Patents Issued in January 18, 2007
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Publication number: 20070013844Abstract: A liquid crystal panel that has a high contrast ratio over a wide range and can suppress color shifting effectively is provided. In a liquid crystal panel including between two polarizing plates arranged in a crossed Nicols state a birefringent layer A with nx>ny?nz, a birefringent layer B with nx?ny>nz and a VA-mode liquid crystal cell C, it is set that a wavelength dispersion characteristic (?40(A)) of the birefringent layer A, a wavelength dispersion characteristic (?40(B)) of the birefringent layer B and a wavelength dispersion characteristic (?40(C)) of the liquid crystal cell C satisfy conditions ?40(B)>?40(C)>?40(A) and 1>?40(A). The wavelength dispersion characteristic ?40 represents a ratio of a retardation Re measured with incident light at 430 nm to that measured with incident light at 550 nm, the incident light being inclined by 40° with respect to a normal direction (0°) of a surface of the birefringent layer or a surface of the liquid crystal cell.Type: ApplicationFiled: October 6, 2005Publication date: January 18, 2007Applicant: NITTO DENKO CORPORATIONInventors: Yuuichi Nishikouji, Hiroyuki Yoshimi
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Publication number: 20070013845Abstract: A manufacturing apparatus for manufacturing an oriented film of a liquid crystal device holding a liquid crystal between a pair of substrates facing each other, includes: a film formation chamber; an evaporation section evaporating an oriented film material on the substrate by a physical vapor deposition, and forming the oriented film in the film formation chamber; a shielding plate formed between the evaporation section and the substrate, having an elongated opening for selectively evaporating the oriented film material, and covering an area of the substrate on which the oriented film is not formed; and a cleaning section providing a cleaning medium for removing the oriented film material adhered on the shielding plate, toward the opening of the shielding plate, and on the side of the shielding plate that faces the evaporation section.Type: ApplicationFiled: July 11, 2006Publication date: January 18, 2007Inventors: Yasushi Nagata, Yuichi Shimizu
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Publication number: 20070013846Abstract: A liquid crystal display, a method for manufacturing the same, and an apparatus for manufacturing the same are provided. A method includes forming a field-generating electrode on a panel, and forming an inorganic alignment layer on the substrate by using atmospheric pressure plasma. The process using the atmospheric pressure plasma to form the inorganic alignment layer is more simplified by omitting the etch steps of the short point area and the pad areas. Also, alignment layers may be formed on the mother glass with various shapes by using one apparatus.Type: ApplicationFiled: July 12, 2006Publication date: January 18, 2007Inventors: Soon-Joon Rho, Duck-Jong Suh, Yong-Kuk Yun, Baek-Kyun Jeon
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Publication number: 20070013847Abstract: A thin film panel that includes a first substrate, a first slope member formed on the first substrate, a first alignment layer formed on the first substrate and the first slope member, a second substrate opposing the first substrate, and a second alignment layer formed on the second substrate. A rubbing direction of the first alignment layer is perpendicular to a rubbing direction of the second alignment layer.Type: ApplicationFiled: June 14, 2006Publication date: January 18, 2007Applicant: SAMSUNG ELECTRONICS CO., LTD.Inventors: Myeong-Ha KYE, Nak-Cho CHOI, Chang-Hun LEE, Sung-Hwan HONG, Il-Kook HUH
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Publication number: 20070013848Abstract: A multi-domain vertical alignment liquid crystal display device is disclosed. The multi-domain vertical alignment liquid crystal display device includes an upper substrate and a lower substrate parallel to each other, a liquid crystal layer between the upper substrate and the lower substrate, a common electrode disposed between the liquid crystal layer and the upper substrate, and a pixel electrode disposed between the liquid crystal layer and the lower substrate. Preferably, the common electrode includes an upper jagged pattern and the pixel electrode includes a lower jagged pattern.Type: ApplicationFiled: July 10, 2006Publication date: January 18, 2007Applicant: CHI MEI OPTOELECTRONICS CORP.Inventors: Che-Ming HSU, I-Lin HO, Ming-Feng HSIEH, Tzu-Yuan KUO
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Publication number: 20070013849Abstract: A particular multi-domain vertical alignment (MVA) liquid crystal display (LCD) can offer a high contrast ratio and a wide symmetrical viewing angle, without rubbing, protrusion surface, or ITO slit geometry. The viewing angle can be further enlarged by the use of optical compensation films, such as a negative birefringence anisotropic optical film with a vertical optical axis.Type: ApplicationFiled: July 20, 2006Publication date: January 18, 2007Inventor: Hiap Ong
