Patents Issued in November 9, 2004
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Patent number: 6815655Abstract: A circuit for use with a photodetector includes multiple switches, a comparator, and a capacitor. The photodetector receives a first voltage and a second voltage at first and second nodes, respectively. The first voltage is higher than the second voltage. The capacitor is connected to the first node. During a power up sequence, the capacitor is charged to the first voltage. The comparator detects when the voltage at the first node reaches a predetermined threshold and in response causes a switch to close so that the second node can receive the second voltage. In a power down sequence, the first and second nodes are allowed to discharge, with the capacitor slowing the discharge of the first node. The comparator detects when the voltage at the first node reaches a predetermined threshold and in response causes another switch to short the second node to ground.Type: GrantFiled: September 24, 2001Date of Patent: November 9, 2004Assignee: Intel CorporationInventor: Xiaolin Yuan
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Patent number: 6815656Abstract: A vertical cavity optical amplifier can tilt to reflect light in different directions. An array of such amplifiers can serve as an optical cross-connect.Type: GrantFiled: March 1, 2002Date of Patent: November 9, 2004Inventor: Mark A. Lauer
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Patent number: 6815657Abstract: A reading apparatus has a sensor unit which is arranged on a substrate to read an object to be detected, a driver circuit unit which is arranged on the substrate to supply a drive signal for driving the sensor unit, and a static electricity protection portion, which is formed to cover at least a portion of the upper surface of the driver circuit unit, and at least a portion of which has electrical conductivity.Type: GrantFiled: June 10, 2002Date of Patent: November 9, 2004Assignee: Casio Computer Co., Ltd.Inventors: Tsuyoshi Toyoshima, Shigeru Morikawa, Yasushi Mizutani
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Patent number: 6815658Abstract: A testing circuit 1, provided between an input terminal IN of an LSI 2 and the CSA 20, includes a switch NSW (a third switch), a capacitor CT which is connected in parallel to the switch NSW, and switches TC1 (a first switch) and TC2 (a second switch) which are connected in series across the capacitor CT. With this arrangement, the circuit including the capacitor CT and the CSA 20 can serve as a reverse amplifier circuit and can input a voltage waveform instead of the charges. Therefore, a conventional charge supply circuit is not necessary when the testing of a reading circuit 16 is carried out.Type: GrantFiled: September 24, 2002Date of Patent: November 9, 2004Assignee: Sharp Kabushiki KaishaInventors: Hisao Okada, Masayuki Takahashi, Hiroaki Ogawa
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Patent number: 6815659Abstract: An imaging system and methodology is provided to facilitate optical imaging performance. The system includes a sensor and a lens system, including one or more lenses, configured according to sensor characteristics to facilitate scaling parts of the sensor to an object field of view so as to provide desired resolution of an object being viewed.Type: GrantFiled: January 14, 2002Date of Patent: November 9, 2004Assignees: Palantyr Research, LLC, Angkor Technology, LLPInventor: Andrew G. Cartlidge
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Patent number: 6815660Abstract: The invention relates to an optoelectronic monitoring device for the detection of objects intruding into a monitored zone comprising at least one transmitter, in particular a light grid, arranged at an end of the monitored zone and having a group of transmission elements spaced apart from one another and each transmitting electromagnetic radiation into the monitored zone, at least one reflector arranged at an end of the monitored zone opposite the transmitter for radiation transmitted by the transmission elements, at least one receiver which has at least one spatially resolving reception element for radiation reflected by the reflector, and an evaluation device coupled with the reception element, wherein the transmitter, the reflector and the receiver are made and arranged such that, during the monitoring operation, at least a part of the group of transmission elements comprising a plurality of transmission elements is imaged on the reception element by means of the reflector and a check is made by means of tType: GrantFiled: August 15, 2002Date of Patent: November 9, 2004Assignee: Sick AGInventors: Olaf Henkel, Martin Wuestefeld
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Patent number: 6815661Abstract: An optical scanning assembly detects positions of wafer specimens stored in a transport box. The scanning assembly includes first and second spaced-apart optical component mounts operatively connected to a deployment mechanism that moves them between extended and retracted positions. The extended positions facilitate specimen scanning operation, and the retracted positions facilitate carrier box front side access during specimen non-scanning processing. A preferred embodiment is a scanning assembly of a differential optical type.Type: GrantFiled: December 24, 2002Date of Patent: November 9, 2004Assignee: Newport CorporationInventors: Paul Bacchi, Paul S. Filipski
