Abstract: A projection exposure apparatus with a small size and low cost suitable for repeated pattern exposure. The apparatus includes an illumination system which irradiates light to a mask including plural columns of a mask pattern for repeated exposure to a member to form plural columns of an exposure pattern, a projection system which projects light from the mask onto the member, an exposure stage which moves the member, and a mask stage which moves the mask. The light irradiation and step driving of the exposure stage for moving the member by a movement amount equal to n times a pitch of the columns of the exposure pattern are alternately performed. The mask is moved by a movement amount equal to n times a pitch of the columns of the mask pattern with step driving of the exposure stage in early and later phases of the repeated exposure.

Abstract: A table configured to support a substrate has one or more projections which support the substrate. In an embodiment, the table also has a raised perimeter defining a space which is configured to be filled with a liquid. A pump is configured to remove liquid from the space via outlet passages to an optional inlet. The removal of liquid can create a pressure differential across the substrate which then clamps it in place. Liquid circulated to the inlet may be filtered by a filter to remove contaminants.

Abstract: A scanning exposure apparatus includes a projection optical system, a stage to move while holding a substrate, a measurement system to measure a position of the substrate in an optical axis direction of the projection optical system, a generation system to generate a driving signal, in which a change amount being controlled to be equal to or less than an upper limit value, to the stage based on the result of measurement by the measurement system, and a setting system to set the upper limit value based on a running status of the stage.

Abstract: An apparatus, system, and method for configuring a dual isolation system lithography tool is described. An isolated base frame is supported by a non-isolated tool structure. A wafer stage component is supported by the isolated base frame. The wafer stage component provides a mount for a semiconductor wafer. A reticle stage component is supported by the isolated base frame. The reticle stage component provides a mount for a reticle. An isolated bridge provides a mount for a projection optics. The isolated bridge is supported by the isolated base frame. Alternatively, an isolated bridge is supported by a non-isolated base frame. A wafer stage component is supported by the non-isolated base frame. A reticle stage component is supported by the non-isolated base frame. An isolated optical relay is supported by the non-isolated base frame. The isolated optical relay includes one or more individually servo controlled framing blades.

Abstract: An exposure system for manufacturing flat panel displays (FPDs) includes a reticle stage adapted to support a reticle. A substrate stage is adapted to support a substrate. A reflective optical system is adapted adapted to image the reticle onto the substrate. The reflective optical system includes a primary mirror including a first mirror and a second mirror, and a secondary mirror. The reflective optical system has sufficient degrees of freedom for both alignment and correction of third order aberrations when projecting an image of the reticle onto the substrate by reflections off the first mirror, the secondary mirror, and the second mirror.

Abstract: A heat developing apparatus comprising an image exposure portion in which a heat development recording material containing a heat development photosensitive material or a photosensitive heat-sensitive recording material is exposed to light to thereby form a latent image, and a heat developing portion in which heat is applied to said latent image to thereby develop said latent image, wherein: said image exposure portion is provided as a sub scanning type structure including a planar guide plate disposed on one side with respect to a carrying path of said heat development recording material, and two drive rollers disposed on other side with respect to said carrying path and having axes substantially parallel to said carrying path and crossing a carrying direction of said heat development recording material substantially perpendicularly; and a plurality of light-emitting elements are embedded in said guide plate so as to be arranged in a main scanning direction to form a light-emitting element array.

Abstract: In a vehicle radar device, a predetermined number of received light signals output based on a predetermined number of laser beams radiated from a radar sensor are integrated by an integrator to produce an integrated signal. Integration of the predetermined number of received light signals helps amplify the received light signal components corresponding to the waves reflected by reflecting objects, making it possible to improve the sensitivity for detecting the waves reflected by the reflecting object. There are set a plurality of ranges of the received light signals to be integrated, each being shifted by one received light signal. This minimizes a drop in the angular resolution based on the integrated signals.

