Type: Grant
    Filed: March 15, 2001
    Date of Patent: March 2, 2004
    Assignee: Eastman Kodak Company
    Inventors: Jian Yang, Michael E. Miller
  • Patent number: 6700628
    Abstract: A device and method for controlling a brightness of an image signal in a moving picture transmission/reception system is disclosed. The present invention includes a control point detecting unit for receiving an image, calculating a Cumulative Density Function from two most significant bits of the image, dividing an axis into a required number of portions, and detecting a required number of control points. The present invention also includes an image signal brightness controlling unit for calculating and dividing six least significant bits of the image and a signal from the control point detecting unit for controlling a next frame of the image.
    Type: Grant
    Filed: May 8, 2000
    Date of Patent: March 2, 2004
    Assignee: LG Electronics Inc.
    Inventor: Sang Yeon Kim
  • Patent number: 6700629
    Abstract: When adjusting a free-running frequency of a voltage controlled oscillator, the video intermediate frequency processing apparatus receives a VIF-DEFEAT signal to a VIF-AMP to minimize gain of the VIF-AMP, and thereby, the VCO is placed into a free-running state. The VIF-DEFEAT signal is also used to turn off a switch, thereby preventing the detection result such as a weak electric field of a video detection signal by an IF-AGC circuit from being input into an AFT-DEFEAT circuit. Therefore, in an automatic frequency tuning circuit, it is possible to take a free-running frequency of the VCO converted into a direct current from a pad.
    Type: Grant
    Filed: November 16, 2000
    Date of Patent: March 2, 2004
    Assignee: Mitsubishi Denki Kabushiki Kaisha
    Inventor: Hiroki Miyamoto
  • Patent number: 6700631
    Abstract: A separation layer (120) is provided on a substrate (100), and a thin film device (140) such as TFT is formed thereon. Separation accelerating ions such as hydrogen ions are implanted into the separation layer (120) in the course of the process for forming the thin film device (140). After the formation of the thin film device (140), the thin film device (140) is preferably joined to a transfer material (180) through an adhesive layer (160), and irradiated with laser light from the substrate side. This causes separation in the separation layer (120) by using also the action of the separation accelerating ions. The thin film device (140) is separated from the substrate (100). This permits transfer of a desired thin film device to any substrate.
    Type: Grant
    Filed: October 22, 1999
    Date of Patent: March 2, 2004
    Assignee: Seiko Epson Corporation
    Inventors: Satoshi Inoue, Tatsuya Shimoda
  • Patent number: 6700632
    Abstract: To provide a reflection type liquid-crystal display device having an illuminator in front of the liquid-crystal display device, the illuminator having a light guide plate superior in light utilization efficiency, dots constituted by a plurality of small recess or protrusion portions for reflecting the light incident on the light guide plate toward the liquid-crystal display device are formed in or on a surface of the light guide plate which does not face the liquid-crystal display device. Each of the dots is set to have a substantially V-shape in section, the sectional inclination angle of the V-shape is set in a range of from 35 to 43°, and the sectional vertex angle of the V-shape is in a range of 70.6±2.5°.
    Type: Grant
    Filed: January 18, 2001
    Date of Patent: March 2, 2004
    Assignees: Hitachi, Ltd., Nitto Denko Corporation
    Inventors: Hitoshi Taniguchi, Yasuo Hira, Toshihiko Ariyoshi, Seiji Umemoto
  • Patent number: 6700633
    Abstract: Disclosed is a liquid crystal display device for realizing a large surface display screen. The liquid crystal display device has a light guiding plate formed at least at one portion of a light source for converting a light generated from the light source into a planar light having a uniform luminance and advancing in a first direction. Light control member composed of a semitransparent or an opaque material is formed between the light guiding plate and the light source for preventing the light from directly advancing in the first direction. With improvement of the structure of a light supply unit, the liquid crystal display device can have much simplified construction and be easily manufactured.
    Type: Grant
    Filed: December 31, 2001
    Date of Patent: March 2, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Chun-Hyun Cho
  • Patent number: 6700634
    Abstract: Light directional diffusing elements such as hologram elements are formed on the upper surface or lower surface of a light guide plate near the light source, and dots are formed of multiple small protrusions or small depressions on the light guide plate upper or lower surface to change the direction the light transmits from the input surface of the upper surface of light guide plate to a specified angle to irradiate towards a display element, to obtain a liquid crystal display technology for an easy to assemble backlit lighting device with greater brightness and fewer dark spots.