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Publication number: 20070013850Abstract: A liquid crystal display mainly includes two substrates processed for vertical alignment and a liquid crystal having a negative dielectric constant anisotropy sealed between the two substrates. An array of slits is provided on pixel electrodes formed on one substrate. A light-shielding matrix and an array of protrusions is provided on the other substrate. Each of the first protrusions has a main body being arranged substantially in a zigzag pattern and in parallel to one another. The slits and the main bodies of the first protrusions are arranged alternately. The liquid crystal display is characterized in that the first protrusions have a plurality of breaks formed within the area of the light-shielding matrix.Type: ApplicationFiled: September 25, 2006Publication date: January 18, 2007Inventor: Bi Lin
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Publication number: 20070013851Abstract: A liquid crystal display including: a first transparent substrate coated with a first alignment layer, a second transparent substrate coated with a second alignment layer, the second substrate facing the first transparent substrate, a liquid crystal layer between the substrates, a polarizer attached on the outer surfaces of the substrates, a pair of electrodes formed on the first substrates, and a driving circuit applying signal voltage to the electrodes. The liquid crystal molecules adjacent to the first substrate is rotated by applying the voltage, but, the liquid crystal molecule adjacent to the second substrate is fixed regardless of the applied voltage. The electrode pair, substantially straight data and common electrodes, are inclined at an angle with respect to a gate line.Type: ApplicationFiled: December 14, 2005Publication date: January 18, 2007Inventor: Hiroshi Komatsu
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Publication number: 20070013852Abstract: A display portion is divided by scan lines and signal lines into sections where pixels are provided. Contact holes each for connecting common wiring and a common electrode together are not formed for all the pixels, but decimated so as to be arranged in zigzags.Type: ApplicationFiled: September 20, 2006Publication date: January 18, 2007Applicant: NEC LCD TECHNOLOGIES, LTD.Inventors: Shingo Saigo, Takasuke Hayase, Makoto Horinouchi, Hideto Motoshima, Akitoshi Maeda
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Publication number: 20070013853Abstract: A display portion is divided by scan lines and signal lines into sections where pixels are provided. Contact holes each for connecting common wiring and a common electrode together are not formed for all the pixels, but decimated so as to be arranged in zigzags.Type: ApplicationFiled: September 20, 2006Publication date: January 18, 2007Applicant: NEC LCD TECHNOLOGIES, LTD.Inventors: Shingo Saigo, Takasuke Hayase, Makoto Horinouchi, Hideto Motoshima, Akitoshi Maeda
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Publication number: 20070013854Abstract: A liquid crystal display includes: a substrate; a pixel electrode disposed on the substrate and having a first subpixel electrode and a second subpixel electrode; and a common electrode facing the pixel electrode, wherein the first subpixel electrode has a pair of bent edges substantially parallel to each other, the second subpixel electrode has a pair of bent edges substantially parallel to each other, and the second subpixel electrode has a height greater than a height of the first subpixel electrode.Type: ApplicationFiled: July 12, 2006Publication date: January 18, 2007Inventors: Seung-Hoo Yoo, Jong-Ho Son, Hee-Wook Do, Hyun-Wuk Kim, Hak-Sun Chang, Yoon-Sung Um
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Publication number: 20070013855Abstract: An array substrate includes a power supply line for supplying a predetermined potential to a counter-electrode, a power supply pad which is disposed on an insulation film that covers the power supply line, and a connection part which connects the power supply line and the power supply pad via a contact hole that is formed in the insulation film. The connection part is disposed inside an outer edge of a seal region.Type: ApplicationFiled: July 3, 2006Publication date: January 18, 2007Inventors: Masanori Ando, Masanobu Nonaka
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Publication number: 20070013856Abstract: The present invention provides a flexible printed circuit that is less likely to suffer from erosion (corrosion) of electrode terminals even in severe environments and a display device using the flexible printed circuit. According to the present invention, a flexible printed circuit includes a flexible FPC film, FPC interconnections formed of a given pattern on the FPC film, a solder resist covering the FPC interconnections, and FPC terminals provided at ends of the FPC interconnections to make external connection. According to the invention, the FPC terminals include at least one terminal that has an end located inside of an outline of the FPC film.Type: ApplicationFiled: May 16, 2006Publication date: January 18, 2007Applicant: MITSUBISHI DENKI KABUSHIKI KAISHAInventors: Kenichi Watanabe, Hiroshi Ueda, Hiroshi Tachibana, Shigeaki Noumi
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Publication number: 20070013857Abstract: A rectangular display driver integrated circuit device adapted for use with a flat panel display (FPD) device is disclosed and comprises, a plurality of input pads arranged in a central portion of the display driver integrated circuit device, and a plurality of output pads arranged along edges of all four sides of the display driver integrated circuit device. An associated film, film package, and flat panel display (FPD) module adapted to receive the display driver integrated circuit device are also disclosed.Type: ApplicationFiled: July 18, 2006Publication date: January 18, 2007Inventors: Ye-chung Chung, Sa-yoon Kang