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Patent number: 6815662Abstract: A measurement apparatus for an optical signal under test includes a closed-loop optical path, an optical mixer in the closed-loop optical path and a photodetector. The optical signal under test and sampling light having a wavelength different from that of the optical signal under test are circulated in the closed-loop optical path. Sum/difference frequency light is generated every time the sampling light passes through the optical mixer. The sum/difference frequency light is detected by the photodetector, which provides a signal representative of the waveform of the optical signal under test.Type: GrantFiled: May 10, 2002Date of Patent: November 9, 2004Assignee: Agilent Technologies, Inc.Inventors: Norihide Yamada, Katsuya Yamashita, Satoshi Watanabe
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Patent number: 6815663Abstract: A scanning type optical device comprises one optical characteristics measuring unit per color. Each optical characteristics measuring unit further includes three units. The first unit is provided on a writing start side within a scanning region, the second unit is provided on the other end side within the scanning region, and the third unit is arranged substantially at the center in the scanning region. Laser beams emitted from each of four semiconductor lasers are modulated based on signals detected by the three units in such a manner that a difference between a real image height and an ideal image height is reduced over the entire scanning region.Type: GrantFiled: June 4, 2002Date of Patent: November 9, 2004Assignee: Ricoh Company, Ltd.Inventor: Takeshi Ueda
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Patent number: 6815664Abstract: Apparatus and methods are provided for interacting light with particles, including but not limited to biological matter such as cells, in unique and highly useful ways. Optophoresis consists of subjecting particles to various optical forces, especially optical gradient forces, and more particularly moving optical gradient forces, so as to obtain useful results. In biology, this technology represents a practical approach to probing the inner workings of a living cell, preferably without any dyes, labels or other markers.Type: GrantFiled: November 14, 2001Date of Patent: November 9, 2004Assignee: Genoptix, Inc.Inventors: Mark M. Wang, Eugene Tu, James P. O'Connell, Kristie L. Lykstad, William F. Butler
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Patent number: 6815665Abstract: Apparatus and method for determining the integrity or quality of a gravel pack positioned between the casing and gravel pack screen of a subterranean borehole, with the method including azimuthally scanning the gravel pack for radiation, with detection of the radiation limited to a limited angular arc of the gravel pack at any one time, with the apparatus including shielded or collimated radiation source and/or detector.Type: GrantFiled: April 21, 2003Date of Patent: November 9, 2004Assignee: Halliburton Energy Services, Inc.Inventors: Bruce H. Storm, Larry L. Gadeken, Ward E. Shultz
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Patent number: 6815666Abstract: A negative ion source placed inside a negatively-charged high voltage electrode emits a beam which is accelerated to moderate energy, approximately 35,000 electron volts, and filtered by a momentum analyzer i.e. an analyzing bending magnet, to remove unwanted ions. Reference ions such as carbon-12 are deflected and measured in an off-axis Faraday cup. Ions of interest, such as carbon ions of mass 14, are accelerated through 300 kV to ground potential and passed through a gas stripper where the ions undergo charge exchange and molecular destruction. The desired isotope, carbon-14 along with fragments of the interfering molecular ions, emerge from the stripper into a momentum analyzer which removes undesirable isotope ions. The ions are further filtered by passing through an electrostatic spherical analyzer to remove ions which have undergone charge exchange. The ions remaining after the spherical analyzer are transmitted to a detector and counted.Type: GrantFiled: September 6, 2002Date of Patent: November 9, 2004Assignee: National Electrostatics Corp.Inventors: James B. Schroeder, James A. Ferry
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Patent number: 6815667Abstract: A mass spectrometer has an ion source for producing sample ions. The ions pass through an ion interface, to a reaction/collision cell section. An inn-neutral decoupling device is provided between the ion interface and the reaction/collision cell section, to provide substantial separation between ions and neutral particles, whereby only ions pass on to the reaction/collision cell section. The supersonic jet entering the spectrometer can have sufficient energy to cause the plasma gases, such as argon, to overcome the pressure differential between the reaction/collision cell and an upstream section of the spectrometer so as to penetrate into the reaction/collision cell; the decoupling device prevents this. The decoupling device can have offset apertures provided by plates or rods or other comparable arrangements, or can comprise a quadrupolar electrostatic deflector, an electrostatic sector deflector or a magnetic sector deflector.Type: GrantFiled: February 25, 2003Date of Patent: November 9, 2004Assignee: MDS Inc.Inventors: Scott D. Tanner, Dmitry R. Bandura, Vladimir I. Baranov
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Patent number: 6815668Abstract: Method and apparatus for chromatographic high field asymmetric waveform ion mobility spectrometry, including a gas chromatographic analyzer section intimately coupled with an ionization section, an ion filter section, and an ion detection section, in which the sample compounds are at least somewhat separated prior to ionization, and ion filtering proceeds in a planar chamber under influence of high field asymmetric periodic signals, with detection integrated into the flow path, for producing accurate, real-time, orthogonal data for identification of a broad range of chemical compounds.Type: GrantFiled: March 5, 2001Date of Patent: November 9, 2004Assignee: The Charles Stark Draper Laboratory, Inc.Inventors: Raanan A. Miller, Erkinjon G. Nazarov, Gary A. Eiceman, Evgeny Krylov, Boris Tadjikov