    Type: Grant
    Filed: February 25, 2002
    Date of Patent: March 2, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Hitoshi Taniguchi, Yasuo Hira, Tetsuo Suzuki
  • Patent number: 6700635
    Abstract: A pixel electrode is located in a pixel area defined by the intersections of the two adjacent gate lines and the two adjacent data lines, and has two linear openings extending in the transverse direction, which divide the pixel electrodes into three rectangular portions arranged in the longitudinal direction. The portions are connected in turn, and each portion of the pixel electrode has an X-shaped projection formed by the X-shaped member thereunder, and portions of the gate insulating film and the passivation film on the member. Since the gate insulating film and the passivation film are also located on the gate lines and the data lines, and the layered structure on the wires acts as peripheral projections of the pixel electrode. Each area enclosed by the projections, the openings and the peripheral projections is in a shape of equilateral trapezoid. The areas may be defined as the areas where the pixel electrode is in direct contact with the substrate.
    Type: Grant
    Filed: September 19, 2001
    Date of Patent: March 2, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Oh Kwag, Jang-Soo Kim, Kyung-Eun Lee, Dong-Gyu Kim
  • Patent number: 6700636
    Abstract: An LCD panel of high resolution (with decreased pixel pitch) and a method for manufacturing the same. In the LCD panel, the even numbered data lines are formed only up to the cell region of a substrate and then extended up to the pad region using conductive patterns. With the use of refracted conductive patterns, the even numbered data pads could be extended from the even numbered data lines and arranged parallel to the odd-numbered data pads along the longitudinal direction of odd-numbered data lines, thereby decreasing the pitch. Instead of using the conductive patterns, the even numbered data lines may be made longer than the odd numbered data lines in the pad region and may be refracted appropriately to arrange the even numbered data pads in parallel to the odd numbered data pads along the longitudinal direction of the odd numbered data lines.
    Type: Grant
    Filed: December 12, 2001
    Date of Patent: March 2, 2004
    Assignee: LG. Philips LCD Co., Ltd.
    Inventors: Woo Hyun Kim, Hong Suk Yoo
  • Patent number: 6700637
    Abstract: A liquid-crystal cell substrate constituted by a sheet which has a thickness in a range of from 0.1 to 1 mm and is made of a resin with a glass transition temperature of not lower than 130° C. and provided with light output means on one of upper and lower surfaces of the sheet so that light incident on a side surface is delivered out of the one of the upper and lower surfaces through the light output means. Liquid-crystal cells constituted by two cell substrates, and a liquid crystal enclosed in between the two cell substrates, wherein one of the two cell substrates is constituted by a liquid-crystal cell substrate. A liquid-crystal display device constituted by such liquid-crystal cells.
    Type: Grant
    Filed: May 23, 2000
    Date of Patent: March 2, 2004
    Assignee: Nitto Denko Corporation
    Inventors: Shuuji Yano, Seiji Umemoto
  • Patent number: 6700638
    Abstract: A liquid crystal display (LCD) is positioned with respect to electronic circuit components within a device so as to direct at least a part of thermal energy generated by and radiated from the electrical circuit components to the liquid crystal display.
    Type: Grant
    Filed: January 31, 2000
    Date of Patent: March 2, 2004
    Assignee: Nokia Mobile Phones Ltd.
    Inventor: Jaakko Nousiainen
  • Patent number: 6700639
    Abstract: A glass sheet for a liquid crystal display apparatus with a scribe groove formed thereon is divided by cooling the scribe groove and its surroundings and heating surrounding areas on both sides of the scribe groove to extend the scribe groove to a backside of the glass sheet, resulting in uniform distribution of residual stress on a cutting area. Also disclosed is a method for cutting a thin sheet of brittle material such as glass or ceramics by extending a scribe groove without deformation or impact so that peeling or cracking is reduced.
    Type: Grant
    Filed: February 26, 2001
    Date of Patent: March 2, 2004
    Assignee: Hitachi, Ltd.
    Inventors: Makoto Tatemura, Masashi Sawa, Katsumi Kobara
  • Patent number: 6700640
    Abstract: In a digital cinema system comprising a decoder and an auditorium manager, where the auditorium manager configured to sequence the presentation of scheduled programs, a method of cueing a theatre automation system is claimed. A cue command is received from the decoder. The cue command is configured to a format acceptable by the theatre automation system. The cue command is then relayed to the theatre automation system.
