Patents Issued in July 24, 2007
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Patent number: 7248326Abstract: A liquid crystal display (LCD) and fabricating method thereof. The LCD includes a first substrate, provided with a plurality of parallel gate lines and a plurality of parallel signal lines, wherein the gate lines and signal lines are perpendicular, and a pixel area is defined by two adjacent gate lines and two adjacent signal lines. A source electrode, electrically connected to one of the adjacent signal lines, and a drain electrode are formed on the pixel area. A first pixel electrode is formed, electrically connected to the drain electrode, on the pixel area. A second substrate is provided a predetermined distance above the first substrate, having a plurality of color-filtering areas, directly above the respective pixel area. A second pixel electrode layer is formed on the second substrate, wherein the part thereof directly above the signal lines is relatively thin.Type: GrantFiled: August 23, 2005Date of Patent: July 24, 2007Inventors: Jun Chang Chen, Ya-Hsiang Tai
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Patent number: 7248327Abstract: Disclosed are a liquid crystal display (LCD) device and a method for assembling the LCD device. The LCD device has a display section for displaying images, a receiving container for receiving the display section, a power supplying section for supplying a power source to the display section, a signal converting section for converting signals from the display section and a securing section for securing the power supplying section and the signal converting section to the receiving container. The power supplying section and the signal converting section are disposed between the display section and the securing section that is directly facing to a rear surface of the receiving container. Accordingly, a total thickness and weight of the LCD device can be minimized and an assembly facility of the LCD device can be improved.Type: GrantFiled: May 15, 2006Date of Patent: July 24, 2007Assignee: Samsung Electronics Co., Ltd.Inventors: Jin-Ho Ha, Se-In Chang
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Patent number: 7248328Abstract: An IPS (In-Plane-Switching) liquid crystal display panel has column spacers for spacing an active matrix substrate structure from a counter substrate structure, and liquid crystal fills the gap therebetween, wherein the ratio of total contact area between the column spacers and the active matrix substrate structure to the total area occupied by the pixels is fallen within the range from 0.050 percent to 0.150 percent so as to prevent the liquid crystal display panel from irregularity of brightness by keeping the gap constant.Type: GrantFiled: October 12, 2000Date of Patent: July 24, 2007Assignee: NEC LCD Technologies, Ltd.Inventor: Hideo Shibahara
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Patent number: 7248329Abstract: A liquid crystal display device includes first and second substrates facing each other and spaced apart by a uniform cell gap, an array element having a switching element on the first substrate and a first transparent electrode connected to the switching element, a first patterned spacer disposed on the array element having a first height less than the uniform cell gap, a second transparent electrode under the second substrate, a second patterned spacer disposed beneath the second transparent electrode, the second patterned spacer having a second height less than the uniform cell gap and connected to the first patterned spacer, a first alignment layer covering the first patterned spacer, a second alignment layer covering the second patterned spacer, and a liquid crystal material layer interposed between the first and second alignment layers, wherein the first and second spacers are connected to each other and a summation of the first and second heights of the first and second patterned spacers is equivalent tType: GrantFiled: November 21, 2005Date of Patent: July 24, 2007Assignee: LG.Philips LCD Co., Ltd.Inventors: Ku-Hyun Park, Sang-Ho Choi
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Patent number: 7248330Abstract: In a liquid crystal display device having a pair of substrates that are opposite to and bonded to each other, a liquid crystal layer is sealed between the pair of substrates, and columnar spacers are formed on one of the pair of substrates and in contact with the other substrate to maintain a gap between the pair of substrates. The surfaces of support columns of the columnar spacers are made to be rough to enhance the friction force between the pair of substrates and to prevent the other of the pair of substrates from diverging from the one of the pair of substrates, so that display quality of the liquid crystal display device is improved.Type: GrantFiled: July 14, 2004Date of Patent: July 24, 2007Assignee: Hitachi Displays, Ltd.Inventors: Akira Ishii, Yoshitaka Imabayashi
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Patent number: 7248331Abstract: The polarizer of the present invention is a polarizer comprising a film having a structure having a minute domain dispersed in a matrix formed of a translucent thermoplastic resin including an absorption dichroic dye, wherein a transmittance to a linearly polarized light in a transmission direction is 80% or more, a haze value is 10% or less , and a haze value to a linearly polarized light in an absorption direction is 50% or more. The polarizer of the present invention is a dye-based polarizer having a high transmittance and a high polarization degree, capable of suppressing unevenness of transmittance in black display and excellent in reliability in heat resistance.Type: GrantFiled: September 5, 2003Date of Patent: July 24, 2007Assignee: Nitto Denko CorporationInventors: Minoru Miyatake, Takashi Kamijo
