Abstract: The present invention is directed to a method of pre-treating a lignocellulosic feedstock. The lignocellulosic feedstock comprises cereal straw, stover, or grass. One or more than one bale of lignocellulosic feedstock is conveyed into a pre-treatment reactor. Steam and acid are added to the bales and are maintained at a temperature, acid concentration, and for a time sufficient to hydrolyze hemicellulose to xylose and increase susceptibility of cellulose to digestion by cellulase enzymes, thus producing a pre-treated feedstock. The pre-treated feedstock is then removed from the pre-treatment reactor.

Abstract: A method has been developed to prepare (E)- and (Z)-2-methyl-2-butenoic acids (2M2BA) from a mixture of (E,Z)-2-methyl-2-butenenitriles (2M2BN) by the regioselective hydrolysis of (E)-2M2BN to (E)-2-methyl-2-butenoic acid (2M2BA) using enzyme catalysts having either a nitrilase activity or a combination of nitrile hydratase and amidase activities. The method provides high yields without significant conversion of (Z)-2M2BN to (Z)-2M2BA. The regioselective hydrolysis of (E)-2M2BN to (E)-2M2BA makes possible the facile separation of (E)-2M2BA from (Z)-2M2BN or (Z)-2-methyl-2-butenamide (2M2BAm), and the subsequent conversion of (Z)-2M2BN or (Z)-2M2BAm to (Z)-2M2BA.

Abstract: Various methods are provided for the enzymatic production of glycolic acid from glycolonitrile. These methods include: 1) use of Acidovorax facilis 72W nitrilase mutants having improved nitrilase activity for converting glycolonitrile to glycolic acid, and 2) methods to improve catalyst stability and/or productivity. The methods to improve catalyst stability/productivity include use of reaction stabilizers, running the reactions under substantially oxygen free conditions, and controlling the concentration of substrate in the reaction mixture.

Abstract: The invention provides an isolated polypeptide containing the amino acid sequence of SEQ ID NO: 14, 16, 18, 20, 22 or 24. The invention also provides an isolated polypeptide containing a) an amino acid sequence having at least 50% amino acid identity with SEQ ID NO: 10, and b) an amino acid sequence selected from SEQ ID NOS: 14, 16, 18, 20, 22, or 24; or a conservative variant thereof. The invention further provides an isolated polypeptide containing the amino acid sequence of SEQ ID NO: 2, 4, 6, or 8. The invention also provides a method for identifying a compound that modulates a COX-1 variant by contacting an isolated COX-1 variant or a COX-1 variant over-expressed in a genetically engineered cell with a compound and determining the level of an indicator which correlates with modulation of a COX-1 variant, where an alteration in the level of the indicator as compared to a control level indicates that the compound is a compound that modulates the COX-1 variant.

Abstract: The invention provides an isolated nucleic acid molecule, designated as a kinase nucleic acid molecule, which encodes a novel protein kinase. The invention also provides antisense nucleic acid molecules, recombinant expression vectors containing kinase nucleic acid molecules, host cells into which the expression vectors have been introduced, and nonhuman transgenic animals in which a kinase gene has been introduced or disrupted. The invention still further provides isolated 14790 proteins, fusion proteins, antigenic peptides and anti-kinase antibodies. Diagnostic, screening, and therapeutic methods utilizing compositions of the invention are also provided.

Abstract: The invention provides isolated nucleic acids molecules, designated 53070, 15985, 26583, 21953, m32404, 14089, and 23436 nucleic acid molecules, which encode novel human protein kinase family members, serine/threonine protein kinase family members, serine/threonine phosphatase family members, prolyl oligopeptidase family members, trypsin family members, trypsin serine protease family members, and ubiquitin protease family members. The invention also provides antisense nucleic acid molecules, recombinant expression vectors containing 53070, 15985, 26583, 21953, m32404, 14089, or 23436 nucleic acid molecules, host cells into which the expression vectors have been introduced, and nonhuman transgenic animals in which a 53070, 15985, 26583, 21953, m32404, 14089, or 23436 gene has been introduced or disrupted.

Abstract: The present invention relates to a phosphorylated form of mammalian glyoxalase I. The present invention relates further to the use of phosphorylated mammalian glyoxalase I to modulate MG-modification of proteins (AGE formation) and consequent cell death, especially upon stress such as oxidative stress, or upon TNF treatment.

