Abstract: A method for cleaning and drying semiconductor wafers improves device yield by providing more advanced control of the ratio of drying fluid to cleaning fluid, for example the ratio of N2 vapor to IPA vapor. In addition, a quick drain process is employed to improve process throughput, and to further improve particle and watermark removal during the cleaning and drying steps.

Abstract: The present invention relates to methods of treating surfaces, to protect or clean said surfaces. The invention more particularly relates to the treatment of interior walls or surfaces, particularly indoor household walls or surfaces, to protect the same from soiling or stains. This invention also relates to compositions, kits and devices for use in the above methods, to protect or clean indoor surfaces. This invention can be applied to various indoor surfaces, such as soft and permeable surfaces, in particular painted walls, wall paper and wallcloth.

Abstract: Disclosed herein is a device and a method of cleaning a photomask, which prevents haze from being generated on a surface of the photomask during a photolithography process. The photomask is heat treated to remove residual ions on a surface thereof and to induce curing and oxidation of Cr and MoSiON layers, thereby preventing diffusion of the ions. Etching of Cr and MoSiON layers due to a cleaning process is suppressed in order to significantly reduce a change in phase and transmissivity of optical properties of Cr and MoSiON.

Abstract: A method for the fabrication of nonpolar indium gallium nitride (InGaN) films as well as nonpolar InGaN-containing device structures using metalorganic chemical vapor deposition (MOVCD). The method is used to fabricate nonpolar InGaN/GaN violet and near-ultraviolet light emitting diodes and laser diodes.

Abstract: A method of making a magnetic alloy material includes the steps of: preparing a melt of an alloy material having a predetermined composition; rapidly cooling and solidifying the melt to obtain a rapidly solidified alloy represented by: Fe100-a-b-cREaAbTMc where RE is at least one rare-earth element selected from La, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er and Tm and including at least about 90 at % of La; A is at least one element selected from Al, Si, Ga, Ge and Sn; TM is at least one transition metal element selected from Sc, Ti, V, Cr, Mn, Co, Ni, Cu and Zn; and 5 at %?a?10 at %, 4.7 at %?b?18 at % and 0 at %?c?9 at %; and producing a compound phase having an NaZn13-type crystal structure in at least about 70 vol % of the rapidly solidified alloy.

Abstract: A carbo-nitriding process for forming a martensitic stainless steel, which is case hardened and superior corrosion resistance over carburized process, is provided. A process for forming a martensitic stainless steel which is case hardened is provided. The process comprises the steps of providing a material consisting essentially of from 8.0 to 18 wt % chromium, cobalt up to 16 wt %, vanadium up to 5.0 wt %, molybdenum up to 8.0 wt %, nickel up to 8.0 wt %, manganese up to 4.0 wt %, silicon up to 2.0 wt %, tungsten up to 6.0 wt %, titanium up to 2.0 wt %, niobium up to 4.0 wt % and the balance iron, and carbo-nitriding to prescribed levels of C+N, to form a hard, corrosion resistance case in a fracture tough stainless steel.

Abstract: A process is described for treating metal surfaces with a composition comprising an oxidizer, an acid, a corrosion inhibitor, an unsaturated alkyl substituted with an aromatic or non-aromatic cyclic groups, and optionally but preferably a source of adhesion enhancing species selected from the group consisting of molybdates, tungstates, tantalates, niobates, vanadates, isopoly or heteropoly acids of molybdenum, tungsten, tantalum, niobium, vanadium, and combinations of any of the foregoing, an organic nitro compound, and a source of halide ions in order to increase the adhesion of polymeric materials to the metal surface.

Abstract: An alloy design approach to modify and improve existing iron based glasses. The modification is related to increasing the stability of the glass, which results in increased crystallization temperature, and increasing the reduced crystallization temperature (Tcrystallization/Tmelting), which leads to a reduced critical cooling rate for metallic glass formation. The modification to the iron alloys includes the additional of lanthanide elements, including gadolinium.

Abstract: By increasing the quantity of resin binder of at least one of conductive paste and ceramic green sheet, adhesion between conductive film and the ceramic green sheet is improved when an intaglio filled with the conductive paste is hot pressed on the ceramic green sheet. As a result, transfer failure at intaglio transfer is removed and internal fracture of the ceramic green sheet is suppressed. Also, by coating an adhesive layer on an intaglio filled with conductive paste, adhesion with ceramic green sheet is improved and transfer failure at intaglio transfer is suppressed.