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Patent number: 7248332Abstract: A lithographic apparatus is provided with a charged object on a projection system of the lithographic apparatus, a substrate table of the lithographic apparatus, or both that is configured to have an electric charge to attract particles thereto.Type: GrantFiled: July 13, 2004Date of Patent: July 24, 2007Assignee: ASML Netherlands B.V.Inventor: Cassandra May Owen
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Patent number: 7248333Abstract: An apparatus for forming a pattern has a light-modulating unit, a scanner, a pattern data processor, a light modulating controller, a position-error detector, and a correction value calculator. The pattern data processor generates band-pattern data corresponding to each scanning band on the basis of pattern data matching a preceding pattern that is repeatedly and regularly formed on the photo-sensitive material. The position-error detector detects a position-error of the preceding pattern relative to a pattern area. The correction value calculator calculates an alignment correction value in each pattern area on the basis of the position-error, so as to overlay the pattern on the preceding pattern. The pattern data processor corrects the band-pattern data in accordance with the alignment correction value while classifying each exposure data of the band-pattern data into a corresponding pattern area.Type: GrantFiled: August 10, 2005Date of Patent: July 24, 2007Assignee: ORC Manufacturing Co., Ltd.Inventor: Takashi Okuyama
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Patent number: 7248334Abstract: The lithographic apparatus includes a support structure configured to hold a patterning device. The patterning device is configured to pattern a beam of radiation according to a desired pattern. The lithographic apparatus further includes a substrate table configured to hold a substrate, a projection system configured to project the patterned beam onto a target portion of the substrate, a measurement system configured to measure a parameter of (a) the substrate table, or (b) the substrate, or (c) an image projected by the projection system, or (d) any combination of (a)-(c), and a liquid supply system configured to supply a liquid to a space between the substrate and the projection system. The lithographic apparatus also includes a shield disposed in a vicinity of a portion of the measurement system and configured to shield the portion of the measurement system from the liquid.Type: GrantFiled: December 7, 2004Date of Patent: July 24, 2007Assignee: ASML Netherlands B.V.Inventors: Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Hans Jansen, Jeroen Johannes Sophia Maria Mertens, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk
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Patent number: 7248335Abstract: An exposure apparatus for exposing a substrate to a pattern due to an original includes a substrate stage which holds and moves the substrate, and a first measurement unit which is arranged on the substrate stage, and measures a position of a mark formed on the original by projecting and receiving light.Type: GrantFiled: March 17, 2006Date of Patent: July 24, 2007Assignee: Canon Kabushiki KaishaInventor: Kazuyuki Kasumi
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Patent number: 7248336Abstract: A focus system that includes a calibration subsystem and a control subsystem. The control subsystem, which includes a control sensor, is in close proximity to the exposing of an image. The calibration subsystem, which includes a calibration sensor and a control sensor, is located remotely from, or off-axis with respect to, the exposing of an image. By separating calibration and control functions, the functional requirements can be separated into two (or more) types of sensors.Type: GrantFiled: April 24, 2006Date of Patent: July 24, 2007Assignee: ASML Holding N.V.Inventors: Michael L. Nelson, Justin L. Kreuzer, Peter L. Filosi, Christopher J. Mason
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Patent number: 7248337Abstract: A level sensor for a lithographic projection apparatus according to one embodiment of the invention includes a light source, a first reflector, a second reflector and a detector. The first reflector is positioned to direct light from the light source towards a wafer surface, and the second reflector is positioned to direct light reflected from the wafer surface to the detector. The first and second reflectors are selected to incur a minimal process dependent apparent surface depression.Type: GrantFiled: January 14, 2004Date of Patent: July 24, 2007Assignee: ASML Netherlands B.V.Inventors: Paulus Antonius Andreas Teunissen, Petrus Johannes Maria Broodbakker, Rene Marinus Gerardus Johan Queens
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Patent number: 7248338Abstract: An exposing device including means which has a plurality of pixels and modulates, per pixel, an optical beam irradiated from a light source, for exposing a plotted image on an exposure surface by modulating, per pixel, the plurality of pixels of the modulating means based on image data, the multi beam exposing device comprising: beam position detecting means for detecting exposure point positional information pertaining to an optical beam irradiated on the exposure surface from predetermined pixels to be measured of the modulating means; and positional deviation calculating means for calculating a relative positional deviation between positional information pertaining to the pixels to be measured of the modulating means and exposure point positional information pertaining to each of the optical beams projected at the exposure surface from each of the pixels to be measured detected by the use of the beam position detecting means, based on the two positional informations.Type: GrantFiled: March 28, 2005Date of Patent: July 24, 2007Assignee: Fujifilm CorporationInventor: Takeshi Fukuda
