Abstract: A system for sensing and displaying lens data for a cinematography zoom lens and camera in real time. A plurality of sensors are connected to the lens for producing signals continually representing the present positions of focus, zoom and T-stop setting rings of the lens. A range finder is positioned adjacent the lens for producing a signal representing the distance from the lens to an object located in front of the lens. A printed circuit board with a microprocessor receives and processes the signals and has a memory with data representing the focus, zoom and T-stop characteristics of that lens. A display device is positioned adjacent the lens and selectively displays indicia representing the positions of the focus, zoom and T-stop settings, the distance to the object and the depth of field.

Abstract: A DD converter circuit 109 for interpolating a digital video signal which is locked to a 14.3-MHz burst clock to convert the sampling data so as to be locked to a 13.5-NHz free-run clock, and a frame memory circuit 110 for writing a digital video signal which is output by the DD converter circuit 109 on the 14.3-MHz burst clock as well as reading the written digital video signal on a 13.5-MHz clock S112 are included. Therefore, a video signal processor which can realize the rate conversion of the digital video signal without using an analog PLL circuit can be provided.

Abstract: A communication system is desccribed which comprises a transmitter which transmits a standard broadcast format with an associated text string and a receiver for the reception and processing of the standard broadcast format and associated text string. The associated text string has close caption text in addition to other program or station specific text. The other program or station specific text is separated from the associated text string, decoded, processed and stored in function specific memories. When one changes a channel, or presses a button on a remote or has programmed in specific information requested, the program or station specific text is displayed. This text may be displayed on the televison screen with the picture, or it may be displayed on a separate display.

Abstract: Disclosed is a method and apparatus for transmission of audio signals over a dedicated video transmission line in which the analog audio signal is inserted into and becomes a part of the video signal. Samples of the audio signal are inserted into the active video line, either at the beginnings or endings, or both, of each active video line scan signal. A defined amount of the active video interval is reserved from the active video line, and is replaced with samples of the analog audio signal. An analog switch in the modulator of the invention toggles to pick up the samples of audio and place them at the designated location (either at the beginnings or at the ends) of each active video line scan signal. A corresponding switch in the demodulator of the invention toggles to retrieve the audio samples from the active video line scans for output to the user. Stereo and/or bi-directional audio signals can be transmitted by insertion into both the beginnings and the endings of the active video line scan signals.

Abstract: The present invention is generally directed to automated methods and systems for converting image streams having a first frame rate to a second frame rate without the need for user intervention. Embodiments of the present invention obviate the effects of processing of a telecine process. In one embodiment, where frames are encoded by a single video field, a statistical analysis of the differences between adjacent frames reveals a telecine pattern, thereby identifying which frames to remove. In another embodiment, where frames are encoded by even and odd video fields, which are interleaved to produce the frame, a statistical analysis of the differences between adjacent fields reveals the telecine pattern, identifies which frames to remove, and identifies frames that are candidates for re-interleaving.

Abstract: The invention relates to the insetting of a moving picture in a moving main picture when the picture signals are in an encoded digital format. The main idea is that the picture signals are combined prior to decoding. The frames of the picture to be inset are scaled down by reducing the number of macro blocks in them in such a manner that the picture whole is retained. The macro blocks of a certain area of the main picture are replaced by the macro blocks of the reduced picture and the combined video signal is decoded. The video signals (ES1, ES2) to be combined may be picked up from different sources or extracted from a transport stream where they are in packets. The system according to the invention requires only a single decoder (210), which considerably reduces the amount of computation required by the combination of the pictures. The advantage is emphasized if there are several pictures to be combined.

Abstract: A method for independently controlling hue or saturation of individual colors in a real time digital video image, without affecting the hue or saturation of any other color in the same real time digital video image.

Abstract: A method of mounting a volume from a tape medium on a tape drive apparatus. The method reads a bar-code indicating the volume from a tape cartridge, attaches the tape cartridge to a tape drive, and detects the current track position on the basis of a longitudinal track. The method then determines whether a beginning volume label or a last used area volume label is nearer to the current track position, reads the nearer volume label from the tape medium, confirms the volume by comparing the nearer volume label with the bar-code, and mounts the volume onto the tape drive.

Abstract: In a display driving method, noise is added (NG, AD) to a video signal before the video signal is subjected to a dithering operation (DC). The invention is preferably applied to render non-moving dither patterns invisible in a plasma display panel driving method in which the display signal is subjected to a (Floyd-Steinberg) dithering.

