Abstract: An optical device comprises a light source unit comprising a plurality of light sources, a light mixing unit that is formed on the light source unit and comprises a light guiding part guiding light emitted from each light source, and a light mixing part mixing the guided light. A supporter supports the light mixing unit to be spaced from the light source unit. A small-sized optical device is provided having an enhanced light efficiency and a projection system having the same.

Abstract: A structure of a light source for a projector includes a light source, a housing and a shade. The housing includes a transparent surface. The light source is disposed in the housing. The shade is disposed on the transparent surface for blocking part of light emitted from the light source.

Abstract: Image display apparatus comprising projector means, at least one primary modulator (4, 6, 8) for modulating light, an auxiliary modulator (36) for modulating the light modulated by the primary modulator, and optical means (32) for relaying the light modulated by the primary modulator to the auxiliary modulator (36), the optical means (32) comprising a concave mirror and at least one refractive element.

Abstract: An optical projection system is disclosed. The optical projection system includes a base, a lamp provided in the base, a DMD assembly provided at one side of the lamp to generate image light from light irradiated by the lamp, and a projection unit for projecting the image light formed through the DMD assembly. The DMD assembly includes a DMD, a main circuit board provided with the DMD at one side, and a side circuit board which may be detached from or fixed to the main circuit board independently from the DMD assembly. The side circuit board may be provided at one side of the main circuit board at a right angle.

Abstract: A communications device (100) and method for adding at least one picture to a contact detail in a phone book (132) stored in the communications device is disclosed. The method includes storing (302) the at least one picture on the communications device during an audio visual communications call between the communications device and another device (202). The method further includes displaying an inquiry (404) on a display screen (106) of the communications device for identifying the at least one picture as possible data to be added to the contact detail in the phone book. The method further includes adding (312) the at least one picture to the contact detail in the phone book when a user interface (108) of the communications device provides an acceptance command in response to the inquiry.

Abstract: Immersion liquid is contained in the immersion area located between the last optical member of a projection system and a surface that is the subject of exposure by providing a liquid seal located adjacent to the immersion area. The liquid seal extends between the surface to be exposed and a seal-holding-surface located adjacent to the immersion area. The liquid seal is a seal-forming-liquid that is different from the immersion liquid and that is maintained in place between the surface to be exposed and the seal-holding-surface only by surface tension.

Abstract: A method and apparatus for maintaining an optical gap between optical structures in a photolithography system is described. A frame defines first and second opposing surfaces. The first opposing surface defines a first opening and the second opposing surface defines a second opening. A plurality of spacing members are spaced apart on the first opposing surface around the first opening. The spacing members have substantially co-planar surfaces configured to mate with a surface of a first optical structure. A bonding agent seals a space around the first opening between the first opposing surface and the first optical structure. The frame thereby encloses the optical gap between the first optical structure and a second optical structure.

Abstract: A method for preventing or reducing contamination of an immersion type projection apparatus is disclosed. The apparatus includes at least one immersion space that is at least partially filled with a liquid when the apparatus projects a beam of radiation onto a substrate. The method includes rinsing at least part of the immersion space with a rinsing liquid before the apparatus is used to project the beam of radiation onto a substrate.

Abstract: An exposure apparatus includes an optical system having a plurality of optical members through which exposure light passes respectively and that are positioned so as to face a substrate, and a liquid immersion system that causes a space between each of the optical members and the substrate to be filled with the liquid. The substrate is exposed via the liquid and at least one of the optical members.

Abstract: A multibeam type scanning microscope that has N beams, wherein the system is devised so that the respective beams perform scanning in LM stages in the Y direction at maximum magnification where the discrete scanning direction is the Y direction, thus performing scanning in an area of N×LM stages overall, and scanning is controlled so that the following processes (1) and (2) are successively repeated LK times at a magnification that is 1/LK times the maximum magnification. Here, L, M and N are integers of 2 or greater, and K is a natural number. (1) The respective beams perform scanning in the Y direction at a sampling interval that is LK times that at the maximum magnification. (2) When scanning of LM-K stages is completed in the Y direction, and the repetition is less than the LKth time, the scanning skips ((N?1)×LM-K+1) stages.

Abstract: An exposure apparatus for exposing a substrate. The apparatus includes an optical system being set at a reference temperature, for directing light to the substrate, an exposure chamber for storing the optical system in a vacuum ambience, and a load-lock chamber, disposed adjacent to the exposure chamber, for converting an ambience of a space surrounding the substrate into a vacuum ambience. When the load-lock chamber converts the ambience of the space surrounding the substrate into a vacuum ambience, the temperature of the load-lock chamber is made higher than the reference temperature.

