Abstract: An improved design for a rotating electric field ion mass spectrometer has deflection electrodes formed as an array of blade elements arrayed radially and circumferentially about an ion axis of the mass spectrometer. The blade elements are formed as flat metal pieces having inner edges shaped in a hyperbolic curve. When a sufficient number of blades are aligned orthogonally to form a horn shape along an ion axis of a hyperbolic helical horn mass spectrometer, the resultant electric field approximates that of using hyperbolic wall surfaces for the deflection electrodes. The blade array design reduces the cost of fabrication, capacitive loading, and vacuum capacity as compared to using cylindrically symmetric, hyperbolic wall surfaces for the deflection electrodes.

Abstract: A digital deflection drive is provided for handling the ion beam input of a rotating electric field ion mass spectrometer (REFIMS), and specifically, a hyperbolic helical horn mass spectrometer (3HMS). In preferred form, the digital deflection drive generates square waves which are easier to implement with digital electronics and also consumes lower power, as compared to an analog (sine wave) drive. The electronic drive circuitry can be implemented by a microprocessor, field programmable gate array (FPGA), or simple logic circuits. In an example for an octopole configuration, the electronic drive circuitry is implemented by logic reduction using three levels of divide-by-two flip-flop stages.

Abstract: A lens of particle-optical apparatus, such as the objective lens, suffers from aberrations. As is already known since decades Ronchigrams can be used to determine these aberrations of particle-optical lenses. Such methods rely e.g. on the determination of the 2nd derivative of the aberration function on the basis of local magnification in one or a set of Ronchigrams. Being dependent on the 2nd derivative the mathematics of these methods allow only (infinitesimal) small shifts between the Ronchigrams. However, this implies that e.g. the spatial quantization noise of the camera recording the Ronchigrams results in a large error. These conflicting requirements limit the accuracy and thus the usefulness of the known methods. The invention describes a set of algorithms which result in an improved method to quantify the lens aberration coefficients using a set of Ronchigrams.

Abstract: A Y-shaped carbon nanotube atomic force microscope probe tip and methods comprise a shaft portion; a pair of angled arms extending from a same end of the shaft portion, wherein the shaft portion and the pair of angled arms comprise a chemically modified carbon nanotube, and wherein the chemically modified carbon nanotube is modified with any of an amine, carboxyl, fluorine, and metallic component. Preferably, each of the pair of angled arms comprises a length of at least 200 nm and a diameter between 10 and 200 nm. Moreover, the chemically modified carbon nanotube is preferably adapted to allow differentiation between substrate materials to be probed. Additionally, the chemically modified carbon nanotube is preferably adapted to allow fluorine gas to flow through the chemically modified carbon nanotube onto a substrate to be characterized. Furthermore, the chemically modified carbon nanotube is preferably adapted to chemically react with a substrate surface to be characterized.

Abstract: A SEM sample container having a sample enclosure (100, 102) including an electron beam permeable, fluid permeable membrane (132), and a peripheral enclosure sealed to the membrane, and a sample enclosure closure including a quick-connect attachment (152) for sealing engagement with the sample enclosure.

Abstract: A method and apparatus for measuring a critical dimension (CD) are provided. Image data of a measurement pattern are generated. The measurement pattern may include a first surface and a second surface facing each other. The image data may include a first side and a second side corresponding to the first surface and the second surface of the measurement pattern, respectively. The image data may be edited to increase an overlap length of the first and second sides. A measurement window crossing the first and second sides in the edited image data is set. A distance between the first and second sides in the measurement window is measured.

Abstract: An infrared sensor includes a series capacitor element and a reference capacitor element each exhibiting a predetermined capacitance value; an infrared-detecting capacitor element whose capacitance value varies depending on an intensity of infrared light incident on the element; and an output node being a node at which a first terminal of the series capacitor element, a first terminal of the reference capacitor element and a first terminal of the infrared-detecting capacitor element are connected to one another.

