Patents Issued in April 6, 2006
  • Publication number: 20060072061
    Abstract: In an active matrix display device, particularly an AMLCD, having an array of display pixels (8) and comprising pixel electrodes (16), associated switches (22), and address lines (18, 20) carried on a first substrate (10), a common electrode (26) carried on a second substrate (12), a drive circuit (40, 80) carried on the first substrate (10) including at least one conductor line (96) providing a drive voltage for the common electrode (26) and to which the common electrode (26) is connected (92), the common electrode (26) on the second substrate is utilised to provide also electrical connection between the one conductor line (96) and at least one other circuit element (37) carried on the first substrate (10). The use of the common electrode in this way assists in avoiding problems due to resistances of connections formed on the first substrate. The connection to a storage capacitor line (37, 36) may benefit especially.
    Type: Application
    Filed: November 19, 2003
    Publication date: April 6, 2006
    Inventors: Jason Hector, Steven Deane
  • Publication number: 20060072062
    Abstract: A liquid crystal display device includes first and second substrates facing each other and spaced apart by a uniform cell gap, an array element having a switching element on the first substrate and a first transparent electrode connected to the switching element, a first patterned spacer disposed on the array element having a first height less than the uniform cell gap, a second transparent electrode under the second substrate, a second patterned spacer disposed beneath the second transparent electrode, the second patterned spacer having a second height less than the uniform cell gap and connected to the first patterned spacer, a first alignment layer covering the first patterned spacer, a second alignment layer covering the second patterned spacer, and a liquid crystal material layer interposed between the first and second alignment layers, wherein the first and second spacers are connected to each other and a summation of the first and second heights of the first and second patterned spacers is equivalent t
    Type: Application
    Filed: November 21, 2005
    Publication date: April 6, 2006
    Inventors: Ku-Hyun Park, Sang-Ho Choi
  • Publication number: 20060072063
    Abstract: A nano-liquid crystal on silicon (nano-LCoS) chip having carbon nanotube (CNT) pillars that are grown on a glass substrate thereof. As the heights of the CNT pillars are uniform, the CNT pillars can function as spacers providing a uniform cell gap between the glass substrate and a silicon chip of the nano-LCoS chip. Also, being excellent electrical conductors, CNT pillars can form a part of the electrical connection between an outside voltage source and the indium tin oxide (ITO) layer formed on the glass substrate. The nano-LCoS chip includes nano-LCoS alignment keys that are formed in the silicon chip and connected to the CNT pillars. By applying the same voltage to the ITO layer and keys, a portion of the liquid crystal activated by the keys become transparent fiduciary marks for optical alignment of nano-LCoS chips.
    Type: Application
    Filed: September 12, 2005
    Publication date: April 6, 2006
    Inventors: Gihong Kim, Charles Koo
  • Publication number: 20060072064
    Abstract: A method of manufacturing a liquid crystal display includes depositing an insulating layer on a substrate, aligning the substrate with a mask having a transmittance that gradually increases along a predetermined direction, and forming a slope member by patterning the insulating layer with lithography using the mask.
    Type: Application
    Filed: September 29, 2005
    Publication date: April 6, 2006
    Inventor: Soo-Jin Kim
  • Publication number: 20060072065
    Abstract: An eyecup for glasses designed to substantially fit against the face of the wearer. The eyecup may also comprise a lens therein.
    Type: Application
    Filed: September 30, 2003
    Publication date: April 6, 2006
    Inventors: Ernest Fernandez, Aaron Markovitz
  • Publication number: 20060072066
    Abstract: Goggles having handless pivotable lenses are provided. The goggles include at least one pair of lenses and a frame. The frame has a chin strap attached thereto. The chin strap enables a wearer to rotate the lenses such that the wearer may maintain the goggles placed on his or her head while not looking through the lenses. The chin strap is positioned underneath the wearer's chin. When the wearer does not wish to use at least one pair of lenses, the wearer opens his or her mouth to rotate the lenses. A linkage assembly operably coupled to the lenses and chin strap operate to rotate the lenses when the wearer opens his or her mouth. When the wearer closes his or her mouth, a spring provided in the linkage assembly facilitates rotation of the lenses back to an original position. This Abstract is provided for the sole purpose of complying with the Abstract requirement rules that allow a reader to quickly ascertain the subject matter of the disclosure contained herein.