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Publication number: 20070013858Abstract: A liquid crystal fabrication method includes the steps of: dropping liquid crystal on a first substrate at an upper surface inside regions enclosed by a sealing agent disposed thereon; overlaying a second substrate on the first substrate downward to stick the substrates together; sticking a polarizing plate on an upper surface of the first and second substrates; and collectively dividing the first and second substrates and the polarizing plate.Type: ApplicationFiled: September 20, 2006Publication date: January 18, 2007Applicant: Sharp Kabushiki KaishaInventors: Koji Yamabuchi, Makoto Nakahara, Akinori Izumi
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Publication number: 20070013859Abstract: The wiring of the present invention has a layered structure that includes a first conductive layer (first layer) having a first width and made of one or a plurality of kinds of elements selected from W and Mo, or an alloy or compound mainly containing the element, a low-resistant second conductive layer (second layer) having a second width smaller than the first width, and made of an alloy or a compound mainly containing Al, and a third conductive layer (third layer) having a third width smaller than the second width, and made of an alloy or compound mainly containing Ti. With this constitution, the present invention is fully ready for enlargement of a pixel portion. At least edges of the second conductive layer have a taper-shaped cross-section. Because of this shape, satisfactory coverage can be obtained.Type: ApplicationFiled: September 22, 2006Publication date: January 18, 2007Applicant: Semiconductor Energy Laboratory Co., Ltd.Inventors: Shunpei Yamazaki, Hideomi Suzawa, Koji Ono, Yoshihiro Kusuyama
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Publication number: 20070013860Abstract: A method of electrically addressing a matrix screen of bistable nematic liquid crystals with breaking of anchoring is disclosed. Controlled electrical signals are applied respectively to row electrodes and to column electrodes of the screen. A plurality of rows are simultaneously addressed using similar row signals that are offset in time by a duration greater than or equal to the time column voltages that are applied. The row addressing signals have, in a first period, at least one voltage value serving to break the anchoring of all of the pixels in the row. This is followed by a second period that enables the final states of the pixels making up the address row to be determined. The final states are a function of the value of each of the electrical signals applied to the corresponding columns.Type: ApplicationFiled: April 17, 2003Publication date: January 18, 2007Applicant: NEMOPTICInventors: Jacques Angele, Romain Vercelletto, Thierry Elbhar
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Publication number: 20070013861Abstract: Disclosed is an apparatus for manufacturing a liquid crystal display, the apparatus including: a first support member for supporting a substrate and a transfer photosensitive film disposed on the substrate and a second support member disposed to face the first support member. An elastic member is provided on the surface of the second support member for allowing the transfer photosensitive film to be moved into contact with the substrate. A driving unit is provided for moving the first support member and the second support member toward and away from each other. A vacuum chamber is provided for receiving the first support member and the second support member.Type: ApplicationFiled: July 14, 2006Publication date: January 18, 2007Inventor: Woo-jae Lee
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Publication number: 20070013862Abstract: An object of the present invention is to provide a liquid crystal display, which can surely perform an instillation process used when liquid crystal is sealed between substrates in a cell process, and a fabrication method thereof. A liquid crystal display comprises a sealing material 6 made of a photo-curing type material which seals liquid crystal 22 sandwiched between substrates 4 and 16, and a shading film 8 having a shading area which overlays a red-colored layer 28 transmitting red light, a green-colored layer 26 transmitting green light and a blue-colored layer 24 transmitting blue light, wherein only the blue-colored layer 24 is formed in an area of the shading film contacting with the sealing material 6 and the photo-curing type material of the sealing material is structured to have a light reactive area for a wavelength of blue color band.Type: ApplicationFiled: September 21, 2006Publication date: January 18, 2007Inventors: Kunihiro Tashiro, Takuya Yoshimi, Yoshio Koike, Satoru Imai, Hideaki Tsuda, Hiroyasu Inoue, Satoshi Murata, Hidehiko Suzuki, Hidefumi Yoshida, Tadashi Hasegawa, Yoji Taniguchi, Norimichi Nakayama, Hiroyuki Sugimura, Minoru Otani