Abstract: The present invention relates to a gene for an enzyme involving in the synthesis of GDP-L-fucose. Particularly, the present invention relates to a GDP-4-keto-6-deoxy-D-mannose-3, 5-epimerase-4-reductase gene derived from Arabidopsis thaliana, and a process for producing GDP-L-fucose using the gene. An enzyme encoded by the gene is (a) a protein comprising an amino acid sequence represented by SEQ ID NO: 1; or (b) a protein comprising an amino acid sequence derived from the amino acid sequence of SEQ ID NO: 1 by deletion, substitution, addition or insertion of one or several amino acid residues, and having GDP-4-keto-6-deoxy-D-mannose-3, 5-epimerase-4-reductase activity. The present invention enables efficient mass production of GDP-L-fucose which is essential in performing addition of fucose, which has a very important function in sugar chains.

Abstract: The present invention provides novel isolated polynucleotides encoding a novel xylose isomerases capable of catalyzing the conversion of glucose to fructose and nucleic acids encoding for such isomerase. The present invention also provides a method of producing the xylose isomerase enzymes employing DNA encoding for the enzymes, plasmids containing the DNA, and bacteria into which the plasmids have been inserted and which produce the enzymes.

Abstract: The present invention relates to recombinant vaccinia viruses derived from the modified vaccinia virus Ankara (MVA) and containing and capable of expressing foreign genes which are inserted at the site of a naturally occurring deletion in the MVA genome, and the use of such recombinant MVA viruses for the production of polypeptides, e.g. antigens or therapeutic agents, or viral vectors for gene therapy, and the use of such recombinant MVA viruses encoding antigens as vaccines.

Abstract: The invention relates to the generation and the use of pestivirus pseudo-particles containing native functional E1, E2 envelope glycoproteins assembled onto retroviral core particles. These particles are highly infectious and constitute a valid model of pestivirus virion.

Abstract: The invention relates to a method for growth of bacteria, such as Gram negative bacteria and its corresponding supernatant. The bacteria are cultivated without substantial release of endotoxins from the bacteria into the surrounding medium. Thereby the need of purification steps necessary to remove endotoxins are reduced or eliminated such as when the bacteria are producing a product which later on should be administered to a mammal, such as a human. The bacteria are also cultivated without substantial formation of acetic acid. The level of the carbon/energy source is controled during the cultivation and oxygen limitation is avoided through regulation of the temperature. The method may be used for cultivation of bacterial in fermenters.

Abstract: An acyltransferase is provided, suitable for use in the manufacture of microbial oils enriched in omega fatty acids in oleaginous organisms. Specifically, the gene encoding diacylglycerol acyltransferase (DGAT2) has been isolated from Mortierella alpina. This gene encodes an enzyme that participates in the terminal step in oil biosynthesis in fungi and yeast and is expected to play a key role in altering the quantity of long-chain polyunsaturated fatty acids produced in oils of oleaginous organisms. Most desirably, the substrate specificity of the instant DGAT2 will be particularly useful to enable accumulation of long-chain PUFAs having chain lengths equal to or greater than C20 in oleaginous yeast, such as Yarrowia lipolytica.

Abstract: The present invention relates to methods of obtaining a mutant cell from a filamentous fungal parent cell, comprising: (a) obtaining mutant cells of the parent cell; (b) identifying the mutant cell which exhibits a more restricted colonial phenotype and/or a more extensive hyphal branching than the parent cell; and (c) identifying the mutant cell which has an improved property for production of a heterologous polypeptide than the parent cell, when the mutant and parent cells are cultured under the same conditions.

Abstract: A method and apparatus of interrogating an addressable array unit, which includes a substrate, a light reflecting layer on a front side of the substrate, and a plurality of features on a front side of the array. The method may include, for each of multiple features, illuminating the feature simultaneously with reflected and non-reflected interrogating light. A light emitted from respective features is detected. Either or both, constructive interference of interrogating light at the features, or constructive interference of light emitted from the features, can be obtained to allow lowering of light power from the source, enhanced signal, or reduced noise, or combinations of the foregoing. High depth discrimination may also be obtained without the need for a confocal detection system with conventional pinhole.

Abstract: A bioreactor apparatus and cell culturing system is provided for the automated cultivation and processing of living cells remotely both on earth and in low gravity which utilizes a generally cylindrical reactor vessel that may be optionally rotated about its cylindrical axis while allowing the entrance of fresh or recycled fluid and the removal, optionally, of spent medium, medium to be recycled or filtered or unfiltered medium for the collection of samples. A method of exchanging gases between the culture medium and ambient gases is provided. A fresh-medium storage bag and peristaltic pump is used for batch feeding, perfusion or sample collection. An enclosure and manifold representing an additional level of chemical containment and a series of pinch valves for the periodic collection of samples of suspended cells or cell-free medium is disposed therein together with a humidity control system.