    Type: Grant
    Filed: March 2, 2001
    Date of Patent: March 2, 2004
    Assignee: Qualcomm Incorporated
    Inventors: Steven A. Morley, Juan Faus, Jesse Hose, Jason Reich
  • Patent number: 6700641
    Abstract: An exposure system includes a chamber and first and second temperature control units. The chamber contains a body of an exposure apparatus which forms a pattern on a substrate. The firs temperature control unit is mounted separate from the body of the exposure apparatus, and controls a temperature of a fluid taken through the body of the exposure apparatus. The second temperature control units is arranged between the body of the exposure apparatus and the first temperature control unit, and controls the temperature of the fluid taken through the first temperature control unit. The second temperature control unit also supplies the fluid to the body of the exposure apparatus. The ability of the second temperature control unit is designed differently from the ability of the first temperature control unit in terms of a magnitude of a temperature range within which the temperature of the fluid changes.
    Type: Grant
    Filed: November 2, 2001
    Date of Patent: March 2, 2004
    Assignee: Nikon Corporation
    Inventor: Naomasa Shiraishi
  • Patent number: 6700642
    Abstract: A laser exposure apparatus including a laser oscillator (1) for oscillating laser beam having a circular section, a beam expander (4) for enlarging the laser beam oscillated from the laser oscillator, a square mask (6) for shaping the laser beam having the circular section enlarged by the beam expander into a square section and an optical system for contracting the laser beam formed into the square section by the square mask. Even when a very small identification code is attached to a wafer, the identification code can be marked to improve reading recognizability of the identification code.
    Type: Grant
    Filed: November 1, 2001
    Date of Patent: March 2, 2004
    Assignee: Toray Engineering Company, Limited
    Inventors: Masaki Mori, Hiroyuki Nakagawa
  • Patent number: 6700643
    Abstract: To expose the peripheral area of a film with high precision while the film is being transported, even if the peripheral area of the film has an arch or a fold, the edge of a copper foil on a TAB strip is determined by way of an optical detector which includes a light projection section and a light receiving section. The sliding base and the projection lens unit are moved such that the amount of light received by the light receiving part is constant. Ultraviolet light is concentrated on the peripheral area of the copper foil of the TAB strip, by which the peripheral area is exposed. The projection lens unit is provided with a nozzle from which air is blown onto the area of the TAB strip which is undergoing peripheral area exposure. This area is pressed by the pressure of the air against the surface of the carrier so that the peripheral area of the TAB strip can be made planar even if the strip has an arch or a fold.
    Type: Grant
    Filed: December 21, 2001
    Date of Patent: March 2, 2004
    Assignee: Ushiodenki Kabushiki Kaisha
    Inventors: Yoshiki Mimura, Kazumoto Tochihara
  • Patent number: 6700644
    Abstract: A condenser for a photolithography system, in which a mask image from a mask is projected onto a wafer through a camera having an entrance pupil, includes a source of propagating radiation, a first mirror illuminated by the radiation, a mirror array illuminated by the radiation reflected from said first mirror, and a second mirror illuminated by the radiation reflected from the array. The mirror array includes a plurality of micromirrors. Each of the micromirrors is selectively actuatable independently of each other. The first mirror and the second mirror are disposed such that the source is imaged onto a plane of the mask and the mirror array is imaged into the entrance pupil of the camera.
    Type: Grant
    Filed: June 5, 2002
    Date of Patent: March 2, 2004
    Assignee: EUV LLC
    Inventor: William C. Sweatt
  • Patent number: 6700645
    Abstract: A projection optical system (20), exposure apparatus (10) incorporating same, and methods pertaining to same, for manufacturing devices and elements, such as integrated circuits, crystal displays, detectors, MR (magneto-resistive) heads, and the like. The projection optical system comprises a first lens group (G1) having positive refractive power, a second lens group (G2) having negative refractive power, a third lens group (G3) having positive refractive power, a fourth lens group (G4) having negative refractive power and a least a first aspherical surface (ASP1), and a fifth lens group (G5) having positive refractive power and an aperture stop (AS). The projection optical system is designed such that paraxial rays traveling parallel to optical axis (A) imagewise to objectwise intersect the optical axis at a location (Q) between the fourth lens group and the fifth lens group.
    Type: Grant
    Filed: November 28, 2000
    Date of Patent: March 2, 2004
    Assignee: Nikon Corporation
    Inventor: Koji Shigematsu
  • Patent number: 6700646
    Abstract: A lithographic projection apparatus is provided with a sensor for detecting luminescence radiation produced in the projection lens system by the passage of the projection beam. The luminescence radiation is indicative of the dose delivered to the substrate, and can be detected close to the substrate to avoid errors due to transmission variations in the optical path from the radiation source to the substrate.
    Type: Grant
    Filed: February 13, 2002
    Date of Patent: March 2, 2004
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Catharinus Hubertus Mulkens, Paul Van Der Veen
  • Patent number: 6700647
    Abstract: An exposure system of a semiconductor wafer and a method for operating the same capable of preventing defects in a photolithographic process. The exposure system of a semiconductor wafer comprises first and second shutters for opening or closing a light source, first and second sensing circuits for sensing the positions of the first and second shutters to generate first and second sensed signals, a controller for determining whether the first and second shutters are completely opened in response to the first and second sensed signals and for generating a control signal when the first and second shutters are not completely opened.