Abstract: A vehicular radar device capable of accurately detecting rain or the like or a road surface by discriminating between the rain or the like or the road surface and others. The vehicular radar device has a control circuit which performs a detection operation in an up state in which the visual field of the radar is shifted comparatively upwardly in the vertical direction so that the road surface is not detected, and determines that, from among detection data obtained during the up state, detection data which does not vary in reception intensity nor in reception delay time (distance data) for a predefined time is detection data relative to rain or the like.

Abstract: A SERS-active structure is disclosed that includes a substrate and at least one nanowire disposed on the substrate. The at least one nanowire includes a core including a first material and a coating including a SERS-active material. A SERS system is also disclosed that includes a SERS-active structure. Also disclosed are methods for forming a SERS-active structure and methods for performing SERS with SERS-active structures.

Abstract: The present invention provides a three-dimensional memory (3D-M) system-on-a-chip (SoC). It takes full advantage of the difference in the number of interconnect levels between the embedded processor (eP) and embedded memory (eM) in an SoC chip. The un-used interconnect space on top of the eM block is converted into 3D-M. This conversion incurs minimum additional cost, but with significant benefits: 3D-M can add a large storage capacity to the SoC chip and therefore the chip becomes more powerful.

Abstract: A method and apparatus for obtaining in-situ data of a substrate in a semiconductor substrate processing chamber is provided. The apparatus includes an optics assembly for acquiring data regarding a substrate and an actuator assembly adapted to laterally move the optics assembly in two dimensions relative to the substrate.

Abstract: A dioptric power distribution measuring device (1) measures the dioptric power distribution of a target lens. A computer (3) constructs a design lens spatial model in a virtual space, and calculates the dioptric power distribution of the design lens spatial model by performing simulation processing for incident/exit light for only the same point in the design lens spatial model as a measurement point on the target lens. The computer then compares the calculated dioptric power distribution with the dioptric power distribution of the target lens which is measured by the dioptric power distribution measuring device (1).

Abstract: To achieve the improvement in workability of attachment or detachment of a light receiving fiber for receiving a torque optical signal from a rotor, as well as the improvement in the light receiving efficiency of optical signals, a torque measuring apparatus comprises a rotor having a hollow body portion formed between a drive-side flange portion and a load-side flange portion; light emitting elements disposed on a periphery of the rotor for emitting optical signals based on an output from a torque detection unit arranged on a hollow portion of the hollow body portion; a diffusion means for diffusing the optical signals; and a light receiving fiber attached to a chassis disposed outside the rotor for receiving the optical signals via the diffusion portion.

Abstract: A device for optical examination of biological materials using radiation of a selected wavelength includes a substrate having a first surface and a second surface opposite to the first surface. The first surface includes a dense array of micro-optical elements arranged to provide increased intensity radiation or evanescent radiation. The first surface is in close proximity to the biological material being examined.

Abstract: A multi-channel, reconfigurable fiber-coupled Raman instrument uses fiber optic switches for laser and calibration light routing to facilitate automated calibration, diagnosis and operational safety. The system allows wavelength axis calibration on all channels; laser wavelength calibration (including multiple and/or backup laser options); fiber coupling optimization; fault detection/diagnosis; and CCD camera binning setup. In the preferred embodiment, dedicated calibration channels surround data channels on a 2-dimensional CCD dispersed slit image implemented using a unique cabling architecture. This “over/under” calibration interpolation approach facilitates quasi-simultaneous or sequential calibration/data acquisitions. CCD binning between sequential calibration and data acquisitions enables higher density multi-channel operation with tilted images based upon a multiplexed grating configuration.

Abstract: An optical system and method of exciting and measuring fluorescence on or in samples treated using fluorescent pigments using such an optical system having at least one first laser (1); a mirror (4); a deflection element (7); an optic (8); and a unit (10), which includes mirror (4) and optic (8) mounted fixed in relation to one another. The unit (10) is positioned so it is linearly movable back and forth along the optical axis (5) and is mechanically connected to an oscillating linear drive (11). The optic (8) additionally acts as a collimator and the mirror (4) additionally acts to deflect the collimated light (12) parallel to the optical axis (5).