Abstract: A method of making a mounting patch for mounting an electronic assembly in the inner liner or a pneumatic tire includes the steps of providing a power source, embedding the power source into a quantity of uncured rubber, and curing the uncured rubber by applying sufficient heat and pressure to the uncured rubber such that the power source is secured in the rubber. The provided power source may correspond to one or more batteries. Additional components that may be incorporated with the mounting assembly may include at least one conductive element, which may also be embedded into the quantity of uncured rubber. An antenna may be configured with undulations to allow longitudinal stretching of the antenna and then also embedded into the quantity of uncured rubber. A preferably non-conductive adhesive layer may be applied to selected portion of the power source, conductive element, and/or the antenna before the step of embedding in the uncured rubber.

Abstract: An improved method enables preparation of articles for a variety of applications, including embossing or otherwise shaping to form a variety of articles. A plurality of thin, preferably resin-impregnated, flexible graphite sheets are arranged to form zones in a composite material having a graded density or other characteristic. Variation of properties between zones in the stock material formed is useful for achieving a desired set of properties in the formation of articles such as those useful in electrochemical fuel cells and double-layer capacitors.

Abstract: A method for forming a honeycomb sandwich composite panel comprising dry fabrics, an unpermeating-resin film, a non-low-viscosity-resin film, a honeycomb core, a non-low-viscosity resin film, an unpermeating-resin film and dry fabrics, stacked in this order in a mold. The cells of the honeycomb core are sealed by the laminated films. The unpermeating-resin film prevents the excessive permeation of the resin which forms the laminated films into the dry fabrics and to enhance the adhesion of this resin to the honeycomb core by forming proper fillets of the resin of the laminated sealing films. Further, drying process for drying the dry fabrics enables the application of the RTM process to the formation of the honeycomb sandwich composite panel.

Abstract: The invention provides a process for producing a substrate for flexible circuit boards which comprises: providing a multilayered insulating resin layer comprising an insulating layer and an adhesive layer; and laminating a metal foil to the insulating layer of the multilayered insulating resin layer via the adhesive layer at a temperature not lower than the glass transition temperature of the insulating layer.

Abstract: A hotmelt adhesive having a melting point of at least 40° C. is provided which may be hardened in multiple stages and which is useful in the production of laminates. The hotmelt adhesive may contain a polymer with at least one functional group that is reactive towards a compound with an acidic hydrogen atom and with one functional group that can be polymerized by UV or electron beams, or a polymer with at least one functional group that is reactive towards a compound with an acidic hydrogen atom and with no functional group that can be polymerized by UV or electron beams. These polymers may be used in combination with a relatively low molecular compound with a functional group that can be polymerized by UV or electron beams.

Abstract: A device and method for controlling the temperature of a plasma chamber inside wall or other surfaces exposed to the plasma by a plurality of temperature control systems. A plasma process within the plasma chamber can be controlled by independently controlling the temperature of segments of the wall or other surfaces.

Abstract: A plasma processor includes a table on which a target object is to be placed, a vessel which accommodates the table and in which a plasma is to be generated by a high-frequency electromagnetic field, a high-frequency oscillator (30) which generates a high-frequency electromagnetic field, and a reference oscillator (34) which is lower in output power than the high-frequency oscillator (30) and stable in oscillation frequency. A reference signal generated by the reference oscillator (34) is injected into the high-frequency oscillator (30) to fix an oscillation frequency of the high-frequency oscillator (30) at a frequency of a reference signal. Therefore, accurate load matching is performed to improve an energy efficiency when an automatic matching device provided between the high-frequency oscillator (30) and vessel is designed based on the frequency of the reference signal.

Abstract: There is provided a plasma treatment apparatus that carries out plasma treatment on an article, with which it is possible to make the plasma density uniform. A plasma treatment vessel houses a semiconductor wafer and a treatment gas is introduced into the plasma treatment vessel. A lower electrode is provided inside the plasma treatment vessel and the semiconductor wafer is placed onto the lower electrode. An upper electrode that has a plurality of holes formed therein and has a dome shape that is upwardly convex, is provided above the lower electrode in the plasma treatment vessel. A height of the upper electrode from the lower electrode becomes greater from an outside of the lower electrode to a center of the lower electrode.