    Type: Application
    Filed: October 1, 2004
    Publication date: April 6, 2006
    Inventor: Miko Mihelic
  • Publication number: 20060072067
    Abstract: Disclosed is an eyewear retention system, which may include any of a variety of electronics, including telecommunications receivers, transmitters, electronic storage devices, and head-up display driving circuitry.
    Type: Application
    Filed: November 22, 2005
    Publication date: April 6, 2006
    Inventors: James Jannard, Jeffrey Julian
  • Publication number: 20060072068
    Abstract: An eye cover for use as sunglasses, eye shields, eye glasses or other eye wear, is formed of an elongated and flexible sheet of transparent plastic material adapted to extend horizontally over both eyes and temples of a wearer, to a location forward of the ears of the wearer. The sheet has a central nose engaging area, a pair of viewing areas on opposite sides of the nose engaging area and a pair of temple engaging areas each extending from one of the viewing areas. Each of the temple areas have inner surfaces and are bent for use into an arcuate position with the inner surfaces engaging the temples of a wearer. A bend retaining mechanism, such as wires connected to the perimeter of the sheet, form and resiliently maintain the arcuate position of each of temple area.
    Type: Application
    Filed: November 22, 2005
    Publication date: April 6, 2006
    Inventor: Luke Landers
  • Publication number: 20060072069
    Abstract: The present invention relates to wettable silicone hydrogels comprising the reaction product of at least one siloxane containing component and at least one reactive, hydrophilic polymeric internal wetting agent. The present invention further relates to silicone hydrogel contact lenses comprising at least one oxygen permeable component, and an amount of reactive, hydrophilic polymeric internal wetting agent sufficient to impart wettability to said device.
    Type: Application
    Filed: September 30, 2004
    Publication date: April 6, 2006
    Inventors: Walter Laredo, Stephen Arnold, Kevin McCabe, Susan Orr, Azaam Alli
  • Publication number: 20060072070
    Abstract: A method of the manufacture of an optical lens element. The method comprises providing a fixable liquid (A) separated from a different liquid (B) by a meniscus (12); varying a curvature of the separating meniscus (12) and fixing the shape of the fixable liquid when the curvature has a desired configuration.
    Type: Application
    Filed: October 31, 2003
    Publication date: April 6, 2006
    Applicant: Koninklijke Philips Electronics N.V.
    Inventors: Stein Kuiper, Edwin Wolterink
  • Publication number: 20060072071
    Abstract: A system and method of screening films. The method includes the first step of displaying a movie print with multiple soundtracks on a display screen. A plurality of screening rooms, each with a view of the display screen, is provided. Separate audio signals from each soundtrack is generated and one or more of the audio signals is transmitted to one or more of the screening rooms. A system for screening films includes a display; a plurality of screening rooms, wherein each screening room includes a view of the display; a movie playback system; and, a sound distribution system coupled to receive audio signals from the movie playback system and to distribute the audio signals to the plurality of screening rooms.
    Type: Application
    Filed: November 21, 2005
    Publication date: April 6, 2006
    Applicant: NT AUDIO VISUAL SUPPLY, INC.
    Inventors: Tom McCormick, Leo O'Donnell, Shawn Jones
  • Publication number: 20060072072
    Abstract: A method for a film transfer device includes receiving a digital image in the film transfer device, wherein the digital image comprises a plurality of square pixels, wherein the digital image comprises a first number of pixels in a horizontal direction and a second number of pixels in a vertical direction, and wherein the digital image comprises a non-anamorphic version of an image, and optically converting the digital image into an optical output image to film media in the film transfer device, wherein the optical output image is associated with a plurality of non-square pixels, wherein the optical output image is associated with the first number of pixels in the horizontal direction and the second number of pixels in the vertical direction, and wherein the optical output image comprises an anamorphic version of the image.
    Type: Application
    Filed: November 3, 2004
    Publication date: April 6, 2006
    Applicant: Pixar
    Inventors: Babak Sanii, James Burgess
  • Publication number: 20060072073
    Abstract: A method is disclosed for producing and exhibiting high-quality three-dimensional (3-D) motion pictures. Stereoscopic images are placed side by side on a strip of motion picture film, such images having been anamorphically compressed to fit into the 70 mm or other film format used for presentation. These images are then reciprocally expanded to produce the aspect ratio of the original images as photographed. A single strip of motion picture film is used and images intended to be seen through the left or right eye of the viewer of such films are slightly different, to create the 3-D effect. To minimize the amount of light projected onto the screen, projection is accomplished by use of a projector capable of accomplishing pulldown between frames in five milliseconds of less and equipped with a single 0-bladed shutter at high frame rates, specifically 48 frames per second or higher. The method described here allows for screen sizes considerably larger than those currently in use for theatrical 3-D presentation.