Abstract: A laser-induced fluorescence analysis device (1), comprising a tube (2) including a channel, elements projecting an excitation light (13), optical collecting member (7), optical measurement elements (8) and a processing member (9) for producing an analysis result, the collecting member being mechanically coupled to one end of the channel, the tube being integrally made of a material with refractive index either lower than that of water, or higher than both that of water and that of ambient air so as to guide the fluorescence light along the channel in the channel and/or its wall up to the collecting member, which is designed to collect the fluorescence light propagated along the longitudinal direction of the channel.

Abstract: A holographic imaging spectrometer, apparatus, and/or method enables the projection of a two-dimensional (2D) slice (having spectral information) of a four-dimensional (4D) probing object. A 4D probing source object is illuminated to emit an optical field. A holographic element having one or more recorded holograms receives and diffracts the optical field into a diffracted plane beam having spectral information. Collector optics (e.g., an imaging lens) focuses the diffracted plane beam having spectral information to a 2D slice (having spectral information) of the 4D probing source object. The focused 2D slice having spectral information is projected onto a 2D detector array surface. In addition, the holographic element may have multiple multiplexed holograms that are arranged to diffract light from the corresponding slice of the 4D probing source object to a non-overlapping section of the detector.

Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.

Abstract: Method and apparatus for detecting biomolecular interactions. The use of labels is not required and the methods may be performed in a high-throughput manner. An apparatus for detecting biochemical interactions occurring on the surface of a biosensor includes a light source. A first optical fiber is coupled to the light source and illuminates the biosensor. A second optical fiber detects a wavelength reflected from the biosensor. A spectrometer determines spectra of a reflected signal from the biosensor.

Abstract: A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, there being apertures before the stage for supporting a material system, and thereafter, the system being present in an environmental control chamber.

Abstract: In order to perform a measurement operation of a pattern and a processing operation in parallel while the positions of two substrate stages are accurately measured and wire/hose units are prevented from becoming tangled, a substrate processing apparatus includes an alignment system for measuring the pattern arrangements of the substrates, a processing system disposed separately from the alignment system and used for processing the substrates, substrate stages which are able to support the substrates and move in an xy plane, and position measurement systems which measure the positions of the substrate stages. Four position measurement systems are arranged for the measurement in the x direction, and three position measurement systems are arranged for the measurement in the y direction. One of the position measurement systems for the measurement in the y direction is disposed at a side opposite to the remaining positioning measurement systems across the substrate stages.

Abstract: An alignment mark includes a first mark usable for global alignment measurement in the direction of a scribe line, and a second mark usable for pre-alignment measurement in a direction perpendicular to the direction of the scribe line. The first mark is formed by arranging a plurality of strip-shaped X measurement marks whose longitudinal direction is perpendicular to the direction of the scribe line. In the second mark, strip-shaped second measurement marks are arranged at the two ends of the first mark such that the longitudinal direction of the second measurement mark is perpendicular to that of the first measurement mark. The alignment mark can be shared by global alignment and pre-alignment, and applied to a narrow scribe line.

Abstract: Before performing observation with an optical scanning probe using a low-coherence light source and the like, a shutter is inserted in a reference light side optical path to create a state wherein interference light does not occur, in which state a reference member is set to a focal position of a converging optical system such that the output of a light detector is maximal by moving the reference member by a driving device at an observation light optical path side of an optical scanning probe, following which the shutter is opened, and the position of a mirror at the reference light side is moved and set such that the output of the light detecting means is maximal, thereby enabling the optical scanning observation apparatus to be set to a state of suitable optical properties, easily and smoothly.

Abstract: A system for inspecting components is provided. The system includes an image data system that generates image data of the component, such as from a position overlooking the top of a bumped wafer. An interferometry inspection system is connected to the image data system and receives the image data, and analyzes the image data to locate interference fringing that is used to determine the surface coordinates of the bump contacts.

Abstract: A system for measuring a displacement along a first axis includes an apparatus movable at least along a second axis perpendicular to the first axis, a measurement mirror mounted to the apparatus at an angle greater than 0° relative to the first axis, and an interferometer with a beam-splitter. The beam-splitter splits an input beam into a measurement beam and a reference beam, directs the measurement beam in at least two passes to the measurement mirror, and combining the measurement beam after said at least two passes and the reference beam into an output beam. At least exterior to the interferometer, the measurement beam travels in paths that are not parallel to the first axis.