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Publication number: 20070013863Abstract: A supplemental lens unit is used on or in combination with a pair of eyeglasses. Lens unit comprises a bridge having at least one prong on each of two ends. Two supplemental lenses are connected by holes positioned near a nasal portion thereof through which prongs protrude. At least one magnet is positioned in peripheral cavities drilled into primary and supplemental lenses. Magnets in each supplemental lens and the corresponding primary lens are of opposite polarity such that lenses are magnetically and removably attached. An example of a method of manufacturing the supplemental lens unit is also disclosed.Type: ApplicationFiled: July 18, 2006Publication date: January 18, 2007Inventor: Dennis Zelazowski
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Publication number: 20070013864Abstract: A tool system comprising eyeglasses and a tool magnetically coupled together.Type: ApplicationFiled: July 13, 2005Publication date: January 18, 2007Inventor: Daniel Dietz
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Publication number: 20070013865Abstract: An illumination system and method are provided for use in conjunction with eyewear that includes a light source, a power switch configured to connect the light source to a power source and a light output configurable to be embedded within the eyewear, and to direct light to a remote location. The light output may be adjustable in various directions, intensity levels and focus.Type: ApplicationFiled: October 21, 2005Publication date: January 18, 2007Inventor: Lonnie Jordan
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Publication number: 20070013866Abstract: Pupil candidate detection unit for detecting positions of pupil candidates in an eye image; and luminance difference calculation unit for obtaining a difference between a maximum value and a minimum value of an image data of an eye image on a circumference of a circle having a center at center coordinates of a pupil candidate and a predetermined radius are provided, and when the output of luminance difference calculation unit is larger than the predetermined threshold, the corresponding pupil candidate is determined not to be the pupil.Type: ApplicationFiled: May 18, 2005Publication date: January 18, 2007Inventors: Morio Sugita, Masahiro Wakamori, Takeshi Fujimatsu
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Publication number: 20070013867Abstract: A fundus camera, in which operability is improved while not impairing the convenience of the function of automatic alignment, has a photographing part including a fundus photographing optical system, a moving unit which moves the photographing part, an observation optical system having a first image-pickup element which picks up a fundus image, an observation optical system having a second image-pickup element which picks up an anterior-segment image, a display unit capable of displaying the images, a control part which obtains information on alignment of the photographing part with the eye and controls driving of the moving unit based on the alignment information so that an alignment state satisfies a first reference condition, and a first input switch for inputting a signal for display switching from the fundus image to the anterior-segment image, wherein the control part prohibits the driving of the moving unit when the signal is inputted.Type: ApplicationFiled: October 21, 2005Publication date: January 18, 2007Applicant: Nidek Co., Ltd.Inventor: Naoki Ichikawa
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Publication number: 20070013868Abstract: An apparatus for detecting abnormalities in spatial perception that consists of a first transparent screen in a close-vision field and a second screen seen through the first one and located in a far-vision field of a person being tested. The apparatus is provided with devices for forming images selectively on the first or second screen and with a device for tracking trajectories of the eye pupils while following the images. The method is based on detecting specific irregularities in trajectories of the eye pupils, such as nystagmuses, cut-offs, sudden drops of the gaze, etc., when a person follows the smooth trajectory of a moving image on a selected screen, or when the size and position of the eye pupil change with certain irregularity in response to instantaneous switching of images between the screens without changing the position of the person's head.Type: ApplicationFiled: June 9, 2005Publication date: January 18, 2007Inventors: Vladimir Pugach, Svetlana Tikhonova, Vitali Tikhonov
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Publication number: 20070013869Abstract: A hybrid contact lens comprises a central zone comprising a substantially rigid, gas permeable material having a DK of at least 30, a relatively soft peripheral zone and an intermediate zone comprising a film or coating that is created around the central zone, and then cured. The film facilitates chemical bonding between the central zone and the peripheral zone, and also provides a protective barrier to prevent modification of the physical characteristics of the central zone. The film may be created by soaking the central zone in a chemical solution for a predetermined amount of soaking time.Type: ApplicationFiled: June 8, 2006Publication date: January 18, 2007Inventors: Ali Dahi, Barry Chen, Joe Collins, Jerome Legerton, Ramezan Benrashid