Abstract: An apparatus for displaying a digital video signal includes a shade reflection ratio calculator and a brightness compensator. The shade reflection ratio calculator calculates a shade reflection ratio r of each pixel per display clock using a linear distance function between a center pixel and a current pixel on a screen. The brightness compensator compensates brightness of each pixel by applying the shade reflection ratio value r and a brightness adjustment width Yrate to an input digital video signal. Thus, it is possible to improve picture quality of a video displayed on a screen.

Abstract: A system supplies a compressed digital signal to a digital television receiver and includes a source of compressed baseband signal. An encoder encodes the baseband signal in a digital format, and the baseband signal has a frequency. The frequency of the encoded baseband signal is shifted by a first frequency shifter. A first interpolator interpolates an output of the first frequency shifter, a second interpolator that interpolates an output of the first interpolator, and a third interpolator that interpolates an output of the second interpolator. A second frequency shifter shifts a frequency of an output of the third interpolator to produce a signal at a selected channel.

Abstract: A tuner for receiving a video broadcast signal comprises commendable circuits (6, 7, 8, 17) to select a tuned frequency, the tuner comprising a bus interface (21) receiving data bytes and among those data bytes, bytes representing a divider ratio N, and address bytes. Bytes received by the bus interface (21) are processed through a N divider comparator (23) comparing the value of divider ratio N received from the bus interface (21) to values stored in a register (24), the comparator (23) outputting address bytes and data bytes to be sent to the commendable circuit (6, 7, 8, 17) of the tuner to select a band and a tuned frequency. The tuner may be implemented on a chassis of a receiver without modification of an existing software included with a microprocessor of the chassis. The values stored in the register (24) are customized values of the tuner.

Abstract: A tuning system and a tuning method in a broadcast signal receiver, in which a radio frequency (RF) spectrum signal adopting an inverting method is filtered by an asymmetric bandpass filter of a tuner to improve the receiving sensitivity. This tuning system includes a first mixer, a filter and a second mixer. The first mixer mixes a predetermined oscillation frequency with an inverted 8 VSB digital broadcast signal in the idle space between upper and lower normal NTSC broadcast signals of high frequency band received from a transmitter, transfers the upper NTSC broadcast signal to the lower side and the lower NTSC broadcast signal to the upper side, inverts the transferred NTSC broadcast signals, and changes the state of the 8 VSB digital broadcast signal into a normal state. The filter attenuates the inverted upper and lower NTSC broadcast signals output from the first mixer to a predetermined band and amplifies the normal 8 VSB digital broadcast signal into a predetermined band.

Abstract: A system includes a shutter which selectively allows access to an infrared detector, when accessed directly by a processor-based system, such as a set-top computer system. In this way, infrared commands may be blasted from a set-top computer system to an appliance, e.g., a television receiver, without interference from other remote control units. When the controlling device is not sending signals to the television receiver, the shutter may allow other remote control units to control the appliance. The shutter may be a voltage controlled liquid crystal shutter, whose transmissivity is a function of the applied voltage.

Abstract: A pair of storage capacitor electrodes are extended along a data line to provide storage capacitance along the data line. One of the storage capacitor electrodes is a metal electrode which partially overlaps the data line. Light can thereby be shielded in a region between the data line and a pixel electrode while forming a storage capacitor. The other storage capacitor electrode is positioned so as to avoid overlapping the data line, thereby suppressing coupling between the data line and the other storage capacitor electrode.

Abstract: In a liquid crystal display device having a thin film transistor in a pixel region thereof, the present invention arranges a semiconductor layer being located under a source electrode in the thin film transistor within a contour of a gate line (or a gate electrode of the thin film transistor) so as to suppress a photo conductive current in the semiconductor layer, or to prevent the source electrode from being broken at a position where the source electrode gets over the semiconductor layer.

Abstract: A frame is disclosed for retaining an LCD panel with a liquid crystal material interposed between two glass substrates disposed so as to face each other. The frame has a frame body for placing the panel, an arm oscillatably attached in a planar direction to the frame body, and a stopper formed at the arm so as to be protruded from the frame body and restrict the movement of the planar member in a planar direction.