Abstract: A convenient and economical method and instrumentation to efficiently reduce offensive spectral noises due to water vapor and carbon dioxide gas often encountered in FTIR spectrophotometry is provided by spectrally monitoring and controlling the amount of water vapor and carbon dioxide gas inside the spectrophotometer such that both amounts in the sample and background measurements become congruent through remote open-close operation of water-vapor (or carbon dioxide gas) supplier and dehumidifier (or carbon dioxide gas adsorber). This new technique can be used: (1) Under the ambient humidity condition, saving time and money effectively. (2) Both in the closed spectrophotometer and in the open system. (3) And applicable to any FTIR accessory and measurement method, including transmission, external reflection, reflection-absorption, attenuated total reflection (ATR), and microscopy measurements.

Abstract: The present embodiments provide methods, systems and apparatuses that detect, classify and locate flash events. In some implementations, some of the methods detect a flash event, trigger an imaging system in response to detecting the flash event to capture an image of an area that includes the flash event, and determines a location of the flash event.

Abstract: An object hereof is to restrain occurrence of artifact in an acquired radiation image with comparatively simple configuration without providing wiring between a radiation source and a radiation imaging apparatus to thereby obtain a radiation image with extremely good quality. Therefore, a controller selectively carries out real read operation of reading an electric signal obtained by activating a drive circuit from a signal processing circuit unit in case of detecting X-ray irradiation with an X-ray detecting circuit and dummy read operation of reading an electric signal obtained by activating a drive circuit from a signal processing circuit unit in case of detecting X-ray non-irradiation with an X-ray detecting circuit; discontinues the dummy read operation at the time of detecting the start of X-ray irradiation with the X-ray detecting unit in dummy read operation; and starts real read operation at the time of detecting the finish of X-ray irradiation with the X-ray detecting unit.

Abstract: A solid state radiation sensor, in which an electrode is disposed on each side of a recording photoconductive layer, and charges generated in the recording photoconductive layer by the irradiation of radiation, with a predetermined bias voltage being applied between the electrodes, are detected as electrical signals. Here, a predetermined region is provided between the electrodes, and the average density of an alkali metal in the predetermined region is greater than or equal to 10 times the average density of the alkali metal in the area between the electrodes other than the predetermined region.

Abstract: The present invention relates to a beam optical component (1, 201) for acting on a charged particle beam (63) including a first element (3; 203) having a first opening (9; 209) for acting on the charged particle beam (63), at least a second element (5; 205) for acting on the charged particle beam (63); at least one distance piece (20a, 20b, 20c) positioned between the first element (3; 203) and the second element (5; 205) to define a minimum distance between the first element (3; 203) and the second element (5; 205); and a first holding piece (30a; 30b; 30c) for abutting the first element (3) to the at least one distance piece (20a, 20b, 20c), whereby the first holding piece (30a; 30b; 30c) is attached to the at least one distance piece (20a, 20b, 20c). First and second elements (3; 203; 5; 205) are preferably electrodes or pole pieces to act on the charged particle beam by an electrostatic or magnetic force.

Abstract: Techniques for preventing parasitic beamlets from affecting ion implantation are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for preventing parasitic beamlets from affecting ion implantation. The apparatus may comprise a controller that is configured to scan a spot beam back and forth, thereby forming an ion beam spanning a predetermined width. The apparatus may also comprise an aperture mechanism that, if kept stationary, allows the spot beam to pass through. The apparatus may further comprise a synchronization mechanism, coupled to the controller and the aperture mechanism, that is configured to cause the aperture mechanism to move in synchronization with the scanned spot beam, allowing the scanned spot beam to pass through but blocking one or more parasitic beamlets associated with the spot beam.

Abstract: In a particle-optical projection system a pattern is imaged onto a target by means of energetic electrically charged particles. The pattern is represented in a patterned beam of said charged particles emerging from the object plane through at least one cross-over; it is imaged into an image with a given size and distortion. To compensate for the Z-deviation of the image position from the actual positioning of the target (Z denotes an axial coordinate substantially parallel to the optical axis), without changing the size of the image, the system includes a position detector for measuring the Z-position of several locations of the target, and a controller for calculating modifications of selected lens parameters of the final particle-optical lens and controlling said lens parameters according to said modifications.