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Publication number: 20070013870Abstract: When a Landolt ring optotype is presented in a visual acuity testing unit, an examinee answers a position of a slit of the optotype through an operation of a joystick lever or the like. If an examinee gives a right answer within a standard time at a first presentation of optotype, examination at a higher visual acuity grade is executed by presenting a smaller Landolt ring optotype. In case of a right answer over the standard time, reexamination at the same visual acuity grade is executed twice at the most. If a right answer is given at least once, examination at a higher visual acuity grade is executed. In case of a wrong answer within the standard time at a first presentation of optotype, reexamination at the same visual acuity is executed only once. If the right answer is given at this reexamination, examination at a higher visual acuity grade is executed. Reexamination is thus executed, so that the result of the examination is correct.Type: ApplicationFiled: September 29, 2005Publication date: January 18, 2007Inventors: Takuya Hara, Yoshikatsu Suzumura
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Publication number: 20070013871Abstract: System and method for enhancing performance in an SLM display system using LED illumination. A preferred embodiment comprises computing a set of spectral characteristics, analyzing the set of spectral characteristics, and modulating a light produced by a light source of a display system based upon the analysis, wherein the light source comprises one or more light-emitting diodes. The spectral characteristics can provide information regarding either the images being displayed by the display system or an operating environment of the display system. Either can have an impact upon the quality of the images being displayed on the display system and can be used to make adjustments to the light source.Type: ApplicationFiled: July 15, 2005Publication date: January 18, 2007Inventors: Stephen Marshall, Steven Penn
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Publication number: 20070013872Abstract: An illuminating device includes a discharge lamp, a condenser lens, an integrator lens, a polarization conversion system, an electromagnetic wave shielding plate, and an electromagnetic wave shielding wall. A light given out from each lens in the light-incident-side fly's eye lens becomes two light fluxes via respective polarizing beam splitters and the two light fluxes pass through two lenses in the light-exit-side fly's eye lens. The electromagnetic shielding plate has an aperture on an optical axis of each lens in the light-exit-side fly's eye lens. The electromagnetic wave shielding plate is grounded through the electromagnetic wave shielding wall.Type: ApplicationFiled: July 14, 2006Publication date: January 18, 2007Applicant: Sanyo Electric Co., Ltd.Inventors: Hideyuki Kanayama, Takashi Ikeda, Haruhiko Murata
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Publication number: 20070013873Abstract: A very low cost computer comprising a motherboard socketed to receive selected components including a processor, memory modules, and interface controllers for connecting to peripheral devices, in combination with a micro-projection display system. The display system employs a low resolution imaging device such as a transmissive or reflective spatial light modulator in combination with an image deflection system for dithering a sequence of low resolution images from the imaging device as a composite high resolution image directed to either a front or rear projection screen. The system may be used in laptop computers and other portable electronic devices such as PDAs and cellular telephones, and in eyeglass-mounted displays.Type: ApplicationFiled: July 20, 2004Publication date: January 18, 2007Inventors: Joseph Jacobson, Nicholas Negroponte
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Publication number: 20070013874Abstract: A heat dissipation device of a projector for transmitting the heat from a lamp out of the projector, the heat dissipation device comprises a fan, a diversion duct, and a division vane. The diversion duct is used for changing the direction of the air flow that generated by the fan to a second direction from a first direction; and the division vane is disposed within the diversion duct for splitting the air flow to discharge the air flow with uniform distributing heat off the diversion duct.Type: ApplicationFiled: June 20, 2006Publication date: January 18, 2007Inventors: Hung-Lin Lee, Yu-Min Kuo, Chih-Chung Yang
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Publication number: 20070013875Abstract: A projection device is provided with an image source unit, the image source, a first projecting optical system, an intermediate optical system and a second projecting optical system. Optical axes of the first and second projecting optical systems as developed are on a same plane. The image source is tilted, and then the center of the image source is translated in a direction spaced from the first projecting optical system within a plane including the image displaying area of the image source ;unit. In the above configuration, a relationship below may be satisfied: 0<S1?(H/2)×?tan?, where, ? denotes an absolute value of tilt angle, S1 denotes a shift amount of the image source, H denotes a width of the image source within the same plane.Type: ApplicationFiled: July 12, 2006Publication date: January 18, 2007Inventors: Shohei Matsuoka, Ken Agatsuma