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Patent number: 6815669Abstract: An asymmetric field ion mobility spectrometer for filtering ions via an asymmetric electric field, an ion flow generator propulsing ions to the filter via a propulsion field.Type: GrantFiled: February 21, 2002Date of Patent: November 9, 2004Assignee: The Charles Stark Draper Laboratory, Inc.Inventors: Raanan A. Miller, Markus Zahn
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Patent number: 6815670Abstract: A detector requires a stream of dry air for transporting particles to the detector. The detector then operates to determine whether the dry air has transported any particles of interest. Continuous operation of the detector is permitted by providing first and second dryers that can be operated alternately for drying air that is to be directed to the detector. The dryer that is not being operated is recharged. Air is directed alternately between the first and second dryer to ensure that neither dryer is operated after reaching saturation.Type: GrantFiled: September 8, 2003Date of Patent: November 9, 2004Assignee: General Electric CompanyInventors: Anthony Jenkins, William J. McGann, Joseph D. Napoli, Kevin J. Perry
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Patent number: 6815671Abstract: A system and method for chemically analyzing single particles in a high velocity gas flow. The system comprises an ion source chamber having a gas inlet and outlet, and a high-energy, pulsed, ultraviolet laser for ablating the single particles in the high velocity gas flow entering the ion source chamber through the gas inlet to produce positively- and negatively-charged ions. The system further includes a first extraction plate for extracting the positively-charged ions provided in the ion source chamber, and a second extraction plate for extracting the negatively-charged ions provided in the ion source chamber. The positively-charged ions are injected into a first ion mobility spectrometer where they are detected and characterized. The negatively-charged ions are injected into a second ion mobility spectrometer where they are detected and characterized.Type: GrantFiled: July 3, 2003Date of Patent: November 9, 2004Assignee: The University of DelawareInventors: Murray V. Johnston, Derek A. Lake, Gary A. Eiceman
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Patent number: 6815672Abstract: It becomes possible to simultaneously atomize and ionize atoms constituting a polymer with the use of a single laser, thereby highly simplifying the constitution of a system. A method of analyzing a polymer which comprises abrading the polymer to be analyzed by irradiating with laser beams to thereby atomize the polymer into the constituting elements thereof, then ionizing the elements and analyzing the constituting elements thus ionized. The laser beams with which the polymer to be analyzed is irradiated for the abrasion are ultrashort pulse laser beams. By irradiating the polymer with the ultrashort pulse laser beams to thereby abrade, the polymer can be atomized and ionized at the same time. Then the thus ionized constituting elements are analyzed.Type: GrantFiled: October 27, 2003Date of Patent: November 9, 2004Assignee: RikenInventors: Yoshihide Hayashizaki, Isao Tanihata
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Patent number: 6815673Abstract: A method and apparatus for the analysis of a narrow range of fragment ions by application of a notched broadband waveform during ion accumulation within a quadrupole collision cell operated as a linear ion trap. The fragment ions are formed via the axial acceleration and collision activated dissociation of mass resolved precursor ions. A narrow band of frequencies is purposefully omitted from the spectrum, so that the secular frequency of a particular fragment ion will fall within this notch of absent frequencies and as a result will not experience resonant excitation and are retained in the linear ion trap. Simultaneously, all other ions are lost either through neutralization when they strike electrodes or through (additional) collision activated dissociation. Accordingly, a particular mass or range of masses, whose secular frequencies fall within the notch of absent frequencies in the notched broadband waveform, may be selectively accumulated during the collision activated dissociation event.Type: GrantFiled: December 19, 2002Date of Patent: November 9, 2004Assignee: MDS Inc.Inventors: Jeffry B. Plomley, Frank A. Londry
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Patent number: 6815674Abstract: In one embodiment, a miniaturized structure and associated method function as a mass spectrometer or analyzer and may, with modification, function as an ion generator. The miniaturized structure has a pair of generally planar parallel spaced electrodes which have projecting walls cooperating to define an ion generating chamber and an exit aperture. By controlling the electric field which is oriented perpendicular to an applied magnetic field, the ion beam may be separated into a plurality beams based upon mass to charge ratio with a predetermined mass to charge ratio emerging from the exit of the apparatus and when the apparatus is functioning as a mass spectrometer or analyzer impinges on an ion collector which responsively transmits information to a cooperating processor. Where it is desired to have it function as an ionizer the ion collector disposed adjacent the ion exit is eliminated.Type: GrantFiled: June 3, 2003Date of Patent: November 9, 2004Assignee: Monitor Instruments Company, LLCInventor: Guenter F. Voss