Abstract: Techniques for reducing effects of photoresist outgassing are disclosed. In one particular exemplary embodiment, the techniques may be realized as an apparatus for reducing effects of photoresist outgassing in an ion implanter. The apparatus may comprise a drift tube located between an end-station and an upstream beamline component. The apparatus may also comprise a first variable aperture between the drift tube and the end-station. The apparatus may further comprise a second variable aperture between the drift tube and the upstream beamline component. The first variable aperture and the second variable aperture can be adjusted to facilitate differential pumping.

Abstract: A particle-optical apparatus comprising: A first source, for generating a first irradiating beam (E) along a first axis (A1); A second source, for generating a second irradiating beam (I) along a second axis (A2) that intersects the first axis at a beam intersection point, the first and second axes (A1, A2) defining a beam plane, A stage assembly (3) for positioning a sample in the vicinity of the beam intersection point, provided with: A sample table (21) to which the sample can be mounted; A set of actuators, arranged so as to effect translation of the sample table along directions substantially parallel to an X-axis perpendicular to the beam plane, a Y-axis parallel to the beam plane, and a Z-axis parallel to the beam plane, said X-axis, Y-axis and Z-axis being mutually orthogonal and passing through the beam intersection point, wherein the set of actuators is further arranged to effect: rotation of the sample table about a rotation axis (RA) substantially parallel to the Z-axis, and; rotation of the s

Abstract: An open-channel radiation sterilization system, comprising a channel, a radiation source and an electrical control means, characterized in that the fluid to be sterilized flows in under the radiation source and the sterilized fluid flows out above the radiation source in the channel; a first partition wall and a second partition wall are both provided in the channel, partitioning the channel into three parts, i.e.

Abstract: A UV sterilizer with a double-chamber structure comprises an inner tube and an outer tube with different size, the inner tube being partly surrounded by the outer tube thereby forming an inner chamber and an outer chamber, the inner chamber is the space encircled by the inner tube and the outer chamber is the annular space encircled by the overlapped portions of the inner tube and the outer tube; a first end portion of the inner tube is located outside the outer chamber and provided with a first water port, a second end portion of the inner tube is located inside the outer chamber and provided with a second water port communicating with the outer chamber; a first end portion of the outer tube is sealingly connected with the outer wall of the inner tube, while a second end portion of the outer tube is sealed; sleeved UV lamps are arranged in the outer chamber or in both the inner chamber and the outer chamber.

Abstract: A micromechanical system including a micromechanical structure and a shadow mask device. The micromechanical structure and the shadow mask device are produced from a single wafer. The micromechanical structure includes a covering surface to be acted upon in a covering area. The covering surface is produced in the course of covering surface processing steps. The shadow mask device is provided for shading part of the micromechanical structure from a deposition or treatment beam. It has at least one geometry, which affects a shading area in respect to the covering surface and which is produced in the course of geometry processing steps. The covering surface and geometry processing steps are applied from one side of the wafer.

Abstract: It is an object of the present invention to provide an observation unit which efficiently cools apparatus members in a reaction chamber of a semiconductor manufacturing apparatus in a high-temperature atmosphere and reduces overexposure. An observation unit comprising: an imaging apparatus for imaging the inside of a reaction chamber of a semiconductor manufacturing apparatus in an atmosphere of a high temperature; a housing case which houses the imaging apparatus and is attached with a translucent member which guides an optical image of the inside of the reaction chamber to the imaging apparatus; and a cooling medium supplying apparatus for supplying a cooling medium to the inside of the housing case, wherein the translucent member is a silica glass plate having a gold film on both sides or one side.

Abstract: A radiation system for generating a beam of radiation is disclosed. The radiation system includes a pulsed EUV source for generating EUV radiation, and a spectral filter mounted in front of the EUV source for selectively passing a spectral range of a beam of EUV radiation from the EUV source. The spectral filter is mounted on a movable mount configured to be moved in synchronicity with the pulsed EUV source to prevent debris traveling from the EUV source from impacting the spectral filter. Accordingly, the spectral filter is kept substantially free from contamination by the debris.