Abstract: The present invention provides a porous vessel bioreactor apparatus for use in reaction with immobilized enzymes and/or microbial cells, said apparatus consisting of a vertically elongated reaction vessel having at least one liquid reactant inlet; at least one product outlet on the vessel; at least one porous vessel completely submerged in the reactant, said porous vessel having pore size ranging from 5 mm to 0.2 microns and a vertical length less than a level of the reactants to be maintained in the vessel, and immobilized bio-catalyst particles comprising the enzymes and/or microbial cells placed inside the porous vessel such that the liquid reactant is in contact with the bio-catalyst in both radial and axial directions.

Abstract: The invention relates to modified acetylcholine receptor subunits, to nucleic acids coding modified acetylchloine receptor subunits, and to methods for finding active ingredients for crop protection and active pharmaceutical ingredients for treating humans and/or animals.

Abstract: An organic nitrogen-containing composition comprising fermentation mother liquor obtained by culturing a microorganism having L-glutamic acid-producing ability in a liquid medium of which pH is adjusted to a condition under which L-glutamic acid is allowed to be precipitated, to allow L-glutamic acid to be produced and accumulated with precipitation of L-glutamic acid accompanied, and then separating L-glutamic acid from the medium.

Abstract: Human Ck?-9 polypeptides and DNA (RNA) encoding such chemokine polypeptides and a procedure for producing such polypeptides by recombinant techniques is disclosed. Also disclosed are methods for utilizing such Ck?-9 polypeptides for the treatment of leukemia, tumors, chronic infections, autoimmune disease, fibrotic disorders, wound healing and psoriasis. Antagonists against such polypeptides and their use as a therapeutic to treat rheumatoid arthritis, autoimmune and chronic inflammatory and infective diseases, allergic reactions, prostaglandin-independent fever and bone marrow failure are also disclosed. Diagnostic assays are also disclosed which detect the presence of mutations in the Ck?-9 coding sequence and over-expression of the Ck?-9 protein.

Abstract: A cell in which a reaction product of a substance to be modified and an amphipathic compound is non-covalently bound to a cell membrane, wherein said compound has the following features: (1) having one or more aliphatic hydrocarbon groups at one end; (2) having one or more portions containing a hydrophilic group in a molecule; and (3) having one or more reactive functional groups which are capable of covalently binding with the substance to be modified at an end different from the end in the above (1).

Abstract: The invention provides methods of monitoring amyotrophic lateral sclerosis (ALS) disease development or progression and monitoring an ALS therapy by determining the level of HLA-DR expression by CD14+ monocytes and/or the percentage of CD16+ cells in the population of CD14+ cells and/or the number of CD14+/CD16+ cells in peripheral blood of an individual with ALS. The invention is also directed to methods for decreasing the number of circulating CD14+ monocytes and/or the population of CD14+/CD16+ cells and/or the number of CD14+/CD16+ cells in an individual with ALS. The invention is also directed to methods of screening for agents which decrease the population of CD14+ monocytes with elevated HLA-DR expression and/or the population of CD14+/CD16+ cells and/or the number of CD14+/CD16+ cells in an individual with ALS.

Abstract: The present invention provides a method for production of functional proteins including hormones by renal cells in a three dimensional co-culture process responsive to shear stress using a rotating wall vessel. Natural mixture of renal cells expresses the enzyme 1-a-hydroxylase which can be used to generate the active form of vitamin D: 1,25-diOH vitamin D3. The fibroblast cultures and co-culture of renal cortical cells express the gene for erythropoietin and secrete erythropoietin into the culture supernatant. Other shear stress response genes are also modulated by shear stress, such as toxin receptors megalin and cubulin (gp280). Also provided is a method of treating in-need individual with the functional proteins produced in a three dimensional co-culture process responsive to shear stress using a rotating wall vessel.

Abstract: We describe an improved method for generating sizable numbers of mature dendritic cells from nonproliferating progenitors in human blood. The first step or “priming” phase is a culture of T cell depleted mononuclear cells in medium supplemented with GM-CSF and IL-4 to produce immature dendritic cells. The second step or “differentiation” phase requires the exposure to dendritic cell maturation factor such as monocyte conditioned medium. Using this two-step approach, substantial yields are obtained. The dendritic cells derive from this method have all the features of mature cells. They include a stellate cell shape, nonadherence to plastic, and very strong T cell stimulatory activity. The mature dendritic cells produced according to this invention are useful for activating T cells.