Abstract: A measuring device for interferometric measurement of an optical imaging system that is provided for projecting a useful pattern, provided on a mask, into the image plane of the imaging system, includes a wavefront source for generating at least one wavefront traversing the imaging system; a diffraction grating, arrangeable downstream of the imaging system, for interacting with the wavefront reshaped by the imaging system; and a spatially resolving detector, assigned to the diffraction grating, for acquiring interferometric information. The wavefront source has at least one measuring pattern that is formed on the mask in addition to the useful pattern. The useful pattern may represent the structure of a layer of a semiconductor component in a specific fabrication step. The measuring pattern may be formed as a coherence-forming structure periodic in one or two dimensions.

Abstract: A system for calibrating a spatial light modulator array includes an illumination system and a spatial light modulator array that reflects or transmits light from the illumination system. A projection optical system images the spatial light modulator array onto an image plane. A shearing interferometer creates an interference pattern in the image plane. A controller controls modulation of elements of the spatial light modulator array. The shearing interferometer includes a diffraction grating, a prism, a folding mirror or any other arrangement for generating shear. The shearing interferometer can be a stretching shearing interferometer, a lateral shearing interferometer, or a rotational shearing interferometer. The shearing interferometer may include a diffraction grating with a pitch corresponding to a shear of the light by an integer number of elements. The projection optics resolves each element of the spatial light modulator array in the image plane.

Abstract: A method for studying a surface provided with relief features, wherein a measurement spectrum is taken and then compared with test spectra representative of arbitrary structures that are adjusted stepwise. A correlation over representative points of the spectra is selected while optimizing the determination by a hierarchized adjustment of the parameters.

Abstract: Apparatus for determining the thickness of a configuration having flat, parallel surfaces that are transparent, or nearly so, to pre-specified types of energy. Embodiments comprise a mechanism for illuminating a front surface with an energy source and mechanisms for measuring reflections of the illumination from a parallel back surface. The energy is contained in a spectrum of wavelengths, the energy being refracted in components at unique wavelengths, e.g., different colored light bands, and similarly reflected from the back surface. The measuring mechanisms, e.g., spectrometers, determine the relative lateral displacement between two spectral lines in the refracted and reflected beams to enable determination of thickness. Other characteristics of the material of the configuration may be ascertained, e.g., chemical composition is ascertained by measuring the intensity of responses at multiple wavelengths and comparing this to responses of known materials.

Abstract: A system for certifying laser projection beam accuracy includes a certification fixture having a test pattern and a color background. The certification fixture is configured so that any portion of the laser projection beam reflected from the color background is reflected with a color contrasting to that of the laser beam or of the test pattern. Contrast can be further enhanced by making the pattern of a material that absorbs the laser beam color. Failure of the test is indicated by the presence of any of the laser beam light reflecting from the background. Passage of the test is indicated by the laser beam striking only the test pattern. A functional test pattern tests for both laser beam width and positioning accuracy. A method is provided to use a calibration test pattern to test laser beam width and length projection accuracy independently of one another.

Abstract: The invention relates to a method to determine the volume of small, spherical moving objects in which the objects move through the optical path of a photo electric sensor that comprises at least one light beam transmitter and one light beam receiver, and the change in the light intensity at the light beam receiver caused by objects passing through the optical path is registered and converted into an electrical measurement signal by means of an evaluation unit. The invention is distinguished by the fact that before a measurement process, the amplitude of the electric measurement signal is calibrated to a previously determined average standard volume of the objects and during the measurement process, the volume of each measured object is determined using the change in amplitude of the measurement signal.

Abstract: A printing apparatus can quickly cancel a print job without any influence on the other subsequent print jobs when a print cancel instruction is issued. During printing, if a print cancel instruction is inputted from a printer operation unit, a printer function manager notifies a print command interpreter of the cancellation. The print command interpreter searches data processed at that time in a transmission/reception buffer for an end mark command indicating the end of the cancelled job. Then the print command interpreter deletes the data before the end mark command.