Abstract: An EUV lithographic apparatus includes an EUV radiation source, an optical element and a cleaning device. The cleaning device includes a hydrogen radical source and a flow tube in communication with the hydrogen radical source. The cleaning device is configured to provide a flow of hydrogen radicals and the flow tube is arranged to provide a hydrogen radical flow at a predetermined position within the lithographic apparatus, for example for cleaning a collector mirror.

Abstract: An ion implanter includes an ion source for generating an ion beam moving along a beam line and a vacuum or implantation chamber wherein a workpiece, such as a silicon wafer is positioned to intersect the ion beam for ion implantation of a surface of the workpiece by the ion beam. An ion source includes a ionization chamber and an ionization chamber electrode defining an ionization chamber aperture, wherein the ionization chamber electrode includes a raised portion for generating substantially uniform electric fields in the region adjacent the ionization chamber electrode.

Abstract: One or more thermal transfer sheets are easily removable and replaceable in an ion source. The ion source has a removable anode assembly, including the thermal transfer sheets, that is separable and from a base assembly to allow for ease of servicing consumable components of the anode assembly. The thermal transfer sheets may be interposed between the consumable components within the anode assembly. The thermal transfer sheets may be thermally conductive and either electrically insulating or conductive.

Abstract: A system and method for improved electron beam writing that is capable of taking design intent, equipment capability and design requirements into consideration. The system and method determines an optimal writing pattern based, at least in part, on the received information.

Abstract: A radiation system for providing a projection beam of radiation is disclosed. The radiation system includes an extreme ultraviolet source for providing extreme ultra violet radiation, and a contamination barrier that includes a plurality of closely packed foil plates for trapping contaminant material coming from the radiation source. The contamination barrier encloses the extreme ultraviolet radiation source.

Abstract: A nanolithography system comprising a novel optical printing head suitable for high throughput nanolithography. This optical head enables a super-resolution lithographic exposure tool that is otherwise compatible with the optical lithographic process infrastructure. The exposing light is transmitted through specially designed super-resolution apertures, of which the “C-aperture” is one example, that create small but bright images in the near-field transmission pattern. A printing head comprising an array of these apertures is held in close proximity to the wafer to be exposed. In one embodiment, an illumination source is divided into parallel channels that illuminate each of the apertures. Each of these channels can be individually modulated to provide the appropriate exposure for the particular location on the wafer corresponding to the current position of the aperture. A data processing system is provided to re-interpret the layout data into a modulation pattern used to drive the individual channels.

Abstract: An apparatus and method for EUV light production is disclosed which may comprise a laser produced plasma (“LPP”) extreme ultraviolet (“EUV”) light source control system comprising a target delivery system adapted to deliver moving plasma initiation targets and an EUV light collection optic having a focus defining a desired plasma initiation site, comprising: a target tracking and feedback system comprising: at least one imaging device providing as an output an image of a target stream track, wherein the target stream track results from the imaging speed of the camera being too slow to image individual plasma formation targets forming the target stream imaged as the target stream track; a stream track error detector detecting an error in the position of the target stream track in at least one axis generally perpendicular to the target stream track from a desired stream track intersecting the desired plasma initiation site.

Abstract: The invention relates to a collimator (1) for use in an optical device, such as a display device, an illumination device or an optical touch sensitive device. The collimator (1) according to the invention comprises a multi-layered sheet of preferably at least five alternating light transmitting (10) and light impervious layers (11). A collimation angle of a few degrees is obtainable using a collimator (1) according to the invention. The invention also relates to methods for producing such a collimator (1) by co-extruding or injection molding.

Abstract: A shield device for blocking ambient electromagnetic waves from interfering with testing of an electronic product (50) connected with a cable (60), includes a shield cage (10) and a receiving cage (40) for receiving the cable. The shield cage includes a base (30) defining a receiving space (38) for receiving the electronic product, and an opening in communication with the receiving space. The receiving cage received in the opening, includes an upper cover (42) and a lower cover (44). The upper cover defines a recessed portion (422), and the lower cover includes a protrusion (442) received in the recessed portion. When the upper cover is mounted on the lower cover, at least one transition portion (46) is formed in the receiving cage.