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Patent number: 7248339Abstract: A lithographic apparatus is presented in which vibrations induced by reaction forces exerted on a base frame BF by accelerations within the apparatus are eliminated without the need for complex positioning systems and several balance masses. This is achieved by using feed-forward control to apply a compensating force using actuators to the base frame, based on knowledge of the movements and accelerations of the substrate table and other parts within the apparatus.Type: GrantFiled: July 1, 2004Date of Patent: July 24, 2007Assignee: ASML Netherlands B.V.Inventors: Gerard Van Schothorst, Jan Van Eijk, Erik Roelof Loopstra, Robert-Han Munnig Schmidt, Felix Godfried Peter Peeters
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Patent number: 7248340Abstract: A transport box for transporting a lithographic patterning device and a lithographic apparatus adapted to cooperate with the transport box are presented. The transport box is provided with a container part having an inner space with a storing position for storing the patterning device and an opening for the transfer of the patterning device. The box also includes a closure part for closing the opening, and a channel system for evacuating and/or feeding gasses from/to the inner space the box.Type: GrantFiled: June 24, 2004Date of Patent: July 24, 2007Assignee: ASML Netherlands B.V.Inventors: Erik Leonardus Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hendricus Johannes Maria Meijer, Hans Meiling, Bastiaan Matthias Mertens, Johannes Hubertus Josephina Moors, Gert-Jan Heerens
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Patent number: 7248341Abstract: An apparatus and method for the measurement of water depth between a water surface and water bottom and adapted for mounting on an aircraft flying above the water surface. The apparatus includes a transmitter and a receiver of laser light. The laser light is reflected from a secondary mirror to a primary mirror and to the water where it is subsequently reflected both from the water surface and the water bottom. The primary mirror then collects these reflections where they are then reflected to a receiver to be processed for subsequent analysis. So as to scan across the water surface the primary mirror is oscillated around a major axis generally transverse to the aircraft flying direction as well as parallel to the aircraft direction to compensate for the aircraft movement, the reflections recorded in a temporal fashion.Type: GrantFiled: January 28, 2003Date of Patent: July 24, 2007Assignee: Tenix Lads Corporation Pty LtdInventor: Gavin John Perry
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Patent number: 7248342Abstract: This invention is directed to a 3-dimensional imaging lidar, which utilizes modest power kHz rate lasers, array detectors, photon-counting multi-channel timing receivers, and dual wedge optical scanners with transmitter point-ahead correction to provide contiguous high spatial resolution mapping of surface features including ground, water, man-made objects, vegetation and submerged surfaces from an aircraft or a spacecraft.Type: GrantFiled: December 5, 2003Date of Patent: July 24, 2007Assignee: United States of America as represented by the Administrator of the National Aeronautics and Space AdministrationInventor: John J. Degnan
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Patent number: 7248343Abstract: A laser radar (LADAR) system is provided with amplitude-weighted spatial coherent processing. An amplitude-weighted sum of time domain signals arising from several detectors within a detector array is formed and used for range doppler processing. Weighting coefficients are chosen to be proportional to the signal amplitude present for each of the separate signals from each detector within the array. The amplitude coefficients are determined using target returned energy arising from a continuous wave (CW) porch portion of the transmitted waveform. Amplitude-weighted spatial coherent processing improves the carrier-to-noise ratio (CNR).Type: GrantFiled: June 29, 2004Date of Patent: July 24, 2007Assignee: Raytheon CompanyInventors: Silvio Antonio Cardero, Robert Edmund Majewski
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Patent number: 7248344Abstract: An imaging system scans a light source output over an object to be imaged, and receives the reflected signal in a multi-region light detector, wherein different regions of the object to be imaged are imaged onto different regions of the detector by the receiving optics, and wherein different regions of the light detector can be actuated separately. The light source scanning is synchronized with the actuation of the light detector so that a region of the detector imaging the region of object being illuminated by the light source is actuated. The time of flight of light signals from the light source to the actuated portion of the detector is calculated for all scanning directions, to enable a three dimensional image of the object to be constructed.Type: GrantFiled: April 4, 2002Date of Patent: July 24, 2007Assignee: Instro Precision LimitedInventor: Christopher John Morcom