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Publication number: 20070013876Abstract: A projecting device includes a first projective optical system forming an intermediate image having trapezoidal distortion from light emitted by a display unit displaying a rectangular image, a second projective optical system projecting the light from the intermediate image obliquely onto a screen so that an enlarged image in which the trapezoidal distortion has been corrected will be projected on the screen, and an intermediate optical system leading the light to combine the two projective optical systems. The second projective optical system includes at least one lens having a surface on which first and second ray bundles emitted from both ends of the image displayed by the display unit in regard to a short side direction of the image are totally separate from each other. A prescribed lens included in the at least one lens is configured so that gradients and curvatures at particular positions will satisfy prescribed conditions.Type: ApplicationFiled: July 12, 2006Publication date: January 18, 2007Inventors: Ken Agatsuma, Shohei Matsuoka
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Publication number: 20070013877Abstract: Systems and methods for adjusting a projection mirror of a rear projection device, that may be utilized to properly align an image projected by an image source within a desired projection area of the projection screen by adjusting the positional orientation of an image reflected by the adjustable projection mirror relative to a projection screen of the projection device based on one or more measured characteristics of light reflected by the projection mirror for projection onto the projection screen.Type: ApplicationFiled: July 15, 2005Publication date: January 18, 2007Inventor: Thitipant Tantasirikorn
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Publication number: 20070013878Abstract: A projector for maintaining a bulb of the projector to generate a light at a constant luminance, the projector comprises a power gain data comprising a plurality of power values corresponding to a plurality of using-time durations, wherein the power value such as a voltage is supplied to the bulb is corresponding to the specific power value from the power gain data.Type: ApplicationFiled: July 3, 2006Publication date: January 18, 2007Inventors: Cheng-Feng Hsien, Ming-Cheng Lin
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Publication number: 20070013879Abstract: An illumination apparatus comprises a plurality of luminous bodies as light sources, luminous body drive portions configured to drive to light each of the plurality of luminous bodies, an optical member configured to lead and apply light exiting from a luminous body lighted by the luminous body drive portion to an illumination target area, a light control member configured to perform change of a light path of the light exiting from the luminous body with which the illumination target area is illuminated and/or movement of the luminous body, a movable portion configured to operably drive the light control member, and a light selection portion configured to control the movable portion and/or the luminous body drive portion in such a manner that light with which the illumination target area is selected from light exiting from the plurality of luminous bodies.Type: ApplicationFiled: September 18, 2006Publication date: January 18, 2007Applicant: OLYMPUS CORPORATIONInventors: Shinichi Imade, Shinzo Matsui, Kazunari Hanano, Naoaki Tani, Naoto Shimada, Katsunori Kumai
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Publication number: 20070013880Abstract: The present invention provides a small projection type display apparatus capable of suppressing an optical path of incident light and an optical path of output light in a reflection type light valve from being overlapped with each other and obtaining a projected image of high quality; a rear projector and a multi-vision system using the same. The projection type display apparatus is composed of an illumination optical system 2 for collecting light radiated from a light source 1 to form illumination light, a reflection type light valve 6 for reflecting the illumination light to output modulated light forming an optical image, a projection lens system 7 for projecting an optical image formed by the reflection type light valve, and a lens element 5 with a positive power.Type: ApplicationFiled: September 20, 2006Publication date: January 18, 2007Applicant: Matsushita Electric Industrial Co., Ltd.Inventors: Yoshimasa Fushimi, Yoshihiro Masumoto, Mitsuhiro Wada
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Publication number: 20070013881Abstract: An integration rod used in a projector. The integration rod includes a plurality of lenses that form the integration rod; a layer of high temperature hot-setting UV adhesive applied on the lenses to bond the lenses into a hollow rod structure; and a layer of ceramic adhesive applied on the hollow rod structure for stabilizing the hollow rod structure.Type: ApplicationFiled: May 26, 2006Publication date: January 18, 2007Applicant: PREMIER IMAGE TECHNOLOGY CORPORATIONInventors: Hsin-Li Lin, Pi-Tsung Hsu, I-Pen Chien