Abstract: Disclosed is a method for preparing paper pulp from cornstalks comprising the steps of cooking, washing, screening, thickening, bleaching, beating and drying performed under moderate conditions which have little noxious effects on the environment. By using cornstalks as raw materials for paper pulp, it becomes possible to replace import of wood raw materials, to save foreign currency, to increase rural income, and to make high quality paper.

Abstract: A process for producing tissue webs is disclosed. The process includes the step of partially dewatering a tissue web and then subjecting the web to multiple deflections against fabrics prior to drying the tissue web. For instance, in one embodiment, the tissue web is deflected multiple times in between two opposing fabrics. The tissue web can be deflected against the fabrics under sufficient pressure to cause the tissue web to mold against the fabrics. By deflecting the tissue web multiple times, rearrangement of the papermaking fibers contained in the tissue web occurs increasing the bulk of the web.

Abstract: The present invention is a polysiloxane treated hydrophilic tissue sheet having a polydialkylsiloxane content of about 0.4% or greater by weight of dry pulp fibers. The polysiloxane treated hydrophilic tissue sheet may also have a wet out time after aging 20 days at about 130° F. of about 10 seconds or less.

Abstract: A multi-track magnetron having a convolute shape and asymmetric about the target center about which it rotates. A plasma track is formed as a closed loop between opposed inner and outer magnetic poles, preferably as two or three radially arranged and spirally shaped counter-propagating tracks with respect to the target center and preferably passing over the rotation axis. The pole shape may be optimized to produce a cumulative track length distribution conforming to the function L=arn. After several iterations of computerized optimization, the pole shape may be tested for sputtering uniformity with different distributions of magnets in the fabricated pole pieces. If the uniformity remains unsatisfactory, the design iteration is repeated with a different n value, different number of tracks, or different pole widths. The optimization reduces azimuthal sidewall asymmetry and improves radial deposition uniformity.

Abstract: An anode for a cathodic protection system comprises a base portion or support structure which is shaped to receive a conductive element, or insert, within a cavity of the support structure. The conductive element is made of a polymer material, such as vinyl ester, with a conductive filler, such as graphite powder. The base is attachable to a marine vessel or other submersible component that is being protected by a cathodic protection system. The anode allows the use of a relatively inexpensive resin material with a graphite filler in place of a much more expensive platinum coated titanium element.

Abstract: An active cathodic protection system, the apparatus comprising a rectifier element with at least one electrical connection to a source of electrical current, the rectifier element associated with a direct current positive (+) output terminal for electrical connection of via an anode connector to a consumable anode, a direct current negative (?) output terminal for electrical connection via a cathode connector to the structure to be protected, grounding means for electrical grounding of the apparatus and anti-cross connection means for preventing the continuing flow of electrical current when the anode connector is associated with the negative output terminal and the cathode connector is associated with the positive output terminal.

Abstract: A method of production and a method of polishing a semiconductor device and a polishing apparatus, capable of easily flattening an initial unevenness of a metal film, excellent in efficiency of removal of an excess metal film, and capable of suppressing damage to an interlayer insulation film below the metal film when flattening the metal film by polishing, the polishing method including the steps of interposing an electrolytic solution including a chelating agent between a cathode member and the copper film, applying a voltage between the cathode member used as a cathode and the copper film used as an anode to oxidize the surface of the copper film and forming a chelate film of the oxidized copper, selectively removing a projecting portion of the chelate film corresponding to the shape of the copper film to expose the projecting portion of the copper film at its surface, and repeating the above chelate film forming step and the above chelate film removing step until the projecting portion of the copper film

Abstract: An electrolytic ion-water production apparatus in which purified water without residual chlorine is electrolyzed to produce alkaline-ion water without any chloride smell of lime in use of the apparatus, and in which a mixture of purified water treated by a water purifier and tap water containing residual chlorine is electrolyzed to produce alkaline-ion water containing sodium hypochlorous acid (NaOCl) of low concentration and to retain the produced alkaline-ion water in an introduction passage for reliably preventing propagation of microbes.

Abstract: A hard film for cutting tools which is composed of (Ti1?a?b?c?d, Ala, Crb, Sic, Bd)(C1?eNe) 0.5?a?0.8, 0.06?b, 0?c?0.1, 0?d?0.1, 0?c+d?0.1, a+b+c+d<1, 0.5?e?1 (where a, b, c, and d denote respectively the atomic ratios of Al, Cr, Si, and B, and e denotes the atomic ratio of N).