    Type: Application
    Filed: August 28, 2003
    Publication date: April 6, 2006
    Inventor: Robert Weisgerber
  • Publication number: 20060072074
    Abstract: According to the present invention, there is provided an image display device including a non-luminous reflection type spatial light modulating element, illuminating system to illuminate the reflection type spatial light modulating element and a projection lens and in which light from a light source (2) illuminates the reflection type spatial light modulating elements (14, 15) via first and second fly-eye integrators (9, 10). An unnecessary part, not modulated, of the light reflected by the reflection spatial light modulating elements (14, 15) and further by a reflector (4) for recycling. Since the fly-eye integrators (9, 10) are displaced in relation to their optical axes, it is possible to utilize the light with an improved efficiency and prevent any nonuniform illumination from taking place.
    Type: Application
    Filed: November 28, 2003
    Publication date: April 6, 2006
    Applicant: Sony Corporation
    Inventors: Hiroaki Matsui, Tomoya Yano, Yukio Ohmura
  • Publication number: 20060072075
    Abstract: The invention relates to a projection system (10) for projecting an image onto a screen (16). The system (10) comprises a main video projector (14) arranged to project a main image onto the screen (16), and further a contrast correction projector (12) arranged to project a correction image onto the screen (16) to compensate for imperfections in the image projected by the main video projector (14). The correction projector (12) may be a cheap and simple projector using for its light source light emitting diodes or stray light from the main projector. Typically, the correction projector (12) gives a steady image on the screen (16), only compensating for the imperfections in the main image displayed by the main projector.
    Type: Application
    Filed: November 5, 2003
    Publication date: April 6, 2006
    Applicant: Koninklijke Philips Electronics N.V.
    Inventor: Adrianus Johannes Stephanes De Vaan
  • Publication number: 20060072076
    Abstract: A method and system of selectively projecting images is disclosed. An illuminated area is created on a projection surface by directing a light source to the projection surface. The illuminated area is detected with a camera. Electrical signals are transmitted from the camera to the projector, the electrical signals being indicative of the position of the illuminated area in relation to the projection surface. Based on the received electrical signals, an image and a second image are projected on the projection surface. The image is projected on the illuminated area of the projection surface. The second image is projected on an area of the projection surface that is not illuminated by the light source. Applications of this method and system include the projection of background and foreground images creating the illusion of an x-ray beam, the projection of a normal image and an overblown image creating the illusion of a magnifying light beam.
    Type: Application
    Filed: October 4, 2005
    Publication date: April 6, 2006
    Inventors: Lanny Smoot, Alfredo Ayala, William McArdle, Arthur Tanaka, Don Kravitz, James Frankenberger, Deborah Kurth, Kenneth Knowles
  • Publication number: 20060072077
    Abstract: A rear projector that can be made slim and compact and can prevent image reversal. The rear projector includes a cathode ray tube to scan light and generate an image, a projection lens unit to magnify and project the image generated by the cathode ray tube, a screen on which the projected image is formed, and a reflection optical system interposed between the projection lens unit and the screen to change a path of projected light. The cathode ray tube and the reflection optical system are arranged such that a raster direction of the cathode ray tube and a direction along which the image is formed on the screen are parallel or substantially parallel to each other.
    Type: Application
    Filed: July 26, 2005
    Publication date: April 6, 2006
    Inventors: Seok-il Yoon, Sung-gi Kim, Young-il Kah
  • Publication number: 20060072078
    Abstract: An illumination unit includes a first heat conducting plate and a plurality of light source modules to emit a plurality of lights having different colors, each light source module having at least one LED mounted on the first heat conducting plate and at least one corresponding collimator to collimate the lights emitted from the at least one LED.