    Type: Grant
    Filed: May 30, 2002
    Date of Patent: March 2, 2004
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Jin-muk Kim
  • Patent number: 6700648
    Abstract: In a method for controlling a processing apparatus, an error value between an input value of the processing apparatus for processing a subject to be processed, and a measurement value obtained by measuring the subject being processed is obtained. A correction value is computed for correcting the input value of the processing apparatus in the direction of decreasing the error value, and the values are managed as processing data to be utilized in computing a next correction value. Previous processing data having a history identical to that of the subject loaded to the processing apparatus is searched, and a current bias correction value is predicted from a plurality of most recent correction values having the identical history. Also, a current random correction value is predicted by means of a neural network on the basis of a plurality of most recent random correction values. The predicted bias correction value is summed with the random correction value as a current correction value of the processing apparatus.
    Type: Grant
    Filed: February 12, 2002
    Date of Patent: March 2, 2004
    Assignee: Samsung Electronics, Co., Ltd.
    Inventors: Kyoung Shik Jun, Chan Hoon Park, Yil Seug Park, Bong Su Cho, Hyun Tai Kang, Jae Won Hwang, Young Ho Jei
  • Patent number: 6700649
    Abstract: A photolithography lens system is disclosed. The system has several elements all perpendicularly aligned to an optical axis. The elements include a light source that generates an exposing light, a first lens that has a front focal plane and a pupil plane, and a binary mask between the light source and the first lens. The binary mask is placed at the front focal plane of the first lens. A pupil filter is placed at the pupil plane. Finally, a second lens is provided that has a front focal plane at substantially the same position as the pupil plane. The second lens also has a back focal plane where a semiconductor wafer is placed.
    Type: Grant
    Filed: October 2, 2002
    Date of Patent: March 2, 2004
    Assignee: Intel Corporation
    Inventors: Manish Chandhok, Brandon C. Barnett
  • Patent number: 6700650
    Abstract: A holder for exposing both faces of a panel to light in order to make a double-sided printed circuit using first and second flexible artworks. The holder has a first frame with no transparent plane support member for receiving the first flexible artwork, and a second frame with no transparent plane support member for receiving the second flexible artwork. The holder includes a system for positioning and fixing the peripheries of the artworks to their respective frames. The holder further includes a mechanism for positioning and holding the panel between the frames. There is an approach mechanism for causing the frames to move towards the faces of the panel. There is also a system for establishing suction in the volume defined between the frames having the panel therebetween.
    Type: Grant
    Filed: March 28, 2002
    Date of Patent: March 2, 2004
    Assignee: Automa Tech
    Inventors: Alain Sorel, Christophe Cousin
  • Patent number: 6700651
    Abstract: A distance/defocus device has a plurality of areas in an observing frame, and time sequentially determines the distance to an object or an amount of defocus for each area by performing a correlation calculation while shifting images of the object with respect to each other. The calculation time can be reduced by determining a shift range of the correlation calculation for subsequent areas on the basis of the result of the correlation calculation for a previous, predetermined area.
    Type: Grant
    Filed: April 11, 2002
    Date of Patent: March 2, 2004
    Assignee: Canon Kabushiki Kaisha
    Inventor: Hideo Taka
  • Patent number: 6700652
    Abstract: The invention of a Low-Cost alternating color-pulse digital particle-image velocimetry DPIV (Digital Particle Image Velocimetry) system is proposed. In the proposed system Low-Cost basic equipments are used such as a continuous-wave laser in mixed mode, a CCD (Charge Couple Device) camera, a PMT (Photo-Multiplier Tube), an image-processing card, a PC (personal computer) etc., with an add-on alternating-color planar laser-sheet generating facility to achieve the purpose of DPIV (Digital Particle Image Velocimetry) of planar velocity measurements. With the add-on facility, the laser beam from the continuous-wave laser operated in mixed mode is turned into a planar laser sheet with alternating color at a designated frequency. The CCD (Charge Couple Device) camera captures the alternating-color images of the flow field seeded with small particles.
    Type: Grant
    Filed: July 20, 2001
    Date of Patent: March 2, 2004
    Assignee: National Science Council
    Inventors: Yei-Chin Chao, Chih-Yung Wu, Yung-Li Chang
  • Patent number: 6700653
    Abstract: Systems and methods for laser capture microdissection are disclosed. An inverted microscope includes an illumination/laser beam delivery system that is adapted to both illuminate a sample and provide energy for laser capture microdissection of the sample. The systems and methods provide the advantages of increased speed and much lower rates of contamination.
