Abstract: A photodetector (10) includes a substrate (12) having a surface; a first layer (14) of semiconductor material that is disposed above the surface, the first layer containing a first dopant at a first concentration for having a first type of electrical conductivity; and a second layer (16) of semiconductor material overlying the first layer. The second layer contains a second dopant at a second concentration for having a second type of electrical conductivity and forms a first p-n junction (15) with the first layer. The second layer is compositionally graded through at least a portion of a thickness thereof from wider bandgap semiconductor material to narrower bandgap in a direction away from the p-n junction. The compositional grading can be done in a substantially linear fashion, or in a substantially non-linear fashion, e.g., in a stepped manner.

Abstract: An opening fabricating apparatus for creating an opening with desired dimensions at a mask tip of a near-field optical microscope, and a near-field optical microscope using the same are provided. The apparatus comprising: a light source 116; reflection means 140; light detection means 124; press means 128, 130 pressing a probe tip against said reflection means; storage means 142; calculation means 144 figuring out the quantity of light of the reflected light for the acquisition of said opening with desired dimensions from the calibration information stored in said storage means; and press control means 126 controlling pressing of said probe tip against said reflection means so as to allow the quantity of light of said reflected light to become equal to the quantity figured out by said calculation means. The probe opening fabricating apparatus is capable of readily fabricating an opening of desired dimensions with a high reproducibility.

Abstract: An optically controlled micro-electromechanical (MEM) switch is described which desirably utilizes photoconductive properties of a semiconductive substrate upon which MEM switches are fabricated. In one embodiment the bias voltage provided for actuation of the switch is altered by illuminating an optoelectric portion of the switch to deactivate the switch. In an alternative embodiment, a photovoltaic device provides voltage to actuate the switch without any bias lines at all. Due to the hysteresis of the electromechanical switching as a function of applied voltage, only modest variation of voltage applied to the switch is necessary to cause the switch to open or close sharply under optical control.

Abstract: An optical encoder has a light irradiating device; an optical scale having a grating for transmitting or reflecting incident light; light-receiving elements disposed in a plurality of different directions; and an optical system for amplitude-modulating light traveling from the light irradiating device to the optical scale and transmitted or reflected by the grating, by a dividing element in which a plurality of V-shaped grooves are juxtaposed, and for dividing the amplitude-modulated light into beams along a plurality of different directions to guide the beams to the respective light-receiving elements. The dividing element is comprised of repetitions of such structure that a plurality of V-grooves consisting of planes of mutually different angles are juxtaposed at a predetermined pitch.

Abstract: A display apparatus includes a scanning assembly that scans about two or more axes, typically in a raster pattern. A plurality of light sources emit light from spaced apart locations toward the scanning assembly such that the scanning assembly simultaneously scans more than one of the beams. The scanning assembly is a resonant scanning assembly with a variable resonant frequency. The resonant frequency of the scanning assembly can be actively controlled by controlling partial pressure of fluids in a package containing the scanning assembly. In one embodiment, the increased partial pressure increases the mass of a scanning mirror, thereby changing the resonant frequency. In another embodiment, a gas absorbing material is coupled to a support arm that carries a scanning mirror. As the gas absorbing material absorbs gas, its physical properties change, thereby shifting the resonant frequency of the scanning assembly.

Abstract: A photonic package includes a housing having a semiconductor light source disposed within the housing. The semiconductor light source has a first output and a second output. A reflective surface is disposed inside the housing to reflect the second output from the semiconductor light source. A photodetector is also disposed within the housing and is adapted to indirectly receive the second output of the semiconductor light source reflected off the reflective surface. As a result, interior surface of a housing of an optical transponder may be utilized to provide reflected light to a photodetector to monitor the semiconductor light source.

Abstract: A method and apparatus are provided for monitoring the quality of lubricant that is in a gear mechanism or machine that contains effective materials. A sample of the lubricant or of the vapor that escapes from the lubricant is withdrawn from the gear mechanism or machine. The sample is conveyed to an ion mobility spectrometer, where materials present in the vapor phase above the lubricant are analyzed. The change of the content and of the type of the analyzed materials in the sample is utilized as the actual condition for the aging of the lubricant.

Abstract: The present invention proposes a time-of-flight mass spectrometer having an ion reflector, which can detect the ions over a wider range of energy while maintaining the resolution, thus improving the ion detection sensitivity by a simple method. In the time-of-flight mass spectrometer, the ion reflector has plural thin plate electrodes and a final electrode. Appropriate voltages are applied to the electrodes so as to construct a first stage with a substantially uniform high electric field strength and a second stage with a substantially uniform low electric field strength. The electric field strength of the second stage is corrected so that it substantially increases at the side of the final electrode.