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Patent number: 7248345Abstract: A signal processor and method are provided for detecting movement of a surface relative to an optical sensor having an array of photosensitive elements.Type: GrantFiled: November 8, 2005Date of Patent: July 24, 2007Assignee: Silicon Light Machines CorporationInventors: Brian D. Todoroff, Yansun Xu
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Patent number: 7248346Abstract: An apparatus for determining orientation of an alignment layer in a pixel unit of an LCD device is provided. The pixel unit includes a glass substrate having an outer surface provided with the alignment layer treated by photolithographic masking and rubbing operation. The apparatus includes a conveyor belt for feeding the alignment layer; a steam-generating device disposed above the conveyor belt in such a maimer that the alignment layer is formed with a plurality of water drops or water layer when passed underneath the steam-generating device; a light source for providing light beams into the water drops on the alignment layer; and an image catcher for fetching an image data formed on the alignment layer by virtue of light reflection and refraction of the water drops hanging on the alignment layer.Type: GrantFiled: October 8, 2004Date of Patent: July 24, 2007Assignee: AU Optronics Corp.Inventors: Yueh-Tun Ho, Chin-Hsiung Chang
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Patent number: 7248347Abstract: An apparatus and method for automatically focusing a miniature digital camera module (MUT) is described. A MUT is loaded onto a test fixture and aligned with an optics system of a test handler. Focus targets contained within two target wheels are positioned over an optical centerline above the digital camera module using stepper motors. A field lens is positioned to focus an image of the targets onto the lens opening of the MUT. The image can be of a single target or a combination of targets contained on the target wheels at various optical distances from the MUT. A focusing unit adjusts the lens cap of the MUT for a best focus setting and after the MUT has been tested the best focus setting if physically fixed by permanently connecting the lens cap to the body of the MUT.Type: GrantFiled: August 30, 2004Date of Patent: July 24, 2007Assignee: Dialog Imaging Systems GmbHInventors: Horst Knoedgen, Dirk Huettmann
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Patent number: 7248348Abstract: A detection method for detecting quality of an optical element includes the following steps. Firstly, a point light source is provided. Then, the point light source is allowed to penetrate through the optical element, thereby forming a first optical image on an optical image processing device. Then, the position of the optical element is adjusted when there is a shade block included in the first optical image, and the point light source is allowed to penetrate through the optical element after the adjusting step, thereby forming a second optical image on the optical image processing device. Afterward, the first optical image is compared with the second optical image to discriminate whether the shade block is synchronously moved with position adjustment of the optical element so as to realize the quality of the optical element.Type: GrantFiled: June 17, 2005Date of Patent: July 24, 2007Assignee: Primax Electronics Ltd.Inventors: Hou-Ching Chin, Hsaing-Nan Chen
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Patent number: 7248349Abstract: There is disclosed an exposure method for correcting a focal point, comprising: illuminating a mask, in which a mask-pattern including at least a set of a first mask-pattern and a second mask-pattern mutually different in shape is formed, from a direction in which a point located off an optical axis of an exposure apparatus is a center of illumination, and exposing and projecting an image of said mask-pattern toward an image-receiving element; measuring a mutual relative distance between images of said first and second mask-patterns exposed and projected on said image-receiving element, thereby measuring a focal point of a projecting optical system of said exposure apparatus; and moving said image-receiving element along a direction of said optical axis of said exposure apparatus on a basis of a result of said measurement, and disposing said image-receiving element at an appropriate focal point of said projecting optical system.Type: GrantFiled: September 8, 2005Date of Patent: July 24, 2007Assignee: Kabushiki Kaisha ToshibaInventors: Takashi Sato, Shoji Mimotogi, Takahiro Ikeda, Soichi Inoue
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Patent number: 7248350Abstract: The invention is directed to a method for determining repairability of an original clear coat applied over a darkly pigmented substrate with a corresponding repair clear coat used in repairing damaged original vehicle coatings. The method non-destructively determines the refractive indices of the original clear coat and the corresponding repair clear coats by acquiring the reflection spectrum of these coats with a spectrophotometer with d/8° measurement geometry with and without the specular components followed by determining the refractive indices with the assistance of the differential spectrum between the reflection spectrums with and without the specular components, and then comparing the refractive indices to determine difference between these refractive indices, wherein when the difference between the refractive indices of the original arid repair clear coats is within an acceptable range, the repair clear coat is used for repairing the original clear coat.Type: GrantFiled: April 27, 2004Date of Patent: July 24, 2007Assignee: E. I. du Pont de Nemours and CompanyInventor: Wilhelm Kettler