Abstract: A method of managing a queue of print jobs in a printer is disclosed, wherein the jobs are created by specifying print data and print parameters for each job, and the jobs are put into the print queue, and wherein, before print processing of a job in the queue begins, a start condition for the job is checked and printing is started only when the start condition is fulfilled. The method includes steps of checking a status of mode indicator specifying whether the printer is in a “keep going” mode or a “keep sequence” mode; and, when a job in the queue is reached for which the start condition is not fulfilled, postponing print processing of this job and proceeding with a next job, if any, for which the start condition is fulfilled, if the printer is in the “keep going” mode, or stopping print processing, if the printer is in the “keep sequence” mode.

Abstract: Disclosed is a printer which performs efficient power save control by keeping track of the condition of each client of the printer without having to send wasteful packets, that is, without affecting the network environment. The printer includes: a unit for monitoring packets flowing on a network, and for updating and storing a client-associated last receive time each time a packet is received from any client of the printer; a unit for determining, by referring to the stored client-associated last receive time, that any client from whose associated last receive time has elapsed a prescribed time is in an idle condition, and for computing a printer usage rate by summing the past average usage rates of the clients that have been determined not to be in an idle condition; and a unit for setting, based on the computed printer usage rate, the length of time allowed before a transition is made to the power save mode.

Abstract: Disclosed is a method for controlling transmission of fax data according to a data outputting way of a receiving part, the method comprising the steps of: scanning and storing a document to be transmitted from a facsimile of a transmitting part to a facsimile of the receiving part; when the document is completely scanned, dialing a pre-inputted telephone number of the receiving part; after the receiving part telephone number is dialed, requiring and receiving the data outputting way from the receiving part facsimile, in the case that a call for transmitting data of the document is connected between the transmitting part facsimile and the receiving part facsimile; and transmitting the stored document data according to the received data outputting way.

Abstract: This invention relates to a Web-based imaging system that provides print job time estimates. Such systems of this type, generally, tell the user, prior to printing, how long it will take the target printer to print the print job, as expected.

Abstract: A method of revising multi-component software in a multifunctional printer, including revising at least one software component of the multi-component software, qualifying the multi-component software, bundling the multi-component software as a software bundle; and loading the software bundle on to a multifunctional printer. Additional methods and/or devices are also included.

Abstract: A facsimile machine in which multiple items of account information can be registered in an internal memory with the machine being capable of sending and receiving E-mail is disclosed. If the facsimile machine has been instructed to perform an E-mail operation and multiple items of account information has been registered, one of these items of account information is selected and authentication processing is executed. If only one item of account information has been registered, then this account information is used but the authentication processing is omitted. Thus, depending upon the account registration circumstances, an E-mail operation can be performed without performing an account selection operation and/or personal authentication. The result is improved operability.

Abstract: There is provided an information processing apparatus capable of improving the operability in producing a coversheet in which plural information is written, and preventing generation of a coversheet having an improper layout resulting from the inconsistency in number between the information and fixed character strings. A plural information field is defined in a text field provided on a coversheet template and in which information is to be written, the plural information field being for setting therein attributes specifying the information to be written in the text field, and a number of the information to be written. Fixed character strings to be written in the text field of the coversheet template are set in the coversheet template in association with the information specified by the attributes set in the plural information field. The fixed character strings are repeatedly expanded on the text field of the coversheet template a number of times corresponding to the set number of the information.

Abstract: An image capturing device includes an electronic image sensor, a processor, and a memory. The memory includes a full-size image storage storing one or more full-size digital images and a transfer image storage storing one or more corresponding transfer images. During an image capture, the image capturing device captures and stores a full-size image and also stores a transfer image that is a smaller version of the full-size image. The size of the transfer image is predetermined by the user.

