Patents Issued in February 13, 2007
  • Patent number: 7176509
    Abstract: Two ferroelectric capacitors including a PZT film are connected to one MOS transistor. Electrodes of the ferroelectric capacitor are arranged above a main plane of a substrate parallel to the main plane. Therefore, high capacity can be obtained easily. Furthermore, a (001) direction of the PZT film is parallel to the virtual straight line linking between the two electrodes. Therefore, a direction in which an electric field is applied coincides with a direction of a polarization axis, so that high electric charge amount of remanent polarization can be obtained.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: February 13, 2007
    Assignee: Fujitsu Limited
    Inventors: Kenji Maruyama, Jeffrey Scott Cross
  • Patent number: 7176510
    Abstract: A thin film capacitor includes a pair of electrodes and a dielectric layer having piezoelectricity sandwiched therebetween. The phase characteristic of an impedance resulting from application of a voltage to the pair of electrodes peaks periodically according to a frequency of a signal to be inputted or outputted. The frequency of the signal is adjusted to fall in between the values representing the adjacent peaks. Since there are periodic peak values that depend upon the frequency of the inputted or outputted signal, in fabricating a band-pass filter, a higher attenuation can be attained by ensuring that the peak value stands at a low-frequency level. Thus, a higher attenuation can be attained at low frequencies without sacrificing the band-pass characteristic, whereby making it possible to produce a band-pass filter that is excellent in band-pass characteristic.
    Type: Grant
    Filed: September 24, 2004
    Date of Patent: February 13, 2007
    Assignee: Kyocera Corporation
    Inventors: Kenji Taki, Tetsuya Kishino
  • Patent number: 7176511
    Abstract: A semiconductor memory device includes a first insulation film which is provided on the inner surface of a trench formed in a semiconductor substrate and has its top located above the surface of the semiconductor substrate. A diffusion layer is formed within the semiconductor substrate, surrounding the deep portion of the trench. A first conductive layer is filled in the trench. A gate electrode is provided on a gate insulation layer formed on the surface of the semiconductor substrate. Source/drain diffusion layers are formed in the surface of the semiconductor substrate and sandwich a channel region below the gate electrode. A second conductive layer extends on the first conductive layer, the first insulation layer, and one of the source/drain diffusion layers.
    Type: Grant
    Filed: March 23, 2004
    Date of Patent: February 13, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Masaru Kidoh
  • Patent number: 7176512
    Abstract: A semiconductor memory device comprises a plurality of rows, each row comprising a plurality of active regions arranged at a pitch wherein the active regions in adjacent rows are shifted with respect to each other by one half of the pitch, wherein a distance between each active region in a row is equal to a distance between active regions in adjacent rows.
    Type: Grant
    Filed: August 13, 2004
    Date of Patent: February 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jung-Hyeon Lee, Gi-Sung Yeo, Doo-Hoon Goo, Woo-Sung Han
  • Patent number: 7176513
    Abstract: A semiconductor memory cell structure and method for forming the same. The memory cell is formed on a surface of a substrate and includes an active region formed in the substrate, an epitaxial post formed on the surface of the substrate over the active region. The epitaxial post has at least one surface extending outwardly from the surface of the substrate and another surface opposite of the surface of the substrate. A gate structure is formed adjacent to at least a portion of all the outwardly extending surfaces of the epitaxial post, and a capacitor formed on an exposed surface of the epitaxial post.
    Type: Grant
    Filed: November 9, 2004
    Date of Patent: February 13, 2007
    Assignee: Micron Technology, Inc.
    Inventor: Kris K. Brown
  • Patent number: 7176514
    Abstract: A method for producing a dielectric layer on a substrate made of a conductive substrate material includes reducing a leakage current that flows through defects of the dielectric layer at least by a self-aligning and self-limiting electrochemical conversion of the conductive substrate material into a nonconductive substrate follow-up material in sections of the substrate that are adjacent to the defects. Also provided is a configuration including a dielectric layer with defects, a substrate made of a conductive substrate material, and reinforcement regions made of the nonconductive substrate follow-up material in sections adjacent to the defects.
    Type: Grant
    Filed: April 15, 2003
    Date of Patent: February 13, 2007
    Assignee: Infineon Technologies AG
    Inventors: Thomas Hecht, Albert Birner, Harald Seidl, Uwe Schröder, Stefan Jakschik, Martin Gutsche
  • Patent number: 7176515
    Abstract: It is an object to obtain a semiconductor device having such a structure that respective electrical characteristics of an insulated gate type transistor and an insulated gate type capacitance are not deteriorated and a method of manufacturing the semiconductor device. An NMOS transistor Q1 and a PMOS transistor Q2 which are formed in an NMOS formation region A1 and a PMOS formation region A2 respectively have P? pocket regions 17 and N? pocket regions 27 in vicinal regions of extension portions 14e and 24e of N+ source-drain regions 14 and P+ source-drain regions 24, respectively. On the other hand, an N-type variable capacitance C1 and a P-type variable capacitance C2 which are formed in an N-type variable capacitance formation region A3 and a P-type variable capacitance formation region A4 respectively do not have a region of a reverse conductivity type which is adjacent to extraction electrode regions corresponding to the P? pocket regions 17 and the N? pocket regions 27.