Abstract: An erasing time required to erase radiation image information remaining in an image storage recording medium is calculated based on IP information supplied from an IP information reader and radiation image information read from the image storage recording medium by an image information reader. A display unit displays the erasing time and confirmative information as to whether an erasing process is to be performed or not. If the erasing process is to be performed as selected by an erasing process selector, then the erasing process is performed.

Abstract: An electromagnetically driven valve includes: a valve, including a valve shaft, which reciprocates to and fro along a direction in which the valve shaft extends; a disk, which is a magnetic member, and which is connected to and drives the valve; a first electromagnet which attracts the disk and keeps it in a valve closed position; and a torsion bar, which is a first elastic member, and which applies, to the disk, a force to remove the disk from the first electromagnet. In this first electromagnet, when the disk has been attracted to the first electromagnet and is in the valve closed position, a magnetic gap is provided at least in a portion of at least one magnetic circuit constituted by the electromagnet core and the disk.

Abstract: A reinforced gas valve assembly having a valve stem secured to a main valve body adjacent a valve member. The valve includes a retaining cover plate configured to secure the valve stem to the valve body and a reinforcement member coupled to both the valve stem and the retaining cover plate for restricting radial movement of the valve stem.

Abstract: A lightweight valve (1) for internal combustion engines is provided, which comprises a valve stem (3), a hollow valve cone (7) and a valve disk (9) closing the valve cone (7). In this connection, the valve stem (3) is provided with a hollow space (5) at its end facing the valve disk (9). The lightweight valve (1) is characterized by at least one force transmission element (19) which is provided on the valve disk (9) and extends through the hollow valve cone (7) into the stem hollow space (5).

Abstract: A piezoelectric ceramic comprising a perovskite composite oxide of an ABO3 composition containing Pb in the A-site and Zr and Ti in the B-site, wherein when the total amount of the element species constituting the B-site of the perovskite composite oxide in the ceramic is set to be one mol, an average valency of the element species constituting the B-site is in a range of from 4.002 to 4.009. The piezoelectric ceramic can be fired at a low temperature, has a high Curie temperature and a high piezoelectric distortion constant, as well as excellent durability and reliability against high temperatures.

Abstract: The present invention relates to a method for removing a heavy metal from and/or dissolving calcium and/or magnesium scales in water or an aqueous system comprising using ?-polyglutamic acid (?-PGA, H form), and/or one or more of its salts (i.e., ?-polyglutamate in Na+ form, ?-polyglutamate in K+ form, and ?-polyglutamate in NH4+ form) and/or ?-polyglutamate hydrogel as chelating agents for removing heavy metals and/or dissolving agents for removing calcium and/or magnesium scales from water or the aqueous system.

Abstract: The present invention is directed to a water treatment composition, comprising: calcium hypochlorite coated with a coating comprising at least one hydrated or anhydrous salt. The present invention is also directed to a water treatment composition, comprising: (a) an inner core layer comprising calcium hypochlorite; (b) one or more interlayers of selected salts positioned on top of said inner core layer, and (c) one or more outer layers of selected salts positioned on top of said interlayer(s).

Abstract: The present invention includes a molecular melt composition comprising an antioxidant and a coupling agent. The molecular melt is partially amorphous in nature. The invention also includes a method for making the molecular melt composition and a method for using the molecular melt to produce coupled polymers. The invention further includes a method for using an antioxidant to phlagmatize a coupling agent.

Abstract: The invention refers to a composition comprising a liquid crystal material and an additive, preferably a dopant capable of forming a complex with said LC material, to a liquid crystal cell comprising this composition, uses thereof and to a method of improving the response time of a liquid crystal.

Abstract: The present invention relates to certain metal silicate halide (halosilicate) phosphors, the phosphors with an oxide coating, methods of making the phosphors, and light emitting diode- (LED-) based lighting devices modified with the phosphors.