Abstract: A multi-capillary inlet to focus ions and other charged particles generated at or near atmospheric pressure into a relatively low pressure region, which allows increased conductance of ions and other charged particles. The multi-capillary inlet is juxtaposed between an ion source and the interior of an instrument maintained at near atmospheric pressure, it finds particular advantages when deployed to improve the ion transmission between an electrospray ionization source and the first vacuum stage of a mass spectrometer, and finds its greatest advantages when deployed in conjunction with an electrodynamic (RF) ion funnel deployed within the interior of the mass spectrometer, particularly an ion funnel equipped with a jet disturber.

Abstract: An automated electrospray based sampling system and method for analysis obtains samples from surface array spots having analytes. The system includes at least one probe, the probe including an inlet for flowing at least one eluting solvent to respective ones of a plurality of spots and an outlet for directing the analyte away from the spots. An automatic positioning system is provided for translating the probe relative to the spots to permit sampling of any spot. An electrospray ion source having an input fluidicly connected to the probe receives the analyte and generates ions from the analyte. The ion source provides the generated ions to a structure for analysis to identify the analyte, preferably being a mass spectrometer. The probe can be a surface contact probe, where the probe forms an enclosing seal along the periphery of the array spot surface.

Abstract: An ion mobility spectrometer with a GC column and an internal circulation system is provided which can be used in trace gas analysis. Due to the special design of the gas circulation, the parameters: carrier gas velocity in the GC column, the flow rate of the gas to be analyzed and the flow rate of the drift gas can be varied extensively independently and without reaction. Additional pumps and gas splitters are arranged in the circulation system for this purpose.

Abstract: A microfluidic chip formed with multiple fluid channels terminating at a common electrospray ionization tip for mass spectrometric analysis. The fluid channels may be formed within a substrate plate that are in fluid communication with corresponding reservoirs. The electrospray tip can be formed along a defined portion of the substrate plate, wherein the electrospray tip includes an open-tip region at which the fluid channels converge. A top laminate plate may substantially enclose most portions of the fluid channels formed in the bottom polymer plate except for the open-tip region. Another aspect of the invention provides methods for conducting mass spectrometric analysis of multiple samples flowing through individual fluid channels in a single microfluidic chip that is formed with a convergent electrospray tip. The convergent electrospray tip includes an open or exposed distal pointed tip region.

Abstract: The present invention relates to a method and a device for irradiating ions in a ion cyclotron resonance (ICR) trap with photons and/or electrons. For electron irradiation a hollow electron emitter is used, through the hole of which a light beam can be sent into the ICR trap. The emitter generates a hollow, tubular electron beam. In a special application low energy ions within the tubular electron beam are irradiated with photons. The ions can be cyclotron-excited mass selectively, by which they enter the electron beam and interact with electrons.

Abstract: A vacuum window transmitting keV electrons and usable for high-pressure electron analysis such as XPS and AES in which the sample is positioned outside the UHV analyzer chamber, possibly in a controlled gas environment, relatively close to the window. The window includes a grid formed from a support layer and a thin window layer supported between the ribs and having a thickness preferably of 2 to 3 nm. The window and support layers may be deposited on a silicon wafer and the support layer is lithographically defined into the grid. The wafer is backside etched to expose the back of the grid and its supported window layer. Such a window enables compact and easily used electron analyzers and further allows control of the gas environment at the sample surface during analysis.

Abstract: In accordance with one embodiment, the disclosure pertains to an apparatus for inspection of substrates. The apparatus includes at least a dual-energy e-beam source, an energy-dependent dispersive device, a beam separator, and an objective lens. The dual-energy e-beam source is configured to generate both a higher-energy e-beam component and a lower-energy e-beam component. Said two components exit the dual-energy e-source co-axially. The energy-dispersive device is configured to introduce dispersion between the two components. The components exit the dispersive device at different angles of trajectory. The beam separator is configured to receive the two dispersed components and substantially cancel the dispersion previously introduced by the dispersive device. As a result, the two components are rejoined in trajectory. Finally, the objective lens configured to focus said two rejoined components onto an area of the substrate.