    Type: Application
    Filed: September 23, 2005
    Publication date: April 6, 2006
    Inventors: Su-gun Kim, Kim, Ki-boon Seong, Kye-boon Lee
  • Publication number: 20060072079
    Abstract: A micro-mirror light modulator and associated projection display system. The projection display system includes a light source, a linear light source illumination system that transforms a light emitted from the light source into a thin linear light, a micro-mirror light modulator that selectively diverts the direction of the incident thin linear light to create reflected light, a light transmitting layer that selectively transmits or filters out the reflected light, a condenser lens that focuses the light transmitted by the light transmitting layer, and a scanner that scans the focused light such that the light forms a projected image. The micro-mirror light modulator includes a reflection electrode that deflects toward an electrode when a voltage is applied. The reflection electrode reflects light depending on its deflection state. The micro-mirror light modulator is driven by low voltage, is easily fabricated such that the cost is reduced, and exhibits enhanced image contrast.
    Type: Application
    Filed: September 30, 2005
    Publication date: April 6, 2006
    Applicant: LG Electronics Inc
    Inventor: Chan Young Park
  • Publication number: 20060072080
    Abstract: A ceiling-mounted projection system has a projector mounted above the ceiling, and a periscope assembly that can be moved by a motor along a vertical axis between a raised position in which the periscope assembly is retracted into the ceiling and a lowered position in which the lower portion of the periscope assembly extends below the ceiling. An upper mirror is mounted on the upper portion of the periscope assembly and aligned to reflect images from the projector in a downward direction when the periscope assembly is in the lowered position. A lower mirror is mounted on the lower portion of the periscope assembly and aligned to reflect the images from the upper mirror onto a viewing surface when the periscope assembly is in the lowered position.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Inventors: Mervin Perkins, Eric Perkins, Lawrence Duarte, Kenneth Bowers
  • Publication number: 20060072081
    Abstract: A projection device comprises a plurality of elements, a base seat and an outer cover. The elements are used for respectively executing specific functions to cause the projection device to operate. The base seat comprises a first side surface and a second side surface, an element fixing structure is disposed on the first side surface and used for fixing the elements, and a first fixing device is disposed on the second side surface. The outer cover comprises a third side surface and a fourth side surface, the third side surface is used for forming an outlook surface and a second fixing device is disposed on the fourth side surface. The elements are installed on the element fixing structure, the first fixing device and the second fixing device are combined together when the projection device is assembled.
    Type: Application
    Filed: September 16, 2005
    Publication date: April 6, 2006
    Applicant: Coretronic Corporation
    Inventors: Yi-Hsiung Peng, Wen-Min Huang, Wen-Panz Tsai, Jung-Chi Chen, Tsan-Fu Tseng
  • Publication number: 20060072082
    Abstract: A heat treatment apparatus for manufacturing a liquid crystal display panel through an in-situ process includes a body and a hardening unit, an annealing unit, and a transferring unit disposed on the body. The hardening unit heats a sealing member within a liquid crystal display panel to harden the sealing member. The annealing unit anneals liquid crystal within the liquid crystal display panel sealed by the sealing member. The transferring unit transfers the liquid crystal display panel between the hardening unit and the annealing unit. Therefore, the sealing member may be hardened and the liquid crystal may be sealed through an in-situ process to enhance productivity.
    Type: Application
    Filed: September 22, 2005
    Publication date: April 6, 2006
    Inventors: Youn-Ho Lee, Min-Young Won, Jin-Whal Kim
  • Publication number: 20060072083
    Abstract: A projector includes a light source, an electro-optic device, a projection device, and a first seat and a second seat. The electro-optic device has plural light modulation devices that modulate lights emitted from the light source according to image information, and a light combining device, provided with plural light incident-side end faces to which the plural light modulation devices are attached, that combines respective lights modulated in the plural light modulation devices to form an optical image. The projection device includes at least one lens and a lens barrel accommodating and holding the lens, and projects the optical image formed in the electro-optic device in an enlarged form. The lens barrel includes a flange portion that expands outward in a base end portion in a projection direction.
    Type: Application
    Filed: October 5, 2005
    Publication date: April 6, 2006
    Applicant: Seiko Epson Corporation
    Inventor: Hiroyuki Meguro
  • Publication number: 20060072084
    Abstract: A method for the removal of a deposition on an optical element of an apparatus including the optical element includes providing an H2 containing gas in at least part of the apparatus includes producing hydrogen radicals from H2 from the H2 containing gas; and bringing the optical element with deposition into contact with at least part of the hydrogen radicals and removing at least part of the deposition. Further, a method for the protection of an optical element of an apparatus including the optical element includes providing a cap layer to the optical element by a deposition process; and during or after use of the apparatus, removing at least part of the cap layer from the optical element in a removal process as described above. The methods can be applied in a lithographic apparatus.