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Patent number: 6815675Abstract: The disclosure relates to a method and system of electron beam scanning for measurement, inspection or review. In accordance with one embodiment, the method includes a first scan on a region to collect first image data. The first image data is processed to determine information about a feature in the region. A scanning method is selected for imaging the feature. A second scan using the selected scanning method on the feature is then applied to collect second image data.Type: GrantFiled: April 30, 2003Date of Patent: November 9, 2004Assignee: KLA-Tencor Technologies CorporationInventors: Gian Francesco Lorusso, Luca Grella, Douglas K. Masnaghetti, Amir Azordegan
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Patent number: 6815676Abstract: A material defect evaluation apparatus using positron for evaluating the degree of deterioration of a specimen by measuring a positron lifetime after irradiating positron to the specimen, includes: a positron source, a positron detector and a &ggr;-ray detector, wherein, the positron source and the positron detector are arranged in a container through which a light is not transmitted, and, a positron transmitting window, through which position emanating from the positron source and transmitting through the positron detector is transmitted outward, is arranged to the container.Type: GrantFiled: June 26, 2003Date of Patent: November 9, 2004Assignee: Osaka UniversityInventors: Yasuharu Shirai, Hideki Araki
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Patent number: 6815677Abstract: The present invention provides a scanning electron microscope that can obtain a high-precision SEM image and width measurement values, without damaging an object to be measured even at a high magnification. This scanning electron microscope irradiates a sample with an electron beam so as to detect secondary electrons released from the sample due to the irradiation. The scanning electron microscope also includes scan generators for detecting the secondary electrons at a frequency depending on a detection magnification for the sample. The present invention also provides a method of measuring a pattern size using the above scanning electron microscope.Type: GrantFiled: March 23, 2001Date of Patent: November 9, 2004Assignees: Fujitsu Limited, Kabushiki Kaisha ToshibaInventors: Kouichi Nagai, Takahiro Ikeda
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Patent number: 6815678Abstract: The invention relates to a raster electron microscope having a specimen chamber and a detector for electrons mounted in the specimen chamber. The raster electron microscope also includes a specimen table having a specimen holder and the specimen table is mounted in the specimen chamber. A diaphragm system is provided on the specimen table and has a diaphragm between the specimen holder and the detector. The diaphragm system is adjustable relative to the specimen holder. The invention can be configured especially as an ancillary module which is accommodated on the specimen table of a conventional raster electron microscope. The system of raster electron microscope and ancillary unit serves for generating special contrastings, especially a dark-field contrast in transmission.Type: GrantFiled: March 18, 2003Date of Patent: November 9, 2004Assignee: LEO Elektronemikroskopie GmbHInventors: Ute Golla-Schindler, Bernd Schindler
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Patent number: 6815679Abstract: A reversible thermal recording material permits recording having a clear contrast at a high sensitivity and erasing such images a number of times, at least 1,000 times, repetitively, and comprises a leuco dye, a reversible developer and a light-heat-converting dye, the light-heat-converting dye having a deterioration ratio of 20% or less when a laser beam having an oscillation wavelength of 830 nm is applied thereto repeatedly 1000 times at a temperature of 25° C. at an energy of 2 J/cm2 or being a phthalocyanine compound having a vanadyl group, and a method of recording an image comprises applying a laser beam to the reversible thermal recording material, wherein the colored leuco dye is achromatized with energy that is 25 to 65% of the energy of the laser beam employed for causing the leuco dye to develop a color.Type: GrantFiled: February 11, 2003Date of Patent: November 9, 2004Assignee: Mitsubishi Paper Mills LimitedInventor: Yoichiro Azuma
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Patent number: 6815680Abstract: A method and apparatus for displaying an image includes selecting a camera unit horizontal field of view (FOV) of about eighteen degrees and selecting a system magnification of between 0.4 and 1.0. The method and apparatus also includes determining an aspect ratio for the image based on the selected camera unit horizontal FOV and the selected system magnification, receiving energy from a scene for forming the image and displaying the image on a display.Type: GrantFiled: June 5, 2002Date of Patent: November 9, 2004Assignee: Raytheon CompanyInventor: Alexander L. Kormos