Abstract: A system and method are used to substantially homogenizing and removing at least some coherence from a beam of light.

Abstract: When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.

Abstract: The invention relates to a method and device for photolithography by extreme ultraviolet radiation, using a source resulting from the excitation of plasma by several lasers. The object which is to be photoengraved is displaced behind an irradiation window. The radiation is comprised of N successive current impulses whose surface energy is measured. In particular, each laser emits a quantum of energy having a given duration at each outset. The surface energy of the radiation received by the object in the course of the last N?1 pulses is thus added up for an nth iteration of an iterative method. The photosensitive object is displaced from a distance equal to a fraction 1/N of the width of the irradiation window according to the axis of said translation. The above-mentioned sum is subtracted from the amount of total energy required for the photoengraving method.

Abstract: A system comprising a passive-optical locator to generate information indicative of an absolute location associated with a target and a remotely controlled actuator. The passive-optical locator comprises a passive-optical range-finder to generate information indicative of a distance to the target and at least one sensor to generate information indicative of an azimuth and an elevation of an optical axis of the passive optical range-finder. The passive-optical locator uses information indicative of a geographic location associated with the passive-optical locator, the information indicative of the distance to the target, and the information indicative of the azimuth and the elevation of the optical axis to determine information indicative of an absolute location associated with the target.

Abstract: A multi-modulation frequency laser range finder and a method for the same make use of a crystal oscillator to send out a modulation signal and a sampling signal. After the modulation signal is coupled with a light signal emitted by a laser diode, a laser light beam is generated and emitted to a target. The laser light signal is reflected by the target and received by a receiver to be converted to a reception signal, which is processed according to the frequency of the sampling signal. The processed result is finally sent to a data processor to calculate out the distance to the target. As compared to the prior art, less number of components are used, the precision is enhanced, and the circuit is much simplified, hence reducing the errors and the cost.

Abstract: A lens meter for measuring optical characteristics of a lens to be examined, comprises: a measurement optical system including a measurement optical axis, a light source, and a photo-receiving element; an arithmetic part which determines a deviation of an optical axis of the lens from the measurement optical axis based on a light receiving result of the photo-receiving element; a display; and a control part which displays a reticle mark whose center represents the measurement optical axis and a target mark whose center represents the optical axis of the lens on the display so that both marks are in a positional relation according to the determined deviation, and which also displays a guide mark on the display within a predetermined distance from the center of the reticle mark.

Abstract: A device and method are disclosed that measure the relative angular orientation between two surfaces. Two frames are mounted on the two surfaces to be measured. A collimated light is reflected between the frames and its position is read on a scale. The frame with the collimated light is flipped over and a second position measurement is taken. The difference in position is used to calculate the non-parallel angle between the two rolls. The method and measuring scale can be adapted to provide accurate measurement of very small, near parallel orientation angles. The two frames can be adapted to measure the angular orientation of important surfaces such as rolls or odd shapes that are otherwise difficult to measure.

Abstract: A rate based method for passively determining the range and geolocation of a target from a moving platform. The method includes the steps of determining a speed of the platform in a direction of travel thereof; acquiring the target along a line from the platform; determining an angle between the direction of travel of the platform and the line; determining a rate of change in the angle; and calculating the range based on the speed, the angle, and the rate of change. The method further includes the step of determining the geolocation based on the geoposition of the platform, the angle, and the range.

Abstract: A surveying instrument and method determine a duration of a measuring period for obtaining readings of angle values of an angle measuring system in dependence of readings of an error signal produced by a tracking system. It is thus possible to determine a value of the angle represented by the readings of the angle signal with a desired accuracy in the presence of air turbulence wherein the measuring period is shorter at low degrees of air turbulence and longer at higher degrees of air turbulence.

Abstract: The present invention relates to a device for determining the chemical composition of a living eye comprising light emitting means, light guidance means comprising at least one first focussing lense (2) having an entry surface (2a) and an exit surface (2b) to be brought in optical contact with the eye for illuminating at least part of said eye with a light beam emitted by said light emitting means and for receiving and guiding at least a fraction of the light beam leaving the eye as a result of said illumination towards light detecting means for determining the chemical composition of said eye by analysing said fraction of light and wherein said light guidance means are arranged for illuminating said part of the eye with a light beam having an oblique angle of incidence with respect to the visual axis of the eye.

Abstract: A system and method for projecting an image onto a workpiece are provided. The system includes a data system capable of providing information indicative of a flaw within the workpiece, wherein the information is based on data acquired by at least one sensor. The system also includes an image-projecting device in communication with the data system and capable of projecting an image indicative of the flaw onto the workpiece, as well as a plurality of encoders for determining a location and/or orientation of the image-projecting device.