    Type: Grant
    Filed: October 17, 2002
    Date of Patent: March 2, 2004
    Assignee: Arcturus Engineering, Inc.
    Inventors: Thomas M. Baer, Mark A. Enright, David F. Head, Christopher E. Todd
  • Patent number: 6700654
    Abstract: A monitoring system useful for monitoring the state of a fiber communication channel in which a portion of the fiber signal is tapped and detected by a photodiode. The dark current of the photodiode and other DC offsets of the system may be compensated by passing a known signal through the photodiode and extracting the component due to the known signal. The known signal may be a locally generated optical signal having a predetermined harmonic signature. Optionally, the fiber signal may be selectively attenuated before being combined with the known signal so only the known signal is detected. The known signal may also be a dark signal induced by selectively attenuating the fiber signal. The system may include a temperature sensor which allows the compensation to be performed against stored temperature dependent compensation values while the fiber signal is not attenuated.
    Type: Grant
    Filed: February 15, 2001
    Date of Patent: March 2, 2004
    Assignee: Corning Incorporated
    Inventors: Kevin S. Gerrish, Scott T. Hilbert
  • Patent number: 6700655
    Abstract: Optical fiber characteristic measuring device comprising a coherent light supply device, a light pulse generating device, a wave mixing device, a opto-electrical converting device, and a processing device, is provided such that parts have the frequency characteristic for corresponding to low frequency component for an opto-electrical converting device and a processing section so as to reduce the cost of the circuits.
    Type: Grant
    Filed: April 24, 2002
    Date of Patent: March 2, 2004
    Assignee: Ando Electric Co., Ltd.
    Inventors: Haruyoshi Uchiyama, Yoshiyuki Sakairi
  • Patent number: 6700656
    Abstract: An optical system, consisting of drop-reflection image, reflection-refracted shadowgraphy and top-view photography, is used to measure the spreading and instant dynamic contact angle of a volatile-liquid drop on a non-transparent substrate. The drop-reflection image and the shadowgraphy is shown by projecting the images of a collimated laser beam partially reflected by the drop and partially passing through the drop onto a screen while the top view photograph is separately viewed by use of a camera video recorder and monitor. For a transparent liquid on a reflective solid surface, thermocapillary convection in the drop, induced by evaporation, can be viewed nonintrusively, and the drop real-time profile data are synchronously recorded by video recording systems. Experimental results obtained from this technique clearly reveal that evaporation and thermocapillary convection greatly affect the spreading process and the characteristics of dynamic contact angle of the drop.
    Type: Grant
    Filed: September 17, 2002
    Date of Patent: March 2, 2004
    Assignee: The United States of America as represented by the Administrator of National Aeronautics and Space Administration
    Inventors: David F. Chao, Nengli Zhang
  • Patent number: 6700657
    Abstract: A method for characterizing a surface are disclosed. The system includes a light source optic which direct a beam of light toward the surface. Scattered light and a spectacular beam are reflected from the surface. A collector collects the scattered light and directs the scattered light to a detector. The detector measures the intensity of the scattered light. A shutter is advanced into position to intersect the scattered light and to block a segment not having substantially any anisotropic light scatter. The shutter further passes another segment having substantially all of the anisotropic light scatter. The detector measures the intensity of the passed segment. A roughness ratio indicative of the anisotropic roughness to the isotropic roughness is produced by evaluating the total intensity of the scattered light and the intensity of the passed segment.
    Type: Grant
    Filed: May 10, 2002
    Date of Patent: March 2, 2004
    Assignee: Schmitt Measurement Systems, Inc.
    Inventor: Mark E. Southwood
  • Patent number: 6700658
    Abstract: The present invention captures images of a circuit chip with a time delay integration or TDI sensor. The circuit chip is on a movable stage which moves at the same rate at which the TDI sensor clocks. A pulsed laser is directed toward the circuit chip and activated in synchronisation with the clock rate of the TDI sensor such that laser is activated when the TDI sensor is imaging the object and the laser is deactivated when the TDI sensor is transferring its charge.
    Type: Grant
    Filed: October 5, 2001
    Date of Patent: March 2, 2004
    Assignee: Electro Scientific Industries, Inc.