Abstract: The invention relates to a new and improved pharmaceutical composition and method for delivery of therapeutic agents. The methods and composition of the invention can be used with several therapeutic agents and can achieve site specific delivery of a therapeutic or diagnostic substance. This can allow for lower doses and for improved efficacy with drugs which traditionally reach targeted sites and can result in improved utility for agents such as oligonucleotides and polynucleotides which are plagued with problems with biodistribution.

Abstract: The present invention provides HIV-derived lentivectors which are safe, highly efficient, and very potent for expressing transgenes for human gene therapy, especially, in human hematopoietic progenitor cells as well as in all other blood cell derivatives. The lentiviral vectors comprise promoters active to promote expression specific to cell types or tissues. Further, promoters are providing that are amenable to control by activators, enhancers, or repressors. These vectors are in a self-inactivating configuration for biosaftey. Additional promoters are also described. The vectors can also comprise additional transcription enhancing elements such as the wood chuck hepatitis virus post-transcriptional regulatory element, without any decrease in the specificity or control exerted by the promoters.

Abstract: Sequences of a serotype 9 adeno-associated virus and vectors and host cells containing these sequences are provided. Also described are methods of using such host cells and vectors in production of rAAV particles. AAV9-mediated delivery of therapeutic and immunogenic genes is also provided.

Abstract: An upstream side catalyst and a downstream side catalyst are disposed in an exhaust passage. A first oxygen sensor is disposed between these two catalysts and a second oxygen sensor is disposed downstream of the downstream side catalyst. The air-fuel ratio is forcibly oscillated and the oxygen storage capacity of the upstream side catalyst is detected. Deterioration of the upstream side catalyst is then detected based on whether this oxygen storage capacity is larger than a predetermined value. The forced oscillation of the air-fuel ratio is performed only when the oxygen storage state of the downstream side catalyst is appropriate.

Abstract: Methods of using a reference control composition containing a nucleated red blood cell component for measurement of nucleated red blood cells are disclosed. The nucleated red blood cell component is made of stabilized or processed nucleated blood cells which have impedance and optical properties simulating the impedance and optical properties of human nucleated red blood cells under a blood lysing condition as measured by a specific measurement. The methods include mixing the reference control composition with a lytic reagent, and analyzing the control sample mixture on a flow cytometric instrument by impedance, impedance and optical measurement, or DC impedance and a multi-dimensional measurement of light scatter, radio frequency and a second DC impedance; and reporting the simulated nucleated red blood cells in the reference control composition.

Abstract: The present invention provides a method of predicting pregnancy outcome in a subject by determining the amount of an early pregnancy associated molecular isoform of hCG in a sample. The present invention further provides a method for determining the amount of early pregnancy associated molecular isoforms of human chorionic gonadotropin (hCG) in a sample. The present invention also provides a diagnostic kit for determining the amount of early pregnancy associated hCG in a sample. The present invention additionally provides an antibody which specifically binds to an early pregnancy associated molecular isoform of human chorionic gonadotropin. Finally, the present invention provides methods for detecting trophoblast or non-trophoblast malignancy in a sample.

Abstract: A method is disclosed whereby the concentration of a blood substitute, such as cross-linked hemoglobin, in a serum or plasma specimen is rapidly and accurately identified and quantified. The method further takes the measured concentration of the blood substitute and uses it to correct for its effect, if any, on a measured analyte concentration, e.g., serum/plasma total protein. Further, the method allows for the determination of the concentration of true hemoglobin in the presence of blood substitutes. The method is carried out in respect of samples contained in a primary or secondary labelled tube, or a pipette tip used to dispense serum or plasma in a blood analyzer.

Abstract: An automated fluid handling system configured to prepare fluid samples and to introduce them into an analytical instrument, such as a particle analyzer, flow cytometer or sorter flow cell, and that is capable of analyzing both accurately and quickly.

Abstract: A method for analyzing a substance, comprising: a step of obtaining a dispersion complex by co-existing fine particles having a dispersion property higher than that of lyophobic fine particles in a dispersion phase of the lyophobic fine particles at a concentration sufficient for covering a periphery of a lyophobic fine particle group; a step of contacting the dispersion complex and a fluid containing an analyte; and a step of analyzing the analyte using an optical measuring means, wherein the lyophobic fine particles exist in the dispersion phase in a group for providing the surface enhancing effect. The method is effective for analysis of a slight amount substance or a low concentration substance.