Abstract: In one embodiment, a system to measure defects on a surface of a wafer and an edge of the wafer using a single tool comprises a radial motor to move an optical head in a radial direction to detect defects at locations displaced from the edge of the wafer, and a rotational motor to rotate the optical head around the edge of the wafer to detect defects on the edge of the wafer.

Abstract: A method for qualifying printability of a mask, including performing a first inspection of the mask with an optical assembly at a first numerical aperture of collection (NAC) of radiation from the mask, and determining, in response to the first inspection, a first possible defect in the mask and a first location of the first possible defect. The method also includes performing a second inspection of the mask with the optical assembly at a second NAC of radiation from the mask, different from the first NAC, and determining, in response thereto, a second possible defect in the mask and a second location of the second possible defect. The method further includes performing a comparison of the first and second locations, and in response to the comparison, determining that the first and second possible defects represent a real defect if the first location matches the second location.

Abstract: An inspection machine (M) for checking particularly bottles (F) comprises a conveyor (T) for transporting the bottles along an arched path (2) and past at least one inspection device (A1-A4) associated with the arched path, and at least one illumination device (3) which is arranged below the arched path and shines light through the bottles from below and upward. The conveyor (T) presents a disk (1) which can be driven in rotation, and whose top side (9) presents a standing surface for the bottom (15) of each bottle to be transported, which stands directly on the surface, where the disk (1) is constructed so that it is transparent at least in some area.

Abstract: A photonic crystal based collection probe is provided. The probe includes a photonic crystal configured to guide and condition a beam of Raman scattered photons. Further, the device includes a spectrograph in optical communication with the photonic crystal and configured to receive Raman scattering from the photonic crystal. The device may be employed in a Raman spectrometer system.

Abstract: A light measuring device is designed, so that excitation light, emitted by a light source, is guided through an excitation light optical fiber to irradiate a sample, and that fluorescence discharged by the sample is guided to an optical detection system through a receiving light optical fiber. A coupling lens is arranged ahead of the excitation light optical fiber and ahead of the receiving light optical fiber on the sample side. A sample container for retaining a sample is so designed that a lens portion, for collecting excitation light and fluorescence, is integrally formed with the cylindrical bottom. According to this arrangement, excitation light is changed to parallel light or converged light by the coupling lens, and is collected at the sample by the lens portion integrally formed with the bottom of the sample container.

Abstract: A device (10) is provided for measuring at least one characteristic (12) related to presence of particles. The device (10) includes a light source unit (16) for emitting light into a region (18) containing particles (20), with the light source being configured to emit light from a plurality of locations in a manner so that the emitted light follows a desired intensity distribution (22), the desired intensity distribution (22) being desired for the measurement of the at least one characteristic (12). In preferred embodiments the intensity distribution is Lambertian.

Abstract: A system and method of correlating Raman measurements with digital images of a treated sample and using this correlation to classify the disease state of the sample. A spectroscopic data set is obtained for the sample positioned in the field of view of a spectroscopic device. The positional information about the field of view is stored. With the sample removed from the field of view, the sample is treated with a contrast enhancing agent. Using the stored positional information for the field of view, the treated sample is repositioned in the spectroscopic device's field of view. A digital image of the treated sample positioned in the field of view is obtained. The spectroscopic data set is linked with the digital image by defining a transformation to map the image spatial coordinates of the digital image to the spectral spatial coordinates of the spectroscopic data. A database having a plurality of spectroscopic data sets, for samples having well characterized pathology, is provided.

Abstract: An optical system for analyzing light from a plurality of samples is provided. The optical system includes a plurality of holders adapted to have samples located therein, a collection lens, a transmission grating, and a reimaging lens. The collection lens is configured to receive and substantially collimate light from the samples. The transmission grating is configured to spectrally disperse the substantially collimated light from the collection lens. The reimaging lens is configured to receive the light from the light dispersing element and direct the light onto a light detection device. A method of optically analyzing at least one sample is also provided.

Abstract: A polarization evaluation mask for evaluating the state of polarization of an illumination light in exposure equipment comprises a transparent substrate; a light interceptor formed in said transparent substrate and having a plurality of fine apertures; a plurality of polarizers formed to cover said plurality of fine apertures and having orientation angles of the transmissive polarization differing in increments of certain angle; and a plurality of quarter-wave plates arranged upstream of said illumination light than said polarizers and formed as superimposed on said polarizers to cover said fine apertures, and having orientation angles of the fast axis differing in increments of certain angle. Each of said plurality of fine apertures has a different combination of said orientation angle of said polarizer and said orientation angle of said quarter-wave plate.