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Patent number: 6815681Abstract: An electron beam lithography apparatus, which uses a patterned emitter, includes a pyroelectric plate emitter that emits electrons using a patterned metal thin layer formed on the pyroelectric plate as a mask. When the emitter is heated, electrons are emitted from portions of the emitter covered with a patterned dielectric layer, and not from portions of the emitter covered with a patterned metal thin layer, and a pattern of the emitter is thereby projected onto a substrate. To prevent dispersion of emitted electron beams, the electron beams may be controlled by a permanent magnet, an electro-magnet, or a deflector unit. A one-to-one or x-to-one projection of a desired pattern on the substrate is thereby obtained.Type: GrantFiled: June 20, 2003Date of Patent: November 9, 2004Assignee: Samsung Electronics Co., Ltd.Inventors: Dong-wook Kim, In-kyeong Yoo, Chang-wook Moon, In-sook Kim
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Patent number: 6815682Abstract: Systems and methods for infrared sensing a compound's concentration in aqueous solution are provided. In various non-limiting embodiments, the invention provides infrared sensing of methanol's concentration in aqueous solution in connection with a fuel circulation process for a direct methanol fuel cell. In some embodiments, flow-through infrared sensing technique are provided. In other embodiments, window type infrared sensing techniques are provided. As a result of the infrared sensing, an accurate real-time measurement of the concentration of a compound of interest in aqueous solution is affordably obtained.Type: GrantFiled: December 28, 2001Date of Patent: November 9, 2004Assignees: E. I. du Pont de Nemours and Company, ABB Research Ltd.Inventors: Arnold Rabinovich, Evangelos Diatzikis, Jeffrey Mullen, Daryl Tulimieri
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Patent number: 6815683Abstract: THz imaging apparatus and methods are provided for rapidly and effectively examining a region of interest to determine the presence of specified compositions. The apparatus includes means for generating electromagnetic radiation of a desired terahertz frequency suitable for the examination, and for rendering the radiation incident at the region of interest. Detector means are provided at a plurality of points in a plane spaced from the region of interest, for detecting the terahertz radiation reflected from or transmitted through the region. Means are provided for converting the detected terahertz radiation to an image of the region of interest from which the presence of the specified compositions are determinable.Type: GrantFiled: May 23, 2003Date of Patent: November 9, 2004Assignee: New Jersey Institute of TechnologyInventors: John Federici, Robert Barat, Dale E. Gary
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Patent number: 6815684Abstract: Each detector element 44 in a solid state position sensitive detector (PSD) could provide a low charge efficiency per X-ray quantum; moreover, a comparatively high stray capacitance 104 could exist between the take-off electrode 90 and the semiconductor material 86, 88, 92 whereto it is connected. These effects will give rise to a low signal-to-noise ratio, thus degrading the signal. According to the invention, the analog charge amplifiers 58 are constructed in integrated bipolar technology and their read-out circuitry 48 is embodied in digital technology, preferably in a BICMOS process in the form of the Current Mode Logic (CML) technique. Moreover, the digital signal processing circuitry may be accommodated on the same substrate as the charge amplifiers.Type: GrantFiled: November 8, 2001Date of Patent: November 9, 2004Assignee: PANalytical B.V.Inventor: Raymond Wilhelmus Herman Johannes Verbruggen
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Patent number: 6815685Abstract: A photodetector and a method for detecting radiation are disclosed. The photodetector comprises a zone of a semiconductor material suitably doped to collect photogenerated charges, coupled in parallel to a capacitance between a ground voltage and a sensing node. A metal oxide semiconductor (MOS) transistor is coupled at its source and a drain between the sensing node and a supply voltage, and a means for applying a predetermined voltage to the gate of the transistor Ls provided. In operation, the capacitance is first charged so that the magnitude of a voltage at the sensing node is greater than a transition voltage magnitude, and a predetermined gate voltage is applied. The transistor then is non-conductive, and a photocurrent of a magnitude dependent on the intensity of incident radiation flows through the zone of semiconductor material, discharging the capacitance and causing the sensing node voltage to vary substantially linearly with the photocurrent magnitude.Type: GrantFiled: October 1, 2002Date of Patent: November 9, 2004Assignee: Photonfocus AGInventor: Martin Wäny
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Patent number: 6815686Abstract: A spherical actinometer integrates the omnidirectional radiant flux over time to obtain the radiant energy or fluence incident on the sphere utilizing a small spherical vessel containing a solution that responds to germicidal radiation but not ambient room light. In one embodiment the actinometric solution, is an aqueous mixture of iodide and iodate that is optically opaque at 254 nm but insensitive radition above 330 nm. The UV-induced formation of triiodide, is facilitated by the presence of iodate that acts as an electron acceptor. The formation of triiodide, which is easily measured spectroscopically with a photometer, occurs with a quantum yield of 0.75 for 254 nm radiation at 21° C. The actinometeric measurement of UV fluence using the system is substantially independent of the size of the measuring device.Type: GrantFiled: August 27, 2001Date of Patent: November 9, 2004Assignee: Riverbend Instruments, Inc.Inventors: Stanley D. Echols, Ronald Rahn