    Type: Grant
    Filed: September 8, 2005
    Date of Patent: February 13, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Shigenobu Maeda, Hiroyuki Takashino, Toshihide Oka
  • Patent number: 7176516
    Abstract: A new structure is disclosed for semiconductor devices with which contact regions are self-aligned to conductive lines. Openings to a gate oxide layer, in partially fabricated devices on a silicon substrate, having insulating sidewalls. First polysilicon lines disposed against the insulating sidewalls extend from below the top of the openings to the gate oxide layer. Oxide layers are grown over the top and exposed sides of the first polysilicon lines serving to insulate the first polysilicon lines. Polysilicon contact regions are disposed directly over and connect to silicon substrate regions through openings in the gate oxide layer and fill the available volume of the openings. Second polysilicon lines connect to the contact regions and are disposed over the oxide layers grown on the first polysilicon lines.
    Type: Grant
    Filed: October 12, 2004
    Date of Patent: February 13, 2007
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventor: Chia-Ta Hsieh
  • Patent number: 7176517
    Abstract: The present disclosure relates to a flash memory including a common source line having a predetermined width formed on a semiconductor substrate, a common source in the semiconductor substrate below the common source line, and a couple of floating gates having a predetermined width formed on both outer side walls of the common source line. The flash memory may also include a couple of tunneling oxide layers formed between the floating gate and the common source line, and between the floating gate and the semiconductor substrate, a couple of dielectric layers formed on each of the couple of floating gates, and a couple of control gates formed on each of the couple of dielectric layers. Further, the flash memory may include a couple of drains formed in the semiconductor substrate by injecting impurity ions in using the control gate and the common source line as a mask.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: February 13, 2007
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Kwan-Ju Koh
  • Patent number: 7176518
    Abstract: A method of fabricating nonvolatile memory devices is disclosed. A nonvolatile memory device comprises: a polysilicon gate on a semiconductor substrate; a gate oxide layer between the polysilicon gate and the substrate; sidewall floating gates on the bottom of the lateral faces of the polysilicon gate; tunnel oxide layers between the sidewall floating gates and the substrate; block oxide layers between the polysilicon gate and the sidewall floating gates; sidewall spacers on the sidewalls of the polysilicon gate and the sidewall floating gates; source and drain extension regions on the substrate under the sidewall spacers; and source and drain regions adjacent to the source and drain extension regions.
    Type: Grant
    Filed: December 30, 2004
    Date of Patent: February 13, 2007
    Assignee: Dongbu Electronics Co., Ltd.
    Inventor: Jin Hyo Jung
  • Patent number: 7176519
    Abstract: A memory cell, memory cell arrangement, and method for producing a memory cell arrangement is described where electric charge carriers can be introduced from a trench structure, which delivers charge carriers, into a charge storage area by applying a predefined electrical potential to the cell.
    Type: Grant
    Filed: August 5, 2005
    Date of Patent: February 13, 2007
    Assignee: Infineon Technologies AG
    Inventor: Franz Schuler
  • Patent number: 7176520
    Abstract: To reduce the size and improve the power added efficiency of an RF power module having an amplifier element composed of a silicon power MOSFET, the on resistance and feedback capacitance, which were conventionally in a trade-off relationship, are reduced simultaneously by forming the structure of an offset drain region existing between a gate electrode and an n+ type drain region of the power MOSFET into a double offset one. More specifically, this is accomplished by adjusting the impurity concentration of an n? type offset drain region, which is closest to the gate electrode, to be relatively low and adjusting the impurity concentration of an n type offset drain region, which is distant from the gate electrode, to be relatively high.
    Type: Grant
    Filed: July 30, 2004
    Date of Patent: February 13, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Tomoyuki Miyake, Masatoshi Morikawa, Yutaka Hoshino, Makoto Hatori
  • Patent number: 7176521
    Abstract: A power semiconductor device comprises a semiconductor layer; a polysilicon-containing gate; a first semiconductor region formed in said semiconductor layer at one surface of said semiconductor layer and operative to serve as at least one of a source region and an emitter region; a second semiconductor region formed in said semiconductor layer at the other surface of said semiconductor layer and operative to serve as at least one of a drain region and a collector region; a gate routing wire commonly connected to a plurality of said gates and including a polysilicon portion and a metal portion formed adjacent to it in the direction of plane of said semiconductor layer; an interlayer insulator film formed to cover said first semiconductor region, said gate routing wire and a plurality of said gates; an electrode portion formed in said interlayer insulator film and connected to said first semiconductor region; and a strap electrode plate located to cover said interlayer insulator on said gate routing wire and co
    Type: Grant
    Filed: April 30, 2004
    Date of Patent: February 13, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Keiko Kawamura, Noboru Matsuda, Yasuo Ebuchi
  • Patent number: 7176522
    Abstract: A method comprises forming a first semiconductor device in a substrate, where the first semiconductor device comprises a gate structure, a spacer disposed on sidewalls of the gate structure, the spacer having a first thickness, and raised source and drain regions disposed on either side of the gate structure. The method further comprises forming a second semiconductor device in the substrate and electrically isolated from the first semiconductor device, where the second semiconductor device comprises a gate structure, a spacer disposed on sidewalls of the gate structure, the spacer having a second thickness less than the first thickness of the spacer of the first semiconductor device, and recessed source and drain regions disposed on either side of the gate structure.