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Patent number: 7248351Abstract: An inspection system includes an illumination source configured to illuminate a blazed phase grating sample, image collection pathways and an imaging system configured to capture an image of a sample point of the blazed phase grating sample, and a controller configured to adjust the illumination source in response to an analysis of the image of the sample point to determine illumination uniformity of the inspection system.Type: GrantFiled: February 25, 2005Date of Patent: July 24, 2007Assignee: Infineon Technologies AGInventors: William Roberts, Gerhard Kunkel, Patrick Lomtscher, Karl Schumacher
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Patent number: 7248352Abstract: The present invention is an apparatus for inspecting foreign particles/defects, comprises an illumination optical system, a detection optical system, a shielding unit which is provided in said detection optical system to selectively shield diffracted light pattern coming from circuit pattern existing on an inspection object and an arithmetic processing system, wherein said shielding unit comprises a micro-mirror array device or a reflected type liquid crystal, or a transmission type liquid crystal, or an object which is transferred a shielding pattern to an optical transparent substrate, or a substrate or a film which is etched so as to leave shielding patterns, or an optical transparent substrate which can be changed in transmission by heating, sudden cold, or light illumination, or change of electric field or magnetic field, or a shielding plate of cylindrical shape or plate shape.Type: GrantFiled: December 2, 2003Date of Patent: July 24, 2007Assignee: Hitachi High-Technologies CorporationInventors: Akira Hamamatsu, Minori Noguchi, Hidetoshi Nishiyama, Yoshimasa Ohshima, Takahiro Jingu, Sachio Uto
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Patent number: 7248353Abstract: A method for alignment of a chip in a substrate surface inspection is provided, in which a surface of a substrate including a chip formed therein is inspected by using a beam. The method is characterized in comprising: a step of placing the substrate so that the chip is positioned within a field of view subject to the inspection; a step of measuring a magnification for the detection when the chip is positioned within the field of view subject to the inspection; a step of calculating a size of position error of the chip based on the measured magnification for the detection; and a step of compensating for the position of the chip based on the calculated position error.Type: GrantFiled: May 28, 2004Date of Patent: July 24, 2007Assignee: Ebara CorporationInventors: Toshifumi Kimba, Mamoru Nakasuji, Tohru Satake
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Patent number: 7248354Abstract: The invention concerns an apparatus for inspection of a wafer, encompassing at least one incident-light illumination device that radiates an illuminating light beam which is incident obliquely onto a surface of a wafer to be inspected, and an image capture device for capturing an image of the surface in a dark-field arrangement. The wafer inspection apparatus is characterized in that at least one deflection device is provided in order to deflect an associated illuminating light beam onto the surface of the wafer.Type: GrantFiled: May 27, 2004Date of Patent: July 24, 2007Assignee: Vistec Semiconductor Systems GmbHInventors: Albert Kreh, Henning Backhauss
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Patent number: 7248355Abstract: The invention in one implementation encompasses the use of special visibility material to enhance the ability of computer-aided visual inspection machines to detect errors in placement or orientation of components mounted to a printed circuit board. In another implementation, the visibility of labels to a repair technician is enhanced by using indicia formed using special visibility material disposed in a housing which substantially restricts the penetration outside ambient light into the interior of the housing.Type: GrantFiled: September 13, 2004Date of Patent: July 24, 2007Assignee: Hewlett-Packard Development Company, L.P.Inventor: Thane Michael Larson
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Patent number: 7248356Abstract: A calibration aid may be assembled as follows. First, the standard reference substance is prepared by dissolving ICG dye and albumin protein in water. Then, the carrier sheet of fleece material is soaked therein and dried. After drying the carrier sheet, a thin well defined layer of protein bound dye is present at the surface of the fleece material. The carrier sheet and the backing sheet are laminated into a plastic card. For this, the plastic layers may be laminated tightly together in the framing region for example by welding or by use of adhesive. The plastic card is then sterilized and packed into a sealed package.Type: GrantFiled: April 6, 2004Date of Patent: July 24, 2007Assignee: Pulsion Medical Systems AGInventor: Ulrich J. Pfeiffer