    Inventor: Patrick F. Leonard
  • Patent number: 6700659
    Abstract: The operability of light-based semiconductor die analysis is enhanced using a method and arrangement that can detect light leakage between a light source and a die. In one example embodiment of the present invention, a light source is directed to a semiconductor analysis arrangement using, for example, a fiber optic cable. The analysis arrangement is adapted to use light from the light source for analyzing the die. A light detection arrangement detects a condition of light leakage from the system and generates a signal representing the condition of light leakage. The generated signal can then be used to control the semiconductor analysis arrangement, such as by deactivating the light source in response to a detected leak, or by allowing the light source to function in response to not detecting a leak.
    Type: Grant
    Filed: April 19, 2001
    Date of Patent: March 2, 2004
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Srikar V. Chunduri, Glen P. Gilfeather, Brennan V. Davis, David H. Eppes, Victoria Bruce, Michael Bruce, Rosalinda M. Ring, Daniel Stone
  • Patent number: 6700660
    Abstract: A method and apparatus for spectrochemical analysis of liquids, including molten materials, using laser-induced plasma spectroscopy. The apparatus preferably comprises a high power pulsed laser focused on the surface of a liquid stream flowing in a measurement cell, and an optical spectrometer-detector assembly, which receives, detects and analyzes the radiation emitted by the high temperature plasma thereby excited. The measurement cell, and optional pump, establish a steady flow of liquid, thereby permitting the laser to repeatedly sample a fresh unperturbed surface, representative of the liquid volume, while also ensuring that bubbles and waves formed in the liquid are removed from the focal volume. Gas (usually air) blown above the liquid prevents aerosols and matter ejected from the sample responsive to the incident energy from interacting with subsequent laser pulses, and from accumulating on the optics.
    Type: Grant
    Filed: February 8, 2002
    Date of Patent: March 2, 2004
    Assignees: Noranda Inc., National Research Council of Canada
    Inventors: Mohamad Sabsabi, Rene Heon, John M. Lucas
  • Patent number: 6700661
    Abstract: The present invention provides a method of calibrating the wavelength of a target instrument, based on a calibration model developed for a primary instrument. The method comprises: (a) obtaining a reference set of at least two wavelength calibration parameters for the primary instrument; (b) obtaining a target set of at least two corresponding wavelength calibration parameters for the target instrument; (c) measuring a reference spectral response of a sample with the primary instrument; (d) measuring a target spectral response of the sample with the target instrument; (e) iteratively adjusting the target set of wavelength calibration parameters; (f) for each target set of wavelength calibration parameters, determining spectral residuals corresponding to that target set; and (g) selecting an optimum set of wavelength calibration parameters based on the spectral residuals for each target set of wavelength calibration parameters.
    Type: Grant
    Filed: April 15, 2002
    Date of Patent: March 2, 2004
    Assignee: CME Telemetrix, Inc.
    Inventors: Theodore E Cadell, Geng Lu
  • Patent number: 6700662
    Abstract: An improved instrument and method are provided for particulate characterization in combustion exhausts. An instrument for measuring particles of combustion exhausts includes a laser for producing a high intensity laser pulse. A sample cell receives a combustion exhaust input and the high intensity laser pulse. At least one detector detects a signal generated by particles in said received combustion exhaust input. The detected signal includes laser induced incandescence (LII). Signal conditioning electronics is coupled to the detector and particle data is displayed during transient operation of a combustion engine. Data related to mass concentration, number density, and particle size of particles in the received combustion exhaust input is measured and displayed.
    Type: Grant
    Filed: January 22, 2001
    Date of Patent: March 2, 2004
    Assignee: The University of Chicago
    Inventors: Sreenath B. Gupta, Ramanujam Raj Sekar
  • Patent number: 6700663
    Abstract: An amorphous silicon thin film is formed on a substrate first. Then the thin film is irradiated by a laser plus having an irradiation interval along a first direction to re-crystallize the thin film into a polysilicon thin film. A light source is thereafter focused into a micro spot having a diameter smaller than the irradiation interval, and the polysilicon thin film is irradiated by the micro spot moving along the first direction and having a relative moving distance to obtain a spectrum.
    Type: Grant
    Filed: January 21, 2003
    Date of Patent: March 2, 2004
    Assignee: AU Optronics Corp.
    Inventor: Kun-chih Lin
  • Patent number: 6700664
    Abstract: An optical channel monitoring device uses a linear variable filter (LVF) disposed in the path of a beam of light for selectively transmitting light in a variable manner along a length of the filter, a photodetector array positioned in the path of light transmitted through the LVF for measuring spectral characteristics of the transmitted light, and collimating means disposed between the input port and the LVF for collimating said beam of light. The device is a low-cost, compact and rugged high-resolution spectrometer for various uses.