Abstract: A fluorescent label compound of formula where Z is a reactive group that can be used for covalent coupling of the fluorescent label compound to other molecule. Either the fluorophore is a dipyrrometheneboron difluoride dye and Y is a water-solubilizing moiety, or Y is —CH2CH2SO3? X+ where X+ is a cation. The use of the compounds in bianalytical assays and cytological or histological staining methods, and a method for increasing the hydrophilicity of fluorescent compounds, are also disclosed.

Abstract: In a process for fabricating a ferrocapacitor comprising providing ferroelectric PZT elements over an Al2O3 layer, the Al2O3 layer is covered with a seed layer comprising layers of PZT and TiO2. Then a thicker layer of PZT is formed over the seed layer and crystallized. By this process, the crystallinity of the thick PZT layer is much improved, and its orientation is improved to be in the (111) direction. Furthermore, the seed layer reduces downward diffraction of Pb from the thick PZT layer, such as through the Al2O3 into a TEOS structure beneath.

Abstract: A method for fabricating a ferroelectric memory having memory cells arranged in arrays, wherein an Al2O3 film (2), a Pt film (3), a PZT film (4) and IrO2 film (5) are formed on an interlayer insulation film. At the time of forming a top electrode, the IrO2 film (5) is patterned using a resist mask having a part extending in the row direction, and then patterned using a resist mask having a part extending in the column direction. Consequently, a top electrode of the IrO2 film (5) having a rectangular plan view is formed at the intersection of these resist masks.

Abstract: A method for manufacturing a microstructure, which includes at least one fine feature on an existing feature, using an NSOM laser micromachining system. A microstructure device preform is provided. A portion of its top surface is profiled with the NSOM to produce a topographical image. This profiled portion is selected to include the existing feature. An image coordinate system is defined for the profiled portion of top surface based on the topographical image. Coordinates of a reference point and the orientation of the existing feature in the image coordinate system are determined using the topographical image. The probe tip of the NSOM is aligned over a portion of the existing feature using the determined coordinates of the reference point and the orientation of the existing feature. The top surface of the microstructure device preform is machined with the micro-machining laser to form the fine feature(s) on the existing feature.

Abstract: Dispersion of load may be kept within an allowance even when a plurality of probes in a large area are pressed in batch by pressing the probes provided in a membrane to a wafer by applying a pressure load to a plurality of places of a plane of pressure members on the side opposite from the wafer in a probe test step/burn-in test step which is one of semiconductor device manufacturing steps. It is then possible to provide semiconductor devices and a manufacturing method thereof which enhance the reliability and productivity of the semiconductor devices by probing a large number of integrated circuits or a large size integrated circuit in the same time.

Abstract: Disclosed are techniques for efficiently inspecting defects on voltage contrast test. In one embodiment, methodologies and test structures allow inspection to occur entirely within a charged particle system. In a specific embodiment, a method of localizing and imaging defects in a semiconductor test structure suitable for voltage contrast inspection is disclosed. A charged particle beam based tool is used to determine whether there are any defects present within a voltage contrast test structure. The same charged particle beam based tool is then used to locate defects determined to be present within the voltage contrast test structure. Far each localized defect, the same charged particle beam based tool may then be used to generate a high resolution image of the localized defect whereby the high resolution image can later be used to classify the each defect. In one embodiment, the defect's presence and location are determined without rotating the test structure relative to the charged particle beam.

Abstract: A method for identifying faults in a semiconductor fabrication process includes storing measurements for a plurality of parameters of a wafer in the semiconductor fabrication process. A first subset of the parameters is selected. The subset is associated with a feature formed on the wafer. A principal component analysis model is applied to the first subset to generate a performance metric. A fault condition with the wafer is identified based on the performance metric. A system includes a data store and a fault monitor. The data store is adapted to store measurements for a plurality of parameters of a wafer in a semiconductor fabrication process. The fault monitor is adapted to select a first subset of the parameters, the subset being associated with a feature formed on the wafer, apply a principal component analysis model to the first subset to generate a performance metric, and identify a fault condition with the wafer based on the performance metric.