Abstract: Disclosed is an apparatus for inspecting a sample. The apparatus includes a first electron beam generator arranged to direct a first electron beam having a first range of energy levels toward a first area of the sample and a second electron beam generator arranged to direct a second electron beam having a second range of energy levels toward a second area of the sample. The second area of the sample at least partly overlaps with the first area, and the second range of energy levels are different from the first range such that charge build up caused by the first electron beam is controlled.

Abstract: An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means.

Abstract: A night vision device and method for vehicles is provided, including a radiation device for generating infrared radiation, a detection device for receiving an infrared image, wherein the detection device works together with the radiation device, and a display device for visual display of the infrared image for the vehicle driver, wherein the radiation device has a semiconductor radiation source that can be controlled such that the infrared radiation is emitted in a discrete-time fashion.

Abstract: An ordinary golf ball is cleaned and then treated with an emulsion depositing in the dimples a hologram having the capacity to reflect a pre-selected wavelength of laser-beam. If a player temporarily looses such ball, a hand-held unit directs an infra-red laser beam of said pre-selected wavelength, desirably one not absorbed by atmospheric moisture, such as 1310 nm. Said hand-held unit contains an analyzer evaluating the light reflected back to such analyzer and attributable to such laser beam of said pre-selected wave-length. By evaluating the intensity of such reflected light, the golfer can target the location of the temporarily lost ball. Upon approaching the lost ball the angle at which the unit would be held would be modified for focusing on the ball. Earphones, meters, or other diagnostic equipment can monitor the intensity of the light reflected back from such laser beam.

Abstract: The present invention is a method for quantitatively measuring nitrogen in Czochralski silicon based on the detection of one or more N—O complexes by means of low temperature Fourier Transform infrared spectroscopy (LT-FTIR) in the far infrared spectral range (FIR).

Abstract: A method for quantitative imaging of gas emissions utilizing optical techniques combining gas correlation techniques with thermal background radiation or gas self-emission radiation is presented. A simultaneous recording of images with and without filtering through a gas-filled cell is utilized for the identification of a selected gas. A new calibration method provides the display of the integrated gas concentration spatially resolved in the generated final image. The procedure includes methods for a correct subtraction of the zero level, consisting of self-radiation from the dual-image camera device including the as correlation cell and electronic offset, and for the calculation of the specific absorption as a function of the difference temperature between the background and the gas emission.

Abstract: A method for identification and partial-pressure determination of two gases in an unknown anesthesia gas mixture comprising n possible gases by measuring the infrared optical radiation, transmitted through the gas mixture, that passes through m filters having different transmission wavelength ranges, in which n is a number greater than 2 and m is a number less than n. The method evaluates the exit intensities, measured after passage through the filters, of the infrared optical radiation transmitted through the unknown gas mixture in such a way that with three filters, for instance, two gases in an unknown gas mixture comprising five possible gases can be identified, and their partial pressures can be determined. By dividing the partial pressures by the total pressure, it is optionally also possible to determine the concentration of the gases.

Abstract: A method and apparatus for eliminating the picket fence effect in PET scanners where the scanner includes a master clock and an event processing circuit that generates time stamps during each clock cycle, the scanner also including a coincidence detector that compares the time stamps during each clock cycle to identify coincidence events, the method including the steps of, for consecutive master clock cycles, identifying an overlap period that includes a portion of a first of the master cycles adjacent a second of the master cycles, adding an overlap period that occurs during the overlap period to the second of the master cycles to generate an extended cycle, identifying overlap events that occur during the overlap period in the first of the master cycles, copying the overlap events to the overlap period in the extended second cycle and performing a comparison of the events in the extended cycle to identify coincidence event pairs

Abstract: A nuclear imaging system comprising: first and second radiation detectors, each comprising an imaging surface facing each other and each having an extent; an radiation source, situated outside a space defined by a largest parallelepiped formed on two sides by said first and second detectors, which irradiates the second detector; and an axis about which the first and second detectors and the radiation source rotate together; wherein the field of view of the radiation source, defined by lines connecting the external source and the edges of the second detector, encompass the axis of rotation.

Abstract: A photodiode with integrated microporous filter formed on a semiconductor substrate is provided. The microporous filter will provide in excess of six orders of magnitude visible light reduction while transmitting a measurable amount of UV/EUV radiation. A process for manufacturing the photodiode with integrated microporous filter is also presented.

Abstract: A beam array includes a base plate, a plurality of conductor pads, and a ground plate. The conductor pads are arranged in a one-dimensional array on the base plate. The ground plate is coupled to the base plate over the plurality of conductor pads with a gap between the base plate and the ground plate. Each of the plurality of conductor pads forms a beam blanker across the gap with the ground plate.