    Type: Grant
    Filed: August 11, 2004
    Date of Patent: February 13, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shui-Ming Cheng, Hung-Wei Chen, Zhong Tang Xuan
  • Patent number: 7176523
    Abstract: In a high frequency amplifying MOSFET having a drain offset region, the size is reduced and the on-resistance is decreased by providing conductor plugs 13 (P1) for leading out electrodes on a source region 10, a drain region 9 and leach-through layers 3 (4), to which a first layer wirings 11a, 11d (M1) are connected and, further, backing second layer wirings 12a to 12d are connected on the conductor plugs 13 (P1) to the first layer wirings 11s, 11d (M1).
    Type: Grant
    Filed: August 19, 2004
    Date of Patent: February 13, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Yutaka Hoshino, Shuji Ikeda, Isao Yoshida, Shiro Kamohara, Megumi Kawakami, Tomoyuki Miyake, Masatoshi Morikawa
  • Patent number: 7176524
    Abstract: In one embodiment, a semiconductor device is formed in a body of semiconductor material. The semiconductor device includes a charge compensating trench formed in proximity to active portions of the device. The charge compensating trench includes a trench filled with various layers of semiconductor material including opposite conductivity type layers.
    Type: Grant
    Filed: February 15, 2005
    Date of Patent: February 13, 2007
    Assignee: Semiconductor Components Industries, LLC
    Inventors: Gary H. Loechelt, Peter J. Zdebel, Gordon M. Grivna
  • Patent number: 7176525
    Abstract: A process for producing an adhered SOI substrate without causing cracking and peeling of a single-crystal silicon thin film. The process consists of selectively forming a porous silicon layer in a single-crystal semiconductor substrate, adding hydrogen into the single-crystal semiconductor substrate to form a hydrogen-added layer, adhering the single-crystal semiconductor substrate to a supporting substrate, separating the single-crystal semiconductor substrate at the hydrogen-added layer by thermal annealing, performing thermal annealing again to stabilize the adhering interface, and selectively removing the porous silicon layer to give single-crystal silicon layer divided into islands.
    Type: Grant
    Filed: March 10, 2005
    Date of Patent: February 13, 2007
    Assignee: Semiconductor Energy Laboratory Co., Ltd.
    Inventor: Takeshi Fukunaga
  • Patent number: 7176526
    Abstract: A semiconductor device 1910 comprises a semiconductor substrate 100 including an isolation region 101 and an active region 102, a gate electrode 104 provided on the active region 102 via a gate insulating film 103, part of a side of the gate electrode 104 being covered with a gate electrode side wall insulating film 105, and a source region 106 and a drain region 106 provided on opposite sides of the gate electrode 104 via the gate electrode side wall insulating film 105. At least one of the source region 106 and the drain region 106 has a second surface for contacting a contact conductor. The second surface is tilted with respect to a first surface A–A?. An angle between the second surface and a surface of the isolation region is 80 degrees or less.
    Type: Grant
    Filed: July 27, 2004
    Date of Patent: February 13, 2007
    Assignee: Sharp Kabushiki Kaisha
    Inventors: Hiroshi Iwata, Akihide Shibata, Seizo Kakimoto, Kouichiro Adachi, Masayuki Nakano
  • Patent number: 7176527
    Abstract: A semiconductor device and a method of fabricating the same suppress a substrate floating effect without causing lowering of a degree of integration. The semiconductor device has a Silicon-On-Insulator structure which includes a semiconductor layer formed on an insulator, and has at least one MOSFET element. The MOSFET element includes a source region; a drain region which is opposed to the source region; a body region disposed between the source and drain regions; a gate region positioned on or close to a surface of the body region, so as to form an electrically conducting channel in the body region; and an extracting region being in contact with both of the body region and the source region. The extracting region has a conductivity type which is the same as a conductivity type of the body region and has a concentration higher than that of the body region.
    Type: Grant
    Filed: October 10, 2003
    Date of Patent: February 13, 2007
    Assignee: Oki Electric Industry Co., Ltd.