Abstract: In a distributed computing environment, the following arrangements and procedures provide an imaging device and an imaging metric information server to distribute the imaging device's operational metrics (e.g., print media and toner utilization information) The metrics information are accessible by applications at any time from the server in real-time, independent of forwarding any request for the imaging metrics to the imaging device. Because imaging operational metrics are accessed by an application through the server, the imaging device does not use valuable resources such as bandwidth and processing power to respond to metrics information requests received from the application.

Abstract: When a command for the status response is issued from a host computer to a printer, a data-receipt administration portion adds, to the received command, an ID peculiar to each command, and stores the commands and the peculiar ID; and a data-transmission administration portion immediately returns the ID added to the command to the host computer. A printer-language analyzing portion analyzes the received command, while a status-response processing portion produces information that must be responded to the command. The produced response information is, together with the previously-stored ID added to the corresponding command, returned from the data-transmission administration portion to the host computer. The host computer collates the previous-received ID and the ID received together with the response information with each other so that the command and the corresponding response can be made correspond to each other.

Abstract: A data management method and system for expediting the flow and handling of print data from a creation source to one or more printers. Data in a stream is examined in light of assessed available and capable printers, and is block boundaried accordingly to divide the stream appropriately into compressed and uncompressed data blocks. This activity, which occurs upstream from where rasterization occurs, and which results ultimately in the handing off of data to printers on a block-by-block basis, minimizes data traffic volume and increases data flow speed.

Abstract: A method for printing shingling print data in a shingling print pass of a multi-shingling-pass print swath. One step includes compacting the shingling print data by removing the deterministic voids associated with the shingling print algorithm. Another step includes expanding the compacted shingling print data based on the shingling print algorithm. An additional step includes printing the expanded shingling print data.

Abstract: An image recorder and a method of recording an image on a printing plate are provided. A punch unit for forming punched holes and the like for use in a printing apparatus in the printing plate positions the printing plate by bringing a pair of reference pins into contact with an edge of the printing plate, and punches the printing plate. Next, the printing plate is transferred to a recording drum in the image recorder for image recording. The recording drum is provided with positioning pins mounted upright in substantially the same location as the reference pins of the punch unit. Thus, a portion of the edge of the printing plate which made contact with the reference pins of the punch unit is also brought into contact with the positioning pins of the recording drum. Therefore, the positional relationship between the punches holes for printing and the recorded image is held constant without being affected by an undulation or swell on the edge of the printing plate.

Abstract: In an information processing apparatus capable of communicating with plural image processing apparatuses, the image processing apparatus satisfying a desired condition input by a user is selected from among the plural image processing apparatuses, the selected one or more image processing apparatuses are stored in a storage means, and it causes any one of the stored image processing apparatuses to perform an image process. When the image processing apparatus in question cannot continue the image process, it causes any one of the image processing apparatuses stored in the storage means and satisfying the above condition to perform a substitute process.

Abstract: A handheld mobile communications device comprising: a support structure; radio signal processing circuitry positioned on the support structure and configured to receive and transmit radio signals; an image sensor positioned on the support structure for electronically capturing an image; image processing circuitry positioned on the support structure and operatively connected to: the image sensor to receive the electronically captured image; and the radio signal processing circuitry; a receptacle for receiving a detachable printing mechanism, and a slot for receiving manually inserted print media to be printed on by the printing mechanism.

Abstract: A printing apparatus drive control method is provided which allows the user to select a drive mode in which a printing apparatus can be operated with reduced operation noise whatever print mode is set, such as a fine print mode or a fast print mode, thus eliminating a problem of emitting noisy operation sound to surroundings late at night when a level of noise is comparatively low. One or more of a plurality of motors, which cause a plurality of driven portions in the printing apparatus, such as paper supply unit, main scan unit and paper feed unit, to perform predetermined operations, can be driven in a normal drive mode or a silent drive mode selectively.

Abstract: A color conversion apparatus has a profile storage section storing a first sort of input profile and a second sort of input profile, which are classified in an input profile, a first color conversion section for applying a color conversion to image data in accordance with the input profiles, and an image processing section for applying a data processing of altering a tone of an image to image data after color conversion only in the event that the first color conversion section executes the a color conversion according to the second sort of input profile.