    Type: Application
    Filed: October 4, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Maarten Marinus Johannes Van Herpen, Vadim Banine, Johannes Hubertus Moors, Carolus Ida Spee, Derk Jan Klunder
  • Publication number: 20060072085
    Abstract: A lithographic apparatus is disclosed. The apparatus includes a cleaning system for cleaning a component in the lithographic apparatus in situ. The cleaning system is arranged to provide a cleaning environment in proximity of a predetermined position on a component to be cleaned. The system is also arranged to provide the cleaning environment substantially independent of a type of contamination present at the predetermined position.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Rene Theodorus Compen, Joost Jeroen
  • Publication number: 20060072086
    Abstract: Exposure equipment adapted for use in the manufacture of semiconductor devices and a related control are disclosed. A wafer stage in the exposure equipment comprises an image sensor adapted to detect patterned light from the reticle. Image data corresponding to the detected patterned light is compared to reference image data to verify a state of overlay mismatch of reticle pattern accuracy prior to wafer exposure.
    Type: Application
    Filed: August 30, 2005
    Publication date: April 6, 2006
    Inventor: Soo-Han Kim
  • Publication number: 20060072087
    Abstract: An embodiment of the invention may be applied to measure the positions of features in a alignment region on a mask with a sensor. The positions of the features in the alignment region are known from the design. A feature of which the position is measured, is identified by comparing the relative positions between measured features with relative positions known from the design. The known position of the identified feature is subtracted from a measured position of the identified feature to give the position of the mask.
    Type: Application
    Filed: October 1, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Jacob Frederik Klinkhamer, Anastasius Jacobus Bruinsma, Martinus Hendrikus Leenders, Hubert Van Mierlo
  • Publication number: 20060072088
    Abstract: A lithographic apparatus is provided in which exposure is carried out by projecting through an aqueous solution of alkali metal halide(s), the solution being in contact with the substrate to be exposed.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.
    Inventors: Matthew Lipson, Marcel Mathijs Dierichs, Sjoerd Nicolaas Donders, Johannes Catharinus Mulkens, Bob Streefkerk, Ronald Wilklow, Roel De Jonge
  • Publication number: 20060072089
    Abstract: In a lithographic apparatus, a measurement of the position of an object in an ambient space by an object position measuring system which is influenced by pressure variations in the ambient space, is corrected by an accurate measurement of the pressure in the ambient space. A reference pressure volume may be provided, having a fluid connection with predetermined flow characteristics to the ambient space. A pressure difference is measured between a pressure in the reference pressure volume and an ambient pressure in the ambient space. The absolute pressure in the reference pressure volume is added to the pressure difference to determine a change of pressure in the ambient space. Alternatively, the pressure difference is integrated over time for determining a change of pressure in the reference pressure volume, and this change of pressure in the reference pressure volume is added to the pressure difference to determine a change of pressure in the ambient space.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Emiel Eussen, Tjarko Van-Empel, Wouter Pril
  • Publication number: 20060072090
    Abstract: A lithographic apparatus includes an illumination system configured to condition a radiation beam; a support configured to support a patterning device, the patterning device being configured to impart the radiation beam with a pattern in its cross-section to form a patterned radiation beam; a substrate table configured to hold a substrate; and a projection system configured to project the patterned radiation beam onto a target portion of the substrate, wherein the radiation beam is reflected from at least one grazing incidence mirror that enhances the spectral purity of the radiation beam.
    Type: Application
    Filed: October 6, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventor: Levinus Pieter Bakker
  • Publication number: 20060072091
    Abstract: An exposure apparatus includes plural light modulators that are arranged in parallel, each of which includes an element for modulating a phase distribution of incident light by providing the incident light with a phase difference, and plural projection optical systems that are arranged in parallel, each of which corresponds to each light modulator and projects a pattern formed by a corresponding one of the light modulators onto an object to be exposed.