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Patent number: 6815687Abstract: A high-speed, three-dimensional, gamma-ray imaging method and system as well as a detector and array of such detectors for use therein are provided which characterize radioactivity distributions in nuclear and radioactive waste and materials facilities by superimposing radiation images on a view of the environment using see-through display screens or shields to provide a stereoscopic view of the radiation. The method and system provide real-time visual feedback about the locations and relative strengths of radioactive sources. The method and system dynamically provide continuous updates to the displayed image illustrating changes, such as source movement. A pair of spaced gamma-ray cameras of a detector subsystem function like “gamma eyes”. A pair of CCD cameras may be coupled to the detector subsystem to obtain information about the physical architecture of the environment.Type: GrantFiled: April 14, 2000Date of Patent: November 9, 2004Assignee: The Regents of the University of MichiganInventors: Clair J. Branch-Sullivan, Kimberlee J. Kearfott, Bozidar Stojadinovic, Douglas S. McGregor
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Patent number: 6815688Abstract: A device for guiding a charged particle beam comprising a first superconducting nano-channel. In one embodiment, the device comprises a superconducting nano-channel consisting essentially of a superconducting material in the form of a tube having a proximal end, a distal end, and a bend disposed between said proximal end and said distal end. In another embodiment, the device is formed by a substrate, a first area of superconducting material coated on the substrate and having a first edge, a second area of superconducting material coated on the substrate and having a second edge, the first edge of the first area of superconducting material and the second edge of the second area of superconducting material are substantially parallel. In another embodiment, the device comprises a superconducting nano-channel formed by a plurality of nano-scale superconducting rods disposed around a central region.Type: GrantFiled: July 8, 2003Date of Patent: November 9, 2004Inventors: Conrad W. Schneiker, Robert Gray
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Patent number: 6815689Abstract: A system and method for suppressing secondary electron counts in systems that count particles. The secondary electrons are produced in a foil or other secondary electron emitting surface. A suppression grid is placed in front of the particle detector. The grid is held at an applied voltage that prevents some portion of the electrons from being transmitted through the grid and reaching the detector. The applied voltage may be adjusted and varied in a manner that provides a predicable electron count and an enhanced dynamic range of measurements at the detector.Type: GrantFiled: December 12, 2001Date of Patent: November 9, 2004Assignee: Southwest Research InstituteInventor: David John McComas
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Patent number: 6815690Abstract: An ion source includes an anode and/or cathode which is/are coated with a conductive coating. The coating has a sputtering yield less than that of an uncoated anode and/or cathode, so that erosion of the resulting anode and/or cathode in the source is reduced during source operation. Example coating materials for the anode and/or cathode of the ion beam source include metal borides including but not limited to TiB2 and ZrB2.Type: GrantFiled: July 23, 2002Date of Patent: November 9, 2004Assignee: Guardian Industries Corp.Inventors: Vijayen S. Veerasamy, Rudolph Hugo Petrmichl, Henry A. Luten
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Patent number: 6815691Abstract: A carousel and first and second members have common axes in a first direction. The carousel, preferably cylindrical, has a ring-shaped configuration defined by inner and outer diameters. The first member has an outer diameter preferably contiguous to the carousel inner diameter. The second member has an inner diameter preferably contiguous to the carousel outer diameter. The carousel is divided into compartments by vanes. The carousel rotates at a substantially constant speed past radiation directed by an accelerator in the first direction. When a fault occurs in the system operation, (1) the carousel and radiation stop and (2) the carousel reverses in direction. When the fault is resolved, the carousel moves in the forward direction at the substantially constant speed and the radiation resumes at the position where the article was being irradiated at the time that the fault occurred.Type: GrantFiled: May 6, 2003Date of Patent: November 9, 2004Assignee: The Titan CorporationInventors: Gary K. Loda, Carl B. Eichenberger
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Patent number: 6815692Abstract: A radiation image storage panel having a deposited phosphor layer, wherein the phosphor layer comprises an alkali metal halide stimulable phosphor containing a small amount of oxygen atom and is annealed after deposition has high-sensitivity and gives a reproduced radiation image of high quality.Type: GrantFiled: January 21, 2003Date of Patent: November 9, 2004Assignee: Fuji Photo Film Co., Ltd.Inventors: Yasuo Iwabuchi, Keiko Neriishi