Abstract: A stackable neo-layer comprising one or more embedded discrete electrical components is provided. A plurality of conductive traces, some of which terminate at a peripheral edge of the layer, are formed on sacrificial substrate in a series of process steps and discrete electrical components such as thick film components or wire bonded components are attached thereto. An under-bump metal process step is disclosed and provides for solder attachment at desired contact pad locations. The layer is encapsulated in a potting material and thinned to provide a thin, stackable layer. When assembled into a stack of layers, the electrically conductive traces terminating at the edge of the layer can be electrically connected by means of electroplating using a T-connect.

Abstract: A method for producing a durable electron-emitting device having a uniform electron emission characteristic, an electron source, and an image-forming apparatus having a uniform display characteristic for a long period are provided. The method for producing an electron-emitting device according to the present invention includes the steps of: disposing a cathode electrode on a surface of a substrate; providing an electrode opposite the cathode electrode; disposing plural pieces of fiber containing carbon as a main component on the cathode electrode; and applying potential higher than potential applied to the cathode electrode under depressurized condition to an electrode opposite the cathode electrode.

Abstract: There is provided an active matrix type semiconductor display device which realizes low power consumption and high reliability. In the active matrix type semiconductor display device of the present invention, a counter electrode is divided into two, different potentials are applied to the two counter electrodes, respectively and inversion driving is carried out each other. Since a potential of an image signal can be made low by doing so, it is possible to lower a voltage necessary for operation of a driver circuit. As a result, it is possible to realize improvement of reliability of an element such as a TFT and reduction of consumed electric power. Moreover, since it is possible to lower a voltage of a timing pulse supplied by the driver circuit, a booster circuit can be omitted, and reduction of an area of the driver circuit can be realized.

Abstract: A method of fabricating a thin film transistor array substrate is provided.

Abstract: Semiconductor chip assemblies incorporating flexible, sheet-like elements having terminals thereon overlying the front or rear face of the chip to provide a compact unit. The terminals on the sheet-like element are movable with respect to the chip, so as to compensate for thermal expansion. A resilient element such as a compliant layer interposed between the chip and terminals permits independent movement of the individual terminals toward the chip driving engagement with a test probe assembly so as to permit reliable engagement despite tolerances.

Abstract: This invention pertains to electronic/optoelectronic devices with reduced extended defects and to a method for making it. The method includes the steps of depositing a dielectric thin film mask material on a semiconductor substrate surface; patterning the mask material to form openings therein extending to the substrate surface; growing active material in the openings; removing the mask material to form the device with reduced extended defect density; and depositing electrical contacts on the device.

Abstract: The present invention relates to a nitride semiconductor thin film having less defects and a method of growing the same. According to the present invention, the nitride semiconductor thin film with lower defect density can be manufactured by forming grooves on a substrate, sequentially forming a buffer layer and a first nitride semiconductor thin film on a whole surface of the substrate, etching higher defect density regions of the first nitride semiconductor thin film, and then laterally growing a second nitride semiconductor thin film. Thus, a highly crystalline nitride semiconductor thin film can be obtained. Therefore, there are advantages in that high-efficiency, high-power and high-reliability optical devices or electronic devices can be manufactured and high throughput can also be obtained by using the obtained nitride semiconductor thin film.

Abstract: An optical semiconductor device operable in a 0.6 ?m band includes an active layer of GaInNP sandwiched by a pair of GaInP layer with a thickness of about 2 molecular layers or less.

Abstract: A method for fabricating an interference display unit is provided. A first plate and a sacrificial layer are formed in order on a substrate and at least two openings are formed in the first plate and the sacrificial layer. A photoresist layer is spin-coated on the sacrificial layer and fills the openings. A photolithographic process patterns the photoresist layer to define a support with an arm. A second plate is formed on the sacrificial layer and posts. The arm's stress is released through a thermal process. The position of the arm is shifted and the distance between the first plate and the second plate is therefore defined. Finally, The sacrificial layer is removed.

Abstract: One aspect of the present subject matter relates to a method for forming strained semiconductor film. In various embodiments, a single crystalline semiconductor film is formed on a substrate surface, and a recess is created beneath the film. A portion of the film is influenced into the void and strained. In various embodiments, the naturally-occurring Van der Waal's force is sufficient to influence the film into the void. In various embodiments, a nano-imprint mask is used to assist with influencing the film into the void. In various embodiments, an oxide region is formed in a silicon substrate, and a single crystalline silicon film is formed on the semiconductor substrate and on at least a portion of the oxide region. The oxide region is removed allowing the Van der Waal's force to bond the film to the silicon substrate. Other aspects are provided herein.