    Inventor: Koichi Fukuda
  • Patent number: 7176528
    Abstract: Semiconductor-on-insulator (SOI) structures, including large area SOI structures, are provided which have one or more regions composed of a layer (15) of a substantially single-crystal semiconductor (e.g., doped silicon) attached to a support substrate (20) composed of an oxide glass or an oxide glass-ceramic. The oxide glass or oxide glass-ceramic is preferably transparent and preferably has a strain point of less than 1000° C., a resistivity at 250° C. that is less than or equal to 1016 ?-cm, and contains positive ions (e.g., alkali or alkaline-earth ions) which can move within the glass or glass-ceramic in response to an electric field at elevated temperatures (e.g., 300–1000° C.). The bond strength between the semiconductor layer (15) and the support substrate (20) is preferably at least 8 joules/meter2. The semiconductor layer (15) can include a hybrid region (16) in which the semiconductor material has reacted with oxygen ions originating from the glass or glass-ceramic.
    Type: Grant
    Filed: February 12, 2004
    Date of Patent: February 13, 2007
    Assignee: Corning Incorporated
    Inventors: James G. Couillard, Kishor P. Gadkaree, Joseph F. Mach
  • Patent number: 7176529
    Abstract: A semiconductor device includes a semiconductor substrate having a resistivity of at least 30 ?·cm, a first MISFET formed on the semiconductor substrate to function as a protective element, and a second MISFET protected by the first MISFET.
    Type: Grant
    Filed: May 18, 2004
    Date of Patent: February 13, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventor: Tatsuya Ohguro
  • Patent number: 7176530
    Abstract: A semiconductor technology combines a normally off n-channel channel-junction insulated-gate field-effect transistor (“IGFET”) (104) and an n-channel surface-channel IGFET (100 or 160) to reduce low-frequency 1/f noise. The channel-junction IGFET is normally of materially greater gate dielectric thickness than the surface-channel IGFET so as to operate across a greater voltage range than the surface-channel IGFET. Alternatively or additionally, the channel-junction IGFET may conduct current through a field-induced surface channel. A p-channel surface-channel IGFET (102 or 162), which is typically of approximately the same gate-dielectric thickness as the n-channel surface-channel IGFET, is preferably combined with the two n-channel IGFETs to produce a complementary-IGFET structure. A further p-channel IGFET (106, 180, 184, or 192), which is typically of approximately the same gate dielectric thickness as the n-channel channel-junction IGFET, is also preferably included.
    Type: Grant
    Filed: March 17, 2004
    Date of Patent: February 13, 2007
    Assignee: National Semiconductor Corporation
    Inventors: Constantin Bulucea, Philipp Lindorfer
  • Patent number: 7176531
    Abstract: According to one exemplary embodiment, a method for integrating first and second metal layers on a substrate to form a dual metal NMOS gate and PMOS gate comprises depositing a dielectric layer over an NMOS region and a PMOS region of the substrate. The method further comprises depositing the first metal layer over dielectric layer. The method further comprises depositing the second metal layer over the first metal layer. The method further comprises implanting nitrogen in the NMOS region of substrate and converting a first portion of the first metal layer into a metal oxide layer and converting a second portion of the first metal layer into metal nitride layer. The method further comprises forming the NMOS gate and the PMOS gate, where the NMOS gate comprises a segment of metal nitride layer and the PMOS gate comprises a segment of the metal oxide layer.
    Type: Grant
    Filed: December 22, 2004
    Date of Patent: February 13, 2007
    Assignee: Advanced Micro Devices, Inc.
    Inventors: Qi Xiang, Huicai Zhong, Jung-Suk Goo, Allison K. Holbrook, Joong S. Jeon, George J. Kluth
  • Patent number: 7176532
    Abstract: An active pixel sensor which provides reduced dark current, improved sensitivity, and improved modulation transfer function. An N well, surrounded by a P well is formed in a P type epitaxial substrate. A P+ region is formed extending from within the P well into the substrate leaving a gap between the P+ region and the N well. A gate dielectric is formed covering at least the gap, part of the P+ region, and part of the N well. A gate electrode is formed on the gate dielectric over the gap, part of the P+ region, and part of the N well. The gate electrode is biased so that the region of the substrate under the gate electrode is accumulated with holes and the region of the N well under the gate electrode is depleted of electrons. This will reduce the dark current and improve the sensitivity of the active pixel sensor.
    Type: Grant
    Filed: January 14, 2005
    Date of Patent: February 13, 2007
    Assignee: Dialog Semiconductor GmbH
    Inventor: Taner Dosluoglu
  • Patent number: 7176533
    Abstract: Forming a semiconductor device can include forming an insulating layer on a semiconductor substrate including a conductive region thereof, wherein the insulating layer has a contact hole therein exposing a portion of the conductive region. A polysilicon contact plug can be formed in the contact hole wherein at least a portion of the polysilicon contact plug is doped with an element having a diffusion coeffient that is less than a diffusion coefficient of phosphorus (P). Related structures are also discussed.