Abstract: A scintillator for an electron microscope includes a substrate (24) of optically transparent material in disc shaped form, a retaining ring (20) of highly conductive material having a non-oxidizing surface around the substrate and having a radially inwardly extending lip (22) on one end, a coating of indium tin oxide (26) on surface (28) of the substrate, electrically conductive adhesive material (32) between the lip and the radially outer part of the coating, and scintillator material (36) bonded to surface (38) of the coating. The indium tin oxide coating may be applied by sputtering and the scintillator material may br deposited onto the coating by settlement deposition. All contacting surfaces are intimately bonded to provide maximum conductivity resulting in better signal to noise ratio. The conductive substrate minimizes pinhole interference, the scintillator is easier to handle during installation and no aluminum overcoating is required.

Abstract: An electron beam control device controls an electron beam for use, such as an electron beam exposure device and the like, wherein a track of an electron beam is not adversely Influenced by the amount of magnetic variation occurring influences. The electron beam control device which controls an electron beam for use, such as an electron microscope, an electron beam exposure and the like, wherein a magnetometric sensor for measuring an amount of magnetic variation which influences a track of the electron beam, occurring from surrounding influences, is provided.

Abstract: An ECR ion-beam source for use in an ion implanter has a sealed plasma chamber in which plasma is excited by microwave radiation of 2.45 GHz in combination with an external magnetic field generated by permanent magnets surrounding the plasma chamber. The magnets cause electron-cyclotron resonance for the electrons of the plasma thus creating conditions for efficient absorption of the microwave energy. The same magnets generate a magnetic field, which compresses the plasma toward the center for confining the plasma within the plasma chamber. The ion source also has an RF pumping unit that pumps into the plasma the RF energy. The RF pumping unit has a unique additional function of RF magnetron sputtering of solid targets converted into a gaseous working medium used for implantation in an ionized form.

Abstract: It is often desirable to operate ultraviolet (UV) water treatment systems at high fluid velocities; such as, when low UV doses are required, the UV transmittance of the water being treated is high, or when a high intensity radiation source is used. The operation of an open channel UV fluid treatment system at high fluid velocity causes a disproportionate amount of water to pass through the relatively low intensity region above the top lamp. This results in non-uniform UV dose delivery and poor reactor performance. In one embodiment of the invention, by elevating the inlet to the irradiation zone of the fluid treatment system with respect to the outlet, the amount of water that passes above the top lamp can be minimized, improving overall system performance. The means of elevation can consist of a step or slope in the channel, or a combination of both. Depending on the magnitude of elevation, an increase in maximum velocity of approximately two times can be obtained.

Abstract: A device that permits the in-home UV treatment of drinking water such as tap water is disclosed. The device employs a bare low-energy UV lamp suspended below a reflector and above a free surface of water flowing within the device. The water is supplied from a tap or other store of drinking water and proceeds through the device by the force of gravity. The device itself is not pressurized. The flow of water within the device is exposed to UV radiation from the UV lamp and is disinfected as a result. In the illustrated embodiment, the device is of a small size to permit its use, for example, directly at a tap for drinking water within the home. The flow rate of the device is commensurate with the normal flow rate of tap water, preferably less than about 8 liters per minute. The lamp power for safely disinfecting the water can be less than 20 watts, and in the illustrated embodiment the lamp is a low-pressure Hg lamp.

Abstract: An apparatus for surface treating a semiconductor wafer includes a surface treatment chamber and a source of radiation. The semiconductor wafer disposed inside the chamber is illuminated with radiation sufficient to create a plurality of electron-hole pairs near the surface of the wafer and to desorb ions and molecules adsorbed on the surface of the wafer.

Abstract: There is disclosed an apparatus applied to exposure by a charged beam, having a pattern information acquiring section acquiring information on a character projection pattern formed in a character projection aperture mask, a first information storing section storing information on a reference pattern, and an identifying section identifying a shape of the character projection pattern by comparing the information on the character projection pattern with the information on the reference pattern.