Abstract: There is provided an illuminator having a planar light source unit having reflectance of from 50 to 90% with respect to light in a state in which the light is emitted from a light source provided separately from the planar light source and incident on the planar light source unit, and a reflective type polarizer disposed on a light exit side of the planar light source unit so that a reflected light component and a transmitted light component of polarized light can be obtained from natural light incident on the reflective type polarizer. There is provided a liquid-crystal display device having an illuminator defined above, and a liquid-crystal display panel disposed on an upper side of the reflective type polarizer in the illuminator.

Abstract: A liquid crystal display is provided that includes a first substrate including a thin film transistor and a storage capacitor, a second substrate including a color filter layer with a recess at a location opposite to the storage capacitor, a common electrode on the color filter layer, and a liquid crystal layer between the first and second substrates. Spacers are provided between the first and second substrates to maintain a gap therebetween. In regions that include the storage capacitor, the recess compensates for a height difference in layers forming the capacitor on the first substrate to maintain a substantially uniform liquid crystal layer thickness over the whole region of the liquid crystal display, and thus provides a high quality picture.

Abstract: When transparent substrates 110 and 120 are compression-bonded via a sealing member 130, conductive particles 132 formed to be slightly larger break through relatively soft alignment layers 113 and 123 to become in contact with both inner end portions 111c and outer end portions 121c, and in this state, the sealing member 130 is cured.

Abstract: A liquid crystal display device includes a first substrate, a dry alignment film deposited over the substrate, a second substrate coupled to the first substrate with the dry alignment film deposited over the second substrate therebetween and forming a cell gap, and a liquid crystal material formed in the cell gap. The dry alignment film allows for a truly vertical alignment of molecules of the liquid crystal material such that the molecules form an angle of substantially 90° relative to the substrate. The dry alignment film can be an oxide layer, a nitride layer, an oxynitride layer or a silicon layer. This dry alignment layer can be treated to form a tilted homeotropic alignment, such that the liquid crystal molecules have a pretilt angle of 0.5 to 10 degrees from a substrate normal direction.

Abstract: A liquid crystal display has a plurality of image elements, all the image elements are subdivided identically into at least two zones, the zones being formed so that they have different liquid crystal structures, each of the zones of a respective one of the image elements being electrically controllable.

Abstract: Disclosed is a liquid crystal display comprising a first substrate made of an insulating material; pixel electrodes formed on the first substrate, the pixel electrodes having a first aperture pattern; a second substrate made of an insulating material and provided opposing the first substrate at a predetermined distance; a common electrode formed on the second substrate, the common electrode having a second aperture pattern; and a liquid crystal layer made of liquid crystal material that is injected between the first and second substrates, wherein either or both of the pixel electrodes and the common electrode include stepped portions that protrude a predetermined distance away from the substrates, between apertures of the first and/or second aperture patterns.

Abstract: A vertical alignment mode liquid crystal display device having an improved viewing angle characteristic is provided. The liquid crystal display device uses a liquid crystal having a negative anisotropic dielectric constant, and orientations of the liquid crystal are vertical to substrates when no voltage is applied, almost horizontal when a predetermined voltage is applied, and oblique when an intermediate voltage is applied. At least one of the substrates includes a structure as domain regulating means, and inclined surfaces of the structure operate as a trigger to regulate azimuths of the oblique orientations of the liquid crystal when the intermediate voltage is applied.

Abstract: A method of fabricating an array substrate (as well as an array substrate itself) for use in an IPS-LCD device prevents a short-circuit between a data line and a storage capacitor. When fabricating the array substrate for use in the IPS-LCD device, the residues of a third metallic material, which remains in step portions of the double-layered common line, cause a short-circuit between a data line and a storage capacitor. In order to prevent the short-circuit, a plurality of protrusions extending from a first layer of the double-layered common line are formed at both sides of the storage capacitor. The plural protrusions have quadrilateral-shaped holes in their central portions. By forming an etching hole at each corner of the protrusion and eliminating the residues using the etching hole, the short-circuit between the storage capacitor and the data line is obviated. Accordingly, the IPS-LCD device having a high resolution is achieved.