    Type: Grant
    Filed: November 4, 2004
    Date of Patent: February 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Eun-Ae Chung, Myoung-Bum Lee, Young-Pil Kim, Jin-Gyun Kim, Bean-Jun Jin
  • Patent number: 7176534
    Abstract: The present invention provides a method for fabricating low-resistance, sub-0.1 ?m channel T-gate MOSFETs that do not exhibit any poly depletion problems. The inventive method employs a damascene-gate processing step and a chemical oxide removal etch to fabricate such MOSFETs. The chemical oxide removal may be performed in a vapor containing HF and NH3 or a plasma containing HF and NH3.
    Type: Grant
    Filed: September 11, 2003
    Date of Patent: February 13, 2007
    Assignee: International Business Machines Corporation
    Inventors: Hussein I. Hanafi, Wesley Natzle
  • Patent number: 7176535
    Abstract: The present invention discloses a TFT array substrate that is fabricated using a four-mask process and a method of manufacturing that TFT array substrate. The gate line and gate electrode of the array substrate is surrounded by the metallic oxide after finishing a first mask process using thermal treatment. As a result, the gate line and gate electrode are not eroded and damaged by the etchant and stripper during a fourth mask process. Further, buffering layer can optionally be formed between the substrate and the gate line and gate electrode. Thus, silicon ions and oxygen ions included in the substrate are not diffused into the gate line and electrode. Accordingly, the line defect such as a line open of the gate line and gate electrode is prevented, thereby preventing inferior goods while increasing the manufacturing yield.
    Type: Grant
    Filed: May 12, 2004
    Date of Patent: February 13, 2007
    Assignee: LG. Philips LCD Co., Ltd.
    Inventor: Gee-Sung Chae
  • Patent number: 7176536
    Abstract: A semiconductor device includes a semiconductor substrate, an element-isolating region formed in the semiconductor substrate, a real element region formed in the semiconductor substrate and outside the element-isolating region and having a metal silicide layer formed on the surface thereof, and a dummy element region formed in the semiconductor substrate and outside the element-isolating region and having a metal silicide layer formed on the surface thereof. The ratio of the sum of pattern areas of the real element region and dummy element region occupied in a 1 ?m-square range of interest including the element region is 25% or more.
    Type: Grant
    Filed: May 4, 2004
    Date of Patent: February 13, 2007
    Assignee: Kabushiki Kaisha Toshiba
    Inventors: Hisato Oyamatsu, Kenji Honda
  • Patent number: 7176537
    Abstract: A semiconductor device having a metal/metal silicide gate and a Schottky source/drain and a method of forming the same are provided. The semiconductor device includes a gate dielectric overlying a semiconductor substrate, a metal or metal silicide gate electrode having a work function of less than about 4.3 eV or greater than about 4.9 eV overlying the gate dielectric, a spacer having a thickness of less than about 100 ? on a side of the gate electrode, and a Schottky source/drain having a work function of less than about 4.3 eV or greater than about 4.9 eV wherein the Schottky source/drain region overlaps the gate electrode. The Schottky source/drain region preferably has a thickness of less than about 300 ?.
    Type: Grant
    Filed: May 23, 2005
    Date of Patent: February 13, 2007
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wen-Chin Lee, Chung-Hu Ke, Min-Hwa Chi
  • Patent number: 7176538
    Abstract: A MOSFET includes an insulated gate electrode on a surface of a semiconductor substrate having an impurity region of first conductivity type therein that extends to the surface. Source and drain regions of second conductivity type are provided in the impurity region. The source region includes a highly doped source contract region that extends to the surface and a lightly doped source extension. The lightly doped source extension extends laterally underneath a first end of the insulated gate electrode and defines a source-side P-N junction with the well region. The drain region includes a highly doped drain contact region that extends to the surface and a lightly doped drain extension. The lightly doped drain extension extends laterally underneath a second end of the insulated gate electrode and defines a drain-side P-N junction with the well region. This well region, which extends within the impurity region and defines a non-rectifying junction therewith, is more highly doped than the impurity region.
    Type: Grant
    Filed: June 3, 2004
    Date of Patent: February 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sun-hak Lee, Kwang-dong Yoo
  • Patent number: 7176539
    Abstract: A semiconductor device with substrate-triggered ESD protection has a guard ring, a first MOS transistor array, a second MOS transistor array, a substrate-triggered portion, and an N-well. The first MOS transistor array, the second MOS transistor array, the substrate-triggered portion, and the N-well are formed in a region surrounded by the guard ring, and the substrate-triggered portion is located between the first MOS transistor array and the second MOS transistor array. When the ESD event occurs, the N-well is biased for directing a trigger current.
    Type: Grant
    Filed: October 29, 2004
    Date of Patent: February 13, 2007
    Assignee: United Microelectronics Corp.