    Type: Application
    Filed: September 29, 2005
    Publication date: April 6, 2006
    Inventor: Seima Kato
  • Publication number: 20060072092
    Abstract: In order to adjust the optical axis of a light beam L1 in an exposure apparatus, on a support body in an XYZ three-dimensional coordinate system are mounted: a first mirror 10 having a reflective surface M1 obtained by rotating a plane parallel to the XY plane around an axis 11 parallel to the Y axis by an angle of ?; and a second mirror 20 having a reflective surface M2 obtained by rotating a plane parallel to the XZ plane around an axis 21 parallel to the X axis by an angle of ?. There are provided: position adjustment means for moving the entire support body having the two mirrors parallel to the XY plane; and angle adjustment means for adjusting the angle of the second mirror 20. The incident light L1 is reflected on the reflective surfaces M1 and M2 to be output as an outgoing light L3, where it is possible to perform an optical axis adjustment concerning position and angle by controlling the position adjustment means and the angle adjustment means.
    Type: Application
    Filed: May 12, 2005
    Publication date: April 6, 2006
    Inventors: Yoshinori Tabata, Toshihide Ito, Takeshi Kawakami, Tsuyoshi Kashiwagi, Tsuyoshi Yamauchi
  • Publication number: 20060072093
    Abstract: A system and method is used to pattern a substrate. A projection beam received from a radiation system is patterned using an array of individually controllable elements. A portion of the projection beam is directed directly onto one of the individually controllable elements and collecting radiation reflected therefrom using each one of a first array of focusing elements. An image of the first array of focusing elements is projected onto a second array of focusing elements using a projection system, such that radiation reflected from one of the individually controllable elements is projected via one of the focusing elements in the first array of focusing elements and the projection system to one of the focusing elements in the second array which focuses the radiation onto a spot on the substrate.
    Type: Application
    Filed: November 29, 2005
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventor: Pieter de Jager
  • Publication number: 20060072094
    Abstract: An exposure apparatus includes a beam splitter for splitting light from a light source into first and second beams, a spatial light modulator, arranged in an optical path for the first beam, for modulating a phase distribution of the first beam, a beam coupler for coupling the first beam with the second beam, a projection optical system for projecting a pattern of the spatial light modulator onto a substrate using light from the beam coupler, and a controller for supplying a modulation signal to the spatial light modulator, wherein the spatial light modulator has a one-dimensionally or two-dimensionally arranged pixels, each pixel has plural reflective elements, and the reflective elements in the same pixel displace in the same direction simultaneously.
    Type: Application
    Filed: September 27, 2005
    Publication date: April 6, 2006
    Inventor: Tokuyuki Honda
  • Publication number: 20060072095
    Abstract: An exposure method and apparatus simultaneously transfer patterns with various pitches with high resolution. On the pupil surface of an illumination system, nine areas are set. The nine areas are a first area including the optical axis, four second areas each smaller than the first area and arranged along a first circumference surrounding the first area, and four third areas each smaller than the first area and arranged along a second circumference surrounding the first circumference and arranged along a second circumference. The distribution of intensity of light over the pupil surface is so set that the intensities of light over the nine areas are approximately equal to one another, and the intensity of light over the other area is smaller than those over the nine areas. This distribution of intensity of light is set using a diffraction optical element or a diaphragm.
    Type: Application
    Filed: October 11, 2005
    Publication date: April 6, 2006
    Applicant: NIKON CORPORATION
    Inventors: Takehito Kudo, Shigeru Hirukawa
  • Publication number: 20060072096
    Abstract: A wafer may be aligned with an imaging plate including an alignment grating with a pitch P. A pupil filter in the pupil plane of the optical system may be used so that the periodicity of the intensity of light from the alignment grating is less than P at the wafer plane. Thus, an alignment pattern on the wafer having a pitch smaller than the pitch of the alignment grating may be used. For example, the intensity periodicity at the wafer plane may be P/2. In an implementation, a pupil filter may be sized and positioned to block a zero-th order maximum of light transmitted through the alignment grating at the pupil plane. The pupil filter may be sized and positioned to allow first order maxima of the light to pass. The alignment system may be used with transmission or reflection optics.
    Type: Application
    Filed: November 23, 2005
    Publication date: April 6, 2006
    Inventor: Manish Chandhok
  • Publication number: 20060072097
    Abstract: Pupil intensity distribution of an imaging system is measured by exposing an image field of a radiation detector with a bright feature, positioning the detector at a distance away from the image plane, and exposing the image field of the detector with a bright feature, resulting in a cumulative exposure of the image field of the detector from the two exposures. A characteristic of a spatial pattern in the cumulative exposure of the image field of the detector is then determined.