Abstract: An in-plane switching mode LCD having an improved picture quality comprises first and second substrates; a plurality of pixel areas defined on the first substrate; data electrodes and common electrodes alternately formed in each of the pixel areas and patterned to have the same light transmitting area according to the applied voltage; and a liquid crystal layer between the first and second substrates. A method of manufacturing the in-plane switching mode LCD comprises: preparing the first and second substrates; forming a plurality of gate lines and data lines on the first substrate to define a plurality of pixel areas; forming a plurality of data electrodes and common electrodes to alternate in each pixel areas and have the same light transmitting area in applying voltage; and forming a liquid crystal layer between the first and second substrates.

Abstract: A liquid crystal display device having a pair of substrates with a liquid crystal layer interposed between the pair of substrates. One of the pair of substrates includes a plurality of scanning electrodes, a plurality of signal electrodes arranged so as to cross the plurality of scanning electrodes, a plurality of thin film transistors arranged in the vicinity of crossing points of the scanning electrodes and the signal electrodes, a plurality of common electrodes, and a plurality of pixel electrodes arranged between each of the common electrodes. An electric field is formed in the liquid crystal layer by applying a voltage to the pixel electrodes and the plurality of common electrodes. The other substrate of the pair of substrates includes color filters, an insulating film for flattening the color filters arranged on the color filters, and an orientation control film arranged on the insulating film.

Abstract: A liquid crystal display device has a liquid crystal layer (20) sandwiched between an upper substrate (1) having scanning electrodes (11) and a lower substrate (5) having opposite electrodes (13) and electrode driving ICs (2, 3, 4), mounted only at a side of the upper substrate (1), for driving the respective electrodes, in which connecting wirings (10) for connecting the scanning electrode driving ICs (3, 4) and the scanning electrodes (11) are disposed between an image display portion (14), which is provided on the inner side of a sealing portion (15) for bonding the substrates (1, 5) together, and the sealing portion (15). The connecting wirings (10) and the scanning electrodes (11) are electrically connected to each other at connecting regions (12) provided in the sealing portion (15), and a shielding (51) is provided between the image display portion (14) and the sealing portion (15).

Abstract: A liquid crystal display device comprises a first substrate, a columnar spacer formed on the first substrate and exhibiting light shielding properties, an alignment film formed to covet at least a part of the columnar spacer, a second substrate arranged to face the first substrate with a predetermined gap provided by the columnar spacer between the first and second substrates, and a liquid crystal material arranged within the gap. The columnar spacer is tapered in the forward direction as viewed from the first substrate in that portion of the columnar spacer which is positioned closest to the second substrate and has the largest diameter portion in the region other than that region of the columnar spacer which is positioned closest to the first substrate.

Abstract: A liquid crystal display device and a method of fabricating the same are disclosed in the present invention. The device includes first and second substrates bonded to each other, each having a liquid crystal display panel region divided into an active area and a dummy area, a sealant in a periphery of the liquid crystal display panel region bonding the first and second substrates to each other, at least one column spacer both in the dummy area and outside the liquid crystal display panel region maintaining a cell gap between the first and second substrates, and a liquid crystal layer between the first and second substrates.

Abstract: A reflective liquid crystal display includes upper and lower substrates that are opposite to and are spaced apart from each other; a liquid crystal layer interposed between the upper and lower substrates; a transparent common electrode on the surface of the upper substrate opposite the lower substrate; a cholesteric liquid crystal (CLC) color filter that selectively reflects and transmits light, the CLC color filter formed over the lower substrate; a transparent pixel electrode on the CLC color filter; and a light absorption layer between the lower substrate and the CLC color filter.

Abstract: In-situ cleaning of optical components for use in a lithographic projection apparatus can be carried out by irradiating a space within the apparatus containing the optical component with UV or EUV radiation having a wavelength of less than 250 nm, in the presence of molecular oxygen. Generally, the space will be purged with an ozoneless purge gas which contains a small amount of molecular oxygen in addition to the usual purge gas composition. The technique can also be used in an evacuated space by introducing a low pressure of molecular oxygen into the space.

Abstract: The method and apparatus for reading an image read photoelectrically an original image by prescan, set reading conditions in accordance with prescanned data obtained by the prescan, and perform fine scan that photoelectrically reads the original image to obtain fine scanned data for producing output image data. The method and apparatus analyze data of a preset area of the original image for both the prescanned data and the fine scanned data to calculate image characteristic values of the prescanned data and the fine scanned data of the preset area, calculate a correction condition for the fine scanned data such that the image characteristic values of the prescanned data and fine scanned data match and process the fine scannned data on the correction condition.