    Inventor: Shiao-Shien Chen
  • Patent number: 7176540
    Abstract: A method for producing micromechanical structures, in which a functional layer is deposited onto a sacrificial layer, and the sacrificial layer is removed again for the production of at least one mechanical functional element, which is characterized by a surface barrier layer, with which the functional layer begins on the sacrificial layer, and which has a different state from the remaining functional layer, is also removed at least to a considerable part, or, on the functional layer, one layer or a plurality of layers having at least approximately the same properties with respect to stress in the layer or layers such as the surface barrier layer is (are) applied. Additionally, a micromechanical structure having a functional layer in which the functional layer is constructed in such a way that the stresses are neutralized or no stress gradient appears.
    Type: Grant
    Filed: April 2, 2004
    Date of Patent: February 13, 2007
    Assignee: Robert Bosch GmbH
    Inventors: Wilhelm Frey, Christoph Duenn
  • Patent number: 7176541
    Abstract: A pressure sensor chip includes a diaphragm and pads. A flexible printed circuit board (FPC) includes a resin sheet having a through-hole and wiring patterns that are formed within the resin sheet and sealed. The resin sheet is press-fitted to the pressure sensor chip such that the diaphragm is bared at the through-hole. The wiring patterns are connected to the pads, and junctions between the wiring patterns and the pads are sealed with the resin sheet.
    Type: Grant
    Filed: May 26, 2005
    Date of Patent: February 13, 2007
    Assignee: Denso Corporation
    Inventors: Hiroaki Tanaka, Inao Toyoda, Ichiharu Kondo, Makoto Totani
  • Patent number: 7176542
    Abstract: A photo-EMF detector including a shield to prevent a portion of the detector from illumination. The shield prevents the generation of unwanted noise-currents, thus increasing the performance of the photo-EMF detector.
    Type: Grant
    Filed: April 22, 2004
    Date of Patent: February 13, 2007
    Inventors: Gilmore J. Dunning, Marko Sokolich, Deborah Vogel, David M. Pepper
  • Patent number: 7176543
    Abstract: A thin film semiconductor device such as a photovoltaic device is fabricated on a lightweight substrate material which is affixed to a layer of material which is in turn supported by a carrier. Following the fabrication of the device, the carrier is removed such as by an etching process, leaving the layer of material adhered to the substrate. The adhered layer provides a balancing force to the back side of the substrate which minimizes or eliminates the tendency of the semiconductor device supported on the opposite side of the substrate to cause the substrate to curl. Also disclosed are devices and structures made by this method.
    Type: Grant
    Filed: January 25, 2006
    Date of Patent: February 13, 2007
    Assignee: United Solar Ovonic Corp.
    Inventor: Kevin Beernink
  • Patent number: 7176544
    Abstract: A pixel for detecting red and green light is a single pixel is described. The pixel comprises a deep N well formed in a P type epitaxial substrate. The pixel comprises a deep N well formed in a P type epitaxial substrate. A number of P wells, which are used as the sensor nodes, are formed in the deep N well. The use of these P wells as the sensor nodes improves the modulation transfer function. The depth of the deep N well is about equal to the depth of hole electron pairs generated by red light in silicon. The depth of the P wells is about equal to the depth of hole electron pairs generated by green light in silicon. A red/green signal is determined at each P well by determining the potentials between each of the P wells and the deep N well after a charge integration cycle with the P wells and the deep N well isolated.
    Type: Grant
    Filed: March 31, 2004
    Date of Patent: February 13, 2007
    Assignee: Dialog Imaging Systems GmbH
    Inventors: Taner Dosluoglu, Michael Henry Brill
  • Patent number: 7176545
    Abstract: General purpose methods for the fabrication of integrated circuits from flexible membranes formed of very thin low stress dielectric materials, such as silicon dioxide or silicon nitride, and semiconductor layers. Semiconductor devices are formed in a semiconductor layer of the membrane. The semiconductor membrane layer is initially formed from a substrate of standard thickness, and all but a thin surface layer of the substrate is then etched or polished away. In another version, the flexible membrane is used as support and electrical interconnect for conventional integrated circuit die bonded thereto, with the interconnect formed in multiple layers in the membrane. Multiple die can be connected to one such membrane, which is then packaged as a multi-chip module. Other applications are based on (circuit) membrane processing for bipolar and MOSFET transistor fabrication, low impedance conductor interconnecting fabrication, flat panel displays, maskless (direct write) lithography, and 3D IC fabrication.
    Type: Grant
    Filed: January 27, 2004
    Date of Patent: February 13, 2007
    Assignee: Elm Technology Corporation
    Inventor: Glenn J Leedy
  • Patent number: 7176546
    Abstract: A diode circuit includes a pin diode structure, wherein the n-semiconductor layer is a buried layer, on which the i-area is deposited by an epitaxy method, and wherein a p-semiconductor layer is introduced into the epitaxy layer. A contacting of the p-semiconductor layer and a contacting of the n-semiconductor layer are arranged on the same main surface of the semiconductor substrate so that an integration with an integrated capacitor, an integrated resistor and/or an integrated inductor is possible.