    Type: Application
    Filed: October 6, 2004
    Publication date: April 6, 2006
    Inventors: Franz Zach, Bo Wu, Abdurrahman Sezginer
  • Publication number: 20060072098
    Abstract: A positioning device for positioning an object table relative to a reference frame with a drive unit including a first part connectable to the reference frame and a second part for holding the object table is described. The drive unit is constructed to displace the object table in a first direction by generating a force in the first direction on the second part, and a torque acting on the second part about an axis substantially perpendicular to the first direction such that the resulting force of the force and the torque is directed substantially through the center of gravity of the assembly including the object table and the second part.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventor: Johannes Adrianus Dams
  • Publication number: 20060072099
    Abstract: An integrator of a vehicular radar system has multiple switches and multiple capacitors, which are connected with the switches, for each one of photoreceptive elements. The integrator integrates light reception signals, which are output from the photoreceptive elements, by switching the switches to a connected state one after another in a predetermined order at a predetermined time interval until a predetermined time passes after every emission of the laser light and by switching the switches to the connected state one after another in a predetermined order at a predetermined time interval if the laser light is emitted predetermined times. Thus, the integrator can integrate the light reception signals, which are output from the multiple photoreceptive elements, in parallel.
    Type: Application
    Filed: September 28, 2005
    Publication date: April 6, 2006
    Applicant: DENSO Corporation
    Inventor: Yoshiaki Hoashi
  • Publication number: 20060072100
    Abstract: A distance measuring system, comprising a laser light source for projecting a pulsed laser beam to an object to be measured, a photodetection element for receiving an external light reflected by the object to be measured and an internal light which is a divided part of said laser beam, a photodetection element including said photodetection element, and a control arithmetic unit for calculating a distance based on photodetection of the external light and the internal light received by said photodetection element, wherein said photodetection circuit forms non-detecting condition, and the non-detecting condition is formed before or after photodetection timing of the internal light.
    Type: Application
    Filed: October 4, 2005
    Publication date: April 6, 2006
    Inventor: Masaaki Yabe
  • Publication number: 20060072101
    Abstract: A system and method for measuring tip velocity of sprayed fuel in an engine includes a light source, a lens, a Charge-Coupled Device (CCD) camera, and a control unit. The lens allows light, which is emitted from the light source, to enter into a combustion chamber. The CCD camera photographs the shapes of the dispersion of the sprayed fuel. The control unit causes the light source to emit light two times by controlling the light source, acquiring a single frame image of the shapes of the dispersion of the sprayed fuel by controlling the CCD camera, and calculates the tip velocity of the sprayed fuel by processing the acquired image.
    Type: Application
    Filed: October 4, 2005
    Publication date: April 6, 2006
    Inventor: Young-Kug Park
  • Publication number: 20060072102
    Abstract: A data input device for use with a tracking surface having light-scattering properties with respect to the device. The device comprising a single laser having a modulated light beam. A beam splitter splits the modulated light beam into two light beams projected along separate paths toward the tracking surface. A portion of the light striking the tracking surface reflects back into a cavity of the single laser for self-mixing with the projected light, thereby altering first and second characteristics of the projected modulated light beam according to first and second directions associated with the tracking surface. A detector associated with the laser detects the altered first and second characteristics of the modulated light beam projected by the laser, and a controller responsive to the detector determines the relative movement of the tracking surface and data input device relative to one another as a function of the altered first and second characteristics detected by the detector.
    Type: Application
    Filed: September 17, 2004
    Publication date: April 6, 2006
    Inventors: Xie Jianping, Ming Hai, Zhao Tianpeng, Lv Liang, Gui Huaqiao, Yuan Kong, Craig Ranta
  • Publication number: 20060072103
    Abstract: An apparatus and method for automatically measuring characteristics of a hard disk drive carriage arm. The method provides a first measuring device for automatically measuring a first side of a carriage arm. A second measuring device for automatically measuring a second side of the carriage arm is also provided. The second measuring device operates in conjunction with the first measuring device to cancel a measurement contact bias. Measurement data from the first measuring device and the measurement data from the second measuring device are provided to a computing device, wherein the measurement data is automatically stored and manipulated by the computing device.