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Patent number: 7248357Abstract: A method and system for measuring heat energy of a combustible fluid in which light having wavelengths in the near-infrared is directed into a test cell containing the combustible fluid and portions of the light not absorbed by the combustible fluid and passing out of the cell are spatially dispersed by wavelength, forming a light spectrum that is projected onto a detector. The light spectrum is digitized and inputted into a data processing unit in which it is compared to the actual spectrum of the light source stored in the system to determine the absorbance spectrum of the combustible fluid. The system is spectrally calibrated by identifying known spectral features of the combustible gas absorbance spectrum. To correct for deviations in the original light source spectrum, a light source calibration system is employed.Type: GrantFiled: October 29, 2004Date of Patent: July 24, 2007Assignee: Gas Technology InstituteInventors: James Servaites, Serguei Zelepouga
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Patent number: 7248358Abstract: A spectral measurement device comprising an entrance aperture for receiving an electromagnetic energy and a mask located at the entrance aperture in the form of a two-dimensional encodement pattern. An optical element conditions the electromagnetic energy received from the mask for presentation to the spectral dispersion element and the and a spectral dispersion element disperses the electromagnetic energy in one or more dimensions. Additionally, the optical element conditions the dispersed electromagnetic energy onto an array of detector elements.Type: GrantFiled: October 4, 2005Date of Patent: July 24, 2007Assignee: Plain Sight Systems, Inc.Inventors: Frank Geshwind, Ronald R. Coifman, Andreas Coppi, Richard A. Deverse, William G. Fateley
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Patent number: 7248359Abstract: Systems and methods for biological sample detection by combining and directing light with an optical blender that provides a composite beam from spatially and spectrally distinct non-parallel light sources.Type: GrantFiled: March 30, 2005Date of Patent: July 24, 2007Assignee: Applera CorporationInventor: Steven J. Boege
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Patent number: 7248360Abstract: A system for laser scanning provides spectral flexibility needed for the spectroscopic monitoring of highly multiplexed samples, such as cellular and particle assays in whole blood or other suspensions. In accordance with embodiments of the present invention, the system comprises a scanner to direct an excitation laser through a sample, an objective to collect light emitted by the sample in response to the excitation laser, a spectrograph to disperse the emitted light over a plurality of wavelengths as a spectrum, and a charge coupled device for detecting the spectrum. The system can be used with samples having a variety of reporter tags, including one or more SERS tags, fluorescent organic and protein tags, and quantum dot tags. A laser scanning apparatus and method of using the same is also provided.Type: GrantFiled: March 25, 2005Date of Patent: July 24, 2007Assignee: PPD Biomarker Discovery Sciences, LLCInventors: Uwe Horchner, Aaron B. Kantor
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Patent number: 7248361Abstract: A sample detection system including an anti-resonant waveguide, including a sample having a first index of refraction, a top layer and a substrate surrounding the sample, where the top layer has a second index of refraction, and the substrate has a third index of refraction. The second index of refraction, and the third index of refraction are both greater than the first index of refraction. A detection device of the system includes a low power light source used to direct light into the sample and generate an anti-resonant optical mode in the sample, and an analyzing system to detect the interaction of the light propagating in the sample.Type: GrantFiled: December 22, 2005Date of Patent: July 24, 2007Assignee: Palo Alto Research Center IncorporatedInventors: Peter Kiesel, Oliver Wolst, Michael Kneissl, Huangpin Ben Hsieh, Oliver Schmidt
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Patent number: 7248362Abstract: A small-spot imaging, spectrometry instrument for measuring properties of a sample has a polarization-scrambling element, such as a birefringent plate depolarizer, incorporated between the polarization-introducing components of the system, such as the beamsplitter, and the microscope objective of the system. The plate depolarizer varies polarization with wavelength, and may be a Lyot depolarizer with two plates, or a depolarizer with more than two plates (such as a three-plate depolarizer). Sinusoidal perturbation in the resulting measured spectrum can be removed by data processing techniques or, if the depolarizer is thick or highly birefringent, the perturbation may be narrower than the wavelength resolution of the instrument.Type: GrantFiled: November 15, 2006Date of Patent: July 24, 2007Assignee: Tokyo Electron LimitedInventors: Adam E. Norton, Kenneth C. Johnson, Fred E. Stanke
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Patent number: 7248363Abstract: A laser diffraction particle size analyzer irradiates a laser beam on particles in a scattered state, and measures a spatial intensity distribution of diffracted and scattered light from the particles. A particle size distribution of the particles is calculated from a result of the measurement. The laser diffraction particle size analyzer includes a laser device for generating an ultraviolet laser beam as a light source for generating a laser beam, and a fluorescent member closely attached to or disposed adjacent to a detecting surface of a photodiode array that measures the spatial intensity distribution of the diffracted and scattered light upon incidence thereof.Type: GrantFiled: September 27, 2004Date of Patent: July 24, 2007Assignee: Shimadzu CorporationInventor: Shinichiro Totoki