Abstract: A pressure-resistant reference electrode for electrochemical measurements includes both a half cell and a primary current bridge, provided for closing an electrochemical contact between the half cell and a measurement medium, which current bridge contains a primary electrolyte. The half cell has a reference electrolyte and a lead-off element, dipped into the reference electrolyte, which are disposed in a half-cell chamber that is provided with a primary junction leading to the primary current bridge and is otherwise embodied as medium-proof. The half-cell chamber furthermore has a flexible wall region, which is embodied such that a pressure difference between the primary current bridge and the half cell can be compensated for essentially without convection by the primary junction.

Abstract: Suppressor and anti-suppressor additives in an acid copper sulfate plating bath are analyzed by the cyclic voltammetric stripping (CVS) method without cleaning or rinsing the cell between the two analyses. The suppressor analysis is performed first and the suppressor concentration in the resulting measurement solution is adjusted to a predetermined value corresponding to full suppression. This fully-suppressed solution is then used as the background electrolyte for the anti-suppressor analysis. This integrated analysis approach provides results comparable to those obtained with cell cleaning and rinsing between the analyses but significantly reduces the analysis time, consumption of expensive chemicals, and quantity of hazardous waste generated.

Abstract: A method and apparatus wherein an electrically conductive element is placed inside a previously installed metallic water vessel such as a supply pipe or well. A direct current voltage is then applied between the element and the conductive wall of the vessel. The conductive element can be a partially insulated wire. For causing deposition on the vessel, the voltage applied to the conductive element is of an amount sufficient to cause the potential of the metallic vessel to be lowered below the potential of the element by at least ?0.3 volts, and more adequately ?1.3 volts. An alternative embodiment involves reversing the polarity of the voltage applied between the conductive element and the vessel, causing the oxidation/reduction reaction to reverse, resulting in calcium carbonate being removed from the vessel by the production of acid at the surface of the vessel.

Abstract: A process for the cyclical regeneration of an adsorbent bed containing sulfur-oxidated compounds. The adsorbent bed is used to adsorb and separate sulfur-oxidated compounds from a hydrocarbonaceous stream to produce an adsorbent having adsorbed sulfur-oxidated compounds.

Abstract: The present invention pertains to a catalyst comprising 7–20 wt. % of a Group VIB metal component, calculated as trioxide on the weight of the catalyst, and 0.5 to 6 wt. % of a Group VIII metal component, calculated as oxide on the weight of the catalyst, on a porous inorganic carrier. The catalyst has a specific surface area of 100–180 m2/g, a total pore volume of at least 0.55 ml/g, at least 50% of the total pore volume in pores with a diameter of at least 20 nm (200 ?), 10–30% of the total pore volume in pores with a diameter of at least 200 nm (2000 ?), and 0–1% of the total pore volume in pores with a diameter above 1000 nm (10000 ?). The catalyst is particularly suitable for the hydroprocessing of heavy hydrocarbon feeds of which at least 50 wt. % boils above 538° C. (1000° F.). It is especially advantageous for the hydroprocessing of feedstocks of which at least 80 wt. % boils above 538° C. (1000° F.).

Abstract: A system for introducing a liquid disinfectant into treated wastewater comprising a source of liquid disinfectant, a sensor to detect flow of treated wastewater from a wastewater treatment system, a pump to introduce the liquid disinfectant into the treated wastewater and a controller operatively connected to the sensor to activate the pump in response to increased flow of treated wastewater above a sensed, predetermined flow rate.

Abstract: The invention concerns a monitoring unit [10] for monitoring the condition of a semi-permeable membrane [24] in a water purification system, and particularly the condition of spiral membrane in a reverse osmosis water purification system. The monitoring unit [10] comprises a flow chamber [12] that includes an inlet for permitting ingress of a feed fluid into the flow chamber [12], and a feed fluid outlet [22] for permitting at least partial through-flow of the feed fluid through the flow chamber [12] such that cross-flow conditions apply in the flow chamber [12]. The semi-permeable membrane [24] is at least partly supported in the flow chamber [12]. The monitoring unit [10] further comprises at least one fluid outlet [18] arranged in fluid communication with the flow chamber [12] for permitting egress of fluid from the monitoring unit [10] after having passed through the membrane [24]; and an inspection window [20] for permitting visual inspection of the semi-permeable membrane [24].