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Patent number: 6815693Abstract: Methods are disclosed for correcting proximity effects as affected by varying magnitudes of beam blur occurring at different respective locations in an image of a reticle subfield as projected onto the sensitive surface of a substrate. Local resizings of pattern-element profiles as defined on the reticle are made taking into consideration not only proximity effects arising from Coulomb interactions but also different magnitudes of beam blur occurring at different respective locations in a projected subfield. Beam blur is imparted by the projection-optical system and is a function of the magnitude of beam deflection, the location of pattern element(s) within the area of the exposed subfield, and the exposure-energy profile on the surface of the substrate being exposed. A resist-development energy threshold is established such that the edges of pattern elements as transferred to the wafer in response to the exposure-energy profile will be at their desired locations according to design specifications.Type: GrantFiled: February 20, 2001Date of Patent: November 9, 2004Assignee: Nikon CorporationInventors: Koichi Kamijo, Kazuya Okamoto, Teruaki Okino
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Patent number: 6815694Abstract: A method and apparatus are presented for detecting an effect of interactions of electromagnetic radiation with ultrasound radiation at different locations within a region of interest in a scattering medium to thereby enable imaging of said medium. A plurality of sequences of pulses of ultrasound radiation is transmitted towards a plurality of locations, respectively, in said region of interest within an X-Y plane perpendicular to axes of propagation of the ultrasound pulses. Said region of interest is illuminated with incident electromagnetic radiation of at least one wavelength. The phases of the ultrasound radiation or the phases of the electromagnetic radiation components are appropriately controlled in order to be enable identification of the interactions between the electromagnetic and ultrasound radiation that occur at different locations along the Z-axis.Type: GrantFiled: January 23, 2003Date of Patent: November 9, 2004Assignee: The State of Israel Atomic Energy Commission Soreq Nuclear Research CenterInventors: Bruno Gad Sfez, Aner Lev, Zvi Kotler
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Patent number: 6815695Abstract: A simplified reticle removal system used with an electron beam system. The simplified reticle removal system includes a reticle chamber having an angled opening and a maintenance panel removably or pivotably attached thereto. The angled opening provides access to a reticle stage housed within the reticle chamber. The angled opening further permits removal of the reticle stage from the reticle chamber without having to disassemble and remove the optics system of the electron beam system. This reduces maintenance and repair costs, as well as reduces down time of the electron beam system.Type: GrantFiled: January 28, 2002Date of Patent: November 9, 2004Assignee: Nikon CorporationInventors: W. Thomas Novak, Douglas C. Watson
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Patent number: 6815696Abstract: The present invention provides a beam stop for use in an ion implantation system that includes a base formed of a thermally conductive material, and a heat transfer layer formed of a semi-elastic material that is disposed on a surface of the base. The beam stop further includes one or more tiles, each formed of a thermally conductive refractory material, that are disposed on the semi-elastic layer so as to face an ion beam in the implantation system. The heat transfer layer transfers heat generated in the tile in response to ion beam impact to the base. The base in turn can be coupled to a heat sink to remove heat from the base. The thickness and the thermal conductivity of the base, and those of the heat transfer layer and the tile are chosen so as to ensure uniform expansion of the base and the tile when the beam stop is heated by ion beam impact.Type: GrantFiled: May 29, 2002Date of Patent: November 9, 2004Assignee: Ibis Technology CorporationInventors: Steven Richards, Christopher Berry, William Leavitt
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Patent number: 6815697Abstract: In an ion beam line having a mechanism for scanning an ion beam by an electric field or a magnetic field or in an ion beam line having a mechanism for forming a sheet-like or a ribbon-like ion beam, electrons are confined by the use of cusp magnetic fields generated by arranging permanent magnets. In a direction intersecting a beam traveling direction and a beam scanning direction or in a direction intersecting the beam traveling direction and a beam spread direction of the sheet-like or the ribbon-like beam, the electrons are supplied to neutralize electric charges.Type: GrantFiled: March 27, 2003Date of Patent: November 9, 2004Assignee: Sumitomo Eaton Nova CorporationInventors: Makoto Sano, Michiro Sugitani
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Patent number: 6815698Abstract: A charged particle beam exposure system comprising: a charged particle beam emitting device which generates charged particle beams with which a substrate is irradiated, the charged particle beam emitting device generating the charged particle beams at an accelerating voltage which is lower than that at which an influence of a proximity effect occurs; an illumination optical system which adjusts a beam diameter of the charged particle beams so that density of the charged particle beams is uniform; an character aperture in which an aperture hole is formed in a shape corresponding to a desired pattern to be written; a first deflector which deflects the charged particle beams by an electrostatic field that the charged particle beams have a desired sectional shape and travel towards a desired aperture hole and which returns the charged particle beams passing through the aperture hole to an optical axis thereof; a reducing projecting optical system which forms a multi-pole lens field so that the charged particle beType: GrantFiled: August 3, 2001Date of Patent: November 9, 2004Assignee: Kabushiki Kaisha ToshibaInventors: Osamu Nagano, Yuichiro Yamazaki, Susumu Hashimoto, Motosuke Miyoshi