Abstract: Methods for synthesizing luminescent nanoparticles and nanoparticles prepared by such methods are provided. The nanoparticles are prepared by a method in which an additive is included in the reaction mixture. The additive may be a Group 2 element, a Group 12 element, a Group 13 element, a Group 14 element, a Group 15 element, or a Group 16 element. In additions, a luminescent nanoparticle is provided that comprises a semiconductive core surrounded by an inorganic shell, an interfacial region and an additive present in the interfacial region or both the interfacial region and the shell.

Abstract: The present invention provides-a photoluminescent phosphor coated with a coating of oxide, the phosphor comprising (1) an inorganic phosphor chosen from (a) a metal thiogallate phosphor and (b) a metal sulfide phosphor and (2) a coating that comprises at least one layer having at least one oxides. The coated photoluminescent phosphor of the present invention is more resistant to water-induced degradation than when it is uncoated.

Abstract: A doped-type metal sulfide phosphor nanoparticle dispersion, comprising a doped-type metal sulfide phosphor nanoparticle dispersed in water and/or a hydrophilic solvent, wherein the doped-type metal sulfide phosphor nanoparticle comprises a surface that is modified with a surface modifier, the surface modifier being a compound represented by formula [I]: HS-L-W ??Formula [I] wherein L represents a divalent linking group; and W represents COOM or NH2, in which M represents a hydrogen atom, an alkali metal atom, or NX4, in which X represents a hydrogen atom or an alkyl group.

Abstract: A composition for dissolving a titanium oxide, which comprises carbonic acid and/or a carbonate, hydrogen peroxide and water.

Abstract: Tagged scale-inhibiting polymers, compositions comprised thereof and preventing or controlling scale formation therewith, the tagging units being units deriving from a monomer having the formula X2C?CYY? wherein X is a hydrogen atom, or a C1-C4 alkyl radical, Y is a hydrogen atom or a C1-C4 alkyl radical, Y? is a radical having formula -L-Arom, wherein L is a covalent bond or a divalent organic linking group optionally comprising heteroatoms, and Arom is a group comprising at least two conjugated aromatic rings, said rings comprising conjugated carbon atoms, and, linked to said carbon atoms, hydrogen atoms or other substituents.

Abstract: An electrically conductive additive system comprising carbon nanofibers and, optionally, electrically conductive particulate material mixed in a liquid component. The carbon nanofibers can be characterized by having a diameter between about 70 to about 200 nanometers, a length between about 50 to about 100 microns, and graphitic planes having a stacked cone-type structure.

Abstract: A precursor composition for the deposition and formation of an electrical feature such as a conductive feature. The precursor composition advantageously has a low viscosity enabling deposition using direct-write tools. The precursor composition also has a low conversion temperature, enabling the deposition and conversion to an electrical feature on low temperature substrates. A particularly preferred precursor composition includes silver metal for the formation of highly conductive silver features.

Abstract: A sprayable granite-like coating composition useful for forming simulated stone surfaces, such as polished granite, which have improved fire resistance. The coating composition comprises gel resin matrix based on unsaturated crosslinkable polyester or acrylic resins, a free radical initiator for said resin, a hydrated inorganic salt, granules comprising thermoset resins or mixtures of thermoplastic and thermoset resins containing an inorganic filler and as a binding agent comprising the acrylate phosphate.

Abstract: A multi-use hand tool for framing includes a shaft, a head, a notch, and a close space. The head is attached to the shaft and includes an open space adapted to fit a board. The notch is adapted for pulling nails. The closed space is adapted for pulling long nails.

Abstract: A lifting system for vertical adjustment of a transportation system structure consists of a foot that is fastened onto the transportation system structure and during manufacturing assembly of the transportation system structure points downwards, and a foot cradle. The foot is bounded on opposite sides by two foot surfaces that are arranged at a foot-surface angle to each other. The foot cradle has two complimentary supporting surfaces against which the foot surfaces rest. The supporting surfaces are vertically movable, allowing the foot and transportation system structure to be raised or lowered, and the vertical adjustment thereby takes place. A transportation system cradle has at least one such foot cradle, and together with the transportation system structure suggested, form an intermediate product that can be moved between assembly stations in an assembly plant.