Abstract: A mass separation filter has a first magnet forming a first magnetic field in an orthogonal direction to a beam axis of an ion beam, a second magnet sequentially arranged with the first magnet along the beam axis, parallel with and facing the opposite direction of the first magnet, and forming a second magnetic field orthogonal to the beam axis; and a collimator wall formed within the first and second magnetic fields that forms a transfer channel from a first curved channel deflected from the first magnetic field to a second curved channel deflected by the second magnetic field in a direction the reverse of the first magnetic field. Incident ions pass through a channel inversely curved by the magnetic fields of the first and second magnets according to the mass separation filter, and it is possible to lead ions of a desired mass in the same direction as the beam axis.

Abstract: Disclosed is a medical particle irradiation apparatus comprising a rotating gantry 1 including an irradiation unit 4 emitting particle beams; an annular frame 16 located within and supported by the rotating gantry 1 such that it can rotate relative to the rotating gantry 1; an annular frame 15 fixedly located opposite the annular frame 16; an anti-corotation mechanism 34 being in contact with both the annular frames 16 and 15 to prevent the annular frame 16 from rotating together with the rotating gantry 1 during rotation of the rotating gantry 1; and a flexible moving floor 17 interposed between the annular frames 15 and 16, the flexible moving floor 17 being engaged with the annular frames 15 and 16 in such a manner as to move freely such that its bottom is substantially level and that it moves as the rotating gantry rotates.

Abstract: A parameter calculation unit statistically calculates the estimations and their certainty of a predetermined number of parameters, which uniquely specify any position on an object, for each of a plurality of measured sample sets on the basis of position information of marks composing the sample set. A valid value calculation unit calculates statistically valid values of the predetermined number of parameters on the basis of groups of the estimations and their certainty of the predetermined number of parameters for the respective sample sets. Furthermore, an evaluation unit statistically evaluates if the number of marks composing a sample set can be reduced. If it is determined that the number of marks can be reduced, the parameter calculation unit calculates values of the predetermined number of parameters by using a new sample set having reduced number of marks.

Abstract: A distance measuring system, which comprises a control arithmetic unit 1, a light emitting unit 2 for emitting a measuring light beam and a photodetection unit 3 for receiving a reflection light beam from an object to be measured, the system being used for measuring a distance by receiving the reflection light beam from the object to be measured, wherein the control arithmetic unit compares a signal based on the photodetection amount of the reflection light from the object to be measured as well as a result of the distance measurement with reference data prestored in the control arithmetic unit relating to the reflection of the object to be measured, and judges whether the object to be measured is a prism or a natural object based on a result of the comparison.

Abstract: Optical measuring system for determining the concentration, particularly of turbid liquid samples, comprising a measuring volume for taking up the liquid samples to be measured, a plurality of several photometric channels, each comprising a light source and a light sensor on opposite sides of the sample volume aligned on a common optical axis, the optical axes thereof being disposed under different azimutal angles respective to the sample volume, and an analyzing device which evaluates the concentration of the liquid samples to be measured according to the data provided by the light sensors belonging to a plurality of different photometric channels.

Abstract: The reading side conductive layer of a solid sensor is provided with a photo-charged pair generating electrode formed by a plurality of linear electrodes and a photo-charged pair non-generating electrode formed by a plurality of linear electrodes arranged alternately with the linear electrodes of the photo-charged pair generating electrode. The linear electrodes of the photo-charged pair generating electrode are connected to a read-out apparatus, which reads out the latent image charge. The linear electrodes of the photo-charged pair generating electrode forming one pixel are provided with a bypass connection which, when a part of the linear electrodes is broken, allows outputs of the part of the broken linear electrode on the side of the broken part remote from the read-out apparatus to be detected by the read-out apparatus bypassing the broken part of the linear electrode.

Abstract: An n-type layer of the opposite conduction type composed of n-GaN is formed between a light emitting layer and a p-type cladding layer composed of p-AlGaN. The bandgap of the n-type layer of the opposite conduction type is larger than the bandgap of the light emitting layer and is smaller than the bandgap of the p-type cladding layer.

Abstract: In a semiconductor light-emitting device, an active layer has a multi quantum well structure (MQW) barrier layers and quantum well layers alternately arranged. Each of the cladding layers has a multi quantum barrier structure (MQB) including barrier layers and well layers alternately arranged. The multi quantum barrier (MQB) of each of the cladding layers varies in a graded or stepwise form. Thus, charge carriers are prevented from overflowing from the active layer, preventing cut-off of a guided wave mode, increasing reflectance of electrons entering the energy barriers, and improving temperature characteristics.