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Patent number: 7248364Abstract: An apparatus and method for optically characterizing the reflection and transmission properties of a sample with a beam of light having a small diameter on a surface of the sample over a broadband of wavelengths, from 190 nm to 1100 nm. Reflective optical components, including off-axis parabolic mirrors with a collimated incident or reflected broadband beam of light, minimize non-chromatic aberration. The apparatus and method further disclose an optical light path that can be focused by adjusting the position of an off-axis parabolic mirror and a planar mirror.Type: GrantFiled: December 19, 2003Date of Patent: July 24, 2007Assignee: n&k Technology, Inc.Inventors: Ray Hebert, Marc Aho, Abdul Rahim Forouhi
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Patent number: 7248365Abstract: The unevennesses of a chuck are measured at various positions and are stored, as discrepancies from an idealized plane, in a databank. The measured discrepancies are used to calculate corrections for the predetermined settings for the focus distance and/or the tilt of the chuck. These corrections are in each case used differently for adjusting the respective exposure of the exposure areas.Type: GrantFiled: November 19, 2003Date of Patent: July 24, 2007Assignee: Infineon Technologies AGInventors: Thorsten Schedel, Martin Rössiger
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Patent number: 7248366Abstract: The defect marking method comprises the steps of: installing a surface defect tester to detect surface flaw and a marker device to apply marking at defect position, in a continuous processing line of steel sheet; detecting the surface flaw on the steel sheet using the surface defect tester; determining defect name, defect grade, defect length, and defect position in the width direction of the steel sheet, on the basis of thus detected flaw information, further identifying the defect in terms of harmful defect, injudgicable defect, and harmless defect; applying tracking of the defect position for each of the harmful defect and the injudgicable defect; and applying marking to the defect position. The defect marking device comprises a defect inspection means having plurality of light-receiving parts and a signal processing section, and a marking means.Type: GrantFiled: September 17, 2001Date of Patent: July 24, 2007Assignee: NKK CorporationInventors: Mitsuaki Uesugi, Shoji Yoshikawa, Masaichi Inomata, Tsutomu Kawamura, Takahiko Oshige, Hiroyuki Sugiura, Akira Kazama, Tsuneo Suyama, Yasuo Kushida, Shuichi Harada, Hajime Tanaka, Osamu Uehara, Shuji Kaneto, Masahiro Iwabuchi, Kozo Harada, Shinichi Tomonaga, Shigemi Fukuda
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Patent number: 7248367Abstract: To measure USJ profile abruptness, a PMR-type optical metrology tool is to perform a series of two or more measurements, each with different pump/probe beam separations. Quadrature (Q) and in-phase (I) measurements are obtained for each measurement and used to derive a line in I-Q space. An abruptness measurement is derived by comparing the line slope to a similar line slope obtained for a sample having a known USJ profile. USJ profile depth is measured by obtaining quadrature (Q) values for one or more measurements. Each Q value is translated to a corresponding depth measurement using a table or similar lookup device.Type: GrantFiled: March 8, 2004Date of Patent: July 24, 2007Assignee: Therma-Wave, Inc.Inventors: Alex Salnik, Lena Nicolaides, Jon Opsal
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Patent number: 7248368Abstract: A scatterometer comprising a source (2) for providing an incident radiation beam (1) to be directed to the surface of a sample (4), and means for directing said incident radiation beam (1) at different angles towards the surface of the sample (4). The scatterometer furthermore comprising a screen (6) for receiving the reflection (7) of the incident radiation beam (1), and a camera (9) for recording the scatter profile (7) as projected on said screen (6) by the reflected radiation beam (5). The scatterometer is provided with means (11,12,13,14,15) for moving the screen (6) and thereby keeping it in the reflected radiation beam (5), and with means for keeping the camera (9) directed to the moving screen (6).Type: GrantFiled: February 18, 2004Date of Patent: July 24, 2007Assignee: Koninklijke Philips Electronics, N.V.Inventor: Sipke Wadman
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Patent number: 7248369Abstract: A method and system for controlling the temperature of the single mode fiber connectors and single mode, polarization maintaining fiber connectors, which that are used in the semiconductor source spectroscopy systems, is described to stabilize the system against baseline drift. Research and modeling has identified the source of thermally induced shifting to the single mode fiber connectors and single mode, polarization maintaining fiber connectors that are used to assemble the semiconductor source spectroscopy systems.Type: GrantFiled: August 15, 2005Date of Patent: July 24, 2007Assignee: Axsun Technologies, Inc.Inventor: Randal A. Murdza