    Type: Grant
    Filed: June 10, 2004
    Date of Patent: February 13, 2007
    Assignee: Infineon Technologies AG
    Inventors: Carsten Ahrens, Wolfgang Hartung, Holger Heuermann, Reinhard Losehand, Josef-Paul Schaffer
  • Patent number: 7176547
    Abstract: A four-division photodetector where a formation process of an element isolation structure is simplified is provided. On a P-sub layer that is a common anode of PIN photodiodes (PIN-PD) for every partition, a high resistivity epitaxial layer that is an i layer of the PIN-PD is grown. At a boundary of the partitions, ion implantation is applied from a substrate surface to form an isolation region that is a P+ region. When a cathode region formed for every partition and the P-sub layer are reverse-biased to operate the PIN-PD, the isolation region is set at a ground potential together with the P-sub layer to operate as an anode. As a result, in the epitaxial layer at a position sandwiched between the isolation region and the P-sub layer, a potential barrier to electrons is formed. As a result, electrons generated owing to light absorption in the respective partitions can be inhibited from moving to adjacent partitions and element isolation can thus be realized.
    Type: Grant
    Filed: May 22, 2006
    Date of Patent: February 13, 2007
    Assignee: Sanyo Electric Co., Ltd.
    Inventor: Akihiro Hasegawa
  • Patent number: 7176548
    Abstract: A semiconductor substrate includes a pair of trenches filled with a dielectric material. Dopant introduced into the mesa between the trenches is limited from diffusing laterally when the substrate is subjected to thermal processing. Therefore, semiconductor devices can be spaced more closely together on the substrate, and the packing density of the devices can be increased. Also trench constrained doped region diffuse faster and deeper than unconstrained diffusions, thereby reducing the time and temperature needed to complete a desired depth diffusion. The technique may be used for semiconductor devices such as bipolar transistors as well as isolation regions that electrically isolate the devices from each other. In one group of embodiments, a buried layer is formed at an interface between an epitaxial layer and a substrate, at a location generally below the dopant in the mesa.
    Type: Grant
    Filed: August 15, 2005
    Date of Patent: February 13, 2007
    Assignee: Advanced Analogic Technologies, Inc
    Inventors: Richard K. Williams, Michael E. Cornell, Wai Tien Chan
  • Patent number: 7176549
    Abstract: A shallow trench isolation is disclosed wherein the trench depth is reduced beyond that achieved in prior art processes. The reduced trench depth helps to eliminate the formation of voids during the trench refill process and provides for greater planarity in the final isolation structure. Effective device isolation is achieved with a reduced trench depth by utilizing refilling dielectric materials having low dielectric constant.
    Type: Grant
    Filed: December 13, 2004
    Date of Patent: February 13, 2007
    Assignee: Micron Technology, Inc.
    Inventors: Klaus F. Schuegraf, Aftab Ahmad
  • Patent number: 7176550
    Abstract: The electronic device (10) comprises a capacitor (12) and an inductor (11) and is present on a substrate (1) with an unplanarized surface (2). This is realized in winding (21) of the inductor (11) has a thickness of at least 1 micron and has a planarized upper surface (81). The upper electrode (32) of the capacitor is present in a second electrode layer (6) and has a lower surface (82) which is spaced from the substrate (1) by a larger distance than the upper surface (81) of the lower electrode (31). The second electrode layer (6) preferably includes a second winding (22) of the inductor (11). The electronic device (10) is suitable for use at high frequencies.
    Type: Grant
    Filed: August 14, 2002
    Date of Patent: February 13, 2007
    Assignee: NXP B.V.
    Inventors: Jozef Thomas Martinus Van Beek, Theodoor Gertrudis Silvester Maria Rijks, Marion Kornelia Matters-Kammerer, Henricus Andreas Van Esch
  • Patent number: 7176551
    Abstract: A fuse structure for a semiconductor device is provided. The fuse structure includes a fuse layer between the upper and lower insulating layers. The fuse layer is connected to the other metal layers through the via plugs. The fuse layer includes at least two separate blocks and at least a connecting block. For the current flowing through the separated blocks in a zig-zag path, of the fuse structure provides at least a fusing point or more than one fusing points. In this way, the negative impact of the single failed fuse can be reduced, thus increasing the reliability of the fuse structure. Also the damage to the devices adjacent to the fuse due to the heat generated by the current can be prevented because when the heat generated during the fuse blowing process will be conducted to the adjacent blocks to facilitate heat dissipation.