Abstract: Optical elements such as multilayered EUV mirrors are provided with protective capping layers of diamond-like carbon (C), boron nitride (BN), boron carbide (B4C), silicon nitride (Si3N4), silicon carbide (SiC), B, Pd, Ru, Rh, Au, MgF2, LiF, C2F4 and TiN and compounds and alloys thereof. The final period of a multilayer coating may also be modified to provide improved protective characteristics.

Abstract: A scanning exposure apparatus and method in which an interferometer, operatively connected to a stage holding a mask or a substrate, outputs a measurement value corresponding to positional information of the stage in the scanning direction. Start and stop timing of the output of trigger signals for the emission of pulses of an exposure beam emitted at predetermined time intervals is controlled based on the measurement value from the interferometer.

Abstract: Correlation values between a plurality of templates prepared beforehand and a picture-element data distribution as a pick-up result of an image are calculated, and the position of a maximum template whose correlation value is the maximum of the calculated correlation values is obtained. Subsequently, a curved surface function is calculated which fits the distribution of calculated correlation-values in positions near the maximum template's position, and the position of the picked-up image is calculated based on the curved surface function. As a result, the number of templates prepared beforehand to achieve desired accuracy in detecting a position and the number of times of calculating correlation-values can be reduced, and the image position can be quickly and accurately detected.

Abstract: Lithography device using a source of radiation in the extreme ultraviolet range and multi-layered mirrors with a broad spectral band within this range. Each mirror (24, 26, 29) includes a stack of layers of a first material and layers of a second material alternating with the first material. The first material has an atomic number greater than that of the second material. The thickness of pairs of adjacent layers is a monotonic function of the depth in the stack. The source (22) comprises at least one target (28) which emits the radiation by interAction with a laser beam focused on one of its faces. A part (36) of the radiation emitted from the other face is used. The invention is applicable to the manufacture of integrated circuits with a high degree of integration.

Abstract: A stage assembly (10) for moving and positioning a device (30) includes a stage (14), a stage mover assembly (16), a device table (18), a table mover assembly (20) and a damping assembly (22). The table mover assembly (20) moves the device table (18) along a Z axis, about an X axis and about a Y axis relative to the stage (14) and generates reaction forces. The damping assembly (22) is coupled to the table mover assembly (20). Uniquely, the damping assembly (22) reduces the reaction forces created by the table mover assembly (20) that are transferred to the stage (14).

Abstract: A system and method for viewing objects at a fire scene allows fire fighters to view objects, including persons, in a smoke and fire filled environment. The present invention utilizes two different techniques to discriminate reflections from an object from scattered reflections from smoke and fire. In one embodiment of the invention, the coherent nature of laser light is employed to pick out objects. Another embodiment of the invention utilizes a time-gated approach to select reflections from objects which are located a specific distance from the laser transmitter.

Abstract: A method for determining at least one optical property of an optical device comprises providing an optical input signal that includes first and second signal components that are modulated at first and second frequencies, respectively, and that have first and second polarization states, respectively. The optical input signal is passed to an optical device. An optical output signal from the optical device is separated into first and second output signals that have third and fourth polarization states, respectively. The first and second output signals are each compared with reference signals at the first and second frequencies to provide four phase shift and amplitude measurements that can be used to determine the at least one optical property of the optical device as a function of wavelength.

Abstract: In a method of polarization optical time-domain reflectometer (P-OTDR) for measuring a parameter of an optical transmission path, for example an optical fiber, by transmitting pulses of light into the path and measuring the state of polarization of backscattered light against distance, statistical analysis of the degree of polarization (DOP) of the backscattered signal is used to detect sections of an optical transmission path for which mode-coupling behaviour (long h) leads to high PMD. Preferably, successive DOP measurement are taken with different state of polarization, SOP, for the P-OTDR light source.

Abstract: A device for generating a laser beam in a LADAR system has a master oscillator with a laser-active medium and an amplifier stage in the form of a fiber optic power amplifier. This power amplifier amplifies the power of the oscillator. A carrier body is provided, on which a length of fiber of the power amplifier is coiled. The carrier body consists of a material of high thermal conductivity. The master oscillator may be a microchip laser. Diode lasers are used as pump light sources for the fiber optic power amplifier. This assembly can be made lightweight and compact, whereby it is particularly suitable for use in missiles.