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Patent number: 6815699Abstract: A lithographic projection apparatus, in which movement of a substrate table in a plane is accomplished by a planar magnetic positioning device, has a mechanical limiter that limits rotation of the substrate table about a direction orthogonal to the plane.Type: GrantFiled: December 9, 2002Date of Patent: November 9, 2004Assignee: ASML Netherlands B.V.Inventors: Hernes Jacobs, Harmen Klaas Van Der Schoot, Petrus Matthijs Henricus Vosters, Ton De Groot
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Patent number: 6815700Abstract: The present invention provides a high energy photon source. A pair of plasma pinch electrodes are located in a vacuum chamber. The chamber contains a working gas which includes a noble buffer gas and an active gas chosen to provide a desired spectral line. A pulse power source provides electrical pulses at voltages high enough to create electrical discharges between the electrodes to produce very high temperature, high density plasma pinches in the working gas providing radiation at the spectral line of the source or active gas. Preferably the electrodes are configured co-axially. The central electrode is preferably hollow and the active gas is introduced out of the hollow electrode. This permits an optimization of the spectral line source and a separate optimization of the buffer gas. In preferred embodiments the central electrode is pulsed with a high negative electrical pulse so that the central electrode functions as a hollow cathode.Type: GrantFiled: July 3, 2002Date of Patent: November 9, 2004Assignee: Cymer, Inc.Inventors: Stephan T. Melnychuk, William N. Partlo, Igor V. Fomenkov, I. Roger Oliver, Richard M. Ness, Norbert Bowering, Oleh Khodykin
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Patent number: 6815701Abstract: A method and a device for measuring wear on the internal surfaces (12) of barrels (1), in particular weapon barrels. For a very precise determination of the wear on the internal surfaces (12) of barrels (1), a non-contacting scanning of the internal surface (12) of the respective barrel (1) to be checked is carried out with a light-spot triangulation sensor (6), to determine the respective distance between the internal surface (12) and the barrel axis (7) for selected sensor positions. The contour of the internal surface (12) of the respective barrel (1) is then determined from the detected distance changes. It has proven advantageous if the measured distance values are displayed on a monitor (23) in the form of a C-image, wherein different distance ranges are characterized with different colors, so that faulty surface areas can immediately be recognized optically.Type: GrantFiled: March 6, 2003Date of Patent: November 9, 2004Assignee: Rheinmetall W&M GmbHInventors: Gert Schlenkert, Horst Reckeweg, G{overscore (o)}ran Vogt
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Patent number: 6815702Abstract: A method and apparatus is disclosed to precisely locate an edge of an imageable plate mounted on a drum or other support surface. A light source and light sensor are used to measure the difference in reflectivity between the plate and the support surface. The drum or support surface contains at least one groove to increase the difference in reflectivity between the plate and the support surface. The groove may also contain an anti-reflecting layer to further increase the difference in reflectivity. The groove may also have a geometric shape that causes incident light to be directed away from the light sensor.Type: GrantFiled: October 23, 2001Date of Patent: November 9, 2004Assignee: Agfa CorporationInventors: Arnfried Kiermeier, Norman F. Rolfe
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Patent number: 6815703Abstract: A cassette is provided having an emitter for emitting an erasing light to release residual radiation energy from a stimulable phosphor sheet stored therein does not need to be conveyed to a power supply unit, and in which an emission time of the emitter can be controlled appropriately. The cassette storing the sheet for recording a radiation image therein and comprising a stimulable phosphor layer formed on a substrate thereof has the emitter for irradiating the erasing light on the sheet and a power supply for causing the emitter to emit the erasing light, and a control circuit for controlling the emission time.Type: GrantFiled: November 8, 2001Date of Patent: November 9, 2004Assignee: Fuji Photo Film Co., Ltd.Inventor: Naoto Iwakiri
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Patent number: 6815704Abstract: A phase change memory device, and method of making the same, that includes contact holes formed in insulation material that extend down to and exposes source regions for adjacent FET transistors. Spacer material is disposed in the holes with surfaces that define openings each having a width that narrows along a depth of the opening. Lower electrodes are disposed in the holes. A layer of phase change material is disposed along the spacer material surfaces and along at least a portion of the lower electrodes. Upper electrodes are formed in the openings and on the phase change material layer. Voids are formed into the spacer material to impede heat from the phase change material from conducting through the insulation material. For each contact hole, the upper electrode and phase change material layer form an electrical current path that narrows in width as the current path approaches the lower electrode.Type: GrantFiled: September 4, 2003Date of Patent: November 9, 2004Assignee: Silicon Storage Technology, Inc.Inventor: Bomy Chen