    Type: Grant
    Filed: August 15, 2002
    Date of Patent: March 2, 2004
    Assignee: JDS Uniphase Corporation
    Inventors: Tokuyuki Honda, Yevgeniy Churin, Long Yang
  • Patent number: 6700665
    Abstract: Interferometric apparatus and methods by which the local surface characteristics of photolithographic mirrors or the like may be interferometrically measured in-situ to provide correction signals for enhanced distance and angular measurement accuracy. Surface characterizations along one or multiple datum lines in one or more directions may be made by measuring the angular changes in beams reflected off the surfaces during scanning operations to determine local slope and then integrating the slope to arrive at surface topology. The mirrors may be mounted either on the photolithographic stages or off the photolithographic stages on a reference frame.
    Type: Grant
    Filed: August 13, 2002
    Date of Patent: March 2, 2004
    Assignee: Zygo Corporation
    Inventor: Henry Allen Hill
  • Patent number: 6700666
    Abstract: In order to probe an object in motion subject to surface displacement, for example, caused by ultrasonic wave propagation, a laser beam is split into a first portion and a second portion. The first is scatted off the object to generate a signal beam. The frequency shift produced in the signal beam due to motion of the object is measured, and this is used to adjust the frequency of one or both portions of the laser beam so that both beams have substantially the same frequency. The surface displacements are measured by comparing the second portion of the laser beam and the signal beam after frequency adjustment.
    Type: Grant
    Filed: April 24, 2002
    Date of Patent: March 2, 2004
    Assignee: National Research Council of Canada
    Inventors: Alain Blouin, Denis Drolet, Jean-Pierre Monchalin, Christian Padioleau
  • Patent number: 6700667
    Abstract: A scanning exposure apparatus and method thereof for maintaining a desired shape of a shot area exposed on a photosensitive substrate where an angle formed by the mirrors of interferometric systems for measuring the position of a stage and/or the angle formed by the running direction of a wafer stage and a reference mark plate is changed. A reticle on a reticle minute drive stage is scanned relative to an illuminated region and a wafer on a Z&thgr;-axis drive stage is scanned relative to an exposure region in synchronization with the scanning of the reticle. Thus, a shot area SA on the wafer is exposed to light carrying a pattern image of the reticle. The angle of rotation of a mirror facing in the non-scanning direction of the Z&thgr;-axis drive stage is calculated based on measurement values of two interferometers. The angle of rotation of a mirror facing in the non-scanning direction of the reticle minute drive stage is calculated based on measurement values of two interferometers.
    Type: Grant
    Filed: July 6, 1999
    Date of Patent: March 2, 2004
    Assignee: Nikon Corporation
    Inventor: Kenji Nishi
  • Patent number: 6700668
    Abstract: A method for optical part shape measurement of a bare metal part to determine acceptability of the manufactured part. A variable level light source illuminates the part which is mounted on positioning equipment that allows the part to be moved from one position to another. Localized variations in light level are first determined and are compared with a reflectivity model of the part to determine optimization of the setup. Light level and viewing orientation of the part are adjusted to optimize the quality of test data obtained. Data quality is reviewed to ascertain a confidence factor for each location on the part's surface. Using both the reflectivity model and quality test results, data acquired for specified areas of the part is either accepted or rejected. Light level and part orientation are changed based upon how a reflectivity map of the part changes with each adjustment. New and acceptable data are now acquired for those areas of the part where data was previously discarded.
    Type: Grant
    Filed: June 25, 2002
    Date of Patent: March 2, 2004
    Assignee: General Electric Company
    Inventors: Joseph LeGrand Mundy, Kevin George Harding, Joseph Benjamin Ross, Thomas Watkins Lloyd
  • Patent number: 6700669
    Abstract: A three-dimensional imaging method and system illuminates an object to be imaged with a light pattern that is formed from two or more light sub-patterns. The sub-patterns can each encompass the visible light spectrum or can be spatially varying intensity sub-patterns that each correspond to a red, green, or blue component. The light pattern is generated by a slotted planar member or an optical filter.
    Type: Grant
    Filed: January 29, 2001
    Date of Patent: March 2, 2004
    Inventor: Zheng J. Geng
  • Patent number: 6700670
    Abstract: A metrology process, in accordance with the present invention, measures the dishing of a feature, such as a copper, aluminum, or tungsten metal line, with respect to another feature, such as a dielectric layer, that surround the first feature by measuring the relative heights of varying line widths of the first feature with respect to the second feature. The relative heights are adjusted to correspond to the actual dishing value using a calibration point of a calibration line width and a calibration dishing value. The metrology process is useful, for example, after the metal and dielectric materials undergo a polishing process, e.g., CMP, to approximately planarize the surface. The calibration data provides a dishing value at a specific, relatively, small line width. The relative heights of various line widths are measured on production substrates. These relative heights are plotted as a function of line width. The curve is then extrapolated to the line width used during calibration.