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Patent number: 7248370Abstract: An embodiment includes a method to reduce background noise in a spectrum. A further embodiment includes a method to reduce, by at least about two orders of magnitude, background noise in an experimental absorbance spectrum. Further, an embodiment includes a machine-readable medium that provides instructions, which when executed by a machine, reduce background noise in a spectrum. Further, an embodiment includes a machine-readable medium that provides instructions, which when executed by a machine, reduce, by at least two orders of magnitude, background noise in an experimental absorbance spectrum.Type: GrantFiled: September 8, 2005Date of Patent: July 24, 2007Assignee: Caleb Brett USA, Inc.Inventor: Christopher M. Jones
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Patent number: 7248371Abstract: Provided is an optical image measuring apparatus capable of easily changing a scanning interval of an object to be measured in a depth direction with high precision.Type: GrantFiled: March 29, 2005Date of Patent: July 24, 2007Assignee: Kabushiki Kaisha TopconInventors: Kinpui Chan, Masahiro Akiba, Yasufumi Fukuma, Hiroyuki Otsuka, Hisashi Tsukada
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Patent number: 7248372Abstract: The disclosure includes a system, device, apparatus and programmed medium of measuring thickness of an optical disc by using an interference effect of the optical disc layer. Such a system can include: a spectroscope to separate light, reflected from a surface of an optical disc, into constituent frequencies thereof; an optical intensity measuring unit to measure intensities of the constituent frequencies, respectively, as a first spectrum of data; and a processor to do at least the following, convert the first spectrum data into a second spectrum of values that exhibits variation as a function wavelength and refractive index, transform the second spectrum using a Fast Fourier Transform, and detect a thickness of one or more of the spacer layer and the cover layer, respectively, based upon the transformed spectrum. The disclosed technologies have advantages for high precisely measuring thickness of an optical disc.Type: GrantFiled: September 12, 2006Date of Patent: July 24, 2007Assignee: LG Electronics, Inc.Inventors: Seong Yun Jeong, Jin Yong Kim, Jin Hong Kim, Hun Seo, Keum Cheol Kwak
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Patent number: 7248373Abstract: An assembly includes a platform for supporting and moving a tire along therealong. A light emitter of a first detection assembly transmits a first signal from emitter around the tire in to determine the height of the tire. A light receiver of the first detection assembly receives the transmitted first signal passed around the tire and forwards the first signal to a controller for evaluating the first signal and for determining a first configuration of the tire. A light emitter of a second detection assembly transmits a second signal around the tire in the direction transverse to the direction of the first signal. A light receiver of the second detection assembly receives the transmitted second signal. The second detection assembly is operably connected to the controller. The controller integrates the first and second signals for determining a third configuration of the part thereby identifying the part being evaluated.Type: GrantFiled: November 26, 2003Date of Patent: July 24, 2007Assignee: Durr Systems, IncInventors: Dan Pellerin, Boris R. Teper, Brian Hoy
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Patent number: 7248374Abstract: A device for use in conjunction with a coordinate measuring device, a three-dimensional coordinate measuring system and a method of measuring three-dimensional coordinates are described. The device includes a light source mounted substantially within the center of a spherical member having a spherical surface configured such that the distance from the light source to the outer contact surface of the sphere is substantially equal to the radius of the sphere regardless of sphere orientation. The three-dimensional coordinate measuring system further includes a coordinate-measuring device, the coordinate-measuring device configured to track the movement of the light source and to measure either azithmuth angles and zenith angles, or to spherically encode tracking information related to relevant positions of the light source.Type: GrantFiled: February 24, 2003Date of Patent: July 24, 2007Assignee: Faro Laser Trackers LLCInventor: Robert E. Bridges
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Patent number: 7248375Abstract: A method and apparatus are disclosed for evaluating relatively small periodic structures formed on semiconductor samples. In this approach, a light source generates a probe beam which is directed to the sample. In one preferred embodiment, an incoherent light source is used. A lens is used to focus the probe beam on the sample in a manner so that rays within the probe beam create a spread of angles of incidence. The size of the probe beam spot on the sample is larger than the spacing between the features of the periodic structure so some of the light is scattered from the structure. A detector is provided for monitoring the reflected and scattered light. The detector includes multiple detector elements arranged so that multiple output signals are generated simultaneously and correspond to multiple angles of incidence. The output signals are supplied to a processor which analyzes the signals according to a scattering model which permits evaluation of the geometry of the periodic structure.Type: GrantFiled: September 21, 2005Date of Patent: July 24, 2007Assignee: Therma-Wave, Inc.Inventors: Jon Opsal, Allan Rosencwaig