Abstract: An arrangement for the vertical orientation of a geodetic instrument over a ground point, comprises an optical observation device for visual sighting of the ground point with a target beam, a laser device for generating a laser beam, and an optical in-coupling element by which the laser beam and the target beam can be coupled into a target axis impinging vertically on the target point. In this way, an exact orientation of the geodetic instrument can be achieved under all light conditions. The geodetic instrument retains its compact dimensions. In addition, a laser in a lower hazard class can be used.

Abstract: Object: provide an accurate monitor of light of even intensity light. Construction: A beam splitter (4) being fixed on a base (1) in the path of a main beam (2) of a light system, a reflecting mirror (5) being fixed on a side of the beam splitter (4), an inlet 6a of an integrating sphere (6) is provided at an opposite side of the beam splitter (4), and a light sensor (8) is provided at a reflecting surface of the integrating sphere (6).

Abstract: A method and system of using exposure control to inspect a surface, such as a wafer. One inspection system comprises charge coupled devices (CCDs) as detectors. The exposure control function of each CCD is used to adjust integration times on individual taps of the CCD such that light scattered from the surface, which may contain multiple scattering regions, is within a dynamic range of the CCD during inspection.

Abstract: Types of defects on a wafer are discriminated according to defect measurements obtained from a wafer inspection system which includes a plurality of dark field detectors. Using the wafer measurement system, it is determined whether first, second and third conditions are satisfied. The first condition is when a size of a defect on the wafer measured by the wafer inspection system is smaller than a limit value denoting a maximum size of crystal originated particles. The second condition is when a correlation between a plurality of defect light intensity values detected by a plurality of dark field detectors of the wafer measurement system satisfies a reference value. The third condition is when a location of the defect measured by the wafer inspection system is within a vacancy-rich area of the wafer. The type of the defect is then determined to be a crystal originated particle when the first, second and third conditions are all satisfied.

Abstract: An apparatus for measuring angle-dependent diffraction effects includes a coherent radiation source, a device for deflecting the coherent radiation in different directions, a spherical or aspherical mirror or mirror segments configured to correspond to a spherical or aspherical mirror, and a detector unit for measuring the intensity of the radiation diffracted at a specimen. The radiation deflected in different directions is reflected by the mirror configuration in such a way that the coherent beam is deflected onto the specimen with different angles of incidence in a temporally successively sequential manner. For this purpose, the angle of incidence of the measuring beam is altered continuously or in small steps. The intensities of the direct reflection (zero-order diffraction) and also of the higher orders of diffraction that may occur are measured. This evaluation allows conclusions to be drawn regarding the form and material of the periodic structures examined.

Abstract: One aspect of the present invention relates to a system and method of monitoring for defects on a wafer before and after forming a photoresist layer on the wafer. The system includes a device fabrication system comprising one or more wafer processing system components for producing a device; a defect metrology system integrated within and on track with the fabrication system operative to inspect the wafer for defects before it proceeds to photoresist processing; and a wafer cleaning system for reducing an amount of defects detected on the front and/or back side of the wafer. If the amount of defects have been sufficiently reduced, the front side of the wafer may be coated with a photoresist. Subsequently, the back side of the wafer may be inspected and cleaned while protecting the front side from damage. Cleaning of the wafer may be performed with a thermal shock treatment, for example.

Abstract: An inspection method that enables efficient inspection operations before the shipment of a sheet lens product. A sheet-like Fresnel lens sheet having a masking material bonded on its light-incidence surface is placed on an operation surface equipped with a black color system of background with the light-incidence surface up. On the operation surface the masking material is exfoliated. At the same time the Fresnel lens sheet is inspected by the reflected light to thereby make an inspection of the presence or absence of a white color system of defects. Thereafter, the Fresnel lens sheet is inspected by a the transmission light.

Abstract: A wavefront sensing tool, such as a Shack-Hartmann detector, detects alignment features in a semiconductor wafer that might otherwise be undetectable using conventional optical tools, such as a microscope. This is particularly advantageous for alignment features formed in photoresist with a height that is less than one fourth the illuminating light's wavelength. The wavefront sensing tool can be used in conjunction with conventional optical tools and a composite alignment image can be formed from the two tools. For higher sensitivity, the light reflected off the wafer can be magnified, with e.g. a telescopic lens, prior to impinging upon the wavefront sensing tool. The composite image can be generated by one or both of the tools or by a computer coupled to the tools.