Abstract: An orbital wastewater treatment system includes a tank and a partition disposed in the tank to define a pair of channels in the tank. The tank has a turning wall bounding contiguous portions of the channels. The partition has an end spaced from the turning wall, whereby the channels communicate with one another. A driven shaft is disposed vertically in the tank between the end of the partition and the turning wall. The driven shaft is provided at an upper end with a surface aerator and at a lower end with a horizontal impeller. At least one baffle member is disposed in the tank partially about a lower end of the shaft including the impeller.

Abstract: A filter system for insertion into a storm drain pipe for filtering liquid runoff. Storm weather or other runoff will filter through this filter system prior to this runoff passing through to the outfall and into oceans, lakes, streams, ponds or other retention areas. The filtration system fits within the storm drain underneath the manhole and will capture all the runoff. The filtration device contains a stainless steel flange which hinges into the storm drain and a main chamber which extends down into the storm drain containing a series of filter chambers. The first level of filtration the hydrocarbon media can be easily replaced once saturated. An overflow opening is located at the upper portion of the liquid capturing chamber which prevents backflow with excessive runoff.

Abstract: Water sanitizing apparatus is provided for pools, spas hot tubs and other similar bathing facilities that integrates an ozone generator and a chlorine generator in one unit, in addition to exposing a flow of water to be purified to ultraviolet radiation from the ozone generator for advanced oxidation reactions. In one embodiment, a mixing venturi allows for mixing various substances together prior to insertion into the motive flow. In another embodiment the venturi is constructed as inserts that allow tuning of the venturi for individual systems. In other embodiments, salt is added to a portion of the water flow as a concentrated brine from which chlorine is generated, or the salt may be simply be added to the water of the facility at a much lower concentration and chlorine generated from the flow of water through the apparatus.

Abstract: A process and a device for biological treatment of a suspension in a bioreactor, wherein the suspension is circulated, at least some of the suspension is routed through a vertically aligned guide zone in the bioreactor so that a vertical flow of the suspension is produced. The top scum in the area of the suspension fill level is controlled by feeding a fluid, especially in the form of a free liquid jet, into the bioreactor via at least one nozzle at the fill level, such that the surface of the suspension and/or the top scum floating on the surface of the suspension is forced into rotary flow.

Abstract: A method and apparatus for monitoring and controlling the nano-scale flow rate of fluid in the operating flow path of a HPLC system. A first flow sensor is disposed in a first flow path between a first flow-divider and a fluidic tee. A second flow sensor is disposed in a second flow path between a second flow-divider and the fluidic tee. A first recycle flow restrictor is disposed in the first recycle flow path in fluid communication with the first flow-divider. A second recycle flow restrictor is disposed in the second The permeability of each recycle flow restrictor can be selected to produce a desired flow rate with each respective flow path. The output signals of the first and second flow sensors to control output of a pump within each flow path.

Abstract: A bracket system holds one or more filters in quick-attach and quick-release fashion. Bracket modules are combined in modular fashion, with tubing or other conduit between the modules, to create a “bank” of filters easily changed in number, arrangement, and flow scheme. Preferably, the bracket system comprises pairs of top modules and bottom modules that capture and support the top end and bottom end of a filter. Filter inlet and outlet ports preferably slide onto and off of cooperating tubes or ports in the bracket modules, for installation and removal of the filters onto/from the modules without tools or threaded connections. A top retaining member preferably pivots off of its respective filter, so that the filter may be lifted up off of its respective bottom module. The bottom modules may be pivotal, so that lifting the filter up from the bracket system is facilitated by allowing the filter top end to also pivot out away from the top module.

Abstract: A filter housing having radial sealing means is disclosed herein. Upper bosses and lower bosses can be used to attach the head to the sump for easy opening and closing the filter housing when replacing the filter cartridge. The filter housing of the present invention provides simplified filter cartridge changes to minimize process downtime and without recourse to tools. The filter housing contains fluid flow directing mean to facilitate filter cartridge replacement and safety means to prevent removal of the sump when fluid is passing through the sump.