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Publication number: 20070013882Abstract: In a method of manufacturing projection objectives including defining an initial design for a projection objective and optimizing the design using a merit function, a set of related projection objectives including a first projection objective and at least one second projection objective is defined. Further, a plurality of merit function components, each of which reflects a particular quality parameter, is defined. One of these merit function components defines a common module requirement requiring that the first projection objective and the second projection objective each include at least one common optical module that is constructed to be substantially identical for the first and the second projection objective. The method results in a set of projection objectives having at least one common optical module. Employing the method in the manufacturing of complex projection objectives, such as projection objectives for microlithography, facilitates the manufacturing process and allows substantial cost savings.Type: ApplicationFiled: June 7, 2006Publication date: January 18, 2007Inventors: Aurelian Dodoc, Wilhelm Ulrich, Heiko Feldmann
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Publication number: 20070013883Abstract: An embodiment of a semiconductor manufacturing device includes a chamber to perform a predetermined semiconductor process, a light source to emit light into the chamber, a light receiver to sense scattered light emitted from the light source and to measure an intensity of the scattered light, a first controller to compare the measured intensity of the scattered light with a preset reference value, and a second controller to determine whether to perform the predetermined semiconductor process based on the intensity of the scattered light. An embodiment of the particle monitoring method includes emitting laser light into a process chamber simultaneously with performing a semiconductor process, measuring an intensity of a scattered light after being emitted, comparing the measured intensity of the scattered light with a preset reference value, and interlocking the semiconductor process when the measured intensity of the scattered light is larger than the preset reference value.Type: ApplicationFiled: July 14, 2006Publication date: January 18, 2007Inventor: Il-Jung PARK
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Publication number: 20070013884Abstract: In a method for exposing an object to light and an exposure apparatus for performing the method, projection lights having image information may be produced. The projection lights may be projected onto the film on the substrate and travel along separately advancing paths. The advancing paths may not intersect with each other. To produce the projection light, illumination light beams proceeding along separately advancing paths may be produced. Thereafter, reticle patterns may transmit the illumination light beams. The reticle patterns may move in a first direction, and the substrate may move in a second direction opposite the first direction. The illumination light beams may be produced by separating an initial light. The projection lights may be projected onto the film at the same time or different times.Type: ApplicationFiled: July 10, 2006Publication date: January 18, 2007Inventor: Hak Kim
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Publication number: 20070013885Abstract: In order to improve the productivity of a lithographic apparatus, a stage apparatus to hold two patterning devices is described. The patterning devices are arranged such that the distance between the patterns in the scanning direction corresponds to the length of the pattern in the scanning direction. By doing so, an improved exposure sequence may be performed by exposing a first die with a first pattern, skipping a second die adjacent to the first die, and exposing a third die adjacent to the second die using a second pattern.Type: ApplicationFiled: July 14, 2006Publication date: January 18, 2007Applicant: ASML Netherlands B.V.Inventors: Erik Loopstra, Arno Bleeker, Heine Mulder, Oscar Franciscus Noordman, Timotheus Sengers, Laurentius Jorritsma, Mark Trentelman, Gerrit Streutker
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Publication number: 20070013886Abstract: An immersion lithographic apparatus is disclosed which includes a liquid supply system having an inlet configured to supply a liquid to a space between a projection system of the lithographic apparatus and a substrate and an outlet configured to remove at least part of the liquid, the liquid supply system configured to rotate the inlet, the outlet, or both, about an axis substantially perpendicular. to an exposure plane of the substrate.Type: ApplicationFiled: September 21, 2006Publication date: January 18, 2007Applicant: ASML NETHERLANDS B.V.Inventors: Johannes Baselmans, Sjoerd Donders, Christiaan Hoogendam, Jeroen Johannes Mertens, Johannes Mulkens, Bob Streefkerk
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Publication number: 20070013887Abstract: Methods and systems are described for improving optical lithographic processing of a substrate by selecting appropriate system parameters in order to obtain a good image or print of the pattern to be obtained in a resist layer, which includes selecting a set of system parameters for an optical lithographic system having selectable system parameters, thus characterising the optical lithographic system and obtaining transferred lens pupil information. The latter is performed by obtaining, for each point of a set of points within a lens pupil of the optical lithographic system with the selected set of system parameters, a value of at least one optical parameter at a level of the substrate, the at least one optical parameter being a property of a light ray projected towards the substrate from the point of the set of points within the lens pupil. The lens pupil information then is combined with information about the mask to be used for generating the pattern in the resist layer.Type: ApplicationFiled: July 14, 2006Publication date: January 18, 2007Applicant: Interuniversitair Microelektronica Centrum (IMEC)Inventor: Maria Op de Beeck