    Type: Application
    Filed: September 30, 2004
    Publication date: April 6, 2006
    Inventor: Alan Tegethoff
  • Publication number: 20060072104
    Abstract: The invention is directed to a method for determining the image quality of an optical imaging system and to the use of the method according to the invention for determining the influence of samples on the amplitude distribution and phase front distribution of the illumination light, of which the amplitude distribution is known in particular.
    Type: Application
    Filed: June 11, 2004
    Publication date: April 6, 2006
    Inventors: Thomas Engel, Herbert Gross
  • Publication number: 20060072105
    Abstract: Method and apparatus for optically testing the quality of objects such as silicon wafers which have a circular peripheral edge, wherein light is directed onto the edge region of the object, and the light radiating from the object due to reflection, refraction and/or diffraction is detected by means of a measuring unit which produces an image from the received light. Defects on and/or in the object are identified from the produced image.
    Type: Application
    Filed: November 16, 2005
    Publication date: April 6, 2006
    Inventor: Robert Wagner
  • Publication number: 20060072106
    Abstract: A non-polarization beam splitter is used for splitting optical paths of an illumination system and an image formation system. MTF characteristics independent of an orientation of a pattern on a sample is obtained by illumination with a circularly-polarized light by combining a polarizer and a ?/4 plate. A partial polarizer is put in the image formation system immediately after the non-polarization beam splitter, and high-order diffraction lights are taken in with the maximum efficiency and the transmission efficiency of the zero-order light is controlled to improve high frequency part of MTF.
    Type: Application
    Filed: October 5, 2005
    Publication date: April 6, 2006
    Inventors: Shigeru Matsui, Kei Shimura
  • Publication number: 20060072107
    Abstract: To enable differentiation between a particle and a ghost particle, a detector system is presented. The detector system is configured to output at least two detector signals corresponding to an intensity of radiation being incident on the detector system. If radiation is received from a ghost particle, not all of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a contaminating particle results in all signals having a level above a threshold level. Thus, it may be determined with a high accuracy whether a particle or a ghost particle is redirecting radiation towards the detector system.
    Type: Application
    Filed: October 5, 2004
    Publication date: April 6, 2006
    Applicant: ASML Netherlands B.V.
    Inventors: Johannes Onvlee, Peter Greve, Johannes Hendrikus Franssen
  • Publication number: 20060072108
    Abstract: To enable differentiation between a particle and a ghost particle, a detector system resolves radiation from a ghost particle from radiation from an actual particle. The detector system outputs at least two detector signals corresponding to intensities of radiation being incident on different parts of the detector system or the detector system outputs at least two detector signals corresponding to intensities of radiation with different wavelengths being incident on the detector system. If radiation is received from a ghost particle, not each of the at least two detector signals has a level above a predetermined threshold level, whereas radiation received from a particle results in the signals having substantially a same level above a threshold level.
    Type: Application
    Filed: October 4, 2005
    Publication date: April 6, 2006
    Applicant: ASML Nethderlands B.V.
    Inventors: Johannes Onvlee, Raimond Visser, Peter Greve, Johannes Franssen, Erwin Verhagen
  • Publication number: 20060072109
    Abstract: Hyperspectral imaging systems that may be used for imaging objects in three-dimensions with no moving parts are disclosed. A lenslet array and/or a pinhole array may be used to reimage and divide the field of view into multiple channels. The multiple channels are dispersed into multiple spectral signatures and observed on a two-dimensional focal plane array in real time. The entire hyperspectral datacube is collected simultaneously.
    Type: Application
    Filed: September 6, 2005
    Publication date: April 6, 2006
    Inventors: Andrew Bodkin, Andrew Sheinis, Adam Norton
  • Publication number: 20060072110
    Abstract: An optical monitoring system for determining the constituents of a sample or specimen. An absorption spectrum is obtained from a sample and is passed through one or more filters having a specified absorption spectrum defined by a single atom or a compound. If the filter's absorption spectrum is included in the sample's absorption spectrum, then the sample contains that atom or compound. The apparatus includes a switching assembly that sequentially places one or more filters into the light path to determine if the subject atom or compound is contained in the sample.
    Type: Application
    Filed: July 20, 2005
    Publication date: April 6, 2006
    Applicant: Neptec Optical Solutions, Inc.
    Inventors: Robert Lodder, John Carberry