Abstract: A method and system to measure misalignment error between two overlying or interlaced periodic structures are proposed. The overlying or interlaced periodic structures are illuminated by incident radiation, and the diffracted radiation of the incident radiation by the overlying or interlaced periodic structures are detected to provide an output signal. The misalignment between the overlying or interlaced periodic structures may then be determined from the output signal.

Abstract: A substrate alignment apparatus which aligns and fixes a substrate on a substrate stage includes a chucking pad fixed on the substrate stage to chuck and fix the substrate, a moving unit which moves the substrate with respect to the substrate stage such that a mark on the substrate stage and a mark on the substrate coincide with each other, and a determination unit which evaluates and controls a relative position between the chucking pad and the substrate after movement by the moving unit and determines whether the chucking pad can normally chuck the substrate.

Abstract: A photometer for analyzing a plurality of samples. The photometer comprises a light source and a detector. An optical assembly defines two or more light paths, each light path arranged to carry light from the light source, through a separate sample location, and to the detector.

Abstract: The present invention realizes a compact optical measuring device in which a sample solution sampling mechanism and a cleaning fluid producing mechanism are integrated with each other. Provided is an optical measuring device which applies light from a light emitting element to a sample solution in a measuring chamber provided in a measuring cell through a first light guide portion and which detects light from the sample solution by a light receiving element through a second light guide portion, including: a flow passage section formed in the measuring cell and adapted to guide the sample solution into or out of the measuring chamber; a flow control section attached to the measuring cell and serving to open and close the flow passage section; and a filtering section connected to the measuring cell and communicating with the measuring chamber.

Abstract: A laser treatment apparatus, configured for treating a workpiece, includes: a first laser generation device, a first optical assembly, a second laser generation device, a second optical assembly, a third laser generation device, and an optical detection device. The first optical assembly is configured for directing a first laser beam generated by the first laser generation device onto a first target of the workpiece. The second optical assembly is configured for directing a second laser beam generated by the second laser generation onto a second target of the workpiece. The first laser beam has a wavelength different from that of the second laser beam. The third laser generation device is configured for generating a third laser beam to strike on the first target and/or the second target. The optical detection device is configured for detecting a reflection part of the third laser beam reflected from the workpiece.

Abstract: A photo-thermal interferometric spectroscopy system is disclosed that provides information about a chemical at a remote location. A first light source assembly is included that emits a first beam. The first beam has one or more wavelengths that interact with the chemical and change a refractive index of the chemical. A second laser produces a second beam. The second beam interacts with the chemical resulting in a third beam with a phase change that corresponds with the change of the refractive index of the chemical. A detector system is positioned remote from the chemical to receive at least a portion of the third beam. An adaptive optics system at least partially compensates the light beam degradation caused by atmospheric turbulence.

Abstract: A backlight unit includes a light source including a light emitting diode, a temperature sensor to measure a temperature of the light source, a light source driver to supply power to the light source, and a controller to control the light source driver based on the temperature measured by the temperature sensor.

Abstract: A sampling spectrophotometer comprising an interferometer is used for performing a spectral analysis of light produced by a source. The sampling is adapted for eliminating uncertainty in the frequencies that are associated with spectral components deduced from an interferogram. Preferably, the interferometer is of Michelson type, and is equipped with at least one staircase mirror in one of the two optical paths. Elementary reflecting strips of the staircase mirror can then be offset with respect to one another according to a variable step.

Abstract: An apparatus using optical coherence tomography based on spectral interference and an ophthalmic apparatus, which can accurately obtain information on an object in a depth direction by correcting misalignment between an optical member of a spectral optical system and a photodetector, includes an interference optical system for irradiating measurement light being low coherent light onto the object and synthesizing the measurement light reflected from the object and reference light being low coherent light to interfere, a spectral optical system which disperses interference light for every frequency, a photodetector photo-receiving the dispersed interference light, means guiding calibration light for adjusting alignment between the spectral optical system and the photodetector to the spectral optical system, means storing reference spectral information, and means adjusting the alignment based on a comparison between spectral information on the calibration light guided to the spectral optical system and photo-re

Abstract: A method capable of accurately measuring a physical quantity of a measurement object in a substrate processing apparatus. In a temperature measurement apparatus for implementing the method, two interference positions are measured at different timings when a reference mirror is caused to move in the direction away from a collimator fiber, and a difference between the two interference positions is calculated. When the reference mirror remote from the collimator fiber is caused to move toward the collimator fiber, two interference positions are measured at different timings, and a difference between the two interference positions is calculated. An average value of the interference position differences is calculated, an optical path length difference is determined from the average value, and a wafer temperature is calculated from the optical path length difference.