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Publication number: 20070013888Abstract: An apparatus and method for providing a variable illumination field for use in lithographic imaging for semiconductor manufacturing includes providing a an illumination system including a variable optical element having an array of addressable elements, each addressable element constructed and arranged to have a variable transmittance.Type: ApplicationFiled: March 29, 2005Publication date: January 18, 2007Applicant: ASML Netherlands B.V.Inventors: Donis Flagello, Robert Socha, James Greeneich
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Publication number: 20070013889Abstract: A lithographic apparatus comprises an illumination system for supplying a beam of radiation, an array of individually controllable elements serving to impart the beam with a pattern in its cross-section, a substrate table for supporting a substrate, and a projection system for projecting the patterned beam onto a target portion of the substrate. The beam of radiation comprises a plurality of beam components. The plurality of beam components includes a first beam component having a first frequency spectrum about a first frequency and at least a second beam component having a second frequency spectrum about a second frequency. The second frequency is different from the first frequency. The projection system focuses the first and second beam components at different heights with respect to the substrate table.Type: ApplicationFiled: July 12, 2005Publication date: January 18, 2007Applicant: ASML Netherlands B.V.Inventors: Laurentius Jorritsma, Johannes Baselmans, Arno Bleeker, Jacob Klinkhamer
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Publication number: 20070013890Abstract: In order to improve the productivity of a lithographic apparatus, a stage apparatus for holding two patterning devices is described. The patterning devices are arranged such that the distance between the patterns in the scanning direction corresponds to the length of the pattern in the scanning direction. By doing so, an improved exposure sequence may be performed by exposing a first die with a first pattern, skipping a second die adjacent to the first die, and exposing a third die adjacent to the second die using a second pattern.Type: ApplicationFiled: June 2, 2006Publication date: January 18, 2007Applicant: ASML Netherlands B.V.Inventors: Erik Loopstra, Arno Bleeker, Heine Mulder, Oscar Franciscus Noordman, Timotheus Sengers, Laurentius Jorritsma, Mark Trentelman, Gerrit Streutker
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Publication number: 20070013891Abstract: An apparatus for changing an aggregate intensity of a light within an illumination field of a photolithography system having a blade structure and a first actuator. The blade structure is configured to be positioned along an optical path of the photolithography system between an illumination system and a reticle stage so that, when the illumination system provides the light having the illumination field, the blade structure is substantially at a center of the illumination field and a first portion of the light within the illumination field impinges upon the blade structure. The first actuator is coupled between a first portion of the blade structure and a frame of the photolithography system and is configured to move at least the first portion of the blade structure in a first direction so that a second portion of the light within the illumination field impinges upon the blade structure.Type: ApplicationFiled: September 20, 2006Publication date: January 18, 2007Applicant: ASML Holding N.V.Inventors: Stephen Roux, Erik Loopstra, Michael Nelson
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Publication number: 20070013892Abstract: An exposure apparatus for exposing a pattern of an mask onto a plate to be exposed, said exposure apparatus includes a cleaning apparatus for cleaning the mask, wherein said cleaning apparatus includes an irradiating part for irradiating a laser beam to the mask, and a polarization controller for controlling a polarization characteristic of the laser beam according to a longitudinal direction of the pattern.Type: ApplicationFiled: July 13, 2006Publication date: January 18, 2007Inventors: Hiroshi Osawa, Akinori Ohkubo, Kenji Yamazoe
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Publication number: 20070013893Abstract: In order to improve the productivity of a lithographic apparatus, a stage apparatus for holding two patterning devices is described. The patterning devices are arranged such that the distance between the patterns in the scanning direction corresponds to the length of the pattern in the scanning direction. By doing so, an improved exposure sequence may be performed by exposing a first die with a first pattern, skipping a second die adjacent to the first die, and exposing a third die adjacent to the second die using a second pattern.Type: ApplicationFiled: July 13, 2005Publication date: January 18, 2007Applicant: ASML Netherlands B.V.Inventor: Erik Loopstra