Abstract: Interband tunnel diodes which are compatible with Si-based processes such as, but not limited to, CMOS and SiGe HBT fabrication. Interband tunnel diodes are disclosed (i) with spacer layers surrounding a tunnel barrier; (ii) with a quantum well adjacent to, but not necessarily in contact with, one of the injectors, and (iii) with a first quantum well adjacent to, but not necessarily in contact with, the bottom injector and a second quantum well adjacent to, but not necessarily in contact with, the top injector. Process parameters include temperature process for growth, deposition or conversion of the tunnel diode and subsequent thermal cycling which to improve device benchmarks such as peak current density and the peak-to-valley current ratio.

Abstract: A control system for an array of qubits is disclosed. The control system according to the present invention provides currents and voltages to qubits in the array of qubits in order to perform functions on the qubit. The functions that the control system can perform include read out, initialization, and entanglement. The state of a qubit can be determined by grounding the qubit, applying a current across the qubit, measuring the resulting potential drop across the qubit, and interpreting the potential drop as a state of the qubit. A qubit can be initialized by grounding the qubit and applying a current across the qubit in a selected direction for a time sufficient that the quantum state of the qubit can relax into the selected state. In some embodiments, the qubit can be initialized by grounding the qubit and applying a current across the qubit in a selected direction and then ramping the current to zero in order that the state of the qubit relaxes into the selected state.

Abstract: An LDD structure is manufactured to have a desired aspect ratio of the height to the width of a gate electrode. The gate electrode is first deposited on a semiconductor substrate followed by ion implantation with the gate electrode as a mask to form a pair of impurity regions. The gate electrode is then anodic oxidized to form an oxide film enclosing the electrode. With the oxide film as a mask, highly doped regions are formed by ion implantation in order to define lightly doped regions between the highly doped regions and the channel region located therebetween.

Abstract: An object of the present invention is to provide a TFT of new structure in which the gate electrode overlaps with the LDD region and a TFT of such structure in which the gate electrode does not overlap with the LDD region. The TFT is made from crystalline semiconductor film and is highly reliable. The TFT of crystalline semiconductor film has the gate electrode formed from a first gate electrode 113 and a second gate electrode in close contact with said first gate electrode and gate insulating film. The LDD is formed by ion doping using said first gate electrode as a mask, and the source-drain region is formed using said second gate electrode as a mask. After that the second gate electrode in the desired region is selectively removed. In this way it is possible to form LDD region which overlaps with the second gate electrode.

Abstract: A method of fabricating a gallium nitride-based semiconductor structure on a substrate includes the steps of forming a mask having at least one opening therein directly on the substrate, growing a buffer layer through the opening, and growing a layer of gallium nitride upwardly from the buffer layer and laterally across the mask. During growth of the gallium nitride from the mask, the vertical and horizontal growth rates of the gallium nitride layer are maintained at rates sufficient to prevent polycrystalline material nucleating on said mask from interrupting the lateral growth of the gallium nitride layer. In an alternative embodiment, the method includes forming at least one raised portion defining adjacent trenches in the substrate and forming a mask on the substrate, the mask having at least one opening over the upper surface of the raised portion. A buffer layer may be grown from the upper surface of the raised portion.

Abstract: Part of light emitted downward by an active layer is reflected by an electrode functioning as a reflective layer, and travels upward to radiate outside. Since the electrode is made of a metal, it reflects almost all light regardless of its incident angle, and light can be efficiently extracted.

Abstract: An integrated semiconductor optical-emitting device includes a surface-emission laser diode and an EA-type semiconductor optical modulator integrated commonly on a GaAs substrate in a direction perpendicular to the GaAs substrate.

Abstract: The invention relates to a method using dry etching to obtain contamination free surfaces on of a material chosen from the group comprising GaAs, GaAlAs, InGaAsP, and InGaAs to obtain nitride layers on arbitrary structures on GaAs based lasers, and a GaAs based laser manufactured in accordance with the method. The laser surface is provided with a mask masking away parts of its surface to be prevented from dry etching. The laser is then placed in vacuum. Dry etching is then performed using a substance chosen from the group containing: chemically reactive gases, inert gases, a mixture between chemically reactive gases and inert gases. A native nitride layer is created using plasma containing nitrogen. A protective layer and/or a mirror coating is added.

Abstract: A semiconductor light device includes a light emitting element, a reflector for reflecting a light beam outgoing from the light emitting element and a resin disposed between the light emitting element and the reflector, which are formed on a substrate. A face of the reflector is formed into a rough surface to improve adherence between the reflector and the resin for preventing detachment of the reflector from the resin.