Abstract: A method is disclosed including conditioning a measurement signal from an interferometer, said conditioning characterized by one or more conditioning parameters; measuring a plurality of values for the conditioned measurement signal; providing one or more values indicative of the conditioning parameters; determining an adjustment value at each measured value of the conditioned measurement signal based on the one or more of the measured values indicative of the conditioning parameters; and adjusting a measured value of the measurement signal according to the adjustment value.

Abstract: An interference measurement system self-alignment method, which can be realized through an optical image interference measurement system. The method comprises the following steps of: utilizing the imaging device to get the optical information of the object to be measured and store the optical information thus obtained; performing the inclination adjustment of the first direction rotation axis of the object platform based on the direction of the interference fringe in the optical information until the interference fringes are adjusted to a defined orthogonal direction, thus eliminating the inclination of the first direction rotation axis; and performing the inclination adjustment of the second direction rotation axis of the object platform based on the expansion direction of the interference fringe in the optical information until the spacing of the interference fringes are adjusted to the maximum, thus eliminating the inclination of the second direction rotation axis.

Abstract: A position sensor has an interface structure between negative dielectrics and a dielectric, and is provided with a configuration in which the plasmon intensity with respect to a microstructure in a surface including the interface structure or in the vicinity thereof is detected by the interface structure, and the positional relationship between the interface structure and the microstructure is thereby detected.

Abstract: An optical measuring device (20) for measuring a micro displacement or a micro vibration of an object (28) includes a laser emitter (21), an amplifying lens module (23), and a photoelectric sensor (25). The laser emitter is configured for emitting a laser beam at the object so that the object reflects the laser beam and forms a beam reflection. The amplifying lens module is disposed between the photoelectric sensor and the object for the beam reflection passing there through. The amplifying lens module has an optical axis parallel to the beam reflection. The photoelectric sensor includes a receiving plane (251) for perpendicularly receiving the beam reflection reflected by the object.

Abstract: Apparatus for detecting proximity between a first object (target object) and a second object (reference object), comprising a light source and a light detector adapted to receive resulting back-scattered light from the reference object when illuminated from the light source, whereby the intensity of back-scattered light to the light detector is utilized as a measure of said proximity. The target object comprises an optical device having a focal plane and being adapted to be illuminated by the light source. The axes of the light rays from the light source and the back-scattering to the light detector have mutually closely adjacent and substantially parallel or coincident portions. Said proximity corresponds to a distance (relative position) between the target object and the reference object wherein the reference object is located substantially at the focal plane.

Abstract: A method of implementing high-performance color filter mosaic arrays (CFA) using luminance pixels. The introduction of luminance pixels greatly improves the accuracy of the image acquisition process for a given pixel and image sensor size.

Abstract: An optical imaging system includes optics for imaging a wavefront of electromagnetic radiation to form an image at a detector. The system also includes a plurality of optical phase filters. Each of the phase filters alters phase of the wavefront. The phase filters cooperate to make the system less sensitive to misfocus, as compared to the optical imaging system without the phase filters. Another optical imaging system includes a detector and optics having two or more optical elements for imaging a wavefront onto the detector. The optical elements include aspherical surfaces that cooperate to alter phase of the wavefront such that the optics are less sensitive to defocus as compared to the optics without the aspherical surfaces. The system also includes a post processor for reversing phase alteration induced by the aspherical surfaces to produce an in-focus electronic image.

Abstract: An image forming device comprises a tray parameter table in which tray IDs for identifying one or trays of the image forming device and tray parameters for the respective tray IDs are stored in a mutually associated manner. A replacing unit receives an input tray ID and an input tray change parameter specified by an externally supplied printer control protocol, and replaces a tray parameter contained in the tray parameter table and corresponding to a tray ID which is the same as the input tray ID, by the input tray change parameter.

Abstract: When generating one file from image data having plural pages, the present invention generates coded data of a background portion that is common to plural pages for sharing the coded data, thereby realizing a file compressed at high compression rate while maintaining image quality. For this, the apparatus reads plural pages. In the page processing, the read page image is separated into a text image and a background image. The background image is divided into predetermined pixel blocks, then comparison is performed with respect to a certain position between one page and a previous page in units of pixel block, and common pixel blocks are separated from page-unique pixel blocks. When reading of all pages is completed, a page image is generated with the text image and the page-unique background image. Thereafter, the background image common to plural pages is linked to corresponding pages for generating one file.