Abstract: An ambient anaerobic digester system for anaerobic digestion of animal waste with biogas production and recovery is provided. The anaerobic digester system includes a substantially flexible bladder for anaerobically digesting the animal waste with biogas production and transmitting the biogas to at least one biogas storage container, biogas use device or a combination thereof. In a preferred form, the substantially flexible bladder has a waste inlet, a digester effluent outlet, one or more sludge access ports and a biogas outlet in a top surface thereof. The anaerobic digester system may inexpensively, simply, reliably, and effectively be used to treat animal waste without energy expenditure and little capital expense, thus minimizing pollution typically caused by animal waste.

Abstract: Removal of oxidized contaminants from water. Perchlorate and other oxidized contaminants are reduced and removed from water with a method using a primary electron acceptor.

Abstract: A method and apparatus for treating wastewater streams by adding, either separately or as a mixture, a nitrate containing compound and an alkaline material in an amount sufficient to achieve a lower concentration of atmospheric hydrogen sulfide and dissolved sulfides downstream of the addition as compared to the atmospheric hydrogen sulfide and dissolved sulfides present in the wastewater stream prior to the addition. By adding alkaline material in addition to a nitrate containing compounds, the amount of nitrate containing compound added can be reduced by at least 10% as compared to the amount of nitrate that would theoretically need to be added in the absence of alkaline material to achieve a comparable lower concentration of atmospheric hydrogen sulfide and dissolved sulfides in the wastewater stream.

Abstract: A dialysis machine is provided with a dialysate circuit, a blood circuit and a filter having a dialysate compartment connected to the dialysate circuit, a blood compartment connected to the blood circuit, and a semi-permeable membrane to separate the dialysate compartment from the blood compartment. A method for filling and washing the filter includes the recirculation of a physiological saline in the dialysate circuit and the transfer of the physiological saline from the dialysate circuit to the blood circuit through the semi-permeable membrane.

Abstract: A process for supplying bubbles to a membrane module and cleaning an aerator producing the bubbles includes, in repeated cycles, steps of producing bubbles from an aerator and reducing pressure in the aerator such that water in the tank enters the aerator.

Abstract: A process for removing soluble and insoluble inorganic, organic, and microbiological contaminants from a fluid stream employing a pretreatment module, a post-treatment module, a recycle stream module or any combination thereof, and a membrane module, is provided. The process provided reduces the problems associated with membrane fouling and increases contaminant removal capacity.

Abstract: Supercritical water (SCW) systems and methods using the properties of supercritical water to allow a raw water stream including water and a contaminant to be purified. A supercritical water oxidation (SCWO), water purifier may generally include water and oxidizer (such as oxygen in air) pumping and mixing apparatus, a supercritical water reactor, and a system for separating the resultant purified water from other relatively harmless outputs of the supercritical water reactor.

Abstract: An oil/grease removal assembly includes a container having an inlet to receive effluent from a kitchen sink. A drain connection spaced above the container bottom defines a static water level for contained liquid and connects to a sewer. A baffle extends downwardly below the static water level so water can flow below the baffle to the drain, while retaining floating oil/grease. Means intermittently raise the liquid level in the container above the static water level. Floating oil/grease can flow out through a port when the liquid level in the container is raised above the static water level.

Abstract: A vibratory apparatus for separating a liquid from a liquid-laden solid material. The apparatus includes an inclined trough having a base with a first end and a second elevated with respect to the first end. A deck is attached to the trough base, the deck defining support points positioned above the base spaced from one another by a distance sufficient to support the solid material above the deck, and passages located between the support points to allow liquid to flow to the deck. A vibratory drive is attached to the trough and oriented impart a conveying motion toward the trough second end. Solid material deposited onto the deck is advanced toward the second end by the conveying motion while the liquid flows along the trough base toward the first end under gravity.

Abstract: A method for fabricating a magnetic head with a trapezoidal shaped pole piece tip is described. The body of the main pole piece is deposited, then one or more layers for the pole piece tip are deposited. A bed material is deposited over the pole piece tip material. A void is formed in the bed material over the area for the pole piece tip. The void is filled with an ion-milling resistant material such as alumina preferably using atomic layer deposition or atomic layer chemical vapor deposition. The excess ion-milling resistant material and the bed material are removed. The result is an ion-milling mask formed over the area for the pole piece tip. Ion milling is then used to remove the unmasked material in the pole piece tip layer and to form a beveled pole piece tip and preferably a beveled face on the main pole piece.