    Type: Grant
    Filed: May 23, 2000
    Date of Patent: March 2, 2004
    Assignee: Nanometrics Incorporated
    Inventor: Jaime Poris
  • Patent number: 6700671
    Abstract: A collimator lens 13 converts a light transmitted from a light source 11 into an almost parallel light. A light receiving lens 14 receives the almost parallel light including a shadow 24 of a measurement object 23. A one-dimensional image sensor 17 receives a light passing through a diaphragm 15. A two-dimensional image sensor 19 receives a light split by a beam splitter 16 through a second diaphragm 18. A signal processing section 20 obtains an outside dimension and a monitor image of a measured portion of the measurement object 23 by processing electric signals sent respectively from the image sensors 17 and 19. A display section 21 displays the outside dimension and the monitor image of the measured portion of the measurement object 23.
    Type: Grant
    Filed: October 10, 2001
    Date of Patent: March 2, 2004
    Assignee: Keyence Corporation
    Inventor: Yuji Akishiba
  • Patent number: 6700672
    Abstract: A method, using a filter function, generates an anti-aliased discrete image from a continuous image including an edge. The method defines a line sample. A progressive convolution is derived from the filter function and the line sample. A pixel at a predetermined location in the discrete image is selected, and the line sample is oriented with respect to the selected pixel. A distance is measured from a point in the continuous image corresponding to the selected pixel to the edge along the oriented the line sample. The progressive convolution is evaluated at the measured distance to produce a weighted coverage value, and the weighted coverage value is associated with the pixel to anti-alias the pixel in the discrete image.
    Type: Grant
    Filed: July 30, 1999
    Date of Patent: March 2, 2004
    Assignee: Mitsubishi Electric Research Labs, Inc.
    Inventors: Thouis R. Jones, Ronald N. Perry, Robert M. Kotredes
  • Patent number: 6700673
    Abstract: An image-reading apparatus is provided with a plurality of buffer units between an image-reading unit 6c for reading an image on paper P fed one after another consecutively and an interface 8 for outputting an image data to a host computer 9. The image-reading apparatus suspends feeding of the paper P and reading of the image, and stops operation of its own after all of the image data is output from the buffer unit wherein the image data is written, when operation of a scanner is stopped or temporarily suspended. The invention can thus provide the highly reliable image-reading apparatus that is capable of outputting the entire image data it reads from the original paper without losing it, even if the operation is terminated in the midst of a continuous reading.
    Type: Grant
    Filed: December 16, 1999
    Date of Patent: March 2, 2004
    Assignee: Matsushita Electric Industrial Co., Ltd.
    Inventors: Takeyasu Saito, Hironori Tomooka
  • Patent number: 6700674
    Abstract: A facsimile apparatus is capable of automatically transmitting image data through two communication routes, a communication route via an internet and a public communication switched network. The facsimile apparatus has the capability of establishing a priority order for transmitting data through the two communication routes. In a normal transmission, the data will be transmitted through the highest priority communication route. In another mode, if communication cannot be made through the first communication route, normally the highest priority communication route, the system will automatically attempt to transmit the data through the second communication route. In a final mode, when it is determined that a transmission is urgent, the apparatus executes a two-route transmission operation. In the two-route transmission operation, if e-mail is the highest priority, the apparatus transmits the data together with e-mail to a personal computer of the addressee via the internet.
    Type: Grant
    Filed: October 16, 1998
    Date of Patent: March 2, 2004
    Assignee: Brother Kogyo Kabushiki Kaisha
    Inventors: Shuji Otsuka, Fumihiro Minamizawa, Satoshi Matsushita
  • Patent number: 6700675
    Abstract: An image formation apparatus to ensure provision of sheets used in a host mode process and a guest mode process without increasing the number of sheet cassettes to be mounted at a sheet feed unit and to prevent tedious task due to increase in the sheet feed frequency is provided. In the image formation apparatus, the main CPU identifies the accommodated number of sheets n in the sheet cassette every time one copy mode image formation process ends. This value n is compared with a set value of the number of sheets N read out via a sub CPU. When value n is equal to or less than value N, the copy mode image formation process is interrupted until the sheet cassette is replenished with sheets while waiting for input of image data associated with the guest mode image formation process. When image data associated with the guest mode image formation process is input from an external device during this period, the guest mode image formation process is executed.
    Type: Grant
    Filed: October 4, 1999
    Date of Patent: March 2, 2004
    Assignee: Sharp Kabushiki Kaisha
    Inventor: Hiranaga Yamamoto