    Type: Grant
    Filed: May 19, 2004
    Date of Patent: February 13, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Chun-Wen Cheng, Chia-Wen Liang, Richard Lee, Vincent Hsueh
  • Patent number: 7176552
    Abstract: A semiconductor memory device comprises a cell capacitor having a first buried contact connected with a semiconductor substrate of a cell region and a first storage node connected with the first buried contact, and a decoupling capacitor for reducing a coupling noise, having a plurality of second buried contacts formed on a semiconductor substrate portion adjacent in the cell region and extended in parallel with each other and a plurality of second storage nodes connected with the second buried contacts.
    Type: Grant
    Filed: June 16, 2005
    Date of Patent: February 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Je-Min Park, Yoo-Sang Hwang
  • Patent number: 7176553
    Abstract: In a process for the fabrication of integrated resistive elements with protection from silicidation, at least one active area (15) is delimited in a semiconductor wafer (10). At least one resistive region (21) having a pre-determined resistivity is then formed in the active area (15). Prior to forming the resistive region (21), however, a delimitation structure (20) for delimiting the resistive region (21) is obtained on top of the active area (15). Subsequently, protective elements (25) are obtained which extend within the delimitation structure (20) and coat the resistive region (21).
    Type: Grant
    Filed: September 26, 2003
    Date of Patent: February 13, 2007
    Assignee: STMicroelectronics S.r.l.
    Inventors: Alessandro Grossi, Roberto Bez, Giorgio Servalli
  • Patent number: 7176554
    Abstract: A method for producing a semiconductor entity is described. The method includes providing a donor substrate having a zone of weakness at a predetermined depth to define a thin layer, and the donor substrate includes a bonding interface. A receiver substrate is also provided that includes at least one motif on its surface. The technique further includes bonding the donor substrate at the bonding interface to the at least one motif on the receiver substrate, and supplying sufficient energy to detach a portion of the thin layer from the donor substrate located at the at least one motif and to rupture bonds within the thin layer. The energy thus supplied is insufficient to rupture the bond at the bonding interface. Also described is fabrication of a wafer and the use of the method to produce chips suitable for use in electronics, optics, or optoelectronics applications.
    Type: Grant
    Filed: June 7, 2004
    Date of Patent: February 13, 2007
    Assignee: S.O.I. Tec Silicon on Insulator Technologies S.A.
    Inventors: Yves Matthieu Le Vaillant, Olivier Rayssac, Christophe Fernandez
  • Patent number: 7176555
    Abstract: A flip-chip package includes a packaging substrate; an integrated circuit die affixed to the packaging substrate, wherein the integrated circuit die includes an active integrated circuit surrounded by a peripheral die seal ring therein; and a thermal stress releasing pad disposed in a stress-releasing area that is at a corner of the integrated circuit die outside the die seal ring, wherein the thermal stress releasing pad is connected to the packaging substrate by using a solder bump, which, in turn, is connected to a dummy heat-spreading metal plate embedded in the packaging substrate so as to form a heat shunting path for reducing thermal stress during temperature cycling test.
    Type: Grant
    Filed: July 26, 2005
    Date of Patent: February 13, 2007
    Assignee: United Microelectronics Corp.
    Inventors: Jui-Meng Jao, Chien-Li Kuo
  • Patent number: 7176556
    Abstract: A semiconductor apparatus comprises a support substrate having through holes filles with conductor adapted to a first pitch; a capacitor formed on or above said support substrate; a wiring layer formed on or above said support substrate, leading some of said through holes filles with conductor upwards through said capacitor, having branches, and having wires of a second pitch different from said first pitch; and plural semiconductor elements disposed on or above said wiring layer, having terminals adapted to the second pitch, and connected with said wiring layer via said terminals. A semiconductor apparatus, in which semiconductor elements having a narrow terminal pitch, a support having through wires at a wider pitch, and a capacitor are suitably electrically connected to realize the decoupling function with reduced inductance and large capacitance.
    Type: Grant
    Filed: March 8, 2002
    Date of Patent: February 13, 2007
    Assignee: Fujitsu Limited
    Inventors: Keishiro Okamoto, Takeshi Shioga, Osamu Taniguchi, Koji Omote, Yoshihiko Imanaka, Yasuo Yamagishi
  • Patent number: 7176557
    Abstract: A semiconductor device which permits reduction in the number of pins and in size thereof is provided.
    Type: Grant
    Filed: January 21, 2005
    Date of Patent: February 13, 2007
    Assignee: Renesas Technology Corp.
    Inventors: Yoshihiko Shimanuki, Koji Tsuchiya
  • Patent number: 7176558
    Abstract: A semiconductor package comprises a substrate having connection pads disposed thereon, a semiconductor chip attached to the substrate such that an active surface of the semiconductor chip faces the substrate, and external bonding pads electrically connected to the active surface of the semiconductor chip. The external bonding pads may be formed near the ends of the frame and have an upper surface facing away from the substrate. The external bonding pads are electrically connected with the connection pads.
    Type: Grant
    Filed: September 20, 2004
    Date of Patent: February 13, 2007
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: In-ku Kang